JP2008089590A - 間隔測定についてのシステムおよびそのシステムの操作方法 - Google Patents
間隔測定についてのシステムおよびそのシステムの操作方法 Download PDFInfo
- Publication number
- JP2008089590A JP2008089590A JP2007245124A JP2007245124A JP2008089590A JP 2008089590 A JP2008089590 A JP 2008089590A JP 2007245124 A JP2007245124 A JP 2007245124A JP 2007245124 A JP2007245124 A JP 2007245124A JP 2008089590 A JP2008089590 A JP 2008089590A
- Authority
- JP
- Japan
- Prior art keywords
- probe
- plasma
- current
- detection system
- impedance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 title claims description 15
- 238000005259 measurement Methods 0.000 title 1
- 239000000523 sample Substances 0.000 claims abstract description 83
- 238000001514 detection method Methods 0.000 claims description 14
- 238000007689 inspection Methods 0.000 claims description 11
- 230000000087 stabilizing effect Effects 0.000 claims description 8
- 230000000977 initiatory effect Effects 0.000 claims description 7
- 239000004020 conductor Substances 0.000 description 42
- 230000005540 biological transmission Effects 0.000 description 12
- 238000010586 diagram Methods 0.000 description 10
- 239000003990 capacitor Substances 0.000 description 8
- 238000004804 winding Methods 0.000 description 8
- 230000003071 parasitic effect Effects 0.000 description 5
- 230000002238 attenuated effect Effects 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 150000004965 peroxy acids Chemical class 0.000 description 1
- 230000009897 systematic effect Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2270/00—Control
- F05D2270/01—Purpose of the control system
- F05D2270/17—Purpose of the control system to control boundary layer
- F05D2270/172—Purpose of the control system to control boundary layer by a plasma generator, e.g. control of ignition
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Plasma Technology (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/540,745 US7605595B2 (en) | 2006-09-29 | 2006-09-29 | System for clearance measurement and method of operating the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2008089590A true JP2008089590A (ja) | 2008-04-17 |
| JP2008089590A5 JP2008089590A5 (enExample) | 2012-08-30 |
Family
ID=38752513
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007245124A Pending JP2008089590A (ja) | 2006-09-29 | 2007-09-21 | 間隔測定についてのシステムおよびそのシステムの操作方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US7605595B2 (enExample) |
| EP (1) | EP1906136B1 (enExample) |
| JP (1) | JP2008089590A (enExample) |
| CN (1) | CN101153791A (enExample) |
| BR (1) | BRPI0704921A (enExample) |
| CA (1) | CA2603372A1 (enExample) |
| SG (1) | SG141380A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009140722A (ja) * | 2007-12-06 | 2009-06-25 | General Electric Co <Ge> | プローブ・システム、超音波システム及び超音波発生方法 |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7454974B2 (en) * | 2006-09-29 | 2008-11-25 | General Electric Company | Probe system, ultrasound system and method of generating ultrasound |
| US7870719B2 (en) | 2006-10-13 | 2011-01-18 | General Electric Company | Plasma enhanced rapidly expanded gas turbine engine transition duct |
| US7819626B2 (en) | 2006-10-13 | 2010-10-26 | General Electric Company | Plasma blade tip clearance control |
