JP2006513046A5 - - Google Patents
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- Publication number
- JP2006513046A5 JP2006513046A5 JP2004567099A JP2004567099A JP2006513046A5 JP 2006513046 A5 JP2006513046 A5 JP 2006513046A5 JP 2004567099 A JP2004567099 A JP 2004567099A JP 2004567099 A JP2004567099 A JP 2004567099A JP 2006513046 A5 JP2006513046 A5 JP 2006513046A5
- Authority
- JP
- Japan
- Prior art keywords
- getter material
- deposit
- heating
- metals
- additional layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims 11
- 229910052751 metal Inorganic materials 0.000 claims 4
- 239000002184 metal Substances 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 3
- 150000002739 metals Chemical class 0.000 claims 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims 2
- 229910045601 alloy Inorganic materials 0.000 claims 2
- 239000000956 alloy Substances 0.000 claims 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 1
- 229910052782 aluminium Inorganic materials 0.000 claims 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 1
- 239000011651 chromium Substances 0.000 claims 1
- 229910052804 chromium Inorganic materials 0.000 claims 1
- 239000010941 cobalt Substances 0.000 claims 1
- 229910017052 cobalt Inorganic materials 0.000 claims 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 1
- 229910052742 iron Inorganic materials 0.000 claims 1
- 229910052746 lanthanum Inorganic materials 0.000 claims 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
- 229910052759 nickel Inorganic materials 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 230000005693 optoelectronics Effects 0.000 claims 1
- 229910052715 tantalum Inorganic materials 0.000 claims 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052720 vanadium Inorganic materials 0.000 claims 1
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims 1
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims 1
- 229910052726 zirconium Inorganic materials 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT000069A ITMI20030069A1 (it) | 2003-01-17 | 2003-01-17 | Dispositivi micromeccanici o microoptoelettronici con deposito di materiale getter e riscaldatore integrato. |
| PCT/IT2003/000857 WO2004065289A2 (en) | 2003-01-17 | 2003-12-24 | Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006513046A JP2006513046A (ja) | 2006-04-20 |
| JP2006513046A5 true JP2006513046A5 (enExample) | 2006-12-07 |
Family
ID=32750478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004567099A Pending JP2006513046A (ja) | 2003-01-17 | 2003-12-24 | ゲッター物質のデポジットと組み込まれたヒーターを有するマイクロ機械デバイス又はマイクロオプトエレクトロニック・デバイス、及びその製造のためのサポート |
Country Status (11)
| Country | Link |
|---|---|
| EP (1) | EP1592643A2 (enExample) |
| JP (1) | JP2006513046A (enExample) |
| KR (1) | KR20050092426A (enExample) |
| CN (1) | CN100453442C (enExample) |
| AU (1) | AU2003295223A1 (enExample) |
| CA (1) | CA2511836A1 (enExample) |
| IT (1) | ITMI20030069A1 (enExample) |
| MY (1) | MY157923A (enExample) |
| NO (1) | NO20053804L (enExample) |
| TW (1) | TW200500291A (enExample) |
| WO (1) | WO2004065289A2 (enExample) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102005001449B3 (de) * | 2005-01-12 | 2006-07-20 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren zum Erzeugen eines vorgegebenen Innendrucks in einem Hohlraum eines Halbleiterbauelements |
| ITMI20052343A1 (it) * | 2005-12-06 | 2007-06-07 | Getters Spa | Processo per la produzione di dispositivi micromeccanici contenenti un materiale getter e dispositivi cosi'prodotti |
