JP2008164586A5 - - Google Patents

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Publication number
JP2008164586A5
JP2008164586A5 JP2007267308A JP2007267308A JP2008164586A5 JP 2008164586 A5 JP2008164586 A5 JP 2008164586A5 JP 2007267308 A JP2007267308 A JP 2007267308A JP 2007267308 A JP2007267308 A JP 2007267308A JP 2008164586 A5 JP2008164586 A5 JP 2008164586A5
Authority
JP
Japan
Prior art keywords
manufacturing
mover
impurity ion
sensor
ion introduction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007267308A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008164586A (ja
JP5376790B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007267308A priority Critical patent/JP5376790B2/ja
Priority claimed from JP2007267308A external-priority patent/JP5376790B2/ja
Priority to PCT/JP2007/073617 priority patent/WO2008069284A1/en
Priority to US12/516,007 priority patent/US8336381B2/en
Publication of JP2008164586A publication Critical patent/JP2008164586A/ja
Publication of JP2008164586A5 publication Critical patent/JP2008164586A5/ja
Application granted granted Critical
Publication of JP5376790B2 publication Critical patent/JP5376790B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007267308A 2006-12-04 2007-10-15 センサ、及びその製造方法 Expired - Fee Related JP5376790B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2007267308A JP5376790B2 (ja) 2006-12-04 2007-10-15 センサ、及びその製造方法
PCT/JP2007/073617 WO2008069284A1 (en) 2006-12-04 2007-11-29 Sensor and method of manufacturing the same
US12/516,007 US8336381B2 (en) 2006-12-04 2007-11-29 Sensor and method of manufacturing the same

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006326401 2006-12-04
JP2006326401 2006-12-04
JP2007267308A JP5376790B2 (ja) 2006-12-04 2007-10-15 センサ、及びその製造方法

Publications (3)

Publication Number Publication Date
JP2008164586A JP2008164586A (ja) 2008-07-17
JP2008164586A5 true JP2008164586A5 (enExample) 2010-12-02
JP5376790B2 JP5376790B2 (ja) 2013-12-25

Family

ID=39694275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007267308A Expired - Fee Related JP5376790B2 (ja) 2006-12-04 2007-10-15 センサ、及びその製造方法

Country Status (2)

Country Link
US (1) US8336381B2 (enExample)
JP (1) JP5376790B2 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9481912B2 (en) 2006-09-12 2016-11-01 Longhorn Vaccines And Diagnostics, Llc Compositions and methods for detecting and identifying nucleic acid sequences in biological samples
US11041215B2 (en) 2007-08-24 2021-06-22 Longhorn Vaccines And Diagnostics, Llc PCR ready compositions and methods for detecting and identifying nucleic acid sequences
US9683256B2 (en) 2007-10-01 2017-06-20 Longhorn Vaccines And Diagnostics, Llc Biological specimen collection and transport system
US10004799B2 (en) 2007-08-27 2018-06-26 Longhorn Vaccines And Diagnostics, Llc Composite antigenic sequences and vaccines
AU2008293504B2 (en) 2007-08-27 2012-04-12 Longhorn Vaccines & Diagnostics, Llc Immunogenic compositions and methods
US11041216B2 (en) 2007-10-01 2021-06-22 Longhorn Vaccines And Diagnostics, Llc Compositions and methods for detecting and quantifying nucleic acid sequences in blood samples
DK2535428T3 (en) 2007-10-01 2015-11-23 Longhorn Vaccines & Diagnostics Llc Biological prøvesamlings- and transport system, and methods of using
US8704314B2 (en) * 2007-12-06 2014-04-22 Massachusetts Institute Of Technology Mechanical memory transistor
JP5495607B2 (ja) * 2008-05-27 2014-05-21 キヤノン株式会社 超音波診断装置
JP2010080466A (ja) * 2008-09-24 2010-04-08 Fuji Electric Holdings Co Ltd 加速度および角加速度センサ
JP2010245277A (ja) * 2009-04-06 2010-10-28 Fuji Electric Holdings Co Ltd 半導体センサおよびその製造方法
CN102458239B (zh) * 2009-06-05 2015-03-25 皇家飞利浦电子股份有限公司 电容式感测系统
WO2013112916A1 (en) 2012-01-26 2013-08-01 Longhorn Vaccines And Diagnostics, Llc Composite antigenic sequences and vaccines
US8987845B2 (en) * 2012-11-09 2015-03-24 Taiwan Semiconductor Manufacturing Co., Ltd. Method for the prevention of suspended silicon structure etching during reactive ion etching
EP3294448A4 (en) 2015-05-14 2018-12-12 Longhorn Vaccines and Diagnostics, LLC Rapid methods for the extraction of nucleic acids from biological samples
US11304643B2 (en) * 2016-08-09 2022-04-19 Koninklijke Philips N.V. Maternal monitoring transducer and operating method
US20220252635A1 (en) * 2021-02-05 2022-08-11 Kionix, Inc. Mechanically-sensitive semiconducting triode capacitor

