JP2005244966A5 - - Google Patents

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Publication number
JP2005244966A5
JP2005244966A5 JP2005035841A JP2005035841A JP2005244966A5 JP 2005244966 A5 JP2005244966 A5 JP 2005244966A5 JP 2005035841 A JP2005035841 A JP 2005035841A JP 2005035841 A JP2005035841 A JP 2005035841A JP 2005244966 A5 JP2005244966 A5 JP 2005244966A5
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JP
Japan
Prior art keywords
acoustic resonator
resonator
standoff
acoustic
lower electrode
Prior art date
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Application number
JP2005035841A
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English (en)
Japanese (ja)
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JP2005244966A (ja
JP4683947B2 (ja
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Publication date
Priority claimed from US10/785,525 external-priority patent/US7038559B2/en
Application filed filed Critical
Publication of JP2005244966A publication Critical patent/JP2005244966A/ja
Publication of JP2005244966A5 publication Critical patent/JP2005244966A5/ja
Application granted granted Critical
Publication of JP4683947B2 publication Critical patent/JP4683947B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2005035841A 2004-02-23 2005-02-14 垂直方向に分離された音響フィルタ及び共鳴器 Expired - Fee Related JP4683947B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/785,525 US7038559B2 (en) 2004-02-23 2004-02-23 Vertically separated acoustic filters and resonators

Publications (3)

Publication Number Publication Date
JP2005244966A JP2005244966A (ja) 2005-09-08
JP2005244966A5 true JP2005244966A5 (enExample) 2007-07-12
JP4683947B2 JP4683947B2 (ja) 2011-05-18

Family

ID=34274940

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005035841A Expired - Fee Related JP4683947B2 (ja) 2004-02-23 2005-02-14 垂直方向に分離された音響フィルタ及び共鳴器

Country Status (3)

Country Link
US (5) US7038559B2 (enExample)
JP (1) JP4683947B2 (enExample)
GB (1) GB2411302B (enExample)

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US9154103B2 (en) 2012-01-30 2015-10-06 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator
US9667218B2 (en) 2012-01-30 2017-05-30 Avago Technologies General Ip (Singapore) Pte. Ltd. Temperature controlled acoustic resonator comprising feedback circuit
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JP2017500037A (ja) 2013-12-20 2017-01-05 ディーエスエム アイピー アセッツ ビー．ブイ． 微生物細胞から微生物油を入手するための方法
AU2014369042B2 (en) 2013-12-20 2020-04-30 Dsm Ip Assets B.V. Processes for obtaining microbial oil from microbial cells
BR112016014517B1 (pt) 2013-12-20 2022-06-28 Dsm Ip Assets B.V. Processo para a obtenção de um óleo microbiano compreendendo um ou mais ácidos graxos poli-insaturados de uma ou mais células microbianas
WO2015095696A1 (en) 2013-12-20 2015-06-25 Dsm Ip Assets B.V. Processes for obtaining microbial oil from microbial cells
JP6454299B2 (ja) * 2016-05-13 2019-01-16 太陽誘電株式会社 弾性波デバイス
US11616488B2 (en) * 2016-09-30 2023-03-28 Intel Corporation FBAR devices having multiple epitaxial layers stacked on a same substrate
US10804880B2 (en) * 2018-12-03 2020-10-13 X-Celeprint Limited Device structures with acoustic wave transducers and connection posts
US12162747B2 (en) 2018-12-03 2024-12-10 X-Celeprint Limited Enclosed cavity structures
US11274035B2 (en) 2019-04-24 2022-03-15 X-Celeprint Limited Overhanging device structures and related methods of manufacture
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CN112187212B (zh) * 2020-09-18 2021-12-07 杭州星阖科技有限公司 一种声学谐振器组件及滤波器
US12334906B2 (en) * 2021-12-30 2025-06-17 Raytheon Company Multi-layer resonator assembly and method for fabricating same

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KR100485702B1 (ko) * 2003-05-29 2005-04-28 삼성전자주식회사 지지대를 갖는 박막 벌크 음향 공진기 및 그 제조방법
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US7038559B2 (en) * 2004-02-23 2006-05-02 Ruby Richard C Vertically separated acoustic filters and resonators

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