JP2007240572A - 液晶表示装置の製造方法 - Google Patents
液晶表示装置の製造方法 Download PDFInfo
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- JP2007240572A JP2007240572A JP2006058940A JP2006058940A JP2007240572A JP 2007240572 A JP2007240572 A JP 2007240572A JP 2006058940 A JP2006058940 A JP 2006058940A JP 2006058940 A JP2006058940 A JP 2006058940A JP 2007240572 A JP2007240572 A JP 2007240572A
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- 239000004973 liquid crystal related substance Substances 0.000 title claims description 62
- 238000004519 manufacturing process Methods 0.000 title claims description 20
- 238000005530 etching Methods 0.000 claims abstract description 222
- 239000011521 glass Substances 0.000 claims abstract description 73
- 239000000758 substrate Substances 0.000 claims abstract description 69
- 239000000243 solution Substances 0.000 claims description 78
- 239000003566 sealing material Substances 0.000 claims description 43
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims description 42
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000001514 detection method Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 4
- 239000007864 aqueous solution Substances 0.000 claims description 3
- 238000007654 immersion Methods 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 2
- 238000012423 maintenance Methods 0.000 claims 2
- 239000007788 liquid Substances 0.000 abstract description 5
- 238000002474 experimental method Methods 0.000 description 13
- 238000005070 sampling Methods 0.000 description 13
- 239000000498 cooling water Substances 0.000 description 6
- 238000002347 injection Methods 0.000 description 5
- 239000007924 injection Substances 0.000 description 5
- 238000011084 recovery Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C27/00—Joining pieces of glass to pieces of other inorganic material; Joining glass to glass other than by fusing
- C03C27/06—Joining glass to glass by processes other than fusing
- C03C27/10—Joining glass to glass by processes other than fusing with the aid of adhesive specially adapted for that purpose
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133351—Manufacturing of individual cells out of a plurality of cells, e.g. by dicing
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133302—Rigid substrates, e.g. inorganic substrates
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Ceramic Engineering (AREA)
- Mathematical Physics (AREA)
- Liquid Crystal (AREA)
- Surface Treatment Of Glass (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
【解決手段】 エッチング速度がエッチング槽12内のエッチング液13の温度及び濃度に応じて一意的に決定されることに着目し、エッチング槽12内のエッチング液13の温度及び濃度を一定に維持して、互いに貼り合わされた2枚のガラス基板1、2のエッチング厚さをエッチング時間で管理すると、パラメータはエッチング時間のみであり、互いに貼り合わされた2枚のガラス基板の厚さを薄くするためのエッチングの終了時点を決定するためのパラメータ数を少なくすることができる。
【選択図】 図4
Description
κ=1/ρ=D/(RS)……(1)
3 単素子シール材
4 液晶
5 液晶注入口
6 封止材
7 外周シール材
8 空気逃げ口
9 封止材
10 液晶表示装置形成用構成体
11 エッチング装置
12 エッチング槽
13 エッチング液
14 ヒータ
15 温度センサ
16 冷却水配管
19 冷却水ポンプ
20 導電率計
21 サンプリング配管
22 サンプリングポンプ
23 エッチング液回収配管
24 補給タンク
25 フッ酸
26 補給ポンプ
27 補給配管
28 制御部
Claims (9)
- 2枚のガラス基板の外周部を外周シール材で封止する封止工程と、
上記封止された2枚のガラス基板をエッチング槽内のエッチング液中に浸漬する浸漬工程と、
前記エッチング槽内のエッチング液の温度及び濃度を一定に維持して、前記2枚のガラス基板の所望のエッチング厚さに対応する時間、前記2枚のガラス基板をエッチングして、前記2枚のガラス基板の厚さを薄くするエッチング工程と、
を含むことを特徴とする液晶表示装置の製造方法。 - 前記エッチング工程における前記エッチング槽内のエッチング液の温度の一定の維持は、
前記エッチング槽内のエッチング液の温度を温度検出手段で検出する温度検出工程と、
この温度検出結果に基づいて加熱手段による加熱あるいは冷却手段による冷却により行う温度調整工程と、
を含むことを特徴とする請求項1に記載の液晶表示装置の製造方法。 - 前記エッチング液はフッ酸系水溶液であり、前記エッチング槽内のエッチング液の濃度の一定の維持は、前記エッチング槽内のエッチング液中のフッ酸の濃度を濃度検出手段で検出する濃度検出工程と、
