JP2007027549A - Icチップ実装方法 - Google Patents
Icチップ実装方法 Download PDFInfo
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- JP2007027549A JP2007027549A JP2005209965A JP2005209965A JP2007027549A JP 2007027549 A JP2007027549 A JP 2007027549A JP 2005209965 A JP2005209965 A JP 2005209965A JP 2005209965 A JP2005209965 A JP 2005209965A JP 2007027549 A JP2007027549 A JP 2007027549A
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Abstract
【解決手段】ベースへの搭載面とは反対側の面がテープでマウントされダイシングによりそのテープを残してICチップごとに分離されたウェハを用意して、そのウェハを、ベースへの搭載面がベースに対面する向きに、ベースに対向させ、ベースをウェハに沿う所定の一次元方向に送りながら、かつウェハをベースに沿って二次元的に移動させながら、ウェハ上のICチップを順次にベース上に押し当ててベース上に仮固定させ、ベース上に仮固定された複数のICチップを一括して加熱及び加圧することによりそれら複数のICチップをベース上に固定させる。
【選択図】 図4
Description
ベースへの搭載面とは反対側の面がテープでマウントされダイシングによりそのテープを残してICチップごとに分離されたウェハを用意して、
そのウェハを、ベースへの搭載面がベースに対面する向きに、ベースに対向させ、
ベースをウェハに沿う所定の一次元方向に送りながら、かつウェハをベースに沿って二次元的に移動させながら、ウェハ上のICチップを順次にベース上に押し当ててベース上に仮固定させ、
ベース上に仮固定された複数のICチップを一括して加熱及び加圧することによりそれら複数のICチップをベース上に固定させることを特徴とする。
ベースへの搭載面とは反対側の面がテープでマウントされダイシングによりそのテープを残してICチップごとに分離されたウェハを用意して、
そのウェハを、ベースへの搭載面がベースに対向する向きに、ベースに対向させ、
ベースをウェハに沿う所定の一次元方向に送りながら、かつウェハをベースに沿って二次元的に移動させながら、ウェハ上のICチップを、加熱と加圧を行なう加熱加圧ヘッドでベース上に押し当てて加熱および加圧することにより、ICチップをベース上に順次固定させることを特徴とする。
ダイシングにより複数のICチップに分離される前のウェハの、ベースへのICチップの搭載面とは反対側の面を、ダイシング後の展開によりICチップどうしの間隔がベース上への搭載間隔と一致するように折り曲げにより縮小させたテープでマウントし、
縮小させたテープでマウントされたウェハを、ダイシングにより、そのテープを残してICチップごとに分離し、
テープによりマウントされたICチップを、ICチップのベースへの搭載面がベースに対面する向きに、テープを展開した状態でベースに対向させ、
ICチップをベース上に搭載させることを特徴とする。
ベースへの搭載面とは反対側の面がテープでマウントされダイシングによりテープを残してICチップごとに分離されたウェハを用意するとともに、ICチップが搭載されるベースを、そのベース上にウェハ上のICチップを搭載してそのベースを展開することによりベース上のICチップどうしの間隔がベース上に搭載すべき所期の間隔と同一の間隔となるように曲げ加工により縮小化しておき、
テープでマウントされたウェハを、ベースへの搭載面がベースに対面する向きに、縮小化されたベースに対向させ、
ウェハ上のICチップを縮小化されたベース上に搭載させ、
ベースを展開することを特徴とする。
10 ウェハ
11 ICチップ
12 アンテナ
13 ベース
15 接着剤
16 バンプ
30 テープ
32 ピッキング冶具
33 ボンディングヘッド
51 押当冶具
52 一括加熱ヘッド
61 加熱ヘッド
71a,71b カメラ
72a,72b 画像認識部
73a,73b ずれ量算出部
74 XY補正部
81 カメラ
82 画像認識部
83 ズレ量算出部
84 XY補正部
611 搭載ヘッド
612 ヘッド保持部
613 吸着部
Claims (6)
- ベース上に複数のICチップを実装するICチップ実装方法において、
ベースへの搭載面とは反対側の面がテープでマウントされダイシングにより該テープを残してICチップごとに分離されたウェハを用意して、該ウェハを、ベースへの搭載面が該ベースに対面する向きに、該ベースに対向させ、
