JP2008192822A - 半導体装置およびその製造方法 - Google Patents
半導体装置およびその製造方法 Download PDFInfo
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- JP2008192822A JP2008192822A JP2007025653A JP2007025653A JP2008192822A JP 2008192822 A JP2008192822 A JP 2008192822A JP 2007025653 A JP2007025653 A JP 2007025653A JP 2007025653 A JP2007025653 A JP 2007025653A JP 2008192822 A JP2008192822 A JP 2008192822A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 74
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 68
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 227
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 175
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 173
- 229910021334 nickel silicide Inorganic materials 0.000 claims abstract description 103
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims abstract description 97
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- 239000010703 silicon Substances 0.000 claims description 36
- 229910052759 nickel Inorganic materials 0.000 claims description 35
- 229910005883 NiSi Inorganic materials 0.000 claims description 17
- 238000003746 solid phase reaction Methods 0.000 claims description 9
- 229910005881 NiSi 2 Inorganic materials 0.000 claims description 7
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- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 claims description 6
- 229910052735 hafnium Inorganic materials 0.000 claims description 5
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 4
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229910018098 Ni-Si Inorganic materials 0.000 description 2
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- 229910020203 CeO Inorganic materials 0.000 description 1
- 229910003855 HfAlO Inorganic materials 0.000 description 1
- 229910004143 HfON Inorganic materials 0.000 description 1
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910017414 LaAl Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
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- H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
- H01L21/8238—Complementary field-effect transistors, e.g. CMOS
- H01L21/823828—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes
- H01L21/823842—Complementary field-effect transistors, e.g. CMOS with a particular manufacturing method of the gate conductors, e.g. particular materials, shapes gate conductors with different gate conductor materials or different gate conductor implants, e.g. dual gate structures
