JP2004361395A5 - - Google Patents

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Publication number
JP2004361395A5
JP2004361395A5 JP2004131764A JP2004131764A JP2004361395A5 JP 2004361395 A5 JP2004361395 A5 JP 2004361395A5 JP 2004131764 A JP2004131764 A JP 2004131764A JP 2004131764 A JP2004131764 A JP 2004131764A JP 2004361395 A5 JP2004361395 A5 JP 2004361395A5
Authority
JP
Japan
Prior art keywords
forming
electrode
insulating film
frame plate
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004131764A
Other languages
English (en)
Japanese (ja)
Other versions
JP2004361395A (ja
JP3649245B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004131764A priority Critical patent/JP3649245B2/ja
Priority claimed from JP2004131764A external-priority patent/JP3649245B2/ja
Publication of JP2004361395A publication Critical patent/JP2004361395A/ja
Application granted granted Critical
Publication of JP3649245B2 publication Critical patent/JP3649245B2/ja
Publication of JP2004361395A5 publication Critical patent/JP2004361395A5/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004131764A 2003-05-13 2004-04-27 シート状プローブの製造方法 Expired - Fee Related JP3649245B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004131764A JP3649245B2 (ja) 2003-05-13 2004-04-27 シート状プローブの製造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003134450 2003-05-13
JP2004131764A JP3649245B2 (ja) 2003-05-13 2004-04-27 シート状プローブの製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2004362951A Division JP3781048B2 (ja) 2003-05-13 2004-12-15 シート状プローブおよびその応用

Publications (3)

Publication Number Publication Date
JP2004361395A JP2004361395A (ja) 2004-12-24
JP3649245B2 JP3649245B2 (ja) 2005-05-18
JP2004361395A5 true JP2004361395A5 (enExample) 2005-06-30

Family

ID=34067169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004131764A Expired - Fee Related JP3649245B2 (ja) 2003-05-13 2004-04-27 シート状プローブの製造方法

Country Status (1)

Country Link
JP (1) JP3649245B2 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070010068A (ko) * 2004-04-27 2007-01-19 제이에스알 가부시끼가이샤 시트형 프로브 및 그의 제조 방법 및 그의 응용
US7656176B2 (en) * 2004-10-29 2010-02-02 Jsr Corporation Probe member for wafer inspection, probe card for wafer inspection and wafer inspection equipment
KR101167748B1 (ko) * 2004-11-12 2012-07-23 제이에스알 가부시끼가이샤 웨이퍼 검사용 탐침 부재, 웨이퍼 검사용 프로브 카드 및웨이퍼 검사 장치
JP2006237242A (ja) * 2005-02-24 2006-09-07 Jsr Corp ウエハ検査用プローブカードおよびウエハ検査装置
JP2008089377A (ja) * 2006-09-29 2008-04-17 Jsr Corp シート状プローブおよびその製造方法ならびにその応用
KR200445395Y1 (ko) * 2007-08-13 2009-07-27 주식회사 아이에스시테크놀러지 도전성 콘택터
JP5112496B2 (ja) * 2010-10-29 2013-01-09 日本航空電子工業株式会社 Ｉｃソケット

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