JP2008098651A5 - - Google Patents

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Publication number
JP2008098651A5
JP2008098651A5 JP2007280355A JP2007280355A JP2008098651A5 JP 2008098651 A5 JP2008098651 A5 JP 2008098651A5 JP 2007280355 A JP2007280355 A JP 2007280355A JP 2007280355 A JP2007280355 A JP 2007280355A JP 2008098651 A5 JP2008098651 A5 JP 2008098651A5
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JP
Japan
Prior art keywords
radiation
mirror
space
projection
device manufacturing
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007280355A
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English (en)
Japanese (ja)
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JP2008098651A (ja
JP4743440B2 (ja
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Publication of JP2008098651A publication Critical patent/JP2008098651A/ja
Publication of JP2008098651A5 publication Critical patent/JP2008098651A5/ja
Application granted granted Critical
Publication of JP4743440B2 publication Critical patent/JP4743440B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2007280355A 2000-09-04 2007-10-29 リソグラフィ投影装置及びデバイス製造方法 Expired - Fee Related JP4743440B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP00307608 2000-09-04
EP00307608.0 2000-09-04

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2001262809A Division JP4067078B2 (ja) 2000-09-04 2001-08-31 リソグラフィ投影装置およびデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2008098651A JP2008098651A (ja) 2008-04-24
JP2008098651A5 true JP2008098651A5 (enExample) 2008-10-16
JP4743440B2 JP4743440B2 (ja) 2011-08-10

Family

ID=8173241

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2001262809A Expired - Fee Related JP4067078B2 (ja) 2000-09-04 2001-08-31 リソグラフィ投影装置およびデバイス製造方法
JP2007280355A Expired - Fee Related JP4743440B2 (ja) 2000-09-04 2007-10-29 リソグラフィ投影装置及びデバイス製造方法

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2001262809A Expired - Fee Related JP4067078B2 (ja) 2000-09-04 2001-08-31 リソグラフィ投影装置およびデバイス製造方法

Country Status (6)

Country Link
US (1) US7671965B2 (enExample)
EP (1) EP1186957B1 (enExample)
JP (2) JP4067078B2 (enExample)
KR (1) KR100656582B1 (enExample)
DE (1) DE60127050T2 (enExample)
TW (1) TW548524B (enExample)

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US6664554B2 (en) * 2001-01-03 2003-12-16 Euv Llc Self-cleaning optic for extreme ultraviolet lithography
TW200402606A (en) * 2002-06-11 2004-02-16 Nippon Kogaku Kk Exposure system and exposure method
US7050149B2 (en) 2002-06-11 2006-05-23 Nikon Corporation Exposure apparatus and exposure method
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EP1403715A3 (en) * 2002-09-30 2006-01-18 ASML Netherlands B.V. Lithographic apparatus and device manufacturing method
DE10309084A1 (de) * 2003-03-03 2004-09-16 Carl Zeiss Smt Ag Reflektives optisches Element und EUV-Lithographiegerät
US7217940B2 (en) * 2003-04-08 2007-05-15 Cymer, Inc. Collector for EUV light source
DE10319005A1 (de) 2003-04-25 2004-11-25 Carl Zeiss Smt Ag Reflektives optisches Element, optisches System und EUV-Lithographievorrichtung
DE10321103A1 (de) * 2003-05-09 2004-12-02 Carl Zeiss Smt Ag Verfahren zur Vermeidung von Kontamination und EUV-Lithographievorrichtung
US8945310B2 (en) * 2003-05-22 2015-02-03 Koninklijke Philips Electronics N.V. Method and device for cleaning at least one optical component
DE10342239B4 (de) * 2003-09-11 2018-06-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Verfahren und Vorrichtung zum Erzeugen von Extrem-Ultraviolettstrahlung oder weicher Röntgenstrahlung
EP1522895B1 (en) * 2003-10-06 2006-11-02 ASML Netherlands B.V. Method of and apparatus for supplying a dynamic protective layer to a mirror
US7208746B2 (en) * 2004-07-14 2007-04-24 Asml Netherlands B.V. Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured thereby
US7355672B2 (en) 2004-10-04 2008-04-08 Asml Netherlands B.V. Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
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US7211810B2 (en) * 2004-12-29 2007-05-01 Asml Netherlands B.V. Method for the protection of an optical element, lithographic apparatus, and device manufacturing method
US7701554B2 (en) 2004-12-29 2010-04-20 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method, and optical component
US7868304B2 (en) * 2005-02-07 2011-01-11 Asml Netherlands B.V. Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
US7365349B2 (en) * 2005-06-27 2008-04-29 Cymer, Inc. EUV light source collector lifetime improvements
US7141806B1 (en) * 2005-06-27 2006-11-28 Cymer, Inc. EUV light source collector erosion mitigation
US7561247B2 (en) * 2005-08-22 2009-07-14 Asml Netherlands B.V. Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
JP2007214253A (ja) * 2006-02-08 2007-08-23 Ushio Inc 極端紫外光光源装置および極端紫外光光源装置における集光光学手段の保護方法
JP2007234822A (ja) * 2006-02-28 2007-09-13 Canon Inc 露光装置及びその制御方法並びにデバイス製造方法
GB0605725D0 (en) * 2006-03-23 2006-05-03 Boc Group Plc Spectral filter repair
JP2008263173A (ja) * 2007-03-16 2008-10-30 Canon Inc 露光装置
CN101681114B (zh) 2007-06-12 2013-05-08 皇家飞利浦电子股份有限公司 光学设备和原位处理euv光学部件以增强降低的反射率的方法
JP2009272347A (ja) * 2008-04-30 2009-11-19 Toshiba Corp 光反射型マスク、露光装置、測定方法、及び半導体装置の製造方法
DE102008028868A1 (de) * 2008-06-19 2009-12-24 Carl Zeiss Smt Ag Optische Baugruppe
DE102009043824A1 (de) * 2009-08-21 2011-02-24 Asml Netherlands B.V. Reflektives optisches Element und Verfahren zu dessen Herstellung
CN108107681A (zh) * 2016-11-25 2018-06-01 中国科学院长春光学精密机械与物理研究所 一种光刻投影物镜腔体精密监控装置
DE102021212018B3 (de) 2021-10-25 2022-11-10 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage, Verfahren zum Betreiben der Projektionsbelichtungsanlage

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JPH10221499A (ja) * 1997-02-07 1998-08-21 Hitachi Ltd レーザプラズマｘ線源およびそれを用いた半導体露光装置並びに半導体露光方法
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JP2000091207A (ja) * 1998-09-14 2000-03-31 Nikon Corp 投影露光装置及び投影光学系の洗浄方法
US6198792B1 (en) * 1998-11-06 2001-03-06 Euv Llc Wafer chamber having a gas curtain for extreme-UV lithography
JP2000173893A (ja) * 1998-12-04 2000-06-23 Nikon Corp 投影露光装置及び光学素子の汚染判別方法
US6533952B2 (en) * 1999-06-08 2003-03-18 Euv Llc Mitigation of radiation induced surface contamination
US6304630B1 (en) * 1999-12-24 2001-10-16 U.S. Philips Corporation Method of generating EUV radiation, method of manufacturing a device by means of said radiation, EUV radiation source unit, and lithographic projection apparatus provided with such a radiation source unit
US6421421B1 (en) * 2000-05-22 2002-07-16 Plex, Llc Extreme ultraviolet based on colliding neutral beams

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