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
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Abstract
【解決手段】基板1中に互いに絶縁分離されたp型半導体領域2とn型半導体領域3を形成する工程と、p型およびn型半導体領域上に第1および第2ゲート絶縁膜5,15をそれぞれ形成する工程と、第1ゲート絶縁膜上にNi/Si<31/12となる組成の第1ニッケルシリサイド6bを形成するとともに第2ゲート絶縁膜上にNi/Si≧31/12となる組成の第2ニッケルシリサイド16を形成する工程と、第1ニッケルシリサイド中にアルミニウムを拡散させ、第1ニッケルシリサイドと第1ゲート絶縁膜との界面にアルミニウム6aを偏析させる工程と、を備えている。
【選択図】図8
Description
K.Takahashi et al., "Dual Workfunction Ni-Silicide/HfSiON Gate Stacks by Phase-Controlled Full-Silicidation (PC-FUSI) Technique for 45nm-node LSTP and LOP Devices", 2004 IEDM, p.p.91-94 Y.H.Kim et al., "Systematic Study of Workfunction Engineering and Scavenging Effect Using NiSi Alloy FUSI Metal Gates with Advanced Gate Stacks", 2005 IEDM, p.p.657-660
前記基板上に前記p型半導体領域とは絶縁分離して形成されたn型半導体領域と、前記n型半導体領域に離間して形成された第2ソース・ドレイン領域と、前記第2ソース・ドレイン領域上に形成された第2ゲート絶縁膜と、前記第2ゲート絶縁膜上に形成されたNi/Si<31/12となる組成の第2ニッケルシリサイドと、前記第2ニッケルシリサイド上に形成されたNi/Si≧31/12となる組成の第3ニッケルシリサイドと、の積層からなる第2ゲート電極と、を有するpチャネルMISトランジスタと、を備えたことを特徴とする。
次に、本発明の第1実施形態による半導体装置を説明する。本実施形態の半導体装置は、CMISFETであって、そのゲート長方向の断面を図8に示す。
次に、本実施形態の半導体装置の製造方法を、図9乃至図15を参照して説明する。
本実施形態の変形例によるCMISFETのゲート長方向の断面を図16に示す。図8に示す本実施形態と異なるのはpチャネルMISトランジスタのゲート電極がNi2Siシリサイド26とニッケルリッチなシリサイド16(例えばNi3Si)の積層構造で構成される点である。
本発明の第2実施形態による半導体装置の製造方法を説明する。本実施形態の製造方法に製造される半導体装置は、CMISFETであって、図8に示した第1実施形態のCMISFETとほぼ同一である。
次に、第2実施形態の変形例による製造方法を、図21乃至図25を参照して説明する。
記載の発明の要旨の範疇において様々に変更可能である。また、本発明は、実施段階では
その要旨を逸脱しない範囲で種々に変形することが可能である。さらに、上記実施形態に
開示されている複数の構成要素を適宜組み合わせることにより種々の発明を形成できる。
2 p型ウェル領域
3 n型ウェル領域
4 素子分離層
5、15 HfSiON膜(ゲート絶縁層)
6 ゲート電極
6a 界面アルミニウム層
6b Niシリサイド層(Ni2Si層)
8、18 ゲート側壁
9 エクステンション層
10 拡散層
12 Niシリサイド層(NiSi層)
16 Niシリサイド層(Ni3Si層)
19 エクステンション層
20 拡散層
22 Niシリサイド層(NiSi層)
24 層間絶縁膜
26 Niシリサイド層(Ni2Si層)
70 ニッケル層
80 ハードマスク
100、101 シリコン層
102 ニッケル層
103 アルミニウム層
104 シリコンゲルマニウム層
Claims (13)
- 基板中に互いに絶縁分離されたp型半導体領域とn型半導体領域を形成する工程と、
前記p型およびn型半導体領域上に第1および第2ゲート絶縁膜をそれぞれ形成する工程と、
前記第1ゲート絶縁膜上にNi/Si<31/12となる組成の第1ニッケルシリサイドを形成するとともに前記第2ゲート絶縁膜上にNi/Si≧31/12となる組成の第2ニッケルシリサイドを形成する工程と、
第1ニッケルシリサイド中にアルミニウムを拡散させ、前記第1ニッケルシリサイドと前記第1ゲート絶縁膜との界面に前記アルミニウムを偏析させる工程と、
を備えたことを特徴とする半導体装置の製造方法。 - 基板中に互いに絶縁分離されたp型半導体領域とn型半導体領域を形成する工程と、
前記p型およびn型半導体領域上に第1および第2ゲート絶縁膜をそれぞれ形成する工程と、
前記第1ゲート絶縁膜上に立方晶NiSi2、斜方晶NiSi、および斜方晶Ni2Siのいずれかからなる第1ニッケルシリサイドを形成するとともに前記第2ゲート絶縁膜上に六方晶Ni31Si12および立方晶Ni3Siのいずれかからなる第2ニッケルシリサイドを形成する工程と、
第1ニッケルシリサイド中にアルミニウムを拡散させ、前記第1ニッケルシリサイドと前記第1ゲート絶縁膜との界面に前記アルミニウムを偏析させる工程と、
を備えたことを特徴とする半導体装置の製造方法。 - 前記第1および第2ニッケルシリサイドを形成する工程は、
