JP2008089590A5 - - Google Patents

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Publication number
JP2008089590A5
JP2008089590A5 JP2007245124A JP2007245124A JP2008089590A5 JP 2008089590 A5 JP2008089590 A5 JP 2008089590A5 JP 2007245124 A JP2007245124 A JP 2007245124A JP 2007245124 A JP2007245124 A JP 2007245124A JP 2008089590 A5 JP2008089590 A5 JP 2008089590A5
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JP
Japan
Prior art keywords
probe
impedance
detection system
plasma
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007245124A
Other languages
English (en)
Japanese (ja)
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JP2008089590A (ja
Filing date
Publication date
Priority claimed from US11/540,745 external-priority patent/US7605595B2/en
Application filed filed Critical
Publication of JP2008089590A publication Critical patent/JP2008089590A/ja
Publication of JP2008089590A5 publication Critical patent/JP2008089590A5/ja
Pending legal-status Critical Current

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JP2007245124A 2006-09-29 2007-09-21 間隔測定についてのシステムおよびそのシステムの操作方法 Pending JP2008089590A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/540,745 US7605595B2 (en) 2006-09-29 2006-09-29 System for clearance measurement and method of operating the same

Publications (2)

Publication Number Publication Date
JP2008089590A JP2008089590A (ja) 2008-04-17
JP2008089590A5 true JP2008089590A5 (enExample) 2012-08-30

Family

ID=38752513

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007245124A Pending JP2008089590A (ja) 2006-09-29 2007-09-21 間隔測定についてのシステムおよびそのシステムの操作方法

Country Status (7)

Country Link
US (1) US7605595B2 (enExample)
EP (1) EP1906136B1 (enExample)
JP (1) JP2008089590A (enExample)
CN (1) CN101153791A (enExample)
BR (1) BRPI0704921A (enExample)
CA (1) CA2603372A1 (enExample)
SG (1) SG141380A1 (enExample)

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