JP2007084908A5 - - Google Patents

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Publication number
JP2007084908A5
JP2007084908A5 JP2005278367A JP2005278367A JP2007084908A5 JP 2007084908 A5 JP2007084908 A5 JP 2007084908A5 JP 2005278367 A JP2005278367 A JP 2005278367A JP 2005278367 A JP2005278367 A JP 2005278367A JP 2007084908 A5 JP2007084908 A5 JP 2007084908A5
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JP
Japan
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film
pressure
cleaning
processing method
substrate
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JP2005278367A
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English (en)
Japanese (ja)
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JP2007084908A (ja
JP4823628B2 (ja
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Priority claimed from JP2005278367A external-priority patent/JP4823628B2/ja
Priority to JP2005278367A priority Critical patent/JP4823628B2/ja
Priority to US12/088,153 priority patent/US20090117270A1/en
Priority to PCT/JP2006/314612 priority patent/WO2007034624A1/ja
Priority to KR1020087007208A priority patent/KR101012959B1/ko
Priority to CNA2006800354936A priority patent/CN101273154A/zh
Publication of JP2007084908A publication Critical patent/JP2007084908A/ja
Publication of JP2007084908A5 publication Critical patent/JP2007084908A5/ja
Publication of JP4823628B2 publication Critical patent/JP4823628B2/ja
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Expired - Fee Related legal-status Critical Current

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JP2005278367A 2005-09-26 2005-09-26 基板処理方法および記録媒体 Expired - Fee Related JP4823628B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005278367A JP4823628B2 (ja) 2005-09-26 2005-09-26 基板処理方法および記録媒体
CNA2006800354936A CN101273154A (zh) 2005-09-26 2006-07-25 基板处理方法和记录介质
PCT/JP2006/314612 WO2007034624A1 (ja) 2005-09-26 2006-07-25 基板処理方法および記録媒体
KR1020087007208A KR101012959B1 (ko) 2005-09-26 2006-07-25 기판 처리 방법 및 기록매체
US12/088,153 US20090117270A1 (en) 2005-09-26 2006-07-25 Method for treating substrate and recording medium

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005278367A JP4823628B2 (ja) 2005-09-26 2005-09-26 基板処理方法および記録媒体

Publications (3)

Publication Number Publication Date
JP2007084908A JP2007084908A (ja) 2007-04-05
JP2007084908A5 true JP2007084908A5 (enExample) 2008-07-03
JP4823628B2 JP4823628B2 (ja) 2011-11-24

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JP2005278367A Expired - Fee Related JP4823628B2 (ja) 2005-09-26 2005-09-26 基板処理方法および記録媒体

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US (1) US20090117270A1 (enExample)
JP (1) JP4823628B2 (enExample)
KR (1) KR101012959B1 (enExample)
CN (1) CN101273154A (enExample)
WO (1) WO2007034624A1 (enExample)

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