JP2006505961A - 低ノイズ特性のプローブステーション - Google Patents
低ノイズ特性のプローブステーション Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/18—Screening arrangements against electric or magnetic fields, e.g. against earth's field
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
- G01R19/0046—Arrangements for measuring currents or voltages or for indicating presence or sign thereof characterised by a specific application or detail not covered by any other subgroup of G01R19/00
- G01R19/0053—Noise discrimination; Analog sampling; Measuring transients
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B11/00—Communication cables or conductors
- H01B11/18—Coaxial cables; Analogous cables having more than one inner conductor within a common outer conductor
- H01B11/20—Cables having a multiplicity of coaxial lines
- H01B11/206—Tri-conductor coaxial cables
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Power Engineering (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
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Abstract
Description
Claims (12)
- テスト用装置を検査するためのプローブステーションであって、
(a)前記テスト用装置を支持する支持体と、
(b)前記支持体で支持しながら前記テスト用装置を検査するプローブ装置と、
(c)前記プローブ装置をテスト機器に接続するケーブルと、
を具え、
前記ケーブルが、
(i)第1の誘電体が第1の導体と第2の導体との間に設けられているような、前記第1の導体、前記第1の誘電体、および前記第2の導体、
(ii)第2の誘電体が前記第2の導体と第3の導体との間に設けられているような、前記第2の誘電体および前記第3の導体、
(iii)前記第2の誘電体と前記第3の導体との間の摩擦電流生成を、前記第2の誘電体と前記第3の導体とを直接接合させた場合に起こるであろうものよりも小さいものに減少させるのに適した組成を持つ、前記第2の誘電体と前記第3の導体との間に設けられている、第1の物質層、を含む、
プローブステーション。 - 請求項1に記載のプローブステーションにおいて、
前記第1の誘電体と前記第2の導体との間の摩擦電流生成を、前記第1の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第2の導体との間に設けられている第2の物質層をも含む、
ことを特徴とするプローブステーション。 - テスト用装置を検査するためのプローブステーションであって、
(a)前記テスト用装置を支持する支持体と、
(b)前記支持体で支持しながら前記テスト用装置を検査するプローブ装置と、
(c)前記プローブ装置をテスト機器に接続するケーブルと、
を具え、
前記ケーブルが、
(i)第1の誘電体が第1の導体と第2の導体との間に設けられている、前記第1の導体、前記第1の誘電体、および前記第2の導体、
(ii)第2の誘電体が前記第2の導体と第3の導体との間に設けられている、前記第2の誘電体および前記第3の導体、
(iii)前記第2の誘電体と前記第2の導体との間の摩擦電流生成を、前記第2の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうものよりも小さいものに減少させるのに適した組成を持つ、前記第2の誘電体と前記第2の導体との間に設けられている、第1の物質層、を含む、
プローブステーション。 - 請求項3に記載のプローブステーションにおいて、
前記第1の誘電体と前記第2の導体との間の摩擦電流生成を、前記第1の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第2の導体との間に設けられている第2の物質層をも含む、
ことを特徴とするプローブステーション。 - テスト用装置を検査するためのプローブステーションであって、
(a)前記テスト用装置を支持する支持体と、
(b)前記支持体で支持しながら前記テスト用装置を検査するプローブ装置と、
(c)前記プローブ装置をテスト機器に接続するケーブルと、
を具え、
前記ケーブルが、
(i)第1の誘電体が第1の導体と第2の導体との間に設けられている、前記第1の導体、前記第1の誘電体、および前記第2の導体、
(ii)第2の誘電体が前記第2の導体と第3の導体との間に設けられている、前記第2の誘電体および前記第3の導体、
(iii)前記第1の誘電体と前記第1の導体との間の摩擦電流生成を、前記第1の誘電体と前記第1の導体とを直接接合させた場合に起こるであろうものよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第1の導体との間に設けられている、第1の物質層、を含む、
プローブステーション。 - 請求項5に記載のプローブステーションにおいて、
前記第1の誘電体と前記第2の導体との間の摩擦電流生成を、前記第1の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第2の導体との間に設けられている第2の物質層をも含む、
ことを特徴とするプローブステーション。 - (i)第1の誘電体が第1の導体と第2の導体との間に設けられている、前記第1の導体、前記第1の誘電体、および前記第2の導体、
(ii) 第2の誘電体が前記第2の導体と第3の導体との間に設けられている、前記第2の誘電体および前記第3の導体、
(iii)前記第2の誘電体と前記第3の導体との間の摩擦電流生成を、前記第2の誘電体と前記第3の導体とを直接接合させた場合に起こるであろうものよりも小さいものに減少させるのに適した組成を持つ、前記第2の誘電体と前記第3の導体との間に設けられている、第1の物質層、
を具えるケーブル。 - 請求項7に記載のケーブルにおいて、
前記第1の誘電体と前記第2の導体との間の摩擦電流生成を、前記第1の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第2の導体との間に設けられている第2の物質層、
をも含むことを特徴とするケーブル。 - (i)第1の誘電体が第1の導体と第2の導体との間に設けられている、前記第1の導体、前記第1の誘電体、および前記第2の導体、
(ii)第2の誘電体が前記第2の導体と第3の導体との間に設けられている、前記第2の誘電体および前記第3の導体、
(iii)前記第2の誘電体と前記第2の導体との間の摩擦電流生成を、前記第2の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうものよりも小さいものに減少させるのに適した組成を持つ、前記第2の誘電体と前記第2の導体との間に設けられている、第1の物質層、
を具えるケーブル。 - 請求項9に記載のケーブルにおいて、
前記第1の誘電体と前記第2の導体との間の摩擦電流生成を、前記第1の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第2の導体との間に設けられている第2の物質層、
をも含むことを特徴とするケーブル。 - (i)第1の誘電体が第1の導体と第2の導体との間に設けられている、前記第1の導体、前記第1の誘電体、および前記第2の導体、
(ii)第2の誘電体が前記第2の導体と第3の導体との間に設けられている、前記第2の誘電体および前記第3の導体、
(iii)前記第1の誘電体と前記第1の導体との間の摩擦電流生成を、前記第1の誘電体と前記第1の導体とを直接接合させた場合に起こるであろうものよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第1の導体との間に設けられている、第1の物質層、
