JP2007095875A - 半導体装置の取付構造 - Google Patents
半導体装置の取付構造 Download PDFInfo
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- JP2007095875A JP2007095875A JP2005281360A JP2005281360A JP2007095875A JP 2007095875 A JP2007095875 A JP 2007095875A JP 2005281360 A JP2005281360 A JP 2005281360A JP 2005281360 A JP2005281360 A JP 2005281360A JP 2007095875 A JP2007095875 A JP 2007095875A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/33—Structure, shape, material or disposition of the layer connectors after the connecting process of a plurality of layer connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/2612—Auxiliary members for layer connectors, e.g. spacers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32245—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
- H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
Abstract
【解決手段】一面7aと他面7bから金属板3、4の放熱面3a、4aが露出する板状のモールド樹脂7を有する半導体装置100を、チャック部材300にて狭持して一対の冷却板21の隙間21aに挿入してなる半導体装置の取付構造において、チャック部材300の保持面31にて挟まれるモールド樹脂7の側面7cは、山型に突出した形状を有し、その傾斜面7dのモールド樹脂7の板厚方向と平行な線Lに対する傾斜角度θが25°以上である。
【選択図】図3
Description
なお、上記実施形態では、チャック部材300の保持面31にて挟まれるモールド樹脂7の側面7cにおいて、山型形状を構成する傾斜面7dの両方の面の傾斜角度θが同じであるが、両傾斜面7dの傾斜角度θとが互いに異なるものであってもよい。そのような例としての半導体装置の側面図を図8に示す。
3…第1の金属板、3a…第1の金属板の放熱面、
4…第2の金属板、4a…第2の金属板の放熱面、
7…モールド樹脂、7a…モールド樹脂の一面、7b…モールド樹脂の他面、
7c…チャック部材の保持面にて挟まれるモールド樹脂の側面、7d…傾斜面、
21…冷却部材、21a…隙間、31…チャック部材の保持面、
100…半導体装置、200…冷却器、300…チャック部材、θ…傾斜角度。
Claims (6)
- 一対の金属板(3、4)の間に半導体素子(1、2)を挟んだものを板状のモールド樹脂(7)にて封止し、前記一対の金属板(3、4)のうち一方の放熱面(3a、4a)を前記モールド樹脂(7)の一面(7a)に露出させ、他方の放熱面(4a)を前記モールド樹脂(7)の他面(7b)に露出させてなる半導体装置(100)と、
前記半導体装置(100)が挿入される隙間(21a)を有して対向する一対の冷却板(21)を有する冷却器(200)とを備え、
前記モールド樹脂(7)における対向する側面(7c)を挟むための保持面(31)を有するとともに当該保持面(31)が前記側面(7c)に合致する形状をなすチャック部材(300)を用い、このチャック部材(300)の前記保持面(31)にて前記モールド樹脂(7)の前記側面(7c)を挟んだ状態で、前記半導体装置(100)を、前記一対の冷却板(21)の前記隙間(21a)に挿入することにより、各々の前記放熱面(3a、4a)を前記各冷却板(21)に熱的に接続するようにした半導体装置の取付構造において、
前記チャック部材(300)の前記保持面(31)にて挟まれる前記モールド樹脂(7)の前記側面(7c)は、山型に突出した形状を有し、この山型形状を構成する傾斜面(7d)の前記モールド樹脂(7)の板厚方向と平行な線に対する傾斜角度(θ)が、25°以上であることを特徴とする半導体装置の取付構造。 - 前記チャック部材(300)の前記保持面(31)にて挟まれる前記モールド樹脂(7)の前記側面(7c)の全体において、前記傾斜面(7d)の前記傾斜角度(θ)が25°以上であることを特徴とする請求項1に記載の半導体装置。
- 前記チャック部材(300)の前記保持面(31)にて挟まれる前記モールド樹脂(7)の前記側面(7c)の一部において、前記傾斜面(7d)の前記傾斜角度(θ)が25°以上であることを特徴とする請求項1に記載の半導体装置。
- 前記チャック部材(300)の前記保持面(31)にて挟まれる前記モールド樹脂(7)の前記側面(7c)において、前記山型形状を構成する傾斜面(7d)の両方の面の前記傾斜角度(θ)が同じであることを特徴とする請求項1に記載の半導体装置の取付構造。
- 前記チャック部材(300)の前記保持面(31)にて挟まれる前記モールド樹脂(7)の前記側面(7c)において、前記山型形状をなす傾斜面(7d)の両方の面の前記傾斜角度(θ)が異なることを特徴とする請求項1に記載の半導体装置の取付構造。
- 前記傾斜角度(θ)は、30°以上であることを特徴とする請求項1ないし5のいずれか1つに記載の半導体装置。
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JP2005281360A JP4591297B2 (ja) | 2005-09-28 | 2005-09-28 | 半導体装置の取付構造および半導体装置の取付方法 |
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JP2005281360A JP4591297B2 (ja) | 2005-09-28 | 2005-09-28 | 半導体装置の取付構造および半導体装置の取付方法 |
