JP5776269B2 - 圧電アクチュエーター、ロボット及びロボットハンド - Google Patents

圧電アクチュエーター、ロボット及びロボットハンド Download PDF

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Publication number
JP5776269B2
JP5776269B2 JP2011073558A JP2011073558A JP5776269B2 JP 5776269 B2 JP5776269 B2 JP 5776269B2 JP 2011073558 A JP2011073558 A JP 2011073558A JP 2011073558 A JP2011073558 A JP 2011073558A JP 5776269 B2 JP5776269 B2 JP 5776269B2
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support portion
diaphragm
approximately
resonance frequency
vibrating body
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Japanese (ja)
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JP2012210051A5 (enExample
JP2012210051A (ja
Inventor
上條　浩一
浩一 上條
俊平 大栢
俊平 大栢
宮澤　修
修 宮澤
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Seiko Epson Corp
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Seiko Epson Corp
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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2011073558A 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド Active JP5776269B2 (ja)

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JP2011073558A JP5776269B2 (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

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JP2011073558A JP5776269B2 (ja) 2011-03-29 2011-03-29 圧電アクチュエーター、ロボット及びロボットハンド

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JP2015133338A Division JP6107894B2 (ja) 2015-07-02 2015-07-02 圧電アクチュエーター、ロボット及びロボットハンド

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JP2012210051A JP2012210051A (ja) 2012-10-25
JP2012210051A5 JP2012210051A5 (enExample) 2014-04-03
JP5776269B2 true JP5776269B2 (ja) 2015-09-09

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102177156B1 (ko) 2014-03-10 2020-11-10 삼성전자주식회사 로봇 및 그를 구비한 기판 처리 장치
ES2681802T3 (es) 2014-07-10 2018-09-17 Aktiebolaget Electrolux Método para detectar un error de medición en un dispositivo de limpieza robotizado
TWI683959B (zh) 2016-09-05 2020-02-01 研能科技股份有限公司 壓電致動器及其所適用之微型流體控制裝置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4492349B2 (ja) * 2002-11-12 2010-06-30 セイコーエプソン株式会社 圧電振動体
JP2005237102A (ja) * 2004-02-19 2005-09-02 Seiko Epson Corp 圧電アクチュエータ、時計及び電子機器
JP2006081237A (ja) * 2004-09-07 2006-03-23 Seiko Epson Corp 超音波モータの駆動回路およびアクチュエータ
JP4043497B2 (ja) * 2006-06-14 2008-02-06 シャープ株式会社 超音波振動子の振動特性の調整方法およびそれに用いられる超音波振動子
JP2009254198A (ja) * 2008-04-10 2009-10-29 Sharp Corp 超音波モータおよび超音波振動子

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JP2012210051A (ja) 2012-10-25

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