前記ベースを前記ウェハに沿う所定の一次元方向に送りながら、かつ該ウェハを該ベースに沿って二次元的に移動させながら、前記ウェハ上のICチップを順次に前記ベース上に押し当てて該ベース上に仮固定させ、
前記ベース上に仮固定された複数のICチップを一括して加熱及び加圧することにより、該複数のICチップを該ベース上に固定させることを特徴とするICチップ実装方法。 - ベース上に複数のICチップを実装するICチップ実装方法において、
ベースへの搭載面とは反対側の面がテープでマウントされダイシングにより該テープを残してICチップごとに分離されたウェハを用意して、
該ウェハを、ベースへの搭載面が該ベースに対向する向きに該ベースに対向させ、
前記ベースを前記ウェハに沿う所定の一次元方向に送りながら、かつ該ウェハを該ベースに沿って二次元的に移動させながら、前記ウェハ上のICチップを、加熱と加圧を行なう加熱加圧ヘッドで前記ベース上に押し当てて加熱および加圧することにより、該ICチップを該ベース上に順次固定させることを特徴とするICチップ実装方法。 - ベース上に複数のICチップを実装するICチップ実装方法において、
ダイシングにより複数のICチップに分離される前のウェハの、ベースへのICチップの搭載面とは反対側の面を、ダイシング後の展開によりICチップどうしの間隔がベース上への搭載間隔と一致するように折り曲げにより縮小させたテープでマウントし、
縮小させたテープでマウントされたウェハを、ダイシングにより、該テープを残してICチップごとに分離し、
前記テープによりマウントされたICチップを、該ICチップのベースへの搭載面が該ベースに対面する向きに、該テープを展開した状態で該ベースに対向させ、
前記ICチップを前記ベース上に搭載させることを特徴とするICチップ実装方法。 - ベース上に複数のICチップを実装するICチップ実装方法において、
ベースへの搭載面とは反対側の面がテープでマウントされダイシングにより該テープを残してICチップごとに分離されたウェハを用意するとともに、ICチップが搭載されるベースを、該ベース上に前記ウェハ上のICチップを搭載して該ベースを展開することにより該ベース上のICチップどうしの間隔が該ベース上に搭載すべき所期の間隔と同一の間隔となるように曲げ加工により縮小化しておき、
前記テープでマウントされたウェハを、ベースへの搭載面が該ベースに対面する向きに、縮小化されたベースに対向させ、
前記ウェハ上のICチップを縮小化されたベース上に搭載させ、
前記ベースを展開することを特徴とするICチップ実装方法。 - 前記ベースが、通信用のアンテナが所定間隔で複数形成されたベースであり、
前記ICチップが、前記ベース上のアンテナを介して無線通信を行なう回路が搭載されたICチップであることを特徴とする請求項1から4のうちいずれか1項記載のICチップ実装方法。 - 前記ベースに対向させたICチップを該ベースに搭載させるにあたり、前記ベース上のICチップの搭載箇所、及び/又は、該ICチップ自体をカメラで撮影し、画像認識により位置調整を行ないながら、該ICチップを該ベース上に搭載することを特徴とする請求項1から4のうちいずれか1項記載のICチップ実装方法。
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CN101303988B (zh) | 2012-02-08 |
US7214563B2 (en) | 2007-05-08 |
TWI315052B (en) | 2009-09-21 |
KR100824083B1 (ko) | 2008-04-21 |
KR20070115835A (ko) | 2007-12-06 |
EP1746651A2 (en) | 2007-01-24 |
CN100431125C (zh) | 2008-11-05 |
CN101303988A (zh) | 2008-11-12 |
JP4750492B2 (ja) | 2011-08-17 |
TW200705280A (en) | 2007-02-01 |
KR20070011066A (ko) | 2007-01-24 |
US20070020800A1 (en) | 2007-01-25 |
EP1746651A3 (en) | 2007-04-18 |
EP1746651B1 (en) | 2016-09-28 |
CN1901147A (zh) | 2007-01-24 |
KR100811039B1 (ko) | 2008-03-07 |
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