を具えるケーブル。 - 請求項11に記載のケーブルにおいて、
前記第1の誘電体と前記第2の導体との間の摩擦電流生成を、前記第1の誘電体と前記第2の導体とを直接接合させた場合に起こるであろうよりも小さいものに減少させるのに適した組成を持つ、前記第1の誘電体と前記第2の導体との間に設けられている第2の物質層、
をも含むことを特徴とするケーブル。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US42498602P | 2002-11-08 | 2002-11-08 | |
US10/666,219 US6847219B1 (en) | 2002-11-08 | 2003-09-18 | Probe station with low noise characteristics |
PCT/US2003/033842 WO2004044949A2 (en) | 2002-11-08 | 2003-10-24 | Probe station with low noise characteristics |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2006505961A true JP2006505961A (ja) | 2006-02-16 |
Family
ID=32314566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005507057A Pending JP2006505961A (ja) | 2002-11-08 | 2003-10-24 | 低ノイズ特性のプローブステーション |
Country Status (6)
Country | Link |
---|---|
US (4) | US6847219B1 (ja) |
EP (1) | EP1559116A4 (ja) |
JP (1) | JP2006505961A (ja) |
KR (1) | KR100753945B1 (ja) |
AU (1) | AU2003291650A1 (ja) |
WO (1) | WO2004044949A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013520770A (ja) * | 2010-02-22 | 2013-06-06 | カスケード マイクロテック インコーポレイテッド | 相互接続を改良したプローブステーション |
Families Citing this family (47)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6380751B2 (en) * | 1992-06-11 | 2002-04-30 | Cascade Microtech, Inc. | Wafer probe station having environment control enclosure |
US5345170A (en) * | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
US5561377A (en) * | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
US6586954B2 (en) * | 1998-02-10 | 2003-07-01 | Celadon Systems, Inc. | Probe tile for probing semiconductor wafer |
US6201402B1 (en) * | 1997-04-08 | 2001-03-13 | Celadon Systems, Inc. | Probe tile and platform for large area wafer probing |
US6002263A (en) * | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
US6445202B1 (en) * | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US6914423B2 (en) * | 2000-09-05 | 2005-07-05 | Cascade Microtech, Inc. | Probe station |
US6965226B2 (en) * | 2000-09-05 | 2005-11-15 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US6836135B2 (en) * | 2001-08-31 | 2004-12-28 | Cascade Microtech, Inc. | Optical testing device |
US6777964B2 (en) * | 2002-01-25 | 2004-08-17 | Cascade Microtech, Inc. | Probe station |
US6847219B1 (en) * | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
US7250779B2 (en) * | 2002-11-25 | 2007-07-31 | Cascade Microtech, Inc. | Probe station with low inductance path |
US6861856B2 (en) * | 2002-12-13 | 2005-03-01 | Cascade Microtech, Inc. | Guarded tub enclosure |
US7170305B2 (en) * | 2005-02-24 | 2007-01-30 | Celadon Systems, Inc. | Apparatus and method for terminating probe apparatus of semiconductor wafer |
US6975128B1 (en) | 2003-03-28 | 2005-12-13 | Celadon Systems, Inc. | Electrical, high temperature test probe with conductive driven guard |
US7792552B2 (en) * | 2003-04-15 | 2010-09-07 | Ipventure, Inc. | Eyeglasses for wireless communications |
US7221172B2 (en) * | 2003-05-06 | 2007-05-22 | Cascade Microtech, Inc. | Switched suspended conductor and connection |
US7492172B2 (en) * | 2003-05-23 | 2009-02-17 | Cascade Microtech, Inc. | Chuck for holding a device under test |
US7250626B2 (en) * | 2003-10-22 | 2007-07-31 | Cascade Microtech, Inc. | Probe testing structure |
US7187188B2 (en) * | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
US7330041B2 (en) * | 2004-06-14 | 2008-02-12 | Cascade Microtech, Inc. | Localizing a temperature of a device for testing |
WO2006050395A2 (en) * | 2004-11-02 | 2006-05-11 | Umech Technologies, Co. | Optically enhanced digital imaging system |
US7535247B2 (en) * | 2005-01-31 | 2009-05-19 | Cascade Microtech, Inc. | Interface for testing semiconductors |
US7656172B2 (en) | 2005-01-31 | 2010-02-02 | Cascade Microtech, Inc. | System for testing semiconductors |
US20060169897A1 (en) * | 2005-01-31 | 2006-08-03 | Cascade Microtech, Inc. | Microscope system for testing semiconductors |