この濃度検出結果に基づいて前記エッチング槽内にフッ酸を補給することにより行う濃度調整工程と、
を含むことを特徴とする請求項1に記載の液晶表示装置の製造方法。 - 前記エッチング工程は、前記エッチング槽を揺動する揺動工程を含むことを特徴とする請求項1に記載の液晶表示装置の製造方法。
- 前記エッチング工程は、前記エッチング槽内のエッチング液を超音波振動させながら行う超音波振動工程を含むことを特徴とする請求項1に記載の液晶表示装置の製造方法。
- 前記封止工程は、前記2枚のガラス基板を前記外周シール材を介して一部開口を設けた状態で互いに貼り合わせる貼り合わせ工程と、
前記開口を封止材で封止する工程と、
を含むことを特徴とする請求項1に記載の液晶表示装置の製造方法。 - 前記2枚のガラス基板の間に介在された前記封止材を、前記2枚のガラス基板の外周部における少なくとも前記封止材が設けられた辺を切断することによって除去する封止材除去工程と、
その後、前記封止材が取り除かれた2枚のガラス基板を切断することによって個片化する個片化工程と、
をさらに含むことを特徴とする請求項6に記載の液晶表示装置の製造方法。 - 前記2枚のガラス基板は、完成された液晶表示装置を複数個形成することが可能な面積を有し、その間に介在された複数の単素子シール材及び前記外周シール材を介して互いに貼り合わされて、液晶表示装置形成用構成体を形成していることを特徴とする請求項1に記載の液晶表示装置の製造方法。
- 前記液晶表示装置形成用構成体を複数枚同時にエッチングするバッチ処理工程を含むことを特徴とする請求項8に記載の液晶表示装置の製造方法。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006058940A JP4738212B2 (ja) | 2006-03-06 | 2006-03-06 | 液晶表示装置の製造方法 |
TW095132718A TWI360681B (en) | 2006-03-06 | 2006-09-05 | Manufacturing method of liquid crystal display dev |
US11/527,205 US20070205179A1 (en) | 2006-03-06 | 2006-09-26 | Manufacturing method of liquid crystal display device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006058940A JP4738212B2 (ja) | 2006-03-06 | 2006-03-06 | 液晶表示装置の製造方法 |
Related Child Applications (1)
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---|---|---|---|
JP2010064712A Division JP2010191446A (ja) | 2010-03-19 | 2010-03-19 | 液晶表示装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2007240572A true JP2007240572A (ja) | 2007-09-20 |
JP4738212B2 JP4738212B2 (ja) | 2011-08-03 |
Family
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Family Applications (1)
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JP2006058940A Active JP4738212B2 (ja) | 2006-03-06 | 2006-03-06 | 液晶表示装置の製造方法 |
Country Status (3)
Country | Link |
---|---|
US (1) | US20070205179A1 (ja) |
JP (1) | JP4738212B2 (ja) |
TW (1) | TWI360681B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009204643A (ja) * | 2008-02-26 | 2009-09-10 | Epson Imaging Devices Corp | 電気光学装置及びその製造方法 |
CN110231725A (zh) * | 2019-05-20 | 2019-09-13 | 深圳市华星光电半导体显示技术有限公司 | 一种微影玻璃薄化的方法及其控制系统 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JP4197018B2 (ja) * | 2006-07-31 | 2008-12-17 | カシオ計算機株式会社 | 液晶表示装置の製造方法 |
CN102653451A (zh) * | 2011-03-01 | 2012-09-05 | 三福化工股份有限公司 | 玻璃基板连续结晶式化学蚀刻方法与设备 |
CN103293742A (zh) * | 2013-05-22 | 2013-09-11 | 京东方科技集团股份有限公司 | 一种显示面板的切割方法及显示装置 |
CN104678897B (zh) * | 2015-01-27 | 2017-10-27 | 合肥京东方光电科技有限公司 | 监控装置及方法、显示基板切割及磨边装置 |
CN111785651A (zh) * | 2019-04-04 | 2020-10-16 | 长鑫存储技术有限公司 | 蚀刻终点时间的确定方法和多晶硅膜蚀刻方法 |
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JPH07240398A (ja) * | 1994-02-28 | 1995-09-12 | Murata Mfg Co Ltd | シリコン基板のエッチング方法およびエッチング装置 |
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- 2006-09-26 US US11/527,205 patent/US20070205179A1/en not_active Abandoned
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009204643A (ja) * | 2008-02-26 | 2009-09-10 | Epson Imaging Devices Corp | 電気光学装置及びその製造方法 |
CN110231725A (zh) * | 2019-05-20 | 2019-09-13 | 深圳市华星光电半导体显示技术有限公司 | 一种微影玻璃薄化的方法及其控制系统 |
CN110231725B (zh) * | 2019-05-20 | 2022-03-08 | 深圳市华星光电半导体显示技术有限公司 | 一种微影玻璃薄化的方法及其控制系统 |
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Publication number | Publication date |
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US20070205179A1 (en) | 2007-09-06 |
JP4738212B2 (ja) | 2011-08-03 |
TW200734733A (en) | 2007-09-16 |
TWI360681B (en) | 2012-03-21 |
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