JP2008182511A5 - - Google Patents

Download PDF

Info

Publication number
JP2008182511A5
JP2008182511A5 JP2007014668A JP2007014668A JP2008182511A5 JP 2008182511 A5 JP2008182511 A5 JP 2008182511A5 JP 2007014668 A JP2007014668 A JP 2007014668A JP 2007014668 A JP2007014668 A JP 2007014668A JP 2008182511 A5 JP2008182511 A5 JP 2008182511A5
Authority
JP
Japan
Prior art keywords
structure portion
piezoelectric film
surface side
film
electrode formed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2007014668A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008182511A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007014668A priority Critical patent/JP2008182511A/ja
Priority claimed from JP2007014668A external-priority patent/JP2008182511A/ja
Publication of JP2008182511A publication Critical patent/JP2008182511A/ja
Publication of JP2008182511A5 publication Critical patent/JP2008182511A5/ja
Withdrawn legal-status Critical Current

Links

JP2007014668A 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法 Withdrawn JP2008182511A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007014668A JP2008182511A (ja) 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007014668A JP2008182511A (ja) 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法

Publications (2)

Publication Number Publication Date
JP2008182511A JP2008182511A (ja) 2008-08-07
JP2008182511A5 true JP2008182511A5 (enExample) 2010-02-12

Family

ID=39726072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007014668A Withdrawn JP2008182511A (ja) 2007-01-25 2007-01-25 バルク音響振動子、その周波数温度特性の補償方法、及び、その製造方法

Country Status (1)

Country Link
JP (1) JP2008182511A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6374653B2 (ja) * 2013-11-18 2018-08-15 太陽誘電株式会社 弾性波フィルタ及び分波器
KR102482602B1 (ko) 2020-08-19 2022-12-29 삼성전기주식회사 음향 공진기 필터

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53149783A (en) * 1977-06-01 1978-12-27 Seiko Instr & Electronics Ltd Composite piezo-electric vibrator
JPH03178211A (ja) * 1989-12-07 1991-08-02 Murata Mfg Co Ltd 圧電共振子
JP3514224B2 (ja) * 1999-11-11 2004-03-31 株式会社村田製作所 圧電共振子、フィルタ及び電子機器
JP3979073B2 (ja) * 2000-12-06 2007-09-19 株式会社村田製作所 圧電共振子、圧電フィルタおよびデュプレクサ
JP2005117641A (ja) * 2003-09-17 2005-04-28 Matsushita Electric Ind Co Ltd 圧電体共振器、それを用いたフィルタ及び共用器

Similar Documents

Publication Publication Date Title
WO2009011148A1 (ja) 圧電薄膜共振素子及びこれを用いた回路部品
WO2013185737A3 (zh) 一种温度补偿能力可调节的压电声波谐振器
ATE504975T1 (de) Piezoelektrischer resonator, piezoelektrischer filter und kommunikationsvorrichtung
JP2015537439A5 (enExample)
TW200644046A (en) Method for manufacturing a film bulk acoustic resonator
JP2010087573A5 (enExample)
JP2017022407A5 (enExample)
WO2009050881A1 (ja) 超音波探触子
JP2007159123A5 (enExample)
JP2005244966A5 (enExample)
CN206948610U (zh) 一种压电麦克风及电子设备
FR2954626B1 (fr) Resonateur acoustique comprenant un electret, et procede de fabrication de ce resonateur, application aux filtres commutables a resonateurs couples
JP2013046086A5 (enExample)
JP2008182512A5 (enExample)
JP2009005024A5 (enExample)
JP2008182511A5 (enExample)
JP2009005023A5 (enExample)
EP1523097A3 (en) Air-gap type FBAR, method for fabricating the same, and filter and duplexer using the same
JP2008205888A5 (enExample)
JP5040403B2 (ja) 圧電薄膜振動装置及びその製造方法
KR101612456B1 (ko) 압전 파이버 컴포지트 구조체 및 이를 이용한 압전 스피커
JP2008098974A5 (enExample)
JP2009100367A (ja) 圧電振動装置
TW200640121A (en) Crystal oscillator
JP2009139338A5 (enExample)