JP2007214287A5 - - Google Patents

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Publication number
JP2007214287A5
JP2007214287A5 JP2006031545A JP2006031545A JP2007214287A5 JP 2007214287 A5 JP2007214287 A5 JP 2007214287A5 JP 2006031545 A JP2006031545 A JP 2006031545A JP 2006031545 A JP2006031545 A JP 2006031545A JP 2007214287 A5 JP2007214287 A5 JP 2007214287A5
Authority
JP
Japan
Prior art keywords
electrostatic chuck
dielectric
less
convex portions
chuck according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006031545A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007214287A (ja
JP4244229B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2006031545A external-priority patent/JP4244229B2/ja
Priority to JP2006031545A priority Critical patent/JP4244229B2/ja
Priority to PCT/JP2007/052175 priority patent/WO2007091619A1/ja
Priority to US12/086,967 priority patent/US7907383B2/en
Priority to CN2007800045852A priority patent/CN101379607B/zh
Priority to TW096104666A priority patent/TWI342059B/zh
Priority to KR1020087018298A priority patent/KR100989230B1/ko
Publication of JP2007214287A publication Critical patent/JP2007214287A/ja
Publication of JP2007214287A5 publication Critical patent/JP2007214287A5/ja
Publication of JP4244229B2 publication Critical patent/JP4244229B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2006031545A 2005-11-15 2006-02-08 静電チャック Expired - Lifetime JP4244229B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006031545A JP4244229B2 (ja) 2006-02-08 2006-02-08 静電チャック
TW096104666A TWI342059B (en) 2006-02-08 2007-02-08 Electrostatic chuck
US12/086,967 US7907383B2 (en) 2005-11-15 2007-02-08 Electrostatic chuck
CN2007800045852A CN101379607B (zh) 2006-02-08 2007-02-08 静电卡盘
PCT/JP2007/052175 WO2007091619A1 (ja) 2006-02-08 2007-02-08 静電チャック
KR1020087018298A KR100989230B1 (ko) 2006-02-08 2007-02-08 정전척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006031545A JP4244229B2 (ja) 2006-02-08 2006-02-08 静電チャック

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2008201771A Division JP4623159B2 (ja) 2008-08-05 2008-08-05 静電チャック

Publications (3)

Publication Number Publication Date
JP2007214287A JP2007214287A (ja) 2007-08-23
JP2007214287A5 true JP2007214287A5 (https=) 2008-09-18
JP4244229B2 JP4244229B2 (ja) 2009-03-25

Family

ID=38345213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006031545A Expired - Lifetime JP4244229B2 (ja) 2005-11-15 2006-02-08 静電チャック

Country Status (5)

Country Link
JP (1) JP4244229B2 (https=)
KR (1) KR100989230B1 (https=)
CN (1) CN101379607B (https=)
TW (1) TWI342059B (https=)
WO (1) WO2007091619A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009004752A (ja) * 2007-05-18 2009-01-08 Toto Ltd 静電チャック
JP4786693B2 (ja) 2008-09-30 2011-10-05 三菱重工業株式会社 ウェハ接合装置およびウェハ接合方法
JP5872998B2 (ja) 2012-04-26 2016-03-01 日本特殊陶業株式会社 アルミナ焼結体、それを備える部材、および半導体製造装置
KR102119867B1 (ko) * 2013-10-21 2020-06-09 주식회사 미코세라믹스 정전척
CN107663080B (zh) * 2016-07-27 2020-05-08 北京华卓精科科技股份有限公司 应用于j-r型静电卡盘的氧化铝陶瓷及其制备方法
JP2022142421A (ja) * 2021-03-16 2022-09-30 株式会社巴川製紙所 静電チャック装置およびその製造方法
JP2022142151A (ja) * 2021-03-16 2022-09-30 株式会社巴川製紙所 セラミック膜およびその製造方法、静電チャック装置およびその製造方法
JP7801359B2 (ja) * 2021-10-18 2026-01-16 日本特殊陶業株式会社 アルミナ質焼結体、および静電チャック
JP7777008B2 (ja) * 2022-03-03 2025-11-27 株式会社巴川コーポレーション 静電チャック装置
JP7850571B2 (ja) * 2022-03-03 2026-04-23 株式会社巴川コーポレーション 静電チャック装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03204924A (ja) * 1989-10-30 1991-09-06 Sumitomo Metal Ind Ltd 試料保持装置
JPH09330974A (ja) * 1996-06-12 1997-12-22 Hitachi Ltd 静電吸着電極
JP4201502B2 (ja) * 2000-10-11 2008-12-24 独立行政法人産業技術総合研究所 静電チャックおよびその製造方法
US6483690B1 (en) * 2001-06-28 2002-11-19 Lam Research Corporation Ceramic electrostatic chuck assembly and method of making
JP2004352572A (ja) * 2003-05-29 2004-12-16 Kyocera Corp アルミナセラミックス及びその製造方法
TWI274394B (en) * 2003-11-14 2007-02-21 Advanced Display Proc Eng Co Electrostatic chuck with support balls as contact plane, substrate support, clamp for substrate fixation, and electrode structure, and fabrication method thereof
JP4722463B2 (ja) * 2004-12-03 2011-07-13 黒崎播磨株式会社 静電チャック用誘電体セラミックス及びその製造方法

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