JP2008141197A - 薄膜トランジスタ及び有機薄膜トランジスタ - Google Patents
薄膜トランジスタ及び有機薄膜トランジスタ Download PDFInfo
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- JP2008141197A JP2008141197A JP2007304164A JP2007304164A JP2008141197A JP 2008141197 A JP2008141197 A JP 2008141197A JP 2007304164 A JP2007304164 A JP 2007304164A JP 2007304164 A JP2007304164 A JP 2007304164A JP 2008141197 A JP2008141197 A JP 2008141197A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/80—Constructional details
- H10K10/82—Electrodes
- H10K10/84—Ohmic electrodes, e.g. source or drain electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
- H01L29/456—Ohmic electrodes on silicon
- H01L29/458—Ohmic electrodes on silicon for thin film silicon, e.g. source or drain electrode
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/464—Lateral top-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/466—Lateral bottom-gate IGFETs comprising only a single gate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K10/00—Organic devices specially adapted for rectifying, amplifying, oscillating or switching; Organic capacitors or resistors having potential barriers
- H10K10/40—Organic transistors
- H10K10/46—Field-effect transistors, e.g. organic thin-film transistors [OTFT]
- H10K10/462—Insulated gate field-effect transistors [IGFETs]
- H10K10/468—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics
- H10K10/472—Insulated gate field-effect transistors [IGFETs] characterised by the gate dielectrics the gate dielectric comprising only inorganic materials
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- H—ELECTRICITY
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Abstract
【解決手段】薄膜トランジスタであって、ソース電極と、ドレイン電極と、半導体層とを含み、前記ソース電極と前記ドレイン電極とはそれぞれ第1層と第2層とを含み、前記ソース電極の第1層の仕事関数と前記半導体層のエネルギレベルとの差は、最低0.5eVであり、前記ソース電極の第2層の仕事関数と前記半導体層のエネルギレベルとの差は、最大0.2eVであり、前記半導体層のチャネル長は20マイクロメートル以下である。
【選択図】図1
Description
ISD=Ciμ(W/2L)(VG−VT)2 ・・・(1)
式中、ISDは飽和領域中のドレイン電流であり、WおよびLはそれぞれ半導体チャネル幅とチャネル長であり、Ciはゲート誘電体層の単位面積当たりのキャパシタンスであり、VGとVTはそれぞれゲート電圧と閾値電圧である。装置のVTは、飽和領域のISDの平方根と装置のVGとの関係から、測定データをISD=0に補外して求めた。
比較例1では、実施例と同様にトランジスタを作製したが、ただしソース電極とドレイン電極とは金の一層から構成し、チャネル長は90マイクロメートルとした。移動度は0.12cm2/V−秒、電流オン/オフ比は約107と計算された。
比較例2では、実施例と同様にトランジスタを作製したが、ただしソース電極とドレイン電極とは金の一層から構成し、チャネル長は2マイクロメートルまたは5マイクロメートルとした。移動度は最大0.45cm2/V−秒だったが、電流オン/オフ比は104未満であった。
Claims (3)
- 薄膜トランジスタであって、
ソース電極と、
ドレイン電極と、
半導体層とを含み、
前記ソース電極と前記ドレイン電極とはそれぞれ第1層と第2層とを含み、
前記ソース電極の第1層の仕事関数と前記半導体層のエネルギレベルとの差は、最低0.5eVであり、
前記ソース電極の第2層の仕事関数と前記半導体層のエネルギレベルとの差は、最大0.2eVであり、
前記半導体層のチャネル長は20マイクロメートル以下である薄膜トランジスタ。 - 有機薄膜トランジスタであって、
ソース電極と、
ドレイン電極と、
半導体層とを含み、
前記ソース電極と前記ドレイン電極とはそれぞれ第1層と第2層とを含み、
前記ソース電極の第1層の仕事関数と前記半導体層のエネルギレベルとは、最低0.5eVであり、
前記ソース電極の第2層の仕事関数と前記半導体層のエネルギレベルとは、最大0.2eVであり、
前記半導体層のチャネル長は5マイクロメートル〜10マイクロメートルである有機薄膜トランジスタ。 - 有機薄膜トランジスタであって、
ソース電極と、
ドレイン電極と、
ポリチオフェン半導体層とを含み、
前記ソース電極と前記ドレイン電極とは、チタンからなる第1層と金からなる第2層とをそれぞれ含み、
前記半導体層のチャネル長は最大10マイクロメートルである有機薄膜トランジスタ。
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US11/564,438 US7923718B2 (en) | 2006-11-29 | 2006-11-29 | Organic thin film transistor with dual layer electrodes |
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US (1) | US7923718B2 (ja) |
EP (1) | EP1928038B1 (ja) |
JP (1) | JP2008141197A (ja) |
KR (1) | KR101474934B1 (ja) |
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CA (1) | CA2612033C (ja) |
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