JP4356661B2 (ja) * | 2005-07-25 | 2009-11-04 | 住友電気工業株式会社 | ウェハ保持体およびそれを搭載したウェハプローバ |
US7671613B1 (en) * | 2006-01-06 | 2010-03-02 | Lecroy Corporation | Probing blade conductive connector for use with an electrical test probe |
US9140724B1 (en) | 2006-01-06 | 2015-09-22 | Lecroy Corporation | Compensating resistance probing tip optimized adapters for use with specific electrical test probes |
US9404940B1 (en) | 2006-01-06 | 2016-08-02 | Teledyne Lecroy, Inc. | Compensating probing tip optimized adapters for use with specific electrical test probes |
US7676953B2 (en) * | 2006-12-29 | 2010-03-16 | Signature Control Systems, Inc. | Calibration and metering methods for wood kiln moisture measurement |
US7568946B1 (en) * | 2007-01-16 | 2009-08-04 | Keithley Instruments, Inc. | Triaxial cable with a resistive inner shield |
US7728609B2 (en) * | 2007-05-25 | 2010-06-01 | Celadon Systems, Inc. | Replaceable probe apparatus for probing semiconductor wafer |
US8319503B2 (en) | 2008-11-24 | 2012-11-27 | Cascade Microtech, Inc. | Test apparatus for measuring a characteristic of a device under test |
JP5487661B2 (ja) * | 2009-03-19 | 2014-05-07 | ソニー株式会社 | シールドケーブル |
US8466704B1 (en) * | 2010-04-19 | 2013-06-18 | Altera Corporation | Probe cards with minimized cross-talk |
CN202177646U (zh) * | 2011-08-01 | 2012-03-28 | 鸿富锦精密工业(深圳)有限公司 | 探棒组件 |
US9086436B2 (en) * | 2011-12-19 | 2015-07-21 | Honeywell International Inc. | Method of high voltage detection and accurate phase angle measurement in cordless phasing meters |
WO2013134568A1 (en) * | 2012-03-07 | 2013-09-12 | Advantest Corporation | Shielded probe array |
US9082526B2 (en) * | 2012-06-25 | 2015-07-14 | International Business Machines Corporation | Shielded electrical signal cable |
US9502155B2 (en) * | 2014-08-07 | 2016-11-22 | General Electric Company | Coaxial or triaxial seal assembly |
US10275000B2 (en) * | 2016-09-06 | 2019-04-30 | Google Llc | Thermally conductive cables |
JP7138463B2 (ja) * | 2018-03-30 | 2022-09-16 | 株式会社日本マイクロニクス | プローバ |
US20200072870A1 (en) * | 2018-08-29 | 2020-03-05 | Samsung Display Co., Ltd. | Probe card and test device including the same |
US10950369B1 (en) * | 2020-07-20 | 2021-03-16 | Dell Products L.P. | Inverted cable design for high-speed, low loss signal transmission |
KR20220034494A (ko) | 2020-09-11 | 2022-03-18 | 삼성전자주식회사 | 근접장 검출용 프로브 및 이를 포함하는 근접장 검출 시스템 |
CN113488255B (zh) * | 2021-06-29 | 2022-10-04 | 晶锋集团股份有限公司 | 一种低传输阻抗电抗变频电缆材料及其制备方法 |
Family Cites Families (212)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1191486A (en) | 1914-03-20 | 1916-07-18 | Edward B Tyler | Expansion-joint. |
US1337866A (en) | 1917-09-27 | 1920-04-20 | Griffiths Ethel Grace | System for protecting electric cables |
US2142625A (en) | 1932-07-06 | 1939-01-03 | Hollandsche Draad En Kabelfab | High tension cable |
US2197081A (en) | 1937-06-14 | 1940-04-16 | Transit Res Corp | Motor support |
US2264685A (en) | 1940-06-28 | 1941-12-02 | Westinghouse Electric & Mfg Co | Insulating structure |
US2376101A (en) | 1942-04-01 | 1945-05-15 | Ferris Instr Corp | Electrical energy transmission |
US2389668A (en) | 1943-03-04 | 1945-11-27 | Barnes Drill Co | Indexing mechanism for machine tables |
US2471897A (en) | 1945-01-13 | 1949-05-31 | Trico Products Corp | Fluid motor packing |
US2812502A (en) * | 1953-07-07 | 1957-11-05 | Bell Telephone Labor Inc | Transposed coaxial conductor system |
CH364040A (fr) | 1960-04-19 | 1962-08-31 | Ipa Anstalt | Dispositif de détection pour vérifier si un élément d'une installation électrique est sous tension |
US3185927A (en) | 1961-01-31 | 1965-05-25 | Kulicke & Soffa Mfg Co | Probe instrument for inspecting semiconductor wafers including means for marking defective zones |
US3193712A (en) | 1962-03-21 | 1965-07-06 | Clarence A Harris | High voltage cable |
US3230299A (en) | 1962-07-18 | 1966-01-18 | Gen Cable Corp | Electrical cable with chemically bonded rubber layers |