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JP2007095875A true JP2007095875A (ja) | 2007-04-12 |
JP4591297B2 JP4591297B2 (ja) | 2010-12-01 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010278108A (ja) * | 2009-05-27 | 2010-12-09 | Toyota Motor Corp | 半導体素子の冷却構造 |
JP2013122993A (ja) * | 2011-12-12 | 2013-06-20 | Toyota Motor Corp | 半導体装置 |
JP2015138843A (ja) * | 2014-01-21 | 2015-07-30 | 株式会社デンソー | 半導体装置及びその製造方法 |
US9466549B2 (en) * | 2015-02-24 | 2016-10-11 | Toyota Jidosha Kabushiki Kaisha | Semiconductor module |
US9716077B2 (en) | 2015-09-11 | 2017-07-25 | Toyota Jidosha Kabushiki Kaisha | Wire connecting method and terminal |
JP2018022837A (ja) * | 2016-08-05 | 2018-02-08 | トヨタ自動車株式会社 | 半導体モジュールの製造方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1012704A (ja) * | 1996-06-25 | 1998-01-16 | Dainippon Screen Mfg Co Ltd | 基板移替え装置およびそれを用いた基板処理装置 |
JP2000332181A (ja) * | 1999-05-20 | 2000-11-30 | Nec Eng Ltd | 半導体装置のリード切断装置およびリード加工装置 |
JP2002357701A (ja) * | 2001-06-01 | 2002-12-13 | Ricoh Co Ltd | 複合走査レンズ |
JP2003062859A (ja) * | 2001-08-29 | 2003-03-05 | Nec Tokin Ceramics Corp | モールド型電子部品 |
JP2004213740A (ja) * | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 記録テープカートリッジ |
JP2004253548A (ja) * | 2003-02-19 | 2004-09-09 | Denso Corp | 半導体モジュール |
JP2005217337A (ja) * | 2004-02-02 | 2005-08-11 | Matsushita Electric Ind Co Ltd | 光学デバイス |
-
2005
- 2005-09-28 JP JP2005281360A patent/JP4591297B2/ja not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1012704A (ja) * | 1996-06-25 | 1998-01-16 | Dainippon Screen Mfg Co Ltd | 基板移替え装置およびそれを用いた基板処理装置 |
JP2000332181A (ja) * | 1999-05-20 | 2000-11-30 | Nec Eng Ltd | 半導体装置のリード切断装置およびリード加工装置 |
JP2002357701A (ja) * | 2001-06-01 | 2002-12-13 | Ricoh Co Ltd | 複合走査レンズ |
JP2003062859A (ja) * | 2001-08-29 | 2003-03-05 | Nec Tokin Ceramics Corp | モールド型電子部品 |
JP2004213740A (ja) * | 2002-12-27 | 2004-07-29 | Fuji Photo Film Co Ltd | 記録テープカートリッジ |
JP2004253548A (ja) * | 2003-02-19 | 2004-09-09 | Denso Corp | 半導体モジュール |
JP2005217337A (ja) * | 2004-02-02 | 2005-08-11 | Matsushita Electric Ind Co Ltd | 光学デバイス |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010278108A (ja) * | 2009-05-27 | 2010-12-09 | Toyota Motor Corp | 半導体素子の冷却構造 |
JP2013122993A (ja) * | 2011-12-12 | 2013-06-20 | Toyota Motor Corp | 半導体装置 |
JP2015138843A (ja) * | 2014-01-21 | 2015-07-30 | 株式会社デンソー | 半導体装置及びその製造方法 |
US9466549B2 (en) * | 2015-02-24 | 2016-10-11 | Toyota Jidosha Kabushiki Kaisha | Semiconductor module |
US9716077B2 (en) | 2015-09-11 | 2017-07-25 | Toyota Jidosha Kabushiki Kaisha | Wire connecting method and terminal |
JP2018022837A (ja) * | 2016-08-05 | 2018-02-08 | トヨタ自動車株式会社 | 半導体モジュールの製造方法 |
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