JP2007042855A - ブレード検出手段を備えた切削装置 - Google Patents
ブレード検出手段を備えた切削装置 Download PDFInfo
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- JP2007042855A JP2007042855A JP2005225172A JP2005225172A JP2007042855A JP 2007042855 A JP2007042855 A JP 2007042855A JP 2005225172 A JP2005225172 A JP 2005225172A JP 2005225172 A JP2005225172 A JP 2005225172A JP 2007042855 A JP2007042855 A JP 2007042855A
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- Prior art keywords
- cutting
- blade
- cutting blade
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- image
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- Pending
Links
- 238000001514 detection method Methods 0.000 title claims description 26
- 238000003384 imaging method Methods 0.000 claims abstract description 48
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 21
- 230000004397 blinking Effects 0.000 claims abstract description 14
- 230000002093 peripheral effect Effects 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 5
- 238000005299 abrasion Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 31
- 230000006870 function Effects 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000005323 electroforming Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000013307 optical fiber Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/08—Means for treating work or cutting member to facilitate cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D5/00—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D5/007—Control means comprising cameras, vision or image processing systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D5/00—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D5/20—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting with interrelated action between the cutting member and work feed
- B26D5/30—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting with interrelated action between the cutting member and work feed having the cutting member controlled by scanning a record carrier
- B26D5/34—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting with interrelated action between the cutting member and work feed having the cutting member controlled by scanning a record carrier scanning being effected by a photosensitive device
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/141—With means to monitor and control operation [e.g., self-regulating means]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/162—With control means responsive to replaceable or selectable information program
- Y10T83/173—Arithmetically determined program
- Y10T83/18—With operator input means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T83/00—Cutting
- Y10T83/849—With signal, scale, or indicator
Abstract
【解決手段】チャックテーブルに保持された被加工物に対して切削水を供給しながらその被加工物を切削する切削ブレード102を備えた切削手段10と、切削ブレード102の状態を検出するブレード検出手段120とを少なくとも備えた切削装置において、ブレード検出手段120には、切削ブレード102の外周縁部102bを撮像する撮像部107bと、撮像部107bに対峙し切削ブレード102の外周縁部102bを臨む位置に配設される発光部107aと、撮像部107bにより取得した画像を処理する画像処理部115と、発光部107aを点滅させる点滅制御部112とを少なくとも備える。発光部107aが撮像部107bに対峙しているため、取得した画像における切削ブレードによって遮られる部分と遮られない部分とのコントラストが明確になる。
