JP2007165864A5 - - Google Patents
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- Publication number
- JP2007165864A5 JP2007165864A5 JP2006307761A JP2006307761A JP2007165864A5 JP 2007165864 A5 JP2007165864 A5 JP 2007165864A5 JP 2006307761 A JP2006307761 A JP 2006307761A JP 2006307761 A JP2006307761 A JP 2006307761A JP 2007165864 A5 JP2007165864 A5 JP 2007165864A5
- Authority
- JP
- Japan
- Prior art keywords
- photoelectric conversion
- insulating film
- conversion device
- forming
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims 30
- 238000000034 method Methods 0.000 claims 13
- 238000004519 manufacturing process Methods 0.000 claims 12
- 239000011229 interlayer Substances 0.000 claims 9
- 238000005530 etching Methods 0.000 claims 8
- 239000000758 substrate Substances 0.000 claims 7
- 238000002955 isolation Methods 0.000 claims 5
- 239000012212 insulator Substances 0.000 claims 4
- 230000002093 peripheral effect Effects 0.000 claims 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006307761A JP2007165864A (ja) | 2005-11-15 | 2006-11-14 | 光電変換装置、光電変換装置の製造方法及び撮像システム |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005330142 | 2005-11-15 | ||
| JP2006307761A JP2007165864A (ja) | 2005-11-15 | 2006-11-14 | 光電変換装置、光電変換装置の製造方法及び撮像システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007165864A JP2007165864A (ja) | 2007-06-28 |
| JP2007165864A5 true JP2007165864A5 (enrdf_load_stackoverflow) | 2010-01-07 |
Family
ID=38248349
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006307761A Pending JP2007165864A (ja) | 2005-11-15 | 2006-11-14 | 光電変換装置、光電変換装置の製造方法及び撮像システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007165864A (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5314914B2 (ja) * | 2008-04-04 | 2013-10-16 | キヤノン株式会社 | 光電変換装置、撮像システム、設計方法、及び光電変換装置の製造方法 |
| JP5717357B2 (ja) * | 2010-05-18 | 2015-05-13 | キヤノン株式会社 | 光電変換装置およびカメラ |
| JP5126291B2 (ja) | 2010-06-07 | 2013-01-23 | 株式会社ニコン | 固体撮像素子 |
| JP5975617B2 (ja) * | 2011-10-06 | 2016-08-23 | キヤノン株式会社 | 固体撮像装置およびその製造方法ならびにカメラ |
| JP5991729B2 (ja) | 2011-10-07 | 2016-09-14 | キヤノン株式会社 | 固体撮像装置の製造方法 |
| JP2016149387A (ja) | 2015-02-10 | 2016-08-18 | ルネサスエレクトロニクス株式会社 | 撮像装置およびその製造方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3020147B2 (ja) * | 1997-07-22 | 2000-03-15 | 日本テキサス・インスツルメンツ株式会社 | 電荷結合型半導体装置の製造方法 |
| JP2004165236A (ja) * | 2002-11-11 | 2004-06-10 | Sony Corp | 固体撮像装置の製造方法 |
| US6974715B2 (en) * | 2002-12-27 | 2005-12-13 | Hynix Semiconductor Inc. | Method for manufacturing CMOS image sensor using spacer etching barrier film |
| JP3840214B2 (ja) * | 2003-01-06 | 2006-11-01 | キヤノン株式会社 | 光電変換装置及び光電変換装置の製造方法及び同光電変換装置を用いたカメラ |
| JP2005223019A (ja) * | 2004-02-03 | 2005-08-18 | Matsushita Electric Ind Co Ltd | 受光素子とその製造方法及び固体撮像装置 |
| JP2005223085A (ja) * | 2004-02-04 | 2005-08-18 | Sony Corp | 半導体装置及びその製造方法 |
-
2006
- 2006-11-14 JP JP2006307761A patent/JP2007165864A/ja active Pending
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