前記第1および第2ゲート絶縁膜上に第1および第2シリコン層をそれぞれ形成する工程と、
前記第2シリコン層を薄膜化して第3シリコン層とする工程と、
前記第1シリコン層および前記第3シリコン層の上部に同じ膜厚のニッケル層を形成する工程と、
熱処理することにより前記第1シリコン層および前記第3シリコン層と、前記ニッケル層とを固相反応させる工程と、
を備えたことを特徴とする請求項1または2記載の半導体装置の製造方法。 - 前記第1および第2ニッケルシリサイドを形成する工程は、
前記第1および第2ゲート絶縁層上に第1および第2シリコン層をそれぞれ形成する工程と、
前記第1および第2シリコン層上に第1および第2シリコンゲルマニウム化合物層をそれぞれ形成する工程と、
前記第第1および第2シリコンゲルマニウム化合物層を選択的に除去する工程と、
前記第2シリコン層を薄膜化して第3シリコン層とする工程と、
前記第1シリコン層と、前記第3シリコン層の上部に同じ膜厚のニッケル層を形成する工程と、
熱処理することにより前記第1シリコン層および前記第3シリコン層と、前記ニッケル層とを固相反応させる工程と、
を備えたことを特徴とする請求項1または2記載の半導体装置の製造方法。 - 前記第1および第2ニッケルシリサイドを形成する工程は、
前記第1および第2ゲート絶縁膜上に第1および第2シリコン層をそれぞれ形成する工程と、
前記第1および第2シリコン層上に第1ニッケル層を形成する工程と、
熱処理することによって前記第1および第2シリコン層と前記第1ニッケル層を固相反応させそれぞれ前記第1ニッケルシリサイドとなす工程と、
前記n型半導体領域上の第1ニッケルシリサイド上に第2ニッケル層を形成する工程と、
熱処理することによって前記n型半導体領域上の第1ニッケルシリサイドの少なくとも一部を前記第2ニッケルシリサイドとする工程と、
を備えたことを特徴とする請求項1または2記載の半導体装置の製造方法。 - 前記第2ニッケル層を形成する工程と、前記熱処理することによって前記n型半導体領域上の第1ニッケルシリサイドの少なくとも一部を第2ニッケルシリサイドとなす工程との間に、
前記n型半導体上のニッケルシリサイド上にチタン、ジルコニウム、ハフニウムのうちいずれかを含む層を形成する工程、
を備えたことを特徴とする請求項5記載の半導体装置の製造方法。 - 前記熱処理することによって前記第1ニッケルシリサイドの少なくとも一部を第2ニッケルシリサイドとなす工程において、前記n型半導体領域上のニッケルシリサイドの全てを第2ニッケルシリサイドとなす工程を備えたことを特徴とする請求項5または6記載の半導体装置の製造方法。
- 前記第1ニッケルシリサイドと前記第1ゲート絶縁膜との界面に前記アルミニウムを偏析させる工程は、
前記第1および第2ニッケルシリサイド上にアルミニウム層を形成する工程と、
熱処理することにより、前記第1ニッケルシリサイドと前記第1ゲート絶縁膜との界面に前記アルミニウムを偏析させる工程と
を備えたことを特徴とする請求項1乃至7のいずれかに記載の半導体装置の製造方法。 - 前記アルミニウムを偏析させる工程は、前記第1ニッケルシリサイドと前記第1ゲート絶縁膜との界面に1原子層以上のアルミニウム層を形成するとともに、前記第2ニッケルシリサイドと前記第2ゲート絶縁膜との界面に1原子層未満のアルミニウム層を形成することを特徴とする請求項8記載の半導体装置の製造方法。
- 前記第1ニッケルシリサイドと前記第1ゲート絶縁膜との界面に前記アルミニウムを偏析させる工程は、
前記第1および第2ニッケルシリサイドにアルミニウムをイオン注入する工程と、
熱処理することにより、前記第1ニッケルシリサイドと前記第1ゲート絶縁膜との界面に前記アルミニウムを偏析させる工程と
を備えたことを特徴とする請求項1乃至7のいずれかに記載の半導体装置の製造方法。 - 基板と、
前記基板上に形成されたp型半導体領域と、
前記p型半導体領域に離間して形成された第1ソース・ドレイン領域と、
前記第1ソース・ドレイン領域上に形成された第1ゲート絶縁膜と、
前記第1ゲート絶縁膜上に形成されたNi/Si<31/12となる組成の第1ニッケルシリサイドを有する第1ゲート電極と、
前記第1ゲート絶縁膜と第1ゲート電極の界面に偏在化した第1アルミニウム層と、
を有するnチャネルMISトランジスタと、
前記基板上に前記p型半導体領域とは絶縁分離して形成されたn型半導体領域と、
前記n型半導体領域に離間して形成された第2ソース・ドレイン領域と、
前記第2ソース・ドレイン領域上に形成された第2ゲート絶縁膜と、
前記第2ゲート絶縁膜上に形成されたNi/Si<31/12となる組成の第2ニッケルシリサイドと、前記第2ニッケルシリサイド上に形成されたNi/Si≧31/12となる組成の第3ニッケルシリサイドと、の積層からなる第2ゲート電極と、
を有するpチャネルMISトランジスタと、
を備えたことを特徴とする半導体装置。 - 前記第1および第2ニッケルシリサイドが立方晶NiSi2、斜方晶NiSi、および斜方晶Ni2Siのいずれかであり、前記第3ニッケルシリサイドが六方晶Ni31Si12、および立方晶Ni3Siのいずれかであることを特徴とする請求項11記載の半導体装置。
- 前記第1アルミニウム層は1原子層以上の層厚を有し、前記第2ニッケルシリサイドと前記第2ゲート絶縁膜との界面に1原子層未満の第2アルミニウム層が形成されることを特徴とする請求項11または12記載の半導体装置。
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