【選択図】図4
Description
K≧πD/W
によって求め、N及びnを0から任意の正の整数までそれぞれ増加させ、発光部を発光させるタイミングTを、
T[秒]={60[秒]/M}N+{60[秒]/(MK)}n
によって求めるによって求めることが好ましい。nは0からKまで変化させることができる。
K≧πD/W
によって求め、N及びnを0から任意の正の整数まで増加させ、発光部を発光させる時点Tを、
T[秒]={60[秒]/M}N+{60[秒]/(MK)}n
によって求めるようにすると、切削ブレードの切り刃部の外周縁部の全領域を明確に認識できる画像を取得することができる。また、N及びnを変数としたことにより、これらを柔軟に設定することで、撮像のタイミングを適宜調整することができる。
K≧πD/W・・・(1)
T[秒]={60[秒]/M}N+{60[秒]/(MK)}n・・・(2)
2:オペレーションパネル 3:表示部 4:ウェーハカセット 5:搬出入手段
6:仮置き領域 7:搬送手段 8:チャックテーブル
9:アライメント手段
90:撮像部
10:切削手段
100:ハウジング 101:スピンドル
102:切削ブレード
102a:切り刃部 102b:外周縁部
103:ナット 104:ブレードカバー
105a、105b:切削水ノズル 106:切削水流入口
107:ブレード撮像部材
107a:発光部 107b:撮像部
108:ネジ 109:着脱カバー 110:ネジ
111:切削水流入口 112:点滅制御部
113a、113b:光ファイバ
114:回転数検出部 115:画像処理部 116:判断部
120:ブレード検出手段
Claims (5)
- 被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物に対して切削水を供給しながら該被加工物を切削する切削ブレードを備えた切削手段と、該切削ブレードの切り刃部の状態を検出するブレード検出手段とを少なくとも備えた切削装置であって、
該ブレード検出手段は、該切削ブレードの切り刃部の外周縁部を撮像する撮像部と、該撮像部に対峙し該切削ブレードの切り刃部の外周縁部に臨む位置に配設される発光部と、該撮像部により取得した画像を処理する画像処理部と、該発光部を点滅させる点滅制御部とから少なくとも構成される
ブレード検出手段を備えた切削装置。 - 前記ブレード検出手段には、前記画像処理部によって処理された画像を表示する表示部を備えた
請求項1に記載のブレード検出手段を備えた切削装置。 - 前記点滅制御部は、前記切削ブレードの切り刃部の直径をD[mm]、該切削ブレードの回転数をM[rpm]、前記撮像部によって取得される1画像における該切削ブレードの切り刃部の外周縁部の幅をW[mm]とし、該切削ブレードの切り刃部の外周縁部の全周を撮像するために必要な画像数Kを、
K≧πD/W
によって求め、
N及びnを0から任意の正の整数まで増加させ、前記発光部を発光させるタイミングTを、
T[秒]={60[秒]/M}N+{60[秒]/(MK)}n
によって求める
請求項1または2に記載のブレード検出手段を備えた切削装置。 - 前記nは0からKまで変化しうる
請求項3に記載のブレード検出手段を備えた切削装置。 - 前記ブレード検出手段には、前記切削ブレードの切り刃部の欠けの大きさが許容値を超えているかどうかを判断する判断部を備えた
請求項1、2、3または4に記載のブレード検出手段を備えた切削装置。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005225172A JP2007042855A (ja) | 2005-08-03 | 2005-08-03 | ブレード検出手段を備えた切削装置 |
US11/493,621 US20070028734A1 (en) | 2005-08-03 | 2006-07-27 | Cutting apparatus equipped with blade detection means |
TW095128003A TW200733213A (en) | 2005-08-03 | 2006-07-31 | Cutting apparatus equipped with blade detection means |
IL177166A IL177166A0 (en) | 2005-08-03 | 2006-07-31 | Cutting apparatus equipped with blade detection means |
CN200610151502XA CN1907646B (zh) | 2005-08-03 | 2006-08-03 | 具有刀片检测装置的切削装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005225172A JP2007042855A (ja) | 2005-08-03 | 2005-08-03 | ブレード検出手段を備えた切削装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007042855A true JP2007042855A (ja) | 2007-02-15 |
Family
ID=37698959
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005225172A Pending JP2007042855A (ja) | 2005-08-03 | 2005-08-03 | ブレード検出手段を備えた切削装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20070028734A1 (ja) |
JP (1) | JP2007042855A (ja) |
CN (1) | CN1907646B (ja) |
IL (1) | IL177166A0 (ja) |
TW (1) | TW200733213A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010167504A (ja) * | 2009-01-20 | 2010-08-05 | Disco Abrasive Syst Ltd | 切削ブレードの管理方法 |
KR20210097017A (ko) | 2020-01-29 | 2021-08-06 | 가부시기가이샤 디스코 | 절삭 장치 |
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WO2005087481A2 (en) * | 2004-03-18 | 2005-09-22 | Vmi Epe Holland B.V. | Cutting tool |
