JP2008177154A5 - - Google Patents

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Publication number
JP2008177154A5
JP2008177154A5 JP2007280016A JP2007280016A JP2008177154A5 JP 2008177154 A5 JP2008177154 A5 JP 2008177154A5 JP 2007280016 A JP2007280016 A JP 2007280016A JP 2007280016 A JP2007280016 A JP 2007280016A JP 2008177154 A5 JP2008177154 A5 JP 2008177154A5
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Japan
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workpiece
charged
focused beam
clusters
cluster
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JP2007280016A
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Japanese (ja)
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JP2008177154A (ja
JP5498655B2 (ja
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Priority claimed from US11/590,570 external-priority patent/US8835880B2/en
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Publication of JP5498655B2 publication Critical patent/JP5498655B2/ja
Expired - Fee Related legal-status Critical Current
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JP2007280016A 2006-10-31 2007-10-29 クラスタ源を使用する荷電粒子ビーム処理 Expired - Fee Related JP5498655B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/590,570 US8835880B2 (en) 2006-10-31 2006-10-31 Charged particle-beam processing using a cluster source
US11/590,570 2006-10-31

Publications (3)

Publication Number Publication Date
JP2008177154A JP2008177154A (ja) 2008-07-31
JP2008177154A5 true JP2008177154A5 (https=) 2010-12-16
JP5498655B2 JP5498655B2 (ja) 2014-05-21

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JP2007280016A Expired - Fee Related JP5498655B2 (ja) 2006-10-31 2007-10-29 クラスタ源を使用する荷電粒子ビーム処理

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US (2) US8835880B2 (https=)
EP (1) EP1918963B1 (https=)
JP (1) JP5498655B2 (https=)

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