JP2008047540A - 有機電界発光表示装置 - Google Patents
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- 239000010408 film Substances 0.000 claims abstract description 146
- 239000010409 thin film Substances 0.000 claims abstract description 39
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- 238000002955 isolation Methods 0.000 claims description 20
- 238000002347 injection Methods 0.000 claims description 14
- 239000007924 injection Substances 0.000 claims description 14
- 238000002161 passivation Methods 0.000 claims description 13
- 239000004065 semiconductor Substances 0.000 claims description 10
- 230000005525 hole transport Effects 0.000 claims description 8
- 230000001629 suppression Effects 0.000 claims description 8
- 238000000926 separation method Methods 0.000 abstract description 41
- 230000007547 defect Effects 0.000 abstract description 34
- 238000009413 insulation Methods 0.000 abstract 9
- 239000012528 membrane Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 143
- 239000011229 interlayer Substances 0.000 description 7
- 230000006866 deterioration Effects 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002040 relaxant effect Effects 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 1
- 235000010599 Verbascum thapsus Nutrition 0.000 description 1
- 244000178289 Verbascum thapsus Species 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
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- H05B33/00—Electroluminescent light sources
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- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
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- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/82—Cathodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
- H10K2102/3023—Direction of light emission
- H10K2102/3026—Top emission
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/302—Details of OLEDs of OLED structures
- H10K2102/3023—Direction of light emission
- H10K2102/3031—Two-side emission, e.g. transparent OLEDs [TOLED]
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/123—Connection of the pixel electrodes to the thin film transistors [TFT]
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8051—Anodes
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/80—Constructional details
- H10K59/805—Electrodes
- H10K59/8052—Cathodes
- H10K59/80521—Cathodes characterised by their shape
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/18—Deposition of organic active material using non-liquid printing techniques, e.g. thermal transfer printing from a donor sheet
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- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Optics & Photonics (AREA)
- Electroluminescent Light Sources (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
【解決手段】本発明は、ソース/ドレイン領域の一部を露出させるコンタクトホールを備えた第1絶縁膜、薄膜トランジスタを含む絶縁基板と、第1絶縁膜上に形成された下部電極と、下部電極の一部を露出させる第1開口部を備える第2絶縁膜と、下部電極の一部を露出させる第2開口部を備える第3絶縁膜と、第3絶縁膜と第2開口部の下部電極上に形成された有機薄膜層と、有機薄膜層上に形成された上部電極とを含み、開口部のエッジで第3絶縁膜は40°以下のテーパ角を有し、下部電極と有機薄膜層との間の段差が3000Å以下の段差を有し、第3絶縁膜の第2開口部により露出される下部電極の部分が第2絶縁膜の第1開口部によって露出される部分よりも小さい。
【選択図】図10
Description
