JP2008124208A - Soq基板の製造方法 - Google Patents
Soq基板の製造方法 Download PDFInfo
- Publication number
- JP2008124208A JP2008124208A JP2006305665A JP2006305665A JP2008124208A JP 2008124208 A JP2008124208 A JP 2008124208A JP 2006305665 A JP2006305665 A JP 2006305665A JP 2006305665 A JP2006305665 A JP 2006305665A JP 2008124208 A JP2008124208 A JP 2008124208A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- single crystal
- ion implantation
- soq
- quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 112
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 45
- 239000010453 quartz Substances 0.000 claims abstract description 40
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 40
- 238000005468 ion implantation Methods 0.000 claims abstract description 33
- 238000000034 method Methods 0.000 claims abstract description 24
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000010703 silicon Substances 0.000 claims abstract description 19
- 239000010409 thin film Substances 0.000 claims abstract description 16
- 239000010408 film Substances 0.000 claims abstract description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 10
- 239000001257 hydrogen Substances 0.000 claims abstract description 9
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 9
- -1 Hydrogen ions Chemical class 0.000 claims abstract description 6
- 238000004381 surface treatment Methods 0.000 claims description 10
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 6
- 238000009832 plasma treatment Methods 0.000 claims description 5
- 230000004913 activation Effects 0.000 claims description 4
- 239000013078 crystal Substances 0.000 abstract description 6
- 230000001747 exhibiting effect Effects 0.000 abstract 1
- 238000005389 semiconductor device fabrication Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 12
- 206010040844 Skin exfoliation Diseases 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 9
- 125000004429 atom Chemical group 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 230000003746 surface roughness Effects 0.000 description 7
- 229910052594 sapphire Inorganic materials 0.000 description 6
- 239000010980 sapphire Substances 0.000 description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 3
- 238000002513 implantation Methods 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
- H01L21/2007—Bonding of semiconductor wafers to insulating substrates or to semiconducting substrates using an intermediate insulating layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78603—Thin film transistors, i.e. transistors with a channel being at least partly a thin film characterised by the insulating substrate or support
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/967—Semiconductor on specified insulator
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31551—Of polyamidoester [polyurethane, polyisocyanate, polycarbamate, etc.]
- Y10T428/31609—Particulate metal or metal compound-containing
- Y10T428/31612—As silicone, silane or siloxane
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Thin Film Transistor (AREA)
- Element Separation (AREA)
- Recrystallisation Techniques (AREA)
Abstract
【解決手段】単結晶Si基10の表面(主面)に水素イオンを注入し、水素イオン注入層(イオン注入ダメージ層)11を形成する。この水素イオン注入により、水素イオン注入界面12が形成される。この単結晶Si基板10と炭素濃度100ppm以上を含有する石英基板20を貼り合わせ、イオン注入ダメージ層11近傍に外部衝撃を付与することで、貼り合せ基板の単結晶Si基板10の水素イオン注入界面12に沿ってSi結晶膜を剥離する。そして、得られたシリコン薄膜13の表面を研磨等してダメージを除去してSOQ基板が得られる。
【選択図】図1
Description
11 注入ダメージ層
12 イオン注入界面
13 シリコン薄膜
20 石英基板
Claims (4)
- 炭素濃度100ppm以上を含有する石英基板上に単結晶シリコン薄膜を備えたSOQ(Silicon on Quartz)基板。
- 単結晶シリコン基板の主面側に水素イオンを注入するイオン注入工程と、
前記単結晶シリコン基板の主面及び炭素濃度100ppm以上を含有する石英基板の主面の少なくとも一方にプラズマ処理又はオゾン処理による表面活性化処理を施す表面処理工程と、
前記単結晶シリコン基板と前記石英基板の主面同士を貼り合わせる工程と、
前記貼り合せ基板の水素イオン注入界面に沿って単結晶シリコン膜を剥離して前記石英基板上に単結晶シリコン薄膜を形成する剥離工程とを備えているSOQ基板の製造方法。 - 前記貼り合わせ工程後で前記剥離工程前に、前記単結晶シリコン基板と前記石英基板を貼り合わせた状態で350℃以下の温度で熱処理する工程を備えている請求項2に記載のSOQ基板の製造方法。
- 前記剥離工程は、前記単結晶シリコン基板端部の水素イオン注入領域に機械的衝撃を付与することにより実行されるものである請求項2又は3に記載のSOQ基板の製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006305665A JP5044195B2 (ja) | 2006-11-10 | 2006-11-10 | Soq基板の製造方法 |
US11/979,447 US7732867B2 (en) | 2006-11-10 | 2007-11-02 | Method for manufacturing SOQ substrate |
EP20070021588 EP1921672B1 (en) | 2006-11-10 | 2007-11-06 | Method for manufacturing SOQ substrate |
DE200760007871 DE602007007871D1 (ja) | 2006-11-10 | 2007-11-06 | |
CN2007101700665A CN101179054B (zh) | 2006-11-10 | 2007-11-09 | Soq基板及其制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006305665A JP5044195B2 (ja) | 2006-11-10 | 2006-11-10 | Soq基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008124208A true JP2008124208A (ja) | 2008-05-29 |
JP5044195B2 JP5044195B2 (ja) | 2012-10-10 |
Family
ID=39166645
