JP2007243049A5 - - Google Patents
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- Publication number
- JP2007243049A5 JP2007243049A5 JP2006066300A JP2006066300A JP2007243049A5 JP 2007243049 A5 JP2007243049 A5 JP 2007243049A5 JP 2006066300 A JP2006066300 A JP 2006066300A JP 2006066300 A JP2006066300 A JP 2006066300A JP 2007243049 A5 JP2007243049 A5 JP 2007243049A5
- Authority
- JP
- Japan
- Prior art keywords
- insulating film
- manufacturing
- semiconductor device
- film
- gate electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 9
- 239000004065 semiconductor Substances 0.000 claims 9
- 229910004129 HfSiO Inorganic materials 0.000 claims 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000007704 transition Effects 0.000 claims 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 150000002831 nitrogen free-radicals Chemical class 0.000 claims 1
- 239000002994 raw material Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006066300A JP2007243049A (ja) | 2006-03-10 | 2006-03-10 | 半導体装置 |
| PCT/JP2007/052930 WO2007105413A1 (ja) | 2006-03-10 | 2007-02-19 | 半導体装置 |
| TW096108314A TW200742078A (en) | 2006-03-10 | 2007-03-09 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006066300A JP2007243049A (ja) | 2006-03-10 | 2006-03-10 | 半導体装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007243049A JP2007243049A (ja) | 2007-09-20 |
| JP2007243049A5 true JP2007243049A5 (enrdf_load_stackoverflow) | 2009-03-12 |
Family
ID=38509251
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006066300A Pending JP2007243049A (ja) | 2006-03-10 | 2006-03-10 | 半導体装置 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2007243049A (enrdf_load_stackoverflow) |
| TW (1) | TW200742078A (enrdf_load_stackoverflow) |
| WO (1) | WO2007105413A1 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007027765A1 (de) | 2007-06-16 | 2008-12-18 | Tuchenhagen Gmbh | Doppelsitzventil |
| EP2809974B1 (de) | 2012-02-03 | 2015-12-30 | GEA Tuchenhagen GmbH | Verfahren zur sitzreinigung eines doppelsitzventils und doppelsitzventil zur durchführung des verfahrens |
| DE102012003892A1 (de) | 2012-02-28 | 2013-08-29 | Gea Tuchenhagen Gmbh | Verfahren zur Reinigung eines Ventils |
| PL2861898T3 (pl) | 2012-06-16 | 2017-08-31 | Gea Tuchenhagen Gmbh | Zawór dwugniazdowy z funkcją czyszczenia gniazd |
| WO2018012598A1 (ja) * | 2016-07-15 | 2018-01-18 | ローム株式会社 | 半導体装置 |
| CN114373802A (zh) * | 2021-12-09 | 2022-04-19 | 广州华星光电半导体显示技术有限公司 | Tft基板、液晶显示面板及显示装置 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3688631B2 (ja) * | 2001-11-22 | 2005-08-31 | 株式会社東芝 | 半導体装置の製造方法 |
| JP3776889B2 (ja) * | 2003-02-07 | 2006-05-17 | 株式会社東芝 | 半導体装置およびその製造方法 |
| WO2005038929A1 (ja) * | 2003-10-15 | 2005-04-28 | Nec Corporation | 半導体装置の製造方法 |
| JP4526995B2 (ja) * | 2004-04-09 | 2010-08-18 | 東京エレクトロン株式会社 | ゲート絶縁膜の形成方法ならびにコンピュータ読取可能な記憶媒体およびコンピュータプログラム |
| JP2005317583A (ja) * | 2004-04-27 | 2005-11-10 | Renesas Technology Corp | 半導体装置およびその製造方法 |
-
2006
- 2006-03-10 JP JP2006066300A patent/JP2007243049A/ja active Pending
-
2007
- 2007-02-19 WO PCT/JP2007/052930 patent/WO2007105413A1/ja active Search and Examination
- 2007-03-09 TW TW096108314A patent/TW200742078A/zh unknown
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