JP2007184560A - Cmosイメージセンサ及びその製造方法 - Google Patents
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47G—HOUSEHOLD OR TABLE EQUIPMENT
- A47G25/00—Household implements used in connection with wearing apparel; Dress, hat or umbrella holders
- A47G25/14—Clothing hangers, e.g. suit hangers
- A47G25/28—Hangers characterised by their shape
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- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47G—HOUSEHOLD OR TABLE EQUIPMENT
- A47G1/00—Mirrors; Picture frames or the like, e.g. provided with heating, lighting or ventilating means
- A47G1/02—Mirrors used as equipment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14643—Photodiode arrays; MOS imagers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14685—Process for coatings or optical elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14603—Special geometry or disposition of pixel-elements, address-lines or gate-electrodes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14683—Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof
- H01L27/14689—MOS based technologies
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S977/70—Nanostructure
- Y10S977/762—Nanowire or quantum wire, i.e. axially elongated structure having two dimensions of 100 nm or less
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S977/814—Group IV based elements and compounds, e.g. CxSiyGez, porous silicon
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/953—Detector using nanostructure
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- Condensed Matter Physics & Semiconductors (AREA)
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
Abstract
【解決手段】CMOSイメージセンサの製造方法は、受光素子領域及びトランジスタ領域が画定された半導体基板を用意するステップと、前記受光素子領域にプラズマ放電を発生させて微細ホコリを形成させるステップと、前記微細ホコリをマスクとしてエッチングして、前記受光素子領域にナノピラーを形成するステップと、前記微細ホコリを除去するステップとを含む。
【選択図】図3
Description
202 P−不純物領域
203 トランスファーゲート
204 フローティングディフュージョン
205 STI
206 P+不純物領域
207 酸化膜
208 N不純物領域
209、304 ナノピラー
302、402 フォトレジスト
303 微細ホコリ
403 球状ボール
Claims (14)
- 受光素子を含み、
前記受光素子の上段にナノピラーが複数個形成されていることを特徴とするCMOSイメージセンサ。 - 前記ナノピラーが、シリコン結晶であることを特徴とする請求項1に記載のCMOSイメージセンサ。
- 前記ナノピラーの直径が、ナノメートル以下のサイズを有することを特徴とする請求項1に記載のCMOSイメージセンサ。
- 受光素子領域にプラズマ放電を発生させて、微細ホコリを形成させるステップと、
前記微細ホコリをマスクとして、前記受光素子領域をエッチングするステップと、
前記微細ホコリを除去するステップと
を含むことを特徴とするCMOSイメージセンサの製造方法。 - 前記受光素子領域にプラズマ放電を発生させて、微細ホコリを形成させるステップが、前記受光素子領域にプラズマガスを注入するステップを含むことを特徴とする請求項4に記載のCMOSイメージセンサの製造方法。
- 前記受光素子領域にプラズマ放電を発生させて、微細ホコリを形成させるステップにおいて、前記微細ホコリが、前記プラズマ放電の際、前記プラズマガスのラジカルと前記プラズマガスによってエッチングされる前記受光素子領域の被エッチング物質とが結合して形成されたことを特徴とする請求項5に記載のCMOSイメージセンサの製造方法。
- 前記受光素子領域の被エッチング物質が、シリコンであることを特徴とする請求項6に記載のCMOSイメージセンサの製造方法。
- 前記プラズマガスが、ハロゲン系化合物と酸素(O2)ガスであることを特徴とする請求項5に記載のCMOSイメージセンサの製造方法。
- 前記微細ホコリが、ナノメートル以下のサイズに形成されることを特徴とする請求項4に記載のCMOSイメージセンサの製造方法。
- 受光素子領域にナノメートルサイズの粒子を配列するステップと、
前記粒子をマスクとして、前記受光素子領域をエッチングするステップと、
前記粒子を除去するステップと
を含むことを特徴とするCMOSイメージセンサの製造方法。 - 前記粒子が、ポリマー成分で構成されたことを特徴とする請求項10に記載のCMOSイメージセンサの製造方法。
- 前記エッチングにより形成されたナノピラーの直径が、前記粒子の直径により決定されることを特徴とする請求項10に記載のCMOSイメージセンサの製造方法。
- 前記エッチングにより形成されたナノピラーの直径が、ナノメートル以下のサイズを有することを特徴とする請求項10に記載のCMOSイメージセンサの製造方法。
