JP2006513046A - ゲッター物質のデポジットと組み込まれたヒーターを有するマイクロ機械デバイス又はマイクロオプトエレクトロニック・デバイス、及びその製造のためのサポート - Google Patents

ゲッター物質のデポジットと組み込まれたヒーターを有するマイクロ機械デバイス又はマイクロオプトエレクトロニック・デバイス、及びその製造のためのサポート Download PDF

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JP2006513046A
JP2006513046A JP2004567099A JP2004567099A JP2006513046A JP 2006513046 A JP2006513046 A JP 2006513046A JP 2004567099 A JP2004567099 A JP 2004567099A JP 2004567099 A JP2004567099 A JP 2004567099A JP 2006513046 A JP2006513046 A JP 2006513046A
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Japan
Prior art keywords
getter material
deposit
getter
base
layer
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JP2004567099A
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Japanese (ja)
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JP2006513046A5 (enExample
Inventor
アミオッティ，マルコ
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サエス ゲッターズ ソチエタ ペル アツィオニ
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Publication of JP2006513046A publication Critical patent/JP2006513046A/ja
Publication of JP2006513046A5 publication Critical patent/JP2006513046A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0035—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS
    • B81B7/0038—Packages or encapsulation for maintaining a controlled atmosphere inside of the chamber containing the MEMS using materials for controlling the level of pressure, contaminants or moisture inside of the package, e.g. getters
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP2004567099A 2003-01-17 2003-12-24 ゲッター物質のデポジットと組み込まれたヒーターを有するマイクロ機械デバイス又はマイクロオプトエレクトロニック・デバイス、及びその製造のためのサポート Pending JP2006513046A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT000069A ITMI20030069A1 (it) 2003-01-17 2003-01-17 Dispositivi micromeccanici o microoptoelettronici con deposito di materiale getter e riscaldatore integrato.
PCT/IT2003/000857 WO2004065289A2 (en) 2003-01-17 2003-12-24 Micromechanical or microoptoelectronic devices with deposit of getter material and integrated heater, and support for the production thereof

Publications (2)

Publication Number Publication Date
JP2006513046A true JP2006513046A (ja) 2006-04-20
JP2006513046A5 JP2006513046A5 (enExample) 2006-12-07

Family

ID=32750478

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004567099A Pending JP2006513046A (ja) 2003-01-17 2003-12-24 ゲッター物質のデポジットと組み込まれたヒーターを有するマイクロ機械デバイス又はマイクロオプトエレクトロニック・デバイス、及びその製造のためのサポート

Country Status (11)

Country Link
EP (1) EP1592643A2 (enExample)
JP (1) JP2006513046A (enExample)
KR (1) KR20050092426A (enExample)
CN (1) CN100453442C (enExample)
AU (1) AU2003295223A1 (enExample)
CA (1) CA2511836A1 (enExample)
IT (1) ITMI20030069A1 (enExample)
MY (1) MY157923A (enExample)
NO (1) NO20053804L (enExample)
TW (1) TW200500291A (enExample)
WO (1) WO2004065289A2 (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008072091A (ja) * 2006-07-13 2008-03-27 Commiss Energ Atom 少なくとも１つのゲッターを備えた密閉超小型部品
JP2008132587A (ja) * 2006-08-07 2008-06-12 Honeywell Internatl Inc ウェハレベル真空パッケージデバイスの製造方法
JP2008527730A (ja) * 2005-01-12 2008-07-24 フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ 半導体デバイスの空洞内に所定の内圧を形成する方法
JP2010012595A (ja) * 2008-07-01 2010-01-21 Commiss Energ Atom 吊り下げゲッター材料ベース構造
JP2010251702A (ja) * 2009-03-27 2010-11-04 Kyocera Corp 電子部品、パッケージおよび赤外線センサ
US10199515B2 (en) 2016-06-15 2019-02-05 Seiko Epson Corporation Vacuum package, electronic device, and vehicle