| FR2898597B1 (fr) | 2006-03-16 | 2008-09-19 | Commissariat Energie Atomique | Encapsulation dans une cavite hermetique d'un compose microelectronique, notamment d'un mems |
| FR2903678B1 (fr) * | 2006-07-13 | 2008-10-24 | Commissariat Energie Atomique | Microcomposant encapsule equipe d'au moins un getter |
| US7402905B2 (en) * | 2006-08-07 | 2008-07-22 | Honeywell International Inc. | Methods of fabrication of wafer-level vacuum packaged devices |
| ITMI20070301A1 (it) | 2007-02-16 | 2008-08-17 | Getters Spa | Supporti comprendenti materiali getter e sorgenti di metalli alcalini o alcalino-terrosi per sistemi di termoregolazione basati su effetto tunnel |
| FR2933389B1 (fr) * | 2008-07-01 | 2010-10-29 | Commissariat Energie Atomique | Structure a base d'un materiau getter suspendu |
| JP2010251702A (ja) * | 2009-03-27 | 2010-11-04 | Kyocera Corp | 電子部品、パッケージおよび赤外線センサ |
| FR2956521B1 (fr) * | 2010-02-16 | 2012-08-17 | Thales Sa | Dispositif comprenant des composants electriques, electroniques, electromecaniques ou electro-optiques, a sensibilite reduite a faible debit de dose |
| US9491802B2 (en) | 2012-02-17 | 2016-11-08 | Honeywell International Inc. | On-chip alkali dispenser |
| EP2736071B8 (en) | 2012-11-22 | 2017-04-19 | Tronic's Microsystems S.A. | Wafer level package with getter |
| JP6193480B2 (ja) | 2013-05-24 | 2017-09-06 | スナップトラック・インコーポレーテッド | 微小電気機械システムデバイスパッケージおよび微小電気機械システムデバイスパッケージを製造するための方法 |
| EP2813465B1 (en) | 2013-06-12 | 2020-01-15 | Tronic's Microsystems | MEMS device with getter layer |
| FR3008965B1 (fr) * | 2013-07-26 | 2017-03-03 | Commissariat Energie Atomique | Structure d'encapsulation comprenant un capot renforce mecaniquement et a effet getter |
| CN104743502A (zh) * | 2013-12-31 | 2015-07-01 | 北京有色金属研究总院 | 一种具有复合吸气剂层的mems组件及其制备方法 |
| JP2017224704A (ja) | 2016-06-15 | 2017-12-21 | セイコーエプソン株式会社 | 真空パッケージ、電子デバイス、電子機器及び移動体 |
| CN109173690B (zh) * | 2018-09-20 | 2020-10-09 | 内蒙古科技大学 | 一种用于金属材料热处理中的空气消耗剂 |
| CN114057156A (zh) * | 2021-12-21 | 2022-02-18 | 罕王微电子（辽宁）有限公司 | 一种用于晶圆级mems真空封装的金属扩散吸附系统及工艺 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5734226A (en) * | 1992-08-12 | 1998-03-31 | Micron Technology, Inc. | Wire-bonded getters useful in evacuated displays |
| US5610438A (en) * | 1995-03-08 | 1997-03-11 | Texas Instruments Incorporated | Micro-mechanical device with non-evaporable getter |
| US5837935A (en) * | 1996-02-26 | 1998-11-17 | Ford Motor Company | Hermetic seal for an electronic component having a secondary chamber |
| SE9700612D0 (sv) * | 1997-02-20 | 1997-02-20 | Cecap Ab | Sensorelement med integrerat referenstryck |
| US6992375B2 (en) * | 2000-11-30 | 2006-01-31 | Texas Instruments Incorporated | Anchor for device package |
-
2003
- 2003-01-17 IT IT000069A patent/ITMI20030069A1/it unknown
- 2003-12-24 AU AU2003295223A patent/AU2003295223A1/en not_active Abandoned
- 2003-12-24 EP EP03786227A patent/EP1592643A2/en not_active Withdrawn
- 2003-12-24 CA CA002511836A patent/CA2511836A1/en not_active Abandoned
- 2003-12-24 CN CNB200380108858XA patent/CN100453442C/zh not_active Expired - Fee Related
- 2003-12-24 JP JP2004567099A patent/JP2006513046A/ja active Pending
- 2003-12-24 KR KR1020057013228A patent/KR20050092426A/ko not_active Ceased
- 2003-12-24 WO PCT/IT2003/000857 patent/WO2004065289A2/en not_active Ceased
-
2004
- 2004-01-07 TW TW093100361A patent/TW200500291A/zh unknown
- 2004-01-15 MY MYPI20040115A patent/MY157923A/en unknown
-
2005
- 2005-08-12 NO NO20053804A patent/NO20053804L/no unknown
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