JP2009074977A5 - - Google Patents

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Publication number
JP2009074977A5
JP2009074977A5 JP2007245113A JP2007245113A JP2009074977A5 JP 2009074977 A5 JP2009074977 A5 JP 2009074977A5 JP 2007245113 A JP2007245113 A JP 2007245113A JP 2007245113 A JP2007245113 A JP 2007245113A JP 2009074977 A5 JP2009074977 A5 JP 2009074977A5
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JP
Japan
Prior art keywords
pair
base
thin film
counter electrodes
sensitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007245113A
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English (en)
Japanese (ja)
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JP2009074977A (ja
JP5419336B2 (ja
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Priority to JP2007245113A priority Critical patent/JP5419336B2/ja
Priority claimed from JP2007245113A external-priority patent/JP5419336B2/ja
Publication of JP2009074977A publication Critical patent/JP2009074977A/ja
Publication of JP2009074977A5 publication Critical patent/JP2009074977A5/ja
Application granted granted Critical
Publication of JP5419336B2 publication Critical patent/JP5419336B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2007245113A 2007-09-21 2007-09-21 感応センサ及びその製造方法 Active JP5419336B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007245113A JP5419336B2 (ja) 2007-09-21 2007-09-21 感応センサ及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007245113A JP5419336B2 (ja) 2007-09-21 2007-09-21 感応センサ及びその製造方法

Publications (3)

Publication Number Publication Date
JP2009074977A JP2009074977A (ja) 2009-04-09
JP2009074977A5 true JP2009074977A5 (enExample) 2010-06-03
JP5419336B2 JP5419336B2 (ja) 2014-02-19

Family

ID=40610081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007245113A Active JP5419336B2 (ja) 2007-09-21 2007-09-21 感応センサ及びその製造方法

Country Status (1)

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JP (1) JP5419336B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010084916A1 (ja) * 2009-01-21 2010-07-29 北陸電気工業株式会社 ガスセンサ用基体及びその製造方法
JP5252742B2 (ja) * 2010-01-28 2013-07-31 フィガロ技研株式会社 ガスセンサ
JP5630821B2 (ja) * 2010-11-05 2014-11-26 フィガロ技研株式会社 ガスセンサ
JP6639566B2 (ja) * 2018-06-08 2020-02-05 オムロン株式会社 マイクロホットプレート及びｍｅｍｓガスセンサ
JP2023184338A (ja) * 2022-06-17 2023-12-28 日清紡マイクロデバイス株式会社 ガスセンサ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5391696U (enExample) * 1976-12-27 1978-07-26
JPS61112260U (enExample) * 1984-12-27 1986-07-16
JPS6214048A (ja) * 1985-07-11 1987-01-22 Figaro Eng Inc 排ガスセンサ
JPH0324450A (ja) * 1989-06-21 1991-02-01 Brother Ind Ltd セラミックス湿度・ガスセンサー
JP2005003472A (ja) * 2003-06-11 2005-01-06 Osaka Gas Co Ltd 薄膜ガスセンサの製造方法

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