| US7766599B2 (en) | 2006-10-31 | 2010-08-03 | General Electric Company | Plasma lifted boundary layer gas turbine engine vane |
| US7588413B2 (en) | 2006-11-30 | 2009-09-15 | General Electric Company | Upstream plasma shielded film cooling |
| US7695241B2 (en) | 2006-11-30 | 2010-04-13 | General Electric Company | Downstream plasma shielded film cooling |
| US7628585B2 (en) | 2006-12-15 | 2009-12-08 | General Electric Company | Airfoil leading edge end wall vortex reducing plasma |
| US7736123B2 (en) | 2006-12-15 | 2010-06-15 | General Electric Company | Plasma induced virtual turbine airfoil trailing edge extension |
| US8373425B2 (en) * | 2007-04-06 | 2013-02-12 | Hypertherm, Inc. | Plasma insensitive height sensing |
| US7908115B2 (en) * | 2007-10-09 | 2011-03-15 | University Of Notre Dame Du Lac | Plasma sensors and related methods |
| US20100284795A1 (en) * | 2007-12-28 | 2010-11-11 | General Electric Company | Plasma Clearance Controlled Compressor |
| US8282336B2 (en) | 2007-12-28 | 2012-10-09 | General Electric Company | Instability mitigation system |
| US8282337B2 (en) | 2007-12-28 | 2012-10-09 | General Electric Company | Instability mitigation system using stator plasma actuators |
| US8317457B2 (en) | 2007-12-28 | 2012-11-27 | General Electric Company | Method of operating a compressor |
| US20100047055A1 (en) * | 2007-12-28 | 2010-02-25 | Aspi Rustom Wadia | Plasma Enhanced Rotor |
| US8348592B2 (en) | 2007-12-28 | 2013-01-08 | General Electric Company | Instability mitigation system using rotor plasma actuators |
| US7948229B2 (en) * | 2008-08-29 | 2011-05-24 | General Electric Company | High temperature electronics for passive eddy current sensors |
| CN103884467B (zh) * | 2014-04-14 | 2016-05-11 | 中国科学院工程热物理研究所 | 等离子体压力探针及利用其测量压力的系统 |
| US9709376B2 (en) * | 2014-05-12 | 2017-07-18 | The University Of Akron | High sensitivity inductive sensor for measuring blade tip clearance |
| CN104075888B (zh) * | 2014-06-27 | 2016-05-04 | 北京控制工程研究所 | 一种利用电噪声测量齿轮啮合侧隙的装置及方法 |
| CN112129213B (zh) * | 2020-10-26 | 2021-07-27 | 南京航空航天大学 | 基于脉冲介质阻挡放电的叶尖间隙测量系统及测量方法 |
| CN114234771B (zh) * | 2021-11-10 | 2023-09-19 | 华能铜川照金煤电有限公司 | 一种发动机气隙测量装置及测量方法 |
Citations (9)
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| JPH04231802A (ja) * | 1990-05-29 | 1992-08-20 | General Electric Co <Ge> | 電気キャパシタンス間隙計 |
| JPH07195188A (ja) * | 1993-11-26 | 1995-08-01 | Precitec Gmbh | レーザビームによる工作物加工方法 |
| JPH0847778A (ja) * | 1995-07-31 | 1996-02-20 | Komatsu Ltd | プラズマトーチのスタンドオフ制御方法及びその装置 |
| JPH1064696A (ja) * | 1996-08-23 | 1998-03-06 | Tokyo Electron Ltd | プラズマ処理装置 |
| DE19847365A1 (de) * | 1998-10-14 | 2000-05-04 | Precitec Gmbh | Verfahren zur Überwachung der Bearbeitung eines Werkstücks mittels eines aus einem Bearbeitungskopf austretenden Bearbeitungsstrahls |
| JP2000234903A (ja) * | 1999-02-16 | 2000-08-29 | Precitec Gmbh | センサ電極とワークピースの間隔を測定する方法 |
| JP2001105148A (ja) * | 1999-10-05 | 2001-04-17 | Komatsu Ltd | プラズマアークスポット溶接装置及び方法 |
| JP2004219148A (ja) * | 2003-01-10 | 2004-08-05 | Univ Saitama | 顕微鏡、顕微鏡用マイクロプラズマアレイ、表面観察方法、及び表面改質方法 |
| US20060125492A1 (en) * | 2004-12-14 | 2006-06-15 | Andarawis Emad A | Sensor systems and methods of operation |