JP5236918B2 (ja) * | 2007-10-02 | 2013-07-17 | 株式会社ディスコ | 切削装置の切削ブレード検出機構 |
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US9815166B2 (en) * | 2012-01-04 | 2017-11-14 | Mike Goldstein | Inspection device for mechanical instruments and uses thereof |
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US20150073584A1 (en) * | 2013-09-10 | 2015-03-12 | Andrew Goodale | Wireless vision systems and methods for use in harsh environments |
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CN105259176B (zh) * | 2015-11-12 | 2017-11-07 | 长春设备工艺研究所 | 刀具磨损检测仪 |
CN106382886B (zh) * | 2016-10-24 | 2018-09-14 | 厦门大学 | 一种用于可转位刀片加工在线检测装置及方法 |
JP6866217B2 (ja) * | 2017-04-21 | 2021-04-28 | 株式会社ディスコ | 切削装置 |
EP3511101B1 (de) * | 2018-01-10 | 2020-09-23 | Klingelnberg GmbH | Verfahren zum prüfen eines schleifwerkzeugs und entsprechende vorrichtung |
JP7313805B2 (ja) * | 2018-08-15 | 2023-07-25 | 株式会社ディスコ | 切削装置 |
DE102018006653A1 (de) * | 2018-08-22 | 2020-02-27 | Blum-Novotest Gmbh | Werkzeugkontrolle in einer Werkstückbearbeitugnsmaschine |
CN109500657B (zh) * | 2018-11-14 | 2020-07-10 | 华中科技大学 | 一种基于视觉的断刀检测方法及系统 |
CN109396563A (zh) * | 2018-12-11 | 2019-03-01 | 象山邱工联信息技术有限公司 | 一种汽车配件裁断机 |
CN109946305A (zh) * | 2019-03-14 | 2019-06-28 | 东华大学 | 一种用于晶圆切割的刀片磨损非接触式检测机构 |
JP7325203B2 (ja) * | 2019-03-25 | 2023-08-14 | 株式会社ディスコ | 加工装置 |
CN110480850A (zh) * | 2019-07-29 | 2019-11-22 | 武汉华星光电技术有限公司 | 切割装置及其操作方法 |
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-
2006
- 2006-07-27 US US11/493,621 patent/US20070028734A1/en not_active Abandoned
- 2006-07-31 IL IL177166A patent/IL177166A0/en unknown
- 2006-07-31 TW TW095128003A patent/TW200733213A/zh unknown
- 2006-08-03 CN CN200610151502XA patent/CN1907646B/zh active Active
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JPH01141702A (ja) * | 1987-11-30 | 1989-06-02 | Tokyo Seimitsu Co Ltd | 研削刃管理回路 |
JP2627913B2 (ja) * | 1988-02-17 | 1997-07-09 | 株式会社デイスコ | 加工装置 |
JPH06155239A (ja) * | 1992-11-25 | 1994-06-03 | Hisashi Matsuzaki | 工作機械 |
JPH08164515A (ja) * | 1994-12-13 | 1996-06-25 | Tokyo Seimitsu Co Ltd | ブレード変位検出装置 |
JPH08288244A (ja) * | 1995-04-11 | 1996-11-01 | Disco Abrasive Syst Ltd | 光学検出手段 |
JPH10177973A (ja) * | 1996-12-17 | 1998-06-30 | Disco Abrasive Syst Ltd | ブレード変位検出装置 |
JP2000343383A (ja) * | 1999-06-04 | 2000-12-12 | Yutaka:Kk | 扁平ワークの検査装置 |
JP2002370140A (ja) * | 2001-06-12 | 2002-12-24 | Disco Abrasive Syst Ltd | ブレード監視装置 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010167504A (ja) * | 2009-01-20 | 2010-08-05 | Disco Abrasive Syst Ltd | 切削ブレードの管理方法 |
KR20210097017A (ko) | 2020-01-29 | 2021-08-06 | 가부시기가이샤 디스코 | 절삭 장치 |
Also Published As
Publication number | Publication date |
---|---|
TW200733213A (en) | 2007-09-01 |
IL177166A0 (en) | 2006-12-10 |
CN1907646A (zh) | 2007-02-07 |
US20070028734A1 (en) | 2007-02-08 |
CN1907646B (zh) | 2011-05-18 |
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