JP6866217B2 - 切削装置 - Google Patents
切削装置 Download PDFInfo
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- JP6866217B2 JP6866217B2 JP2017084104A JP2017084104A JP6866217B2 JP 6866217 B2 JP6866217 B2 JP 6866217B2 JP 2017084104 A JP2017084104 A JP 2017084104A JP 2017084104 A JP2017084104 A JP 2017084104A JP 6866217 B2 JP6866217 B2 JP 6866217B2
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- 238000005520 cutting process Methods 0.000 title claims description 181
- 238000001514 detection method Methods 0.000 claims description 38
- 238000012545 processing Methods 0.000 claims description 37
- 238000003754 machining Methods 0.000 claims description 33
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 18
- 238000013500 data storage Methods 0.000 claims description 14
- 238000004364 calculation method Methods 0.000 claims description 13
- 238000003860 storage Methods 0.000 claims description 8
- 230000002159 abnormal effect Effects 0.000 claims description 4
- 230000005856 abnormality Effects 0.000 description 14
- 235000012431 wafers Nutrition 0.000 description 11
- 238000000034 method Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 9
- 239000004065 semiconductor Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000012937 correction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 239000007767 bonding agent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/09—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
- B23Q17/0952—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
- B23Q17/0971—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining by measuring mechanical vibrations of parts of the machine
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D5/00—Arrangements for operating and controlling machines or devices for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D5/005—Computer numerical control means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q17/00—Arrangements for observing, indicating or measuring on machine tools
- B23Q17/12—Arrangements for observing, indicating or measuring on machine tools for indicating or measuring vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
- B28D5/0094—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work the supporting or holding device being of the vacuum type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
- B28D5/023—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels with a cutting blade mounted on a carriage
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q2717/00—Arrangements for indicating or measuring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/10—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving electrical means
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Dicing (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Machine Tool Sensing Apparatuses (AREA)
Description
15 チャックテーブル
40 切削手段
46 切削水供給手段
60 切削ブレード
71 弾性波検出センサ
75 制御手段
76 基準データ記憶部
77 閾値記憶部
78 空転弾性波データ記憶部
79 比率算出部
80 判断部
W 被加工物
Claims (3)
- 被加工物を保持するチャックテーブルと、該チャックテーブルに保持された被加工物を切削するための切削ブレードを備えた切削手段と、該切削ブレードに切削水を供給する切削水供給手段と、備えた切削装置であって、
該切削手段に配設され、該切削ブレードの回転に伴う弾性波を検出する弾性波検出センサと該切削装置を制御する制御手段とを備え、
該制御手段は、
所定加工条件において被加工物を予め加工した際に検出された基準となる基準加工弾性波データと、該加工前に切削水を供給しつつ被加工物に切り込まず該切削ブレードを回転させた状態で検出された基準空転弾性波データと、をセットで基準データとして記憶する基準データ記憶部と、
該基準加工弾性波データを基準に設定された閾値を記憶する閾値記憶部と、
任意のタイミングで切削水を供給しつつ被加工物に切り込まず該切削ブレードを回転させた状態で空転弾性波を検出して検出時刻と共に記憶する空転弾性波データ記憶部と、
被加工物を加工する際に、当該加工前で直近時刻の該空転弾性波データの該基準空転弾性波データに対する比率を算出する比率算出部と、
加工時に検出された加工弾性波データに該比率算出部が算出した比率を除算した値が、該閾値を超えた場合に加工が異常であると判断する判断部とを備える、切削装置。 - 該任意のタイミングは、切削ブレードのセットアップ時である、請求項1記載の切削装置。
- 該任意のタイミングは、被加工物の分割予定ラインを切削した切削ブレードが次の分割予定ラインを切削するために相対的に切削起点に戻る際である、請求項1記載の切削装置。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017084104A JP6866217B2 (ja) | 2017-04-21 | 2017-04-21 | 切削装置 |
TW107108532A TWI752191B (zh) | 2017-04-21 | 2018-03-14 | 切削裝置 |
KR1020180040225A KR102287129B1 (ko) | 2017-04-21 | 2018-04-06 | 절삭 장치 |
SG10201802923WA SG10201802923WA (en) | 2017-04-21 | 2018-04-06 | Cutting apparatus |
CN201810338098.XA CN108724492B (zh) | 2017-04-21 | 2018-04-16 | 切削装置 |
US15/956,105 US10688616B2 (en) | 2017-04-21 | 2018-04-18 | Cutting apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017084104A JP6866217B2 (ja) | 2017-04-21 | 2017-04-21 | 切削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018176394A JP2018176394A (ja) | 2018-11-15 |
JP6866217B2 true JP6866217B2 (ja) | 2021-04-28 |
Family
ID=63852544
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017084104A Active JP6866217B2 (ja) | 2017-04-21 | 2017-04-21 | 切削装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US10688616B2 (ja) |
JP (1) | JP6866217B2 (ja) |
KR (1) | KR102287129B1 (ja) |
CN (1) | CN108724492B (ja) |
SG (1) | SG10201802923WA (ja) |
TW (1) | TWI752191B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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US10679908B2 (en) * | 2017-01-23 | 2020-06-09 | Globalwafers Co., Ltd. | Cleave systems, mountable cleave monitoring systems, and methods for separating bonded wafer structures |
JP6629816B2 (ja) * | 2017-10-31 | 2020-01-15 | ファナック株式会社 | 診断装置および診断方法 |
JP7379064B2 (ja) * | 2019-10-07 | 2023-11-14 | 株式会社ディスコ | 切削装置 |
JP7396848B2 (ja) * | 2019-10-11 | 2023-12-12 | ファナック株式会社 | 検出装置及びプログラム |
JP7394712B2 (ja) * | 2020-06-24 | 2023-12-08 | Towa株式会社 | 切断装置及び切断品の製造方法 |
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2017
- 2017-04-21 JP JP2017084104A patent/JP6866217B2/ja active Active
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2018
- 2018-03-14 TW TW107108532A patent/TWI752191B/zh active
- 2018-04-06 KR KR1020180040225A patent/KR102287129B1/ko active IP Right Grant
- 2018-04-06 SG SG10201802923WA patent/SG10201802923WA/en unknown
- 2018-04-16 CN CN201810338098.XA patent/CN108724492B/zh active Active
- 2018-04-18 US US15/956,105 patent/US10688616B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2018176394A (ja) | 2018-11-15 |
CN108724492B (zh) | 2021-07-09 |
KR20180118522A (ko) | 2018-10-31 |
KR102287129B1 (ko) | 2021-08-05 |
US20180304429A1 (en) | 2018-10-25 |
TW201843006A (zh) | 2018-12-16 |
SG10201802923WA (en) | 2018-11-29 |
US10688616B2 (en) | 2020-06-23 |
TWI752191B (zh) | 2022-01-11 |
CN108724492A (zh) | 2018-11-02 |
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