JP2008130904A - 太陽電池の製造方法及び太陽電池の製造装置 - Google Patents
太陽電池の製造方法及び太陽電池の製造装置 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 51
- 238000002161 passivation Methods 0.000 claims abstract description 115
- 239000010410 layer Substances 0.000 claims abstract description 85
- 239000000758 substrate Substances 0.000 claims abstract description 68
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims abstract description 44
- 239000002344 surface layer Substances 0.000 claims abstract description 30
- 230000001590 oxidative effect Effects 0.000 claims abstract description 16
- 238000000151 deposition Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 91
- 239000007789 gas Substances 0.000 claims description 78
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 37
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 36
- 229910052710 silicon Inorganic materials 0.000 claims description 36
- 239000010703 silicon Substances 0.000 claims description 36
- 229910052757 nitrogen Inorganic materials 0.000 claims description 27
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 10
- 238000005121 nitriding Methods 0.000 claims description 10
- 239000001301 oxygen Substances 0.000 claims description 10
- 229910052760 oxygen Inorganic materials 0.000 claims description 10
- 150000004767 nitrides Chemical class 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 239000001257 hydrogen Substances 0.000 claims description 6
- 229910052739 hydrogen Inorganic materials 0.000 claims description 6
- 208000037998 chronic venous disease Diseases 0.000 abstract description 28
- 238000006243 chemical reaction Methods 0.000 abstract description 15
- 230000003647 oxidation Effects 0.000 abstract description 14
- 238000007254 oxidation reaction Methods 0.000 abstract description 14
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 8
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 8
- 229920005591 polysilicon Polymers 0.000 abstract description 4
- 230000007547 defect Effects 0.000 description 21
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- 230000010355 oscillation Effects 0.000 description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 10
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 8
- 229910001882 dioxygen Inorganic materials 0.000 description 8
- 150000002500 ions Chemical class 0.000 description 8
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 6
- 229910052786 argon Inorganic materials 0.000 description 5
- 238000009832 plasma treatment Methods 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000000969 carrier Substances 0.000 description 4
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 230000031700 light absorption Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229910000077 silane Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 2
- 239000006096 absorbing agent Substances 0.000 description 2
- 229910021419 crystalline silicon Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000008034 disappearance Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229960001730 nitrous oxide Drugs 0.000 description 1
- 235000013842 nitrous oxide Nutrition 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
