JP2008102128A5 - - Google Patents
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- Publication number
- JP2008102128A5 JP2008102128A5 JP2007235898A JP2007235898A JP2008102128A5 JP 2008102128 A5 JP2008102128 A5 JP 2008102128A5 JP 2007235898 A JP2007235898 A JP 2007235898A JP 2007235898 A JP2007235898 A JP 2007235898A JP 2008102128 A5 JP2008102128 A5 JP 2008102128A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- probe according
- semiconductor probe
- semiconductor
- impurity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 20
- 239000000523 sample Substances 0.000 claims 15
- 239000000758 substrate Substances 0.000 claims 15
- 239000012535 impurity Substances 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 8
- 125000006850 spacer group Chemical group 0.000 claims 8
- 238000005530 etching Methods 0.000 claims 6
- 239000011810 insulating material Substances 0.000 claims 5
- 238000000034 method Methods 0.000 claims 3
- 239000003795 chemical substances by application Substances 0.000 claims 2
- 238000000151 deposition Methods 0.000 claims 2
- 239000007769 metal material Substances 0.000 claims 2
- 238000004151 rapid thermal annealing Methods 0.000 claims 2
- 238000005468 ion implantation Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2006-0102467 | 2006-10-20 | ||
| KR1020060102467A KR100790893B1 (ko) | 2006-10-20 | 2006-10-20 | 볼록한 저항성 팁을 구비한 반도체 탐침 및 그 제조방법 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2008102128A JP2008102128A (ja) | 2008-05-01 |
| JP2008102128A5 true JP2008102128A5 (OSRAM) | 2010-10-21 |
| JP4990728B2 JP4990728B2 (ja) | 2012-08-01 |
Family
ID=39216418
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007235898A Expired - Fee Related JP4990728B2 (ja) | 2006-10-20 | 2007-09-11 | 凸状の抵抗性チップを備えた半導体探針およびその製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US7671616B2 (OSRAM) |
| JP (1) | JP4990728B2 (OSRAM) |
| KR (1) | KR100790893B1 (OSRAM) |
| CN (1) | CN101165816B (OSRAM) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100790895B1 (ko) * | 2006-11-16 | 2008-01-03 | 삼성전자주식회사 | 저항성 팁을 구비한 반도체 탐침 및 그 제조방법 |
| US8715981B2 (en) * | 2009-01-27 | 2014-05-06 | Purdue Research Foundation | Electrochemical biosensor |
| WO2017014307A1 (ja) * | 2015-07-23 | 2017-01-26 | 富士フイルム株式会社 | 積層体 |
| BR112018017173A2 (pt) | 2016-02-23 | 2019-01-02 | Univ Colorado Regents | composições e métodos para a produção e uso de formulações imunogênicas termoestáveis com compatibilidade aumentada de uso como vacinas contra um ou mais patógenos |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0194323B1 (en) * | 1985-03-07 | 1989-08-02 | International Business Machines Corporation | Scanning tunneling microscope |
| JP3198355B2 (ja) * | 1991-05-28 | 2001-08-13 | キヤノン株式会社 | 微小変位素子及びこれを用いた走査型トンネル顕微鏡、情報処理装置 |
| US5475318A (en) * | 1993-10-29 | 1995-12-12 | Robert B. Marcus | Microprobe |
| US5923033A (en) * | 1994-09-14 | 1999-07-13 | Olympus Optical Co., Ltd. | Integrated SPM sensor having a photodetector mounted on a probe on a free end of a supported cantilever |
| US6028436A (en) * | 1997-12-02 | 2000-02-22 | Micron Technology, Inc. | Method for forming coaxial silicon interconnects |
| KR100366701B1 (ko) * | 1999-11-09 | 2003-01-06 | 삼성전자 주식회사 | 전계 효과 트랜지스터 채널 구조가 형성된 스캐닝 프로브마이크로스코프의 탐침 및 그 제작 방법 |
| US6479892B1 (en) * | 2000-10-31 | 2002-11-12 | Motorola, Inc. | Enhanced probe for gathering data from semiconductor devices |
| DE10155930B4 (de) * | 2001-11-14 | 2020-09-24 | Nano Analytik Gmbh | Feldeffekttransistor-Sensor |
| KR100468850B1 (ko) * | 2002-05-08 | 2005-01-29 | 삼성전자주식회사 | 저항성 팁을 구비하는 반도체 탐침 및 그 제조방법 및 이를 구비하는 정보 기록장치, 정보재생장치 및 정보측정장치 |
| KR100624434B1 (ko) * | 2004-09-07 | 2006-09-19 | 삼성전자주식회사 | 저항성 팁을 구비한 반도체 탐침 및 그 제조방법 |
| KR100682916B1 (ko) * | 2005-01-15 | 2007-02-15 | 삼성전자주식회사 | 저항성 팁을 구비한 반도체 탐침 및 그 제조방법 |
| KR100785006B1 (ko) * | 2005-09-03 | 2007-12-12 | 삼성전자주식회사 | 고분해능 저항성 팁을 구비한 반도체 탐침 및 그 제조방법 |
-
2006
- 2006-10-20 KR KR1020060102467A patent/KR100790893B1/ko not_active Expired - Fee Related
-
2007
- 2007-04-19 CN CN2007100966318A patent/CN101165816B/zh not_active Expired - Fee Related
- 2007-07-02 US US11/772,441 patent/US7671616B2/en not_active Expired - Fee Related
- 2007-09-11 JP JP2007235898A patent/JP4990728B2/ja not_active Expired - Fee Related
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