US3256484A (en) | 1962-09-10 | 1966-06-14 | Tektronix Inc | High voltage test probe containing a part gas, part liquid dielectric fluid under pressure and having a transparent housing section for viewing the presence of the liquid therein |
US3176091A (en) | 1962-11-07 | 1965-03-30 | Helmer C Hanson | Controlled multiple switching unit |
US3192844A (en) | 1963-03-05 | 1965-07-06 | Kulicke And Soffa Mfg Company | Mask alignment fixture |
US3201721A (en) | 1963-12-30 | 1965-08-17 | Western Electric Co | Coaxial line to strip line connector |
US3405361A (en) | 1964-01-08 | 1968-10-08 | Signetics Corp | Fluid actuable multi-point microprobe for semiconductors |
US3289046A (en) | 1964-05-19 | 1966-11-29 | Gen Electric | Component chip mounted on substrate with heater pads therebetween |
GB1069184A (en) | 1965-04-15 | 1967-05-17 | Andre Rubber Co | Improvements in or relating to pipe couplings |
US3333274A (en) | 1965-04-21 | 1967-07-25 | Micro Tech Mfg Inc | Testing device |
US3435185A (en) | 1966-01-11 | 1969-03-25 | Rohr Corp | Sliding vacuum seal for electron beam welder |
US3408565A (en) | 1966-03-02 | 1968-10-29 | Philco Ford Corp | Apparatus for sequentially testing electrical components under controlled environmental conditions including a component support mating test head |
US3484679A (en) | 1966-10-03 | 1969-12-16 | North American Rockwell | Electrical apparatus for changing the effective capacitance of a cable |
US3609539A (en) | 1968-09-28 | 1971-09-28 | Ibm | Self-aligning kelvin probe |
NL6917791A (ja) | 1969-03-13 | 1970-09-15 | ||
US3648169A (en) | 1969-05-26 | 1972-03-07 | Teledyne Inc | Probe and head assembly |
US3596228A (en) | 1969-05-29 | 1971-07-27 | Ibm | Fluid actuated contactor |
US3602845A (en) | 1970-01-27 | 1971-08-31 | Us Army | Slot line nonreciprocal phase shifter |
US3654573A (en) | 1970-06-29 | 1972-04-04 | Bell Telephone Labor Inc | Microwave transmission line termination |
US3740900A (en) | 1970-07-01 | 1973-06-26 | Signetics Corp | Vacuum chuck assembly for semiconductor manufacture |
US3642415A (en) | 1970-08-10 | 1972-02-15 | Shell Oil Co | Plunger-and-diaphragm plastic sheet forming apparatus |
US3700998A (en) | 1970-08-20 | 1972-10-24 | Computer Test Corp | Sample and hold circuit with switching isolation |
US3714572A (en) | 1970-08-21 | 1973-01-30 | Rca Corp | Alignment and test fixture apparatus |
US4009456A (en) | 1970-10-07 | 1977-02-22 | General Microwave Corporation | Variable microwave attenuator |
US3662318A (en) | 1970-12-23 | 1972-05-09 | Comp Generale Electricite | Transition device between coaxial and microstrip lines |
US3662316A (en) | 1971-03-12 | 1972-05-09 | Sperry Rand Corp | Short base-band pulse receiver |
US3710251A (en) | 1971-04-07 | 1973-01-09 | Collins Radio Co | Microelectric heat exchanger pedestal |
US3814888A (en) | 1971-11-19 | 1974-06-04 | Gen Electric | Solid state induction cooking appliance |
US3810017A (en) | 1972-05-15 | 1974-05-07 | Teledyne Inc | Precision probe for testing micro-electronic units |
US3829076A (en) | 1972-06-08 | 1974-08-13 | H Sofy | Dial index machine |
US3858212A (en) | 1972-08-29 | 1974-12-31 | L Tompkins | Multi-purpose information gathering and distribution system |
US3952156A (en) | 1972-09-07 | 1976-04-20 | Xerox Corporation | Signal processing system |
CA970849A (en) | 1972-09-18 | 1975-07-08 | Malcolm P. Macmartin | Low leakage isolating transformer for electromedical apparatus |
US3775644A (en) | 1972-09-20 | 1973-11-27 | Communications Satellite Corp | Adjustable microstrip substrate holder |
US3777260A (en) | 1972-12-14 | 1973-12-04 | Ibm | Grid for making electrical contact |
FR2298196A1 (fr) | 1973-05-18 | 1976-08-13 | Lignes Telegraph Telephon | Composant non reciproque a ligne a fente a large bande |
US3814838A (en) | 1973-06-01 | 1974-06-04 | Continental Electronics Mfg | Insulator assembly having load distribution support |