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Publication number Priority date Publication date Assignee Title
US3440873A (en) * 1967-05-23 1969-04-29 Corning Glass Works Miniature pressure transducer
US3585415A (en) * 1969-10-06 1971-06-15 Univ California Stress-strain transducer charge coupled to a piezoelectric material
US4812888A (en) * 1984-11-11 1989-03-14 Cornell Research Foundation, Inc. Suspended gate field effect semiconductor pressure transducer device
JPS61155831A (ja) * 1984-12-28 1986-07-15 Yokogawa Electric Corp 半導体容量形圧力センサ
FR2599833B1 (fr) * 1986-06-10 1992-02-14 Metravib Sa Capteur de grandeurs mecaniques integre sur silicium et procede de fabrication
US4773972A (en) * 1986-10-30 1988-09-27 Ford Motor Company Method of making silicon capacitive pressure sensor with glass layer between silicon wafers
JPH0670644B2 (ja) * 1989-09-07 1994-09-07 株式会社日立製作所 半導体容量式加速度センサとその製造方法
JPH0425764A (ja) * 1990-05-21 1992-01-29 Nec Corp 半導体加速度センサ
JP2690417B2 (ja) 1991-08-27 1997-12-10 株式会社テック バッフル装置
JPH07211923A (ja) * 1994-01-19 1995-08-11 Nippondenso Co Ltd 半導体加速度センサ
DE4445553A1 (de) * 1993-12-21 1995-06-22 Nippon Denso Co Halbleiterbeschleunigungssensor
JPH0850022A (ja) * 1994-05-30 1996-02-20 Murata Mfg Co Ltd 角速度センサ
JPH1038737A (ja) * 1996-07-29 1998-02-13 Fujikura Ltd 静電容量式センサおよびその製造方法
JPH10111203A (ja) * 1996-10-08 1998-04-28 Fujikura Ltd 静電容量式半導体センサ及びその製造方法
JP3418548B2 (ja) * 1997-04-03 2003-06-23 株式会社山武 回路基板およびその製造方法
US6105427A (en) * 1998-07-31 2000-08-22 Litton Systems, Inc. Micro-mechanical semiconductor accelerometer
JP2000065581A (ja) * 1998-08-26 2000-03-03 Denso Corp 角速度センサ
JP2002148047A (ja) 2000-11-07 2002-05-22 Murata Mfg Co Ltd ジャイロ装置
KR100418881B1 (ko) * 2001-05-23 2004-02-19 엘지전자 주식회사 Ａｆｍ 용 고감도 압전저항 캔틸레버
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JP2005262412A (ja) * 2004-03-19 2005-09-29 Toyota Central Res & Dev Lab Inc シリコン系構造体とその製造方法
JP5095930B2 (ja) * 2005-08-12 2012-12-12 パナソニック株式会社 Ｍｅｍｓデバイスおよびその製造方法
KR20080005854A (ko) * 2006-07-10 2008-01-15 야마하 가부시키가이샤 압력 센서 및 그의 제조 방법

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