JP2007013447A5 - - Google Patents
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- Publication number
- JP2007013447A5 JP2007013447A5 JP2005190269A JP2005190269A JP2007013447A5 JP 2007013447 A5 JP2007013447 A5 JP 2007013447A5 JP 2005190269 A JP2005190269 A JP 2005190269A JP 2005190269 A JP2005190269 A JP 2005190269A JP 2007013447 A5 JP2007013447 A5 JP 2007013447A5
- Authority
- JP
- Japan
- Prior art keywords
- microresonator
- signal
- filter
- resonator
- input
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000010410 layer Substances 0.000 description 38
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 32
- 229920005591 polysilicon Polymers 0.000 description 32
- 230000003071 parasitic effect Effects 0.000 description 25
- 238000004891 communication Methods 0.000 description 22
- 239000012535 impurity Substances 0.000 description 19
- 239000012212 insulator Substances 0.000 description 17
- 230000005540 biological transmission Effects 0.000 description 16
- 239000004065 semiconductor Substances 0.000 description 16
- 239000000758 substrate Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005190269A JP4710435B2 (ja) | 2005-06-29 | 2005-06-29 | 微小共振器、バンドパスフィルタ、半導体装置、並びに通信装置 |
| US11/425,080 US7489212B2 (en) | 2005-06-29 | 2006-06-19 | Microresonator, band-pass filter, semiconductor device, and communication apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005190269A JP4710435B2 (ja) | 2005-06-29 | 2005-06-29 | 微小共振器、バンドパスフィルタ、半導体装置、並びに通信装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007013447A JP2007013447A (ja) | 2007-01-18 |
| JP2007013447A5 true JP2007013447A5 (enExample) | 2008-06-26 |
| JP4710435B2 JP4710435B2 (ja) | 2011-06-29 |
Family
ID=37588735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005190269A Expired - Lifetime JP4710435B2 (ja) | 2005-06-29 | 2005-06-29 | 微小共振器、バンドパスフィルタ、半導体装置、並びに通信装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7489212B2 (enExample) |
| JP (1) | JP4710435B2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4206904B2 (ja) * | 2003-11-06 | 2009-01-14 | ソニー株式会社 | Ｍｅｍｓ共振器 |
| EP1976015B1 (en) * | 2007-03-26 | 2014-09-10 | Semiconductor Energy Laboratory Co., Ltd. | Switching element, method for manufacturing the same, and display device including switching element |
| FR2939581B1 (fr) * | 2008-12-09 | 2010-11-26 | Commissariat Energie Atomique | Reseau de resonateurs couples, filtre passe-bande et oscillateur. |
| JP2010280035A (ja) * | 2009-06-04 | 2010-12-16 | Toshiba Corp | Ｍｅｍｓデバイスとその製造方法 |
| JP6724394B2 (ja) * | 2016-02-02 | 2020-07-15 | セイコーエプソン株式会社 | 発振モジュール、電子機器及び移動体 |
| KR102236099B1 (ko) * | 2019-10-25 | 2021-04-05 | 삼성전기주식회사 | 멀티 터치의 위치 식별이 가능한 터치 센싱 장치 및 전자 기기 |
| TWI779534B (zh) * | 2020-03-25 | 2022-10-01 | 昇佳電子股份有限公司 | 電容感測電路 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6557419B1 (en) * | 1996-12-31 | 2003-05-06 | Honeywell International Inc. | Zero TCF thin film resonator |
| US6211598B1 (en) * | 1999-09-13 | 2001-04-03 | Jds Uniphase Inc. | In-plane MEMS thermal actuator and associated fabrication methods |
| US6262464B1 (en) * | 2000-06-19 | 2001-07-17 | International Business Machines Corporation | Encapsulated MEMS brand-pass filter for integrated circuits |
| US6987432B2 (en) * | 2003-04-16 | 2006-01-17 | Robert Bosch Gmbh | Temperature compensation for silicon MEMS resonator |
| JP4341288B2 (ja) | 2003-04-21 | 2009-10-07 | ソニー株式会社 | Ｍｅｍｓ型共振器及びその製造方法、並びにフィルタ |
| KR100485702B1 (ko) * | 2003-05-29 | 2005-04-28 | 삼성전자주식회사 | 지지대를 갖는 박막 벌크 음향 공진기 및 그 제조방법 |
| JP4415616B2 (ja) * | 2003-09-11 | 2010-02-17 | ソニー株式会社 | マイクロマシン |
| JP4586404B2 (ja) * | 2004-04-28 | 2010-11-24 | ソニー株式会社 | フィルタ装置及び送受信機 |
-
2005
- 2005-06-29 JP JP2005190269A patent/JP4710435B2/ja not_active Expired - Lifetime
-
2006
- 2006-06-19 US US11/425,080 patent/US7489212B2/en not_active Expired - Fee Related
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