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| US3480963A (en) * | 1965-07-27 | 1969-11-25 | Burroughs Corp | Command responsive multi-channel electrostatic recorder |
| US3711767A (en) * | 1970-10-30 | 1973-01-16 | Wilcom Prod Inc | Method and apparatus for evaluating the integrity of the shield connection in a splicing section joining the ends of adjacent insulated and shielded communication cables |
| US4058765A (en) * | 1976-06-07 | 1977-11-15 | David Richardson | General displacement sensor |
| JPS59166801A (ja) * | 1983-03-09 | 1984-09-20 | Nippon Kokan Kk <Nkk> | 渦電流を利用した差動帰還型距離測定装置 |
| US4845991A (en) * | 1986-12-22 | 1989-07-11 | Combustion Engineering, Inc. | Hydraulic clearance measurement system |
| CA1268851A (en) * | 1987-02-20 | 1990-05-08 | Reginald Montgomery Clements | Method and apparatus for generating underwater acoustics |
| US4806848A (en) * | 1987-03-11 | 1989-02-21 | The United States Of America As Represented By The Secretary Of The Air Force | Compressor blade clearance measurement system |
| US5085499A (en) * | 1988-09-02 | 1992-02-04 | Battelle Memorial Institute | Fiber optics spectrochemical emission sensors |
| US5365147A (en) * | 1990-11-28 | 1994-11-15 | Nichimen Kabushiki Kaisha | Plasma stabilizing apparatus employing feedback controls |
| US5414345A (en) * | 1991-04-29 | 1995-05-09 | Electronic Development, Inc. | Apparatus and method for low cost electromagnetic field susceptibility testing |
| US6146135A (en) * | 1991-08-19 | 2000-11-14 | Tadahiro Ohmi | Oxide film forming method |
| JPH0719670B2 (ja) * | 1991-10-31 | 1995-03-06 | 日本高周波株式会社 | 空間電位誤差を補正するトリプルプローブ・プラズマ測定装置 |
| US5800618A (en) * | 1992-11-12 | 1998-09-01 | Ngk Insulators, Ltd. | Plasma-generating electrode device, an electrode-embedded article, and a method of manufacturing thereof |
| US5382911A (en) * | 1993-03-29 | 1995-01-17 | International Business Machines Corporation | Reaction chamber interelectrode gap monitoring by capacitance measurement |
| US5723980A (en) * | 1995-06-07 | 1998-03-03 | Aerogage Corporation | Clearance measurement system |
| US5734268A (en) * | 1996-04-08 | 1998-03-31 | Motorola, Inc. | Calibration and measurment technique and apparatus for same |
| US5770922A (en) * | 1996-07-22 | 1998-06-23 | Eni Technologies, Inc. | Baseband V-I probe |
| GB2317265A (en) | 1996-09-13 | 1998-03-18 | Aea Technology Plc | Radio frequency plasma generator |
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| JP4710216B2 (ja) * | 2002-06-11 | 2011-06-29 | コニカミノルタホールディングス株式会社 | 薄膜形成方法 |
| TWI391035B (zh) * | 2002-12-16 | 2013-03-21 | Japan Science & Tech Agency | Plasma generation device, plasma control method and substrate manufacturing method (1) |
| KR100393522B1 (en) * | 2003-01-11 | 2003-08-02 | Ellipso Technology Co Ltd | Device and method for measuring film thickness, making use of improved fast fourier transformation |
| US7015703B2 (en) * | 2003-08-12 | 2006-03-21 | Scientific Systems Research Limited | Radio frequency Langmuir probe |
| US7015414B2 (en) * | 2003-09-30 | 2006-03-21 | Tokyo Electron Limited | Method and apparatus for determining plasma impedance |
| JP2005117151A (ja) * | 2003-10-03 | 2005-04-28 | Murata Mfg Co Ltd | 弾性表面波装置の製造方法及び弾性表面波装置 |