- 前記粒子が、球状ボールであることを特徴とする請求項10に記載のCMOSイメージセンサの製造方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020060001335A KR100767629B1 (ko) | 2006-01-05 | 2006-01-05 | 높은 광감도를 갖는 cmos 이미지 센서 및 이의 제조방법 |
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JP2007184560A true JP2007184560A (ja) | 2007-07-19 |
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JP2006321079A Pending JP2007184560A (ja) | 2006-01-05 | 2006-11-29 | Cmosイメージセンサ及びその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7741664B2 (ja) |
JP (1) | JP2007184560A (ja) |
KR (1) | KR100767629B1 (ja) |
CN (1) | CN1996605B (ja) |
Cited By (4)
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JP2014209625A (ja) * | 2010-12-14 | 2014-11-06 | ゼーナ テクノロジーズ, インク.Zena Technologies, Inc. | イメージセンサ用の2つ組又は4つ組のシリコンナノワイヤを備えるフルカラー単一ピクセル |
US11664400B2 (en) | 2019-10-24 | 2023-05-30 | Samsung Electronics Co., Ltd. | Image sensor and electronic apparatus including the same |
US11948955B2 (en) | 2019-10-23 | 2024-04-02 | Samsung Electronics Co., Ltd. | Image sensor including color separating lens array and electronic device including the image sensor |
US11978748B2 (en) | 2019-10-23 | 2024-05-07 | Samsung Electronics Co., Ltd. | Image sensor including color separating lens array, including regions of different patterns, and electronic apparatus including the image sensor |
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US7382008B2 (en) * | 2006-05-02 | 2008-06-03 | Eastman Kodak Company | Ultra-small CMOS image sensor pixel using a photodiode potential technique |
US7868426B2 (en) * | 2007-07-26 | 2011-01-11 | University Of Delaware | Method of fabricating monolithic nanoscale probes |
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CN102169088B (zh) * | 2010-12-31 | 2013-02-13 | 清华大学 | 单分子检测方法 |
CN102664185A (zh) * | 2012-06-01 | 2012-09-12 | 上海中科高等研究院 | Cmos图像传感器及其制作方法 |
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2006
- 2006-01-05 KR KR1020060001335A patent/KR100767629B1/ko not_active IP Right Cessation
- 2006-11-29 JP JP2006321079A patent/JP2007184560A/ja active Pending
- 2006-12-06 US US11/567,513 patent/US7741664B2/en active Active
- 2006-12-25 CN CN2006101680972A patent/CN1996605B/zh not_active Expired - Fee Related
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JP2014209625A (ja) * | 2010-12-14 | 2014-11-06 | ゼーナ テクノロジーズ, インク.Zena Technologies, Inc. | イメージセンサ用の2つ組又は4つ組のシリコンナノワイヤを備えるフルカラー単一ピクセル |
US11948955B2 (en) | 2019-10-23 | 2024-04-02 | Samsung Electronics Co., Ltd. | Image sensor including color separating lens array and electronic device including the image sensor |
US11978748B2 (en) | 2019-10-23 | 2024-05-07 | Samsung Electronics Co., Ltd. | Image sensor including color separating lens array, including regions of different patterns, and electronic apparatus including the image sensor |
US11664400B2 (en) | 2019-10-24 | 2023-05-30 | Samsung Electronics Co., Ltd. | Image sensor and electronic apparatus including the same |
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CN1996605B (zh) | 2010-05-19 |
US7741664B2 (en) | 2010-06-22 |
US20070152248A1 (en) | 2007-07-05 |
KR20070073430A (ko) | 2007-07-10 |
CN1996605A (zh) | 2007-07-11 |
KR100767629B1 (ko) | 2007-10-17 |
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