US3836751A (en) | 1973-07-26 | 1974-09-17 | Applied Materials Inc | Temperature controlled profiling heater |
US3930809A (en) | 1973-08-21 | 1976-01-06 | Wentworth Laboratories, Inc. | Assembly fixture for fixed point probe card |
US3863181A (en) | 1973-12-03 | 1975-01-28 | Bell Telephone Labor Inc | Mode suppressor for strip transmission lines |
US4001685A (en) | 1974-03-04 | 1977-01-04 | Electroglas, Inc. | Micro-circuit test probe |
US3936743A (en) | 1974-03-05 | 1976-02-03 | Electroglas, Inc. | High speed precision chuck assembly |
US3976959A (en) | 1974-07-22 | 1976-08-24 | Gaspari Russell A | Planar balun |
US3970934A (en) | 1974-08-12 | 1976-07-20 | Akin Aksu | Printed circuit board testing means |
US4042119A (en) | 1975-06-30 | 1977-08-16 | International Business Machines Corporation | Workpiece positioning apparatus |
US4038894A (en) | 1975-07-18 | 1977-08-02 | Springfield Tool And Die, Inc. | Piercing apparatus |
SE407115B (sv) | 1975-10-06 | 1979-03-12 | Kabi Ab | Forfarande och metelektroder for studium av enzymatiska och andra biokemiska reaktioner |
US4035723A (en) | 1975-10-16 | 1977-07-12 | Xynetics, Inc. | Probe arm |
US3992073A (en) | 1975-11-24 | 1976-11-16 | Technical Wire Products, Inc. | Multi-conductor probe |
US3996517A (en) | 1975-12-29 | 1976-12-07 | Monsanto Company | Apparatus for wafer probing having surface level sensing |
US4116523A (en) | 1976-01-23 | 1978-09-26 | James M. Foster | High frequency probe |
US4049252A (en) | 1976-02-04 | 1977-09-20 | Bell Theodore F | Index table |
US4008900A (en) | 1976-03-15 | 1977-02-22 | John Freedom | Indexing chuck |
US4099120A (en) | 1976-04-19 | 1978-07-04 | Akin Aksu | Probe head for testing printed circuit boards |
US4115735A (en) | 1976-10-14 | 1978-09-19 | Faultfinders, Inc. | Test fixture employing plural platens for advancing some or all of the probes of the test fixture |
US4093988A (en) | 1976-11-08 | 1978-06-06 | General Electric Company | High speed frequency response measurement |
US4186338A (en) | 1976-12-16 | 1980-01-29 | Genrad, Inc. | Phase change detection method of and apparatus for current-tracing the location of faults on printed circuit boards and similar systems |
US4115736A (en) | 1977-03-09 | 1978-09-19 | The United States Of America As Represented By The Secretary Of The Air Force | Probe station |
US4151465A (en) | 1977-05-16 | 1979-04-24 | Lenz Seymour S | Variable flexure test probe for microelectronic circuits |
US4161692A (en) | 1977-07-18 | 1979-07-17 | Cerprobe Corporation | Probe device for integrated circuit wafers |
US4135131A (en) | 1977-10-14 | 1979-01-16 | The United States Of America As Represented By The Secretary Of The Army | Microwave time delay spectroscopic methods and apparatus for remote interrogation of biological targets |
US4371742A (en) | 1977-12-20 | 1983-02-01 | Graham Magnetics, Inc. | EMI-Suppression from transmission lines |
US4172993A (en) | 1978-09-13 | 1979-10-30 | The Singer Company | Environmental hood for testing printed circuit cards |
DE2849119A1 (de) | 1978-11-13 | 1980-05-14 | Siemens Ag | Verfahren und schaltungsanordnung zur daempfungsmessung, insbesondere zur ermittlung der daempfungs- und/oder gruppenlaufzeitverzerrung eines messobjektes |
US4383217A (en) | 1979-01-02 | 1983-05-10 | Shiell Thomas J | Collinear four-point probe head and mount for resistivity measurements |
US4280112A (en) | 1979-02-21 | 1981-07-21 | Eisenhart Robert L | Electrical coupler |
US4352061A (en) | 1979-05-24 | 1982-09-28 | Fairchild Camera & Instrument Corp. | Universal test fixture employing interchangeable wired personalizers |
US4287473A (en) | 1979-05-25 | 1981-09-01 | The United States Of America As Represented By The United States Department Of Energy | Nondestructive method for detecting defects in photodetector and solar cell devices |
