JP2012015696A5 - - Google Patents

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Publication number
JP2012015696A5
JP2012015696A5 JP2010148749A JP2010148749A JP2012015696A5 JP 2012015696 A5 JP2012015696 A5 JP 2012015696A5 JP 2010148749 A JP2010148749 A JP 2010148749A JP 2010148749 A JP2010148749 A JP 2010148749A JP 2012015696 A5 JP2012015696 A5 JP 2012015696A5
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JP
Japan
Prior art keywords
electrode
vibration piece
piezoelectric layer
disposed
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010148749A
Other languages
English (en)
Japanese (ja)
Other versions
JP5533349B2 (ja
JP2012015696A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010148749A priority Critical patent/JP5533349B2/ja
Priority claimed from JP2010148749A external-priority patent/JP5533349B2/ja
Publication of JP2012015696A publication Critical patent/JP2012015696A/ja
Publication of JP2012015696A5 publication Critical patent/JP2012015696A5/ja
Application granted granted Critical
Publication of JP5533349B2 publication Critical patent/JP5533349B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2010148749A 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器 Expired - Fee Related JP5533349B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010148749A JP5533349B2 (ja) 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010148749A JP5533349B2 (ja) 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器

Publications (3)

Publication Number Publication Date
JP2012015696A JP2012015696A (ja) 2012-01-19
JP2012015696A5 true JP2012015696A5 (enExample) 2013-05-02
JP5533349B2 JP5533349B2 (ja) 2014-06-25

Family

ID=45601626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010148749A Expired - Fee Related JP5533349B2 (ja) 2010-06-30 2010-06-30 屈曲振動片、屈曲振動子、発振器、および電子機器

Country Status (1)

Country Link
JP (1) JP5533349B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6044222B2 (ja) * 2012-09-20 2016-12-14 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、および移動体
JP2017216753A (ja) * 2017-09-15 2017-12-07 セイコーエプソン株式会社 振動片、振動子、電子デバイス、電子機器、および移動体

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4296757B2 (ja) * 2002-07-19 2009-07-15 パナソニック株式会社 圧電機能部品の製造方法
JP2005249645A (ja) * 2004-03-05 2005-09-15 Matsushita Electric Ind Co Ltd 角速度センサおよびその製造方法
JP5067033B2 (ja) * 2007-06-20 2012-11-07 セイコーエプソン株式会社 音叉型振動子、発振器
JP4533934B2 (ja) * 2008-01-15 2010-09-01 エプソントヨコム株式会社 振動片及び振動子の製造方法
JP5316748B2 (ja) * 2008-03-28 2013-10-16 セイコーエプソン株式会社 振動片の製造方法
JP5168002B2 (ja) * 2008-07-22 2013-03-21 セイコーエプソン株式会社 振動子及び発振器

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