図7は、本発明の第1実施形態に係る全面発光型の有機電界発光表示装置を示す断面図である。図7を参照すると、絶縁基板300上にバッファ層305が形成され、バッファ層305上にソース/ドレイン領域311、315を備える半導体層310が形成される。ゲート絶縁膜320上にゲート電極325が形成され、層間絶縁膜330上にコンタクトホール331、335を介して該ソース/ドレイン領域311、315に接続されるソース/ドレイン電極341、345が形成される。
る赤色発光素子を製造して素子の特性を測定したものであり、各々10000Å、5000Åおよび3000Åの段差と40°および20°のテーパ角を有する場合の素子の特性を測定したものである。前記各赤色発光素子は、アノード電極上に40°および20°のテーパ角と10000Å、5000Åおよび3000Åの段差を有するように画素分離膜が形成される。画素分離膜を形成した後、スピンコーティング法により高分子電荷輸送層であるPEDOTを500Åの厚さで蒸着し、200°で5分間、ホットプレートを用いてアニリング工程を実施する。
305、405、505、605 バッファ層
310、410、510、610 半導体層
320、420、520、620 ゲート絶縁膜
325、425、525、625 ゲート電極
331、335、431、435、531、535、631、635 ソース/ドレイン電極
341、345、441、445、541、545、641、645 ソース/ドレイン電極
350、450、550、650 パッシベイション膜
355、455、555 ビアホール
360、460 平坦化膜
365、565、665 画素分離膜
370、470、570、670 アノード電極
385、485、585、685 有機薄膜層
390、490、590、690 カソード電極
Claims (5)
- ソース/ドレイン領域を備えた半導体層、前記ソース/ドレイン領域の一部を露出させるコンタクトホールを備えた第1絶縁膜、前記コンタクトホールを介して前記ソース/ドレイン領域に接続されるソース/ドレイン電極を備える薄膜トランジスタを含む絶縁基板と、
前記第1絶縁膜上に形成され、前記ソース/ドレイン電極の中の一つに接続される下部電極と、
前記下部電極の一部を露出させる第1開口部を備える第2絶縁膜と、
前記下部電極の一部を露出させる第2開口部を備える第3絶縁膜と、
前記第3絶縁膜と第2開口部の下部電極上に形成された有機薄膜層と、
前記有機薄膜層上に形成された上部電極とを含み、
前記開口部のエッジで第3絶縁膜は40°以下のテーパ角を有し、
前記下部電極と前記有機薄膜層との間の段差が3000Å以下の段差を有し、
前記第3絶縁膜の第2開口部により露出される下部電極の部分が前記第2絶縁膜の第1開口部によって露出される部分よりも小さいことを特徴とする有機電界発光表示装置。 - 前記第2絶縁膜はパッシベイション膜を含み、第3絶縁膜は画素分離膜を含むことを特徴とする請求項1に記載の有機電界発光表示装置。
- 前記下部電極は、アノード電極とカソード電極の中の一つであり、前記上部電極は他の一つの電極であることを特徴とする請求項1に記載の有機電界発光表示装置。
- 前記下部電極は透過電極であり、前記上部電極は反射電極、または透過電極として作用し、前記有機薄膜層から発光される光が基板方向に放出されるか、または基板方向と基板反対方向に放出されることを特徴とする請求項1に記載の有機電界発光表示装置。
- 前記有機薄膜層は正孔注入層、正孔輸送層、発光層、正孔抑制層、電子輸送層および電子注入層から選択される少なくとも一つの有機膜を含み、前記発光層はレーザ熱転写法によって形成された有機膜を含むことを特徴とする請求項1に記載の有機電界発光表示装置。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030087789A KR100611159B1 (ko) | 2003-11-29 | 2003-11-29 | 유기전계 발광표시장치 |
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JP2004344945A Division JP2005165324A (ja) | 2003-11-29 | 2004-11-29 | 有機電界発光表示装置 |
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JP2008047540A true JP2008047540A (ja) | 2008-02-28 |
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JP2004344945A Pending JP2005165324A (ja) | 2003-11-29 | 2004-11-29 | 有機電界発光表示装置 |
JP2007242936A Pending JP2008047540A (ja) | 2003-11-29 | 2007-09-19 | 有機電界発光表示装置 |
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JP2004344945A Pending JP2005165324A (ja) | 2003-11-29 | 2004-11-29 | 有機電界発光表示装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7501756B2 (ja) |
EP (2) | EP1536494B1 (ja) |
JP (2) | JP2005165324A (ja) |
KR (1) | KR100611159B1 (ja) |
CN (2) | CN101221977B (ja) |
DE (1) | DE602004025078D1 (ja) |
Cited By (1)
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---|---|---|---|---|
JP2013211169A (ja) * | 2012-03-30 | 2013-10-10 | Toppan Printing Co Ltd | 有機エレクトロルミネセンスディスプレイパネル |
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CN100448055C (zh) | 2008-12-31 |
CN1622708A (zh) | 2005-06-01 |
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US7501756B2 (en) | 2009-03-10 |
KR100611159B1 (ko) | 2006-08-09 |
DE602004025078D1 (de) | 2010-03-04 |
US20050116631A1 (en) | 2005-06-02 |
CN101221977B (zh) | 2010-06-02 |
EP1536494A2 (en) | 2005-06-01 |
EP1536494B1 (en) | 2010-01-13 |
EP1919007A3 (en) | 2008-06-25 |
EP1919007B1 (en) | 2012-06-20 |
EP1536494A3 (en) | 2005-10-12 |
CN101221977A (zh) | 2008-07-16 |
KR20050052301A (ko) | 2005-06-02 |
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