FI58719C (fi) * | 1979-06-01 | 1981-04-10 | Instrumentarium Oy | Diagnostiseringsanordning foer broestkancer |
US4277741A (en) | 1979-06-25 | 1981-07-07 | General Motors Corporation | Microwave acoustic spectrometer |
FI69943C (fi) | 1979-07-10 | 1986-05-26 | Sumitomo Electric Industries | Foerfarande foer bildande av en foerbindning foer en polyolefinisolerad elektrisk ledning eller kabel och vaermekrympande slang foer genomfoerande av foerfarandet |
JPS5933267B2 (ja) | 1979-08-28 | 1984-08-14 | 三菱電機株式会社 | 半導体素子の不良解析法 |
US4327180A (en) | 1979-09-14 | 1982-04-27 | Board Of Governors, Wayne State Univ. | Method and apparatus for electromagnetic radiation of biological material |
US4284033A (en) | 1979-10-31 | 1981-08-18 | Rca Corporation | Means to orbit and rotate target wafers supported on planet member |
US4330783A (en) | 1979-11-23 | 1982-05-18 | Toia Michael J | Coaxially fed dipole antenna |
US4365195A (en) | 1979-12-27 | 1982-12-21 | Communications Satellite Corporation | Coplanar waveguide mounting structure and test fixture for microwave integrated circuits |
US4365109A (en) * | 1980-01-25 | 1982-12-21 | The United States Of America As Represented By The Secretary Of The Air Force | Coaxial cable design |
US4342958A (en) | 1980-03-28 | 1982-08-03 | Honeywell Information Systems Inc. | Automatic test equipment test probe contact isolation detection method |
JPS5953659B2 (ja) | 1980-04-11 | 1984-12-26 | 株式会社日立製作所 | 真空室中回転体の往復動機構 |
US4284682A (en) | 1980-04-30 | 1981-08-18 | Nasa | Heat sealable, flame and abrasion resistant coated fabric |
US4357575A (en) | 1980-06-17 | 1982-11-02 | Dit-Mco International Corporation | Apparatus for use in testing printed circuit process boards having means for positioning such boards in proper juxtaposition with electrical contacting assemblies |
US4346355A (en) | 1980-11-17 | 1982-08-24 | Raytheon Company | Radio frequency energy launcher |
JPS6041583B2 (ja) * | 1981-03-23 | 1985-09-18 | 日清製油株式会社 | レトルトサラダの製造法 |
US4376920A (en) | 1981-04-01 | 1983-03-15 | Smith Kenneth L | Shielded radio frequency transmission cable |
JPS57169244A (en) | 1981-04-13 | 1982-10-18 | Canon Inc | Temperature controller for mask and wafer |
US4401945A (en) | 1981-04-30 | 1983-08-30 | The Valeron Corporation | Apparatus for detecting the position of a probe relative to a workpiece |
US4425395A (en) | 1981-04-30 | 1984-01-10 | Fujikura Rubber Works, Ltd. | Base fabrics for polyurethane-coated fabrics, polyurethane-coated fabrics and processes for their production |
US4414638A (en) | 1981-04-30 | 1983-11-08 | Dranetz Engineering Laboratories, Inc. | Sampling network analyzer with stored correction of gain errors |
US4426619A (en) | 1981-06-03 | 1984-01-17 | Temptronic Corporation | Electrical testing system including plastic window test chamber and method of using same |
US4566184A (en) | 1981-08-24 | 1986-01-28 | Rockwell International Corporation | Process for making a probe for high speed integrated circuits |
US4419626A (en) | 1981-08-25 | 1983-12-06 | Daymarc Corporation | Broad band contactor assembly for testing integrated circuit devices |
US4453142A (en) | 1981-11-02 | 1984-06-05 | Motorola Inc. | Microstrip to waveguide transition |
US4480223A (en) | 1981-11-25 | 1984-10-30 | Seiichiro Aigo | Unitary probe assembly |
US4468629A (en) | 1982-05-27 | 1984-08-28 | Trw Inc. | NPN Operational amplifier |
US4528504A (en) | 1982-05-27 | 1985-07-09 | Harris Corporation | Pulsed linear integrated circuit tester |
US4491173A (en) | 1982-05-28 | 1985-01-01 | Temptronic Corporation | Rotatable inspection table |
JPS58210631A (ja) | 1982-05-31 | 1983-12-07 | Toshiba Corp | 電子ビ−ムを用いたicテスタ |
US4507602A (en) | 1982-08-13 | 1985-03-26 | The United States Of America As Represented By The Secretary Of The Air Force | Measurement of permittivity and permeability of microwave materials |
