JP2007240035A5 - - Google Patents

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Publication number
JP2007240035A5
JP2007240035A5 JP2006060361A JP2006060361A JP2007240035A5 JP 2007240035 A5 JP2007240035 A5 JP 2007240035A5 JP 2006060361 A JP2006060361 A JP 2006060361A JP 2006060361 A JP2006060361 A JP 2006060361A JP 2007240035 A5 JP2007240035 A5 JP 2007240035A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006060361A
Other versions
JP2007240035A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006060361A priority Critical patent/JP2007240035A/ja
Priority claimed from JP2006060361A external-priority patent/JP2007240035A/ja
Priority to US11/682,118 priority patent/US7610756B2/en
Priority to TW096107560A priority patent/TWI393849B/zh
Priority to KR1020070021525A priority patent/KR100841122B1/ko
Priority to CNB2007100861852A priority patent/CN100473919C/zh
Publication of JP2007240035A publication Critical patent/JP2007240035A/ja
Publication of JP2007240035A5 publication Critical patent/JP2007240035A5/ja
Pending legal-status Critical Current

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JP2006060361A 2006-03-06 2006-03-06 冷却加熱装置及び載置装置 Pending JP2007240035A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2006060361A JP2007240035A (ja) 2006-03-06 2006-03-06 冷却加熱装置及び載置装置
US11/682,118 US7610756B2 (en) 2006-03-06 2007-03-05 Cooling/heating apparatus and mounting apparatus
TW096107560A TWI393849B (zh) 2006-03-06 2007-03-05 Cooling and heating devices and loading devices
KR1020070021525A KR100841122B1 (ko) 2006-03-06 2007-03-05 냉각 가열 장치 및 탑재 장치
CNB2007100861852A CN100473919C (zh) 2006-03-06 2007-03-06 冷却加热装置和载置装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006060361A JP2007240035A (ja) 2006-03-06 2006-03-06 冷却加熱装置及び載置装置

Publications (2)

Publication Number Publication Date
JP2007240035A JP2007240035A (ja) 2007-09-20
JP2007240035A5 true JP2007240035A5 (ja) 2009-03-05

Family

ID=38470297

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006060361A Pending JP2007240035A (ja) 2006-03-06 2006-03-06 冷却加熱装置及び載置装置

Country Status (5)

Country Link
US (1) US7610756B2 (ja)
JP (1) JP2007240035A (ja)
KR (1) KR100841122B1 (ja)
CN (1) CN100473919C (ja)
TW (1) TWI393849B (ja)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080294981A1 (en) * 2007-05-21 2008-11-27 Advancis.Com, Inc. Page clipping tool for digital publications
US9558980B2 (en) * 2008-04-30 2017-01-31 Axcelis Technologies, Inc. Vapor compression refrigeration chuck for ion implanters
DE102009009208A1 (de) * 2009-02-17 2010-08-26 Danfoss Compressors Gmbh Individualumgebungs-Temperiervorrichtung
US8910486B2 (en) 2010-07-22 2014-12-16 Flir Systems, Inc. Expander for stirling engines and cryogenic coolers
JP5333679B2 (ja) * 2011-02-10 2013-11-06 トヨタ自動車株式会社 冷却システム
JP5715444B2 (ja) * 2011-02-28 2015-05-07 東京エレクトロン株式会社 載置装置
JP5632317B2 (ja) 2011-03-19 2014-11-26 東京エレクトロン株式会社 冷却装置の運転方法及び検査装置
US9021800B2 (en) * 2011-03-22 2015-05-05 The Boeing Company Heat exchanger and associated method employing a stirling engine
CN102513334B (zh) * 2011-12-31 2015-03-25 胡昀 用于垃圾处理设备的冷却水循环系统
JP6034231B2 (ja) * 2012-07-25 2016-11-30 株式会社Kelk 半導体製造装置用温度調整装置、半導体製造におけるｐｉｄ定数演算方法、及び半導体製造装置用温度調整装置の運転方法
TWI618597B (zh) * 2014-04-15 2018-03-21 工具機之加工液冷卻系統及其使用方式
CN106705507A (zh) * 2015-11-17 2017-05-24 谢德音 冷媒配管装置
US11837479B2 (en) * 2016-05-05 2023-12-05 Applied Materials, Inc. Advanced temperature control for wafer carrier in plasma processing chamber
JP7032644B2 (ja) * 2018-03-22 2022-03-09 株式会社東京精密 プローバの冷却システム
US11099211B1 (en) * 2018-10-27 2021-08-24 PsiQuantum Corp. Cryogenic probe card
TWI692643B (zh) * 2019-04-16 2020-05-01 漢民測試系統股份有限公司 半導體測試裝置
US10781771B1 (en) * 2019-09-22 2020-09-22 Ghasem Kahe Automatic cooling system for combustion engine
KR102508040B1 (ko) * 2020-05-20 2023-03-08 시바우라 메카트로닉스 가부시끼가이샤 냉각 장치, 기판 처리 장치, 냉각 방법, 및 기판 처리 방법
JP2023023042A (ja) * 2021-08-04 2023-02-16 株式会社ディスコ 定温液体供給装置
KR102562102B1 (ko) * 2023-03-02 2023-08-02 (주)본씨앤아이 친환경 냉매를 사용하는 반도체 설비용 냉각 시스템

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02303361A (ja) * 1989-05-18 1990-12-17 Fujitsu Ltd 電源回路
JP3367141B2 (ja) * 1993-04-28 2003-01-14 アイシン精機株式会社 物体冷却装置
KR100238947B1 (ko) * 1997-03-31 2000-01-15 윤종용 반도체 웨이퍼 탑재장치
TW426798B (en) * 1998-02-06 2001-03-21 Sanyo Electric Co Stirling apparatus
JP3968610B2 (ja) * 1998-05-27 2007-08-29 Ｓｍｃ株式会社 半導体処理液用冷却加熱装置
JP2002098627A (ja) * 2001-01-26 2002-04-05 Sanyo Electric Co Ltd スターリング冷凍機及びヒートショック試験機
JP4055892B2 (ja) * 2002-05-31 2008-03-05 東京エレクトロン株式会社 冷媒の温度制御方法、冷却方法及び冷却装置
JP3883061B2 (ja) * 2002-08-12 2007-02-21 三洋電機株式会社 スターリング冷熱供給システム

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