JP2007505997A5 - - Google Patents

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Publication number
JP2007505997A5
JP2007505997A5 JP2006527084A JP2006527084A JP2007505997A5 JP 2007505997 A5 JP2007505997 A5 JP 2007505997A5 JP 2006527084 A JP2006527084 A JP 2006527084A JP 2006527084 A JP2006527084 A JP 2006527084A JP 2007505997 A5 JP2007505997 A5 JP 2007505997A5
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JP
Japan
Prior art keywords
cathode
magnetron
cathode plate
arc
magnetic field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006527084A
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English (en)
Japanese (ja)
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JP2007505997A (ja
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Publication date
Priority claimed from US10/667,279 external-priority patent/US6929727B2/en
Application filed filed Critical
Publication of JP2007505997A publication Critical patent/JP2007505997A/ja
Publication of JP2007505997A5 publication Critical patent/JP2007505997A5/ja
Pending legal-status Critical Current

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JP2006527084A 2003-09-18 2004-09-17 長方形フィルター真空プラズマ源及び真空プラズマ流の制御方法 Pending JP2007505997A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/667,279 US6929727B2 (en) 1999-04-12 2003-09-18 Rectangular cathodic arc source and method of steering an arc spot
PCT/US2004/030603 WO2005040451A1 (en) 2003-09-18 2004-09-17 Rectangular filtered vapor plasma source and method of controlling vapor plasma flow

Publications (2)

Publication Number Publication Date
JP2007505997A JP2007505997A (ja) 2007-03-15
JP2007505997A5 true JP2007505997A5 (enExample) 2007-09-20

Family

ID=34520454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006527084A Pending JP2007505997A (ja) 2003-09-18 2004-09-17 長方形フィルター真空プラズマ源及び真空プラズマ流の制御方法

Country Status (5)

Country Link
US (3) US6929727B2 (enExample)
JP (1) JP2007505997A (enExample)
DE (1) DE112004001728T5 (enExample)
GB (1) GB2419897B (enExample)
WO (1) WO2005040451A1 (enExample)

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