US4479690A (en) * | 1982-09-13 | 1984-10-30 | The United States Of America As Represented By The Secretary Of The Navy | Underwater splice for submarine coaxial cable |
US4487996A (en) | 1982-12-02 | 1984-12-11 | Electric Power Research Institute, Inc. | Shielded electrical cable |
US4575676A (en) | 1983-04-04 | 1986-03-11 | Advanced Research And Applications Corporation | Method and apparatus for radiation testing of electron devices |
CH668646A5 (de) | 1983-05-31 | 1989-01-13 | Contraves Ag | Vorrichtung zum wiederholten foerdern von fluessigkeitsvolumina. |
JPS59226167A (ja) | 1983-06-04 | 1984-12-19 | Dainippon Screen Mfg Co Ltd | 基板表面処理装置 |
FR2547945B1 (fr) | 1983-06-21 | 1986-05-02 | Raffinage Cie Francaise | Nouvelle structure de cable electrique et ses applications |
US4588970A (en) | 1984-01-09 | 1986-05-13 | Hewlett-Packard Company | Three section termination for an R.F. triaxial directional bridge |
JPS60136006U (ja) | 1984-02-20 | 1985-09-10 | 株式会社 潤工社 | フラツトケ−ブル |
US4557599A (en) | 1984-03-06 | 1985-12-10 | General Signal Corporation | Calibration and alignment target plate |
US4646005A (en) | 1984-03-16 | 1987-02-24 | Motorola, Inc. | Signal probe |
US4722846A (en) * | 1984-04-18 | 1988-02-02 | Kikkoman Corporation | Novel variant and process for producing light colored soy sauce using such variant |
JPS60235304A (ja) | 1984-05-08 | 1985-11-22 | 株式会社フジクラ | 直流電力ケ−ブル |
US4675600A (en) | 1984-05-17 | 1987-06-23 | Geo International Corporation | Testing apparatus for plated through-holes on printed circuit boards, and probe therefor |
DE3428087A1 (de) | 1984-07-30 | 1986-01-30 | Kraftwerk Union AG, 4330 Mülheim | Konzentrisches dreileiterkabel |
US4665360A (en) | 1985-03-11 | 1987-05-12 | Eaton Corporation | Docking apparatus |
DE3531893A1 (de) * | 1985-09-06 | 1987-03-19 | Siemens Ag | Verfahren zur bestimmung der verteilung der dielektrizitaetskonstanten in einem untersuchungskoerper sowie messanordnung zur durchfuehrung des verfahrens |
JPH0326643Y2 (ja) * | 1985-09-30 | 1991-06-10 | ||
DE3625631A1 (de) * | 1986-07-29 | 1988-02-04 | Gore W L & Co Gmbh | Elektromagnetische abschirmung |
JP2609232B2 (ja) * | 1986-09-04 | 1997-05-14 | 日本ヒューレット・パッカード株式会社 | フローテイング駆動回路 |
US4673839A (en) | 1986-09-08 | 1987-06-16 | Tektronix, Inc. | Piezoelectric pressure sensing apparatus for integrated circuit testing stations |
US4904933A (en) * | 1986-09-08 | 1990-02-27 | Tektronix, Inc. | Integrated circuit probe station |
US5082627A (en) * | 1987-05-01 | 1992-01-21 | Biotronic Systems Corporation | Three dimensional binding site array for interfering with an electrical field |
US4894612A (en) * | 1987-08-13 | 1990-01-16 | Hypres, Incorporated | Soft probe for providing high speed on-wafer connections to a circuit |
US5084671A (en) * | 1987-09-02 | 1992-01-28 | Tokyo Electron Limited | Electric probing-test machine having a cooling system |
JP2554669Y2 (ja) * | 1987-11-10 | 1997-11-17 | 博 寺町 | 回転位置決め装置 |
US4859989A (en) * | 1987-12-01 | 1989-08-22 | W. L. Gore & Associates, Inc. | Security system and signal carrying member thereof |
US4896109A (en) * | 1987-12-07 | 1990-01-23 | The United States Of America As Represented By The Department Of Energy | Photoconductive circuit element reflectometer |
US4891584A (en) * | 1988-03-21 | 1990-01-02 | Semitest, Inc. | Apparatus for making surface photovoltage measurements of a semiconductor |
US5091691A (en) * | 1988-03-21 | 1992-02-25 | Semitest, Inc. | Apparatus for making surface photovoltage measurements of a semiconductor |
US4893914A (en) * | 1988-10-12 | 1990-01-16 | The Micromanipulator Company, Inc. | Test station |
US4904935A (en) * | 1988-11-14 | 1990-02-27 | Eaton Corporation | Electrical circuit board text fixture having movable platens |
US4982153A (en) * | 1989-02-06 | 1991-01-01 | Cray Research, Inc. | Method and apparatus for cooling an integrated circuit chip during testing |