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITMI20052343A1 (it) * 2005-12-06 2007-06-07 Getters Spa Processo per la produzione di dispositivi micromeccanici contenenti un materiale getter e dispositivi cosi'prodotti
FR2898597B1 (fr) 2006-03-16 2008-09-19 Commissariat Energie Atomique Encapsulation dans une cavite hermetique d'un compose microelectronique, notamment d'un mems
ITMI20070301A1 (it) 2007-02-16 2008-08-17 Getters Spa Supporti comprendenti materiali getter e sorgenti di metalli alcalini o alcalino-terrosi per sistemi di termoregolazione basati su effetto tunnel
FR2956521B1 (fr) * 2010-02-16 2012-08-17 Thales Sa Dispositif comprenant des composants electriques, electroniques, electromecaniques ou electro-optiques, a sensibilite reduite a faible debit de dose
US9491802B2 (en) 2012-02-17 2016-11-08 Honeywell International Inc. On-chip alkali dispenser
EP2736071B8 (en) 2012-11-22 2017-04-19 Tronic's Microsystems S.A. Wafer level package with getter
JP6193480B2 (ja) 2013-05-24 2017-09-06 スナップトラック・インコーポレーテッド 微小電気機械システムデバイスパッケージおよび微小電気機械システムデバイスパッケージを製造するための方法
EP2813465B1 (en) 2013-06-12 2020-01-15 Tronic's Microsystems MEMS device with getter layer
FR3008965B1 (fr) * 2013-07-26 2017-03-03 Commissariat Energie Atomique Structure d'encapsulation comprenant un capot renforce mecaniquement et a effet getter
CN104743502A (zh) * 2013-12-31 2015-07-01 北京有色金属研究总院 一种具有复合吸气剂层的mems组件及其制备方法
CN109173690B (zh) * 2018-09-20 2020-10-09 内蒙古科技大学 一种用于金属材料热处理中的空气消耗剂
CN114057156A (zh) * 2021-12-21 2022-02-18 罕王微电子（辽宁）有限公司 一种用于晶圆级mems真空封装的金属扩散吸附系统及工艺

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5734226A (en) * 1992-08-12 1998-03-31 Micron Technology, Inc. Wire-bonded getters useful in evacuated displays
US5610438A (en) * 1995-03-08 1997-03-11 Texas Instruments Incorporated Micro-mechanical device with non-evaporable getter
US5837935A (en) * 1996-02-26 1998-11-17 Ford Motor Company Hermetic seal for an electronic component having a secondary chamber
SE9700612D0 (sv) * 1997-02-20 1997-02-20 Cecap Ab Sensorelement med integrerat referenstryck
US6992375B2 (en) * 2000-11-30 2006-01-31 Texas Instruments Incorporated Anchor for device package

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008527730A (ja) * 2005-01-12 2008-07-24 フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ 半導体デバイスの空洞内に所定の内圧を形成する方法
JP4809848B2 (ja) * 2005-01-12 2011-11-09 フラウンホッファー−ゲゼルシャフト ツァ フェルダールング デァ アンゲヴァンテン フォアシュンク エー．ファオ 半導体デバイスの空洞内に所定の内圧を形成する方法
JP2008072091A (ja) * 2006-07-13 2008-03-27 Commiss Energ Atom 少なくとも１つのゲッターを備えた密閉超小型部品
JP2008132587A (ja) * 2006-08-07 2008-06-12 Honeywell Internatl Inc ウェハレベル真空パッケージデバイスの製造方法
JP2010012595A (ja) * 2008-07-01 2010-01-21 Commiss Energ Atom 吊り下げゲッター材料ベース構造
US9260291B2 (en) 2008-07-01 2016-02-16 Commissariat A L'energie Atomique Suspended getter material-based structure
JP2010251702A (ja) * 2009-03-27 2010-11-04 Kyocera Corp 電子部品、パッケージおよび赤外線センサ
US10199515B2 (en) 2016-06-15 2019-02-05 Seiko Epson Corporation Vacuum package, electronic device, and vehicle

Also Published As

Publication number Publication date
KR20050092426A (ko) 2005-09-21
ITMI20030069A1 (it) 2004-07-18
HK1087090A1 (zh) 2006-10-06
WO2004065289A2 (en) 2004-08-05
WO2004065289A3 (en) 2005-01-06
AU2003295223A1 (en) 2004-08-13
MY157923A (en) 2016-08-15
CN1738765A (zh) 2006-02-22
CA2511836A1 (en) 2004-08-05
EP1592643A2 (en) 2005-11-09
TW200500291A (en) 2005-01-01
CN100453442C (zh) 2009-01-21
NO20053804L (no) 2005-08-12

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