JP2007043090A5 - - Google Patents
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- Publication number
- JP2007043090A5 JP2007043090A5 JP2006145633A JP2006145633A JP2007043090A5 JP 2007043090 A5 JP2007043090 A5 JP 2007043090A5 JP 2006145633 A JP2006145633 A JP 2006145633A JP 2006145633 A JP2006145633 A JP 2006145633A JP 2007043090 A5 JP2007043090 A5 JP 2007043090A5
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- conductive pad
- ferrite structure
- ubm layer
- ferrite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims 10
- 229910000859 α-Fe Inorganic materials 0.000 claims 9
- 239000010410 layer Substances 0.000 claims 5
- 239000000463 material Substances 0.000 claims 5
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 claims 4
- 229910052751 metal Inorganic materials 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 3
- 229910001092 metal group alloy Inorganic materials 0.000 claims 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 239000012790 adhesive layer Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910052802 copper Inorganic materials 0.000 claims 1
- 239000010949 copper Substances 0.000 claims 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2005-0070396 | 2005-08-01 | ||
| KR1020050070396A KR100606654B1 (ko) | 2005-08-01 | 2005-08-01 | 전자파 장해 저감용 페라이트 차폐 구조를 구비하는 반도체패키지 및 그 제조 방법 |
| US11/387,848 | 2006-03-24 | ||
| US11/387,848 US7495317B2 (en) | 2005-08-01 | 2006-03-24 | Semiconductor package with ferrite shielding structure |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007043090A JP2007043090A (ja) | 2007-02-15 |
| JP2007043090A5 true JP2007043090A5 (enExample) | 2009-07-02 |
| JP5138181B2 JP5138181B2 (ja) | 2013-02-06 |
Family
ID=37681296
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006145633A Active JP5138181B2 (ja) | 2005-08-01 | 2006-05-25 | フェライト遮蔽構造を備えた半導体パッケージ |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5138181B2 (enExample) |
| DE (1) | DE102006036963A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9721872B1 (en) | 2011-02-18 | 2017-08-01 | Amkor Technology, Inc. | Methods and structures for increasing the allowable die size in TMV packages |
| KR101374148B1 (ko) * | 2012-06-08 | 2014-03-17 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지 및 이의 제조 방법 |
| US9799592B2 (en) | 2013-11-19 | 2017-10-24 | Amkor Technology, Inc. | Semicondutor device with through-silicon via-less deep wells |
| KR101366461B1 (ko) | 2012-11-20 | 2014-02-26 | 앰코 테크놀로지 코리아 주식회사 | 반도체 디바이스 및 그 제조 방법 |
| KR101607981B1 (ko) | 2013-11-04 | 2016-03-31 | 앰코 테크놀로지 코리아 주식회사 | 반도체 패키지용 인터포저 및 이의 제조 방법, 제조된 인터포저를 이용한 반도체 패키지 |
| US9960328B2 (en) | 2016-09-06 | 2018-05-01 | Amkor Technology, Inc. | Semiconductor device and manufacturing method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2870162B2 (ja) * | 1990-07-20 | 1999-03-10 | セイコーエプソン株式会社 | 半導体装置およびその製造方法 |
| KR100313706B1 (ko) * | 1999-09-29 | 2001-11-26 | 윤종용 | 재배치 웨이퍼 레벨 칩 사이즈 패키지 및 그 제조방법 |
| JP3923368B2 (ja) * | 2002-05-22 | 2007-05-30 | シャープ株式会社 | 半導体素子の製造方法 |
| JP4161911B2 (ja) * | 2004-01-30 | 2008-10-08 | ソニー株式会社 | 集積回路装置 |
| EP1594163A1 (en) * | 2004-05-03 | 2005-11-09 | Commissariat A L'energie Atomique | A screened electrical device and a process for manufacturing the same |
-
2006
- 2006-05-25 JP JP2006145633A patent/JP5138181B2/ja active Active
- 2006-08-01 DE DE102006036963A patent/DE102006036963A1/de not_active Ceased
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