| US7251195B1 (en) * | 2003-10-23 | 2007-07-31 | United States Of America As Represented By The Secretary Of The Army | Apparatus for generating an acoustic signal |
| JP3768999B2 (ja) * | 2003-10-29 | 2006-04-19 | 澄英 池之内 | プラズマ処理装置とその制御方法 |
| US6998832B1 (en) * | 2004-02-26 | 2006-02-14 | Hd Electric Company | High-voltage indicating apparatus and method |
| US7275013B1 (en) * | 2004-09-20 | 2007-09-25 | University Of Notre Dame Duloc | Plasma anemometer and method for using same |
| US7332915B2 (en) * | 2004-09-28 | 2008-02-19 | General Electric Company | Sensor system and method of operating the same |
| US7722310B2 (en) * | 2004-12-17 | 2010-05-25 | General Electric Company | System and method for measuring clearance between two objects |
| US20060139039A1 (en) * | 2004-12-23 | 2006-06-29 | Dutton David T | Systems and methods for a contactless electrical probe |
| US8591188B2 (en) * | 2005-04-26 | 2013-11-26 | General Electric Company | Displacement sensor system and method of operation |
| US7333913B2 (en) * | 2005-06-27 | 2008-02-19 | General Electric Company | Clearance measurement system and method of operation |
-
2006
- 2006-09-29 US US11/540,745 patent/US7605595B2/en not_active Expired - Fee Related
-
2007
- 2007-09-14 SG SG200708565-7A patent/SG141380A1/en unknown
- 2007-09-20 CA CA002603372A patent/CA2603372A1/en not_active Abandoned
- 2007-09-21 JP JP2007245124A patent/JP2008089590A/ja active Pending
- 2007-09-21 BR BRPI0704921-8A patent/BRPI0704921A/pt not_active IP Right Cessation
- 2007-09-25 EP EP07117162A patent/EP1906136B1/en not_active Not-in-force
- 2007-09-29 CN CNA2007101532424A patent/CN101153791A/zh active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04231802A (ja) * | 1990-05-29 | 1992-08-20 | General Electric Co <Ge> | 電気キャパシタンス間隙計 |
| JPH07195188A (ja) * | 1993-11-26 | 1995-08-01 | Precitec Gmbh | レーザビームによる工作物加工方法 |
| JPH0847778A (ja) * | 1995-07-31 | 1996-02-20 | Komatsu Ltd | プラズマトーチのスタンドオフ制御方法及びその装置 |
| JPH1064696A (ja) * | 1996-08-23 | 1998-03-06 | Tokyo Electron Ltd | プラズマ処理装置 |
| DE19847365A1 (de) * | 1998-10-14 | 2000-05-04 | Precitec Gmbh | Verfahren zur Überwachung der Bearbeitung eines Werkstücks mittels eines aus einem Bearbeitungskopf austretenden Bearbeitungsstrahls |
| JP2000234903A (ja) * | 1999-02-16 | 2000-08-29 | Precitec Gmbh | センサ電極とワークピースの間隔を測定する方法 |
| JP2001105148A (ja) * | 1999-10-05 | 2001-04-17 | Komatsu Ltd | プラズマアークスポット溶接装置及び方法 |
| JP2004219148A (ja) * | 2003-01-10 | 2004-08-05 | Univ Saitama | 顕微鏡、顕微鏡用マイクロプラズマアレイ、表面観察方法、及び表面改質方法 |
| US20060125492A1 (en) * | 2004-12-14 | 2006-06-15 | Andarawis Emad A | Sensor systems and methods of operation |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009140722A (ja) * | 2007-12-06 | 2009-06-25 | General Electric Co <Ge> | プローブ・システム、超音波システム及び超音波発生方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| CA2603372A1 (en) | 2008-03-29 |
| US20080079445A1 (en) | 2008-04-03 |
| EP1906136B1 (en) | 2012-02-08 |
| EP1906136A1 (en) | 2008-04-02 |
| CN101153791A (zh) | 2008-04-02 |
| BRPI0704921A (pt) | 2008-05-27 |
| US7605595B2 (en) | 2009-10-20 |
| SG141380A1 (en) | 2008-04-28 |
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