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006305665A Expired - Fee Related JP5044195B2 (ja) | 2006-11-10 | 2006-11-10 | Soq基板の製造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US7732867B2 (ja) |
EP (1) | EP1921672B1 (ja) |
JP (1) | JP5044195B2 (ja) |
CN (1) | CN101179054B (ja) |
DE (1) | DE602007007871D1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5496598B2 (ja) * | 2008-10-31 | 2014-05-21 | 信越化学工業株式会社 | シリコン薄膜転写絶縁性ウェーハの製造方法 |
JP2012250907A (ja) * | 2011-06-02 | 2012-12-20 | Samsung Corning Precision Materials Co Ltd | 自立基板の製造方法 |
GB201114365D0 (en) | 2011-08-22 | 2011-10-05 | Univ Surrey | Method of manufacture of an optoelectronic device and an optoelectronic device manufactured using the method |
CN102779739B (zh) * | 2012-07-12 | 2015-04-15 | 清华大学 | 功率半导体器件背面制造工艺 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001180964A (ja) * | 1999-12-27 | 2001-07-03 | Kyocera Corp | 黒色系焼結石英 |
JP2004123514A (ja) * | 2002-07-31 | 2004-04-22 | Shinetsu Quartz Prod Co Ltd | 石英ガラスの製造方法及び石英ガラス体 |
JP2006210900A (ja) * | 2004-12-28 | 2006-08-10 | Shin Etsu Chem Co Ltd | Soiウエーハの製造方法及びsoiウェーハ |
JP2007081145A (ja) * | 2005-09-14 | 2007-03-29 | Tosoh Corp | ダミーウエハー |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5395788A (en) * | 1991-03-15 | 1995-03-07 | Shin Etsu Handotai Co., Ltd. | Method of producing semiconductor substrate |
FR2681472B1 (fr) | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | Procede de fabrication de films minces de materiau semiconducteur. |
JPH11307747A (ja) * | 1998-04-17 | 1999-11-05 | Nec Corp | Soi基板およびその製造方法 |
TW200307652A (en) | 2002-04-04 | 2003-12-16 | Tosoh Corp | Quartz glass thermal sprayed parts and method for producing the same |
TW200422273A (en) * | 2002-11-29 | 2004-11-01 | Shinetsu Quartz Prod | Method for producing synthetic quartz glass and synthetic quartz glass article |
US7176528B2 (en) * | 2003-02-18 | 2007-02-13 | Corning Incorporated | Glass-based SOI structures |
DE602004013292T2 (de) * | 2004-06-11 | 2009-05-28 | S.O.I. Tec Silicon On Insulator Technologies S.A. | Verfahren zur Herstellung eines Verbundsubstrats |
FR2896619B1 (fr) * | 2006-01-23 | 2008-05-23 | Soitec Silicon On Insulator | Procede de fabrication d'un substrat composite a proprietes electriques ameliorees |
-
2006
- 2006-11-10 JP JP2006305665A patent/JP5044195B2/ja not_active Expired - Fee Related
-
2007
- 2007-11-02 US US11/979,447 patent/US7732867B2/en active Active
- 2007-11-06 EP EP20070021588 patent/EP1921672B1/en active Active
- 2007-11-06 DE DE200760007871 patent/DE602007007871D1/de active Active
- 2007-11-09 CN CN2007101700665A patent/CN101179054B/zh not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001180964A (ja) * | 1999-12-27 | 2001-07-03 | Kyocera Corp | 黒色系焼結石英 |
JP2004123514A (ja) * | 2002-07-31 | 2004-04-22 | Shinetsu Quartz Prod Co Ltd | 石英ガラスの製造方法及び石英ガラス体 |
JP2006210900A (ja) * | 2004-12-28 | 2006-08-10 | Shin Etsu Chem Co Ltd | Soiウエーハの製造方法及びsoiウェーハ |
JP2007081145A (ja) * | 2005-09-14 | 2007-03-29 | Tosoh Corp | ダミーウエハー |
Also Published As
Publication number | Publication date |
---|---|
JP5044195B2 (ja) | 2012-10-10 |
EP1921672B1 (en) | 2010-07-21 |
CN101179054A (zh) | 2008-05-14 |
CN101179054B (zh) | 2012-05-30 |
US20080118757A1 (en) | 2008-05-22 |
US7732867B2 (en) | 2010-06-08 |
DE602007007871D1 (ja) | 2010-09-02 |
EP1921672A3 (en) | 2009-07-22 |
EP1921672A2 (en) | 2008-05-14 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7977209B2 (en) | Method for manufacturing SOI substrate | |
JP5284576B2 (ja) | 半導体基板の製造方法 | |
US7588997B2 (en) | Method of fabricating a thin film | |
US7833878B2 (en) | Method for manufacturing SOI substrate | |
KR101575917B1 (ko) | 실리콘 박막 전사 절연성 웨이퍼의 제조 방법 | |
JP2008153411A (ja) | Soi基板の製造方法 | |
TWI595561B (zh) | Method of manufacturing hybrid substrate and hybrid substrate | |
KR101380514B1 (ko) | 반도체 기판의 제조 방법 | |
JP5220335B2 (ja) | Soi基板の製造方法 | |
JP2008130884A (ja) | Soq基板およびsoq基板の製造方法 | |
JP5044195B2 (ja) | Soq基板の製造方法 | |
JPWO2014017368A1 (ja) | Sos基板の製造方法及びsos基板 | |
JP2009105315A (ja) | 半導体基板の製造方法 | |
JP5064693B2 (ja) | Soi基板の製造方法 | |
JP2008124206A (ja) | 歪シリコン基板の製造方法 | |
JP2008263010A (ja) | Soi基板の製造方法 | |
JP4730645B2 (ja) | Soiウェーハの製造方法 | |
JP5368000B2 (ja) | Soi基板の製造方法 | |
KR100722523B1 (ko) | 웨이퍼 표면 식각 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20081224 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20120627 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120703 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120713 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5044195 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150720 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |