JP2006522079A - アセチレンに含まれる溶媒の除去方法及び前記方法を実施するための装置 - Google Patents
アセチレンに含まれる溶媒の除去方法及び前記方法を実施するための装置 Download PDFInfo
- Publication number
- JP2006522079A JP2006522079A JP2006505854A JP2006505854A JP2006522079A JP 2006522079 A JP2006522079 A JP 2006522079A JP 2006505854 A JP2006505854 A JP 2006505854A JP 2006505854 A JP2006505854 A JP 2006505854A JP 2006522079 A JP2006522079 A JP 2006522079A
- Authority
- JP
- Japan
- Prior art keywords
- acetylene
- solvent
- pressure
- gas stream
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 title claims abstract description 43
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 title claims abstract description 43
- 238000000034 method Methods 0.000 title claims abstract description 31
- 239000002904 solvent Substances 0.000 title claims abstract description 24
- 239000007788 liquid Substances 0.000 claims abstract description 14
- 239000012535 impurity Substances 0.000 claims abstract description 13
- 238000001179 sorption measurement Methods 0.000 claims abstract description 12
- 238000000746 purification Methods 0.000 claims abstract description 7
- 239000007787 solid Substances 0.000 claims abstract description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 12
- 239000003463 adsorbent Substances 0.000 claims description 12
- 239000002245 particle Substances 0.000 claims description 5
- 238000001816 cooling Methods 0.000 claims description 4
- 238000000926 separation method Methods 0.000 claims description 4
- 239000000203 mixture Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000011877 solvent mixture Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 24
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000003860 storage Methods 0.000 description 3
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 230000008929 regeneration Effects 0.000 description 2
- 238000011069 regeneration method Methods 0.000 description 2
- 239000013557 residual solvent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910001868 water Inorganic materials 0.000 description 2
- 239000005997 Calcium carbide Substances 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 230000001172 regenerating effect Effects 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- CLZWAWBPWVRRGI-UHFFFAOYSA-N tert-butyl 2-[2-[2-[2-[bis[2-[(2-methylpropan-2-yl)oxy]-2-oxoethyl]amino]-5-bromophenoxy]ethoxy]-4-methyl-n-[2-[(2-methylpropan-2-yl)oxy]-2-oxoethyl]anilino]acetate Chemical compound CC1=CC=C(N(CC(=O)OC(C)(C)C)CC(=O)OC(C)(C)C)C(OCCOC=2C(=CC=C(Br)C=2)N(CC(=O)OC(C)(C)C)CC(=O)OC(C)(C)C)=C1 CLZWAWBPWVRRGI-UHFFFAOYSA-N 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C7/00—Purification; Separation; Use of additives
- C07C7/12—Purification; Separation; Use of additives by adsorption, i.e. purification or separation of hydrocarbons with the aid of solids, e.g. with ion-exchangers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Water Supply & Treatment (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Separation Of Gases By Adsorption (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0304192A FR2853313B1 (fr) | 2003-04-04 | 2003-04-04 | Procede d'elimination d'un solvant contenu dans l'acetylene, installation pour la mise en oeuvre du procede |
| PCT/FR2004/050112 WO2004089859A2 (fr) | 2003-04-04 | 2004-03-17 | Procede d'elimination d'un solvant contenu dans l'acetylene. installation pour la mise en oeuvre du procede |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010186242A Division JP2011021017A (ja) | 2003-04-04 | 2010-08-23 | アセチレンに含まれる溶媒の除去方法及び前記方法を実施するための装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006522079A true JP2006522079A (ja) | 2006-09-28 |
| JP2006522079A5 JP2006522079A5 (enExample) | 2010-10-21 |
Family
ID=32982233
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006505854A Pending JP2006522079A (ja) | 2003-04-04 | 2004-03-17 | アセチレンに含まれる溶媒の除去方法及び前記方法を実施するための装置 |
| JP2010186242A Withdrawn JP2011021017A (ja) | 2003-04-04 | 2010-08-23 | アセチレンに含まれる溶媒の除去方法及び前記方法を実施するための装置 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010186242A Withdrawn JP2011021017A (ja) | 2003-04-04 | 2010-08-23 | アセチレンに含まれる溶媒の除去方法及び前記方法を実施するための装置 |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1613575A2 (enExample) |
| JP (2) | JP2006522079A (enExample) |
| FR (1) | FR2853313B1 (enExample) |
| WO (1) | WO2004089859A2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010070554A (ja) * | 2008-09-16 | 2010-04-02 | Air Products & Chemicals Inc | アセチレンを供給するための方法およびシステム |
| KR101493756B1 (ko) * | 2008-09-16 | 2015-02-17 | 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 | 아세틸렌을 제공하기 위한 방법 및 시스템 |
| JP2019099847A (ja) * | 2017-11-29 | 2019-06-24 | 大陽日酸株式会社 | 真空浸炭炉用アセチレンガス供給装置及びその供給方法 |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7915166B1 (en) | 2007-02-22 | 2011-03-29 | Novellus Systems, Inc. | Diffusion barrier and etch stop films |
| US20080242912A1 (en) * | 2007-03-29 | 2008-10-02 | Olivier Letessier | Methods and Apparatus for Providing a High Purity Acetylene Product |
| FR2915991A1 (fr) * | 2007-07-17 | 2008-11-14 | Air Liquide | Nouveau procede d'elimination d'un solvant contenu dans de l'acetylene detendu. installation pour la mise en oeuvre du procede |
| FR2912401A1 (fr) * | 2007-07-17 | 2008-08-15 | Air Liquide | Nouveau procede d'elimination d'un solvant contenu dans de l'acetylene sous pression. installation pour la mise en oeuvre du procede |
| US8962101B2 (en) | 2007-08-31 | 2015-02-24 | Novellus Systems, Inc. | Methods and apparatus for plasma-based deposition |
| US7820556B2 (en) * | 2008-06-04 | 2010-10-26 | Novellus Systems, Inc. | Method for purifying acetylene gas for use in semiconductor processes |
| US8435608B1 (en) | 2008-06-27 | 2013-05-07 | Novellus Systems, Inc. | Methods of depositing smooth and conformal ashable hard mask films |
| US8398747B2 (en) | 2009-06-23 | 2013-03-19 | Praxair Technology, Inc. | Processes for purification of acetylene |
| US8563414B1 (en) | 2010-04-23 | 2013-10-22 | Novellus Systems, Inc. | Methods for forming conductive carbon films by PECVD |
| SG195494A1 (en) | 2012-05-18 | 2013-12-30 | Novellus Systems Inc | Carbon deposition-etch-ash gap fill process |
| US9362133B2 (en) | 2012-12-14 | 2016-06-07 | Lam Research Corporation | Method for forming a mask by etching conformal film on patterned ashable hardmask |
| US9304396B2 (en) | 2013-02-25 | 2016-04-05 | Lam Research Corporation | PECVD films for EUV lithography |
| US9589799B2 (en) | 2013-09-30 | 2017-03-07 | Lam Research Corporation | High selectivity and low stress carbon hardmask by pulsed low frequency RF power |
| US9320387B2 (en) | 2013-09-30 | 2016-04-26 | Lam Research Corporation | Sulfur doped carbon hard masks |
| TW202113121A (zh) | 2019-05-29 | 2021-04-01 | 美商蘭姆研究公司 | 藉由高功率脈衝低頻率射頻產生的高選擇性、低應力、且低氫之類鑽石碳硬遮罩 |
| CN114342043A (zh) | 2019-08-30 | 2022-04-12 | 朗姆研究公司 | 低压下的高密度、模量和硬度的非晶碳膜 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5220442B1 (enExample) * | 1967-09-09 | 1977-06-03 | ||
| JPS6219539A (ja) * | 1985-07-18 | 1987-01-28 | Nichigou Asechiren Kk | アセチレンの精製法およびそれに用いる装置 |
| JPS62285988A (ja) * | 1986-06-04 | 1987-12-11 | Nichigou Asechiren Kk | 高純度アセチレンガスの提供方法およびそれに用いる精製装置 |
| JP2004148257A (ja) * | 2002-10-31 | 2004-05-27 | Nichigo Acetylene Kk | 可搬式超高純度アセチレン供給装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6446098A (en) * | 1987-08-07 | 1989-02-20 | Nichigo Acetylen | Method for cleaning inside of container of dissolved acetylene |
-
2003
- 2003-04-04 FR FR0304192A patent/FR2853313B1/fr not_active Expired - Fee Related
-
2004
- 2004-03-17 JP JP2006505854A patent/JP2006522079A/ja active Pending
- 2004-03-17 EP EP04721218A patent/EP1613575A2/fr not_active Withdrawn
- 2004-03-17 WO PCT/FR2004/050112 patent/WO2004089859A2/fr not_active Ceased
-
2010
- 2010-08-23 JP JP2010186242A patent/JP2011021017A/ja not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5220442B1 (enExample) * | 1967-09-09 | 1977-06-03 | ||
| JPS6219539A (ja) * | 1985-07-18 | 1987-01-28 | Nichigou Asechiren Kk | アセチレンの精製法およびそれに用いる装置 |
| JPS62285988A (ja) * | 1986-06-04 | 1987-12-11 | Nichigou Asechiren Kk | 高純度アセチレンガスの提供方法およびそれに用いる精製装置 |
| JP2004148257A (ja) * | 2002-10-31 | 2004-05-27 | Nichigo Acetylene Kk | 可搬式超高純度アセチレン供給装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010070554A (ja) * | 2008-09-16 | 2010-04-02 | Air Products & Chemicals Inc | アセチレンを供給するための方法およびシステム |
| JP2014055675A (ja) * | 2008-09-16 | 2014-03-27 | Air Products And Chemicals Inc | アセチレンを供給するための方法およびシステム |
| KR101493756B1 (ko) * | 2008-09-16 | 2015-02-17 | 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 | 아세틸렌을 제공하기 위한 방법 및 시스템 |
| JP2019099847A (ja) * | 2017-11-29 | 2019-06-24 | 大陽日酸株式会社 | 真空浸炭炉用アセチレンガス供給装置及びその供給方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2011021017A (ja) | 2011-02-03 |
| EP1613575A2 (fr) | 2006-01-11 |
| WO2004089859A3 (fr) | 2004-11-25 |
| FR2853313A1 (fr) | 2004-10-08 |
| WO2004089859A2 (fr) | 2004-10-21 |
| FR2853313B1 (fr) | 2005-05-06 |
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