【解決手段】p型層となる多結晶シリコン基板Sp上に形成されたn型層となる多結晶シリコン層Snの表層を、プラズマを用いて酸化処理し、その後CVD処理によりシリコン窒化膜を堆積することにより、多結晶シリコン層Snの表層にパッシベーション膜A1、A2を形成する。かかるプラズマ酸化処理は、10eV以下のシース電位のプラズマを用いて、圧力が6.67Pa〜6.67×102Paの範囲で、温度が200℃〜600℃の範囲となる条件下で行う。プラズマを励起するマイクロ波は、スロットアンテナを通じて処理容器内に供給され、マイクロ波の表面波によってプラズマが生成される。
【選択図】図14
Description
14 処理部
42 ラジアルラインスロットアンテナ
Sp 多結晶シリコン基板
Sn 多結晶シリコン層
A パッシベーション膜
W 太陽電池基板
Claims (29)
- 太陽電池の製造方法であって、
シリコン層の表層をプラズマを用いて酸化、窒化又は酸窒化して、前記シリコン層の表層にパッシベーション膜を形成することを特徴とする、太陽電池の製造方法。 - 10eV以下のシース電位を有するプラズマを用いて前記パッシベーション膜を形成することを特徴とする、請求項1に記載の太陽電池の製造方法。
- 6.67Pa〜6.67×102Paの圧力下で、前記パッシベーション膜を形成することを特徴とする、請求項1又は2に記載の太陽電池の製造方法。
- 200℃〜600℃の温度下で、前記パッシベーション膜を形成することを特徴とする、請求項1〜3のいずれかに記載の太陽電池の製造方法。
- 前記プラズマは、マイクロ波によって励起される表面波プラズマであることを特徴とする、請求項1〜4のいずれかに記載の太陽電池の製造方法。
- 前記プラズマを生成するマイクロ波は、スロットアンテナを通じて供給されることを特徴とする、請求項5に記載の太陽電池の製造方法。
- 前記プラズマを生成するマイクロ波は、所定周期のパルス状に断続的に供給されることを特徴とする、請求項5又は6に記載の太陽電池の製造方法。
- 多結晶のシリコン層の表層を酸化処理する場合に、
多結晶のシリコン層とパッシベーション膜との界面における窒素原子含有率が5atomic%以下になるように、処理容器内に窒素を含む処理ガスを導入することを特徴とする、請求項1〜7のいずれかに記載の太陽電池の製造方法。 - 前記シリコン層の表層に形成されたパッシベーション膜上に、CVD処理により酸化膜、窒化膜又は酸窒化膜を成膜して、さらにパッシベーション膜を形成することを特徴とする、請求項1〜8のいずれかに記載の太陽電池の製造方法。
- プラズマを用いた前記CVD処理により前記パッシベーション膜を形成することを特徴とする、請求項9に記載の太陽電池の製造方法。
- 前記CVD処理時には、パッシベーション膜の堆積層にバイアス電力を印加することを特徴とする、請求項10に記載の太陽電池の製造方法。
- 前記シリコン層の表層を酸化、窒化又は酸窒化する前記処理時、又は前記CVD処理時の少なくともいずれかには、処理ガスに水素を添加することを特徴とする、請求項10又は11に記載の太陽電池の製造方法。
- 前記シリコン層の表層を酸化、窒化又は酸窒化する前記処理と、前記CVD処理を同一処理容器内で行うことを特徴とする、請求項10〜12のいずれかに記載の太陽電池の製造方法。
- 前記シリコン層の表層を酸化、窒化又は酸窒化する前記処理と、前記CVD処理とを異なる処理容器で行い、前記処理容器間の太陽電池基板を真空搬送することを特徴とする、請求項10〜12のいずれかに記載の太陽電池の製造方法。
- 前記シリコン層の表層を酸窒化してパッシベーション膜を形成する場合において、
前記CVD処理時に、処理容器内に酸素と窒素を含有する処理ガスを導入し、その導入する処理ガスの酸素に対する窒素の比率を次第に増加させて、パッシベーション膜中の窒素原子含有率を堆積方向に次第に増加させることを特徴とする、請求項9〜14のいずれかに記載の太陽電池の製造方法。 - 太陽電池の製造装置であって、
シリコン層の表層をプラズマを用いて酸化、窒化又は酸窒化して、前記シリコン層の表層にパッシベーション膜を形成する処理部を有することを特徴とする、太陽電池の製造装置。 - 前記処理部では、10eV以下のシース電位を有するプラズマを用いて前記パッシベーション膜を形成することを特徴とする、請求項16に記載の太陽電池の製造装置。
- 前記処理部では、6.67Pa〜6.67×102Paの圧力下で、前記パッシベーション膜を形成することを特徴とする、請求項16又は17に記載の太陽電池の製造装置。
- 前記処理部では、200℃〜600℃の温度下で、前記パッシベーション膜を形成することを特徴とする、請求項16〜18のいずれかに記載の太陽電池の製造装置。
- 前記プラズマは、マイクロ波によって励起される表面波プラズマであることを特徴とする、請求項16〜19のいずれかに記載の太陽電池の製造装置。
- 前記処理部は、マイクロ波を供給するスロットアンテナを有することを特徴とする、請求項20に記載の太陽電池の製造装置。
- 前記プラズマを生成するマイクロ波は、所定周期のパルス状に断続的に供給されることを特徴とする、請求項20又は21に記載の太陽電池の製造装置。
- 多結晶のシリコン層の表層を酸化処理する場合に、
多結晶のシリコン層とパッシベーション膜との界面における窒素原子含有率が5atomic%以下になるように、処理容器内に窒素を含む処理ガスを導入することを特徴とする、請求項16〜22のいずれかに記載の太陽電池の製造装置。 - 前記シリコン層の表層に形成されたパッシベーション膜上に、CVD処理により酸化膜、窒化膜又は酸窒化膜を成膜して、さらにパッシベーション膜を形成する他の処理部を有することを特徴とする、請求項16〜23のいずれかに記載の太陽電池の製造装置。
- 前記他の処理部では、プラズマを用いたCVD処理により前記パッシベーション膜を形成することを特徴とする、請求項24に記載の太陽電池の製造装置。
- 前記他の処理部は、パッシベーション膜の堆積層にバイアス電力を印加する電源を有することを特徴とする、請求項25に記載の太陽電池の製造装置。
- 前記処理部において前記シリコン層の表層を酸化、窒化又は酸窒化する前記処理時、又は前記他の処理部における前記CVD処理時の少なくともいずれかには、処理ガスに水素を添加することを特徴とする、請求項25又は26に記載の太陽電池の製造装置。
- 前記処理部と他の処理部は、太陽電池基板を真空搬送する搬送部を通じて接続されていることを特徴とする、請求項24〜27のいずれかに記載の太陽電池の製造装置。
- 前記処理部において前記シリコン層の表層を酸窒化してパッシベーション膜を形成する場合に、
前記他の処理部における前記CVD処理時に、処理容器内に酸素と窒素を含有する処理ガスを導入し、その導入する処理ガスの酸素に対する窒素の比率を次第に増加させて、パッシベーション膜中の窒素原子含有率を堆積方向に次第に増加させることを特徴とする、請求項24〜28のいずれかに記載の太陽電池の製造装置。
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PCT/JP2007/071547 WO2008062663A1 (fr) | 2006-11-22 | 2007-11-06 | Procédé de fabrication de cellule solaire et appareil de fabrication de cellule solaire |
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