US5089774A (en) * | 1989-12-26 | 1992-02-18 | Sharp Kabushiki Kaisha | Apparatus and a method for checking a semiconductor |
JPH03209737A (ja) * | 1990-01-11 | 1991-09-12 | Tokyo Electron Ltd | プローブ装置 |
US4994737A (en) * | 1990-03-09 | 1991-02-19 | Cascade Microtech, Inc. | System for facilitating planar probe measurements of high-speed interconnect structures |
US5061823A (en) * | 1990-07-13 | 1991-10-29 | W. L. Gore & Associates, Inc. | Crush-resistant coaxial transmission line |
US5187443A (en) * | 1990-07-24 | 1993-02-16 | Bereskin Alexander B | Microwave test fixtures for determining the dielectric properties of a material |
US5091732A (en) * | 1990-09-07 | 1992-02-25 | The United States Of America As Represented By The Secretary Of The Navy | Lightweight deployable antenna system |
DE69130205T2 (de) * | 1990-12-25 | 1999-03-25 | Ngk Insulators Ltd | Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben |
US5107076A (en) * | 1991-01-08 | 1992-04-21 | W. L. Gore & Associates, Inc. | Easy strip composite dielectric coaxial signal cable |
JPH05136218A (ja) * | 1991-02-19 | 1993-06-01 | Tokyo Electron Yamanashi Kk | 検査装置 |
DE4109908C2 (de) | 1991-03-26 | 1994-05-05 | Erich Reitinger | Anordnung zur Prüfung von Halbleiter-Wafern |
US5214243A (en) * | 1991-10-11 | 1993-05-25 | Endevco Corporation | High-temperature, low-noise coaxial cable assembly with high strength reinforcement braid |
US5210377A (en) * | 1992-01-29 | 1993-05-11 | W. L. Gore & Associates, Inc. | Coaxial electric signal cable having a composite porous insulation |
TW212252B (ja) * | 1992-05-01 | 1993-09-01 | Martin Marietta Corp | |
US5345170A (en) * | 1992-06-11 | 1994-09-06 | Cascade Microtech, Inc. | Wafer probe station having integrated guarding, Kelvin connection and shielding systems |
FR2695508B1 (fr) * | 1992-09-08 | 1994-10-21 | Filotex Sa | Câble à faible niveau de bruit. |
US5382898A (en) * | 1992-09-21 | 1995-01-17 | Cerprobe Corporation | High density probe card for testing electrical circuits |
US5684669A (en) * | 1995-06-07 | 1997-11-04 | Applied Materials, Inc. | Method for dechucking a workpiece from an electrostatic chuck |
US5448172A (en) * | 1993-05-05 | 1995-09-05 | Auburn International, Inc. | Triboelectric instrument with DC drift compensation |
JPH0714898A (ja) * | 1993-06-23 | 1995-01-17 | Mitsubishi Electric Corp | 半導体ウエハの試験解析装置および解析方法 |
JP3346838B2 (ja) * | 1993-06-29 | 2002-11-18 | 有限会社創造庵 | 回転運動機構 |
US5412866A (en) * | 1993-07-01 | 1995-05-09 | Hughes Aircraft Company | Method of making a cast elastomer/membrane test probe assembly |
JP3442822B2 (ja) * | 1993-07-28 | 2003-09-02 | アジレント・テクノロジー株式会社 | 測定用ケーブル及び測定システム |
US5594358A (en) * | 1993-09-02 | 1997-01-14 | Matsushita Electric Industrial Co., Ltd. | Radio frequency probe and probe card including a signal needle and grounding needle coupled to a microstrip transmission line |
US20020011859A1 (en) * | 1993-12-23 | 2002-01-31 | Kenneth R. Smith | Method for forming conductive bumps for the purpose of contrructing a fine pitch test device |
US5486975A (en) * | 1994-01-31 | 1996-01-23 | Applied Materials, Inc. | Corrosion resistant electrostatic chuck |
US5477011A (en) * | 1994-03-03 | 1995-12-19 | W. L. Gore & Associates, Inc. | Low noise signal transmission cable |
US5715819A (en) * | 1994-05-26 | 1998-02-10 | The Carolinas Heart Institute | Microwave tomographic spectroscopy system and method |
US5491426A (en) * | 1994-06-30 | 1996-02-13 | Vlsi Technology, Inc. | Adaptable wafer probe assembly for testing ICs with different power/ground bond pad configurations |
US5704355A (en) * | 1994-07-01 | 1998-01-06 | Bridges; Jack E. | Non-invasive system for breast cancer detection |
GB9417450D0 (en) * | 1994-08-25 | 1994-10-19 | Symmetricom Inc | An antenna |
US5488954A (en) * | 1994-09-09 | 1996-02-06 | Georgia Tech Research Corp. | Ultrasonic transducer and method for using same |
US5481196A (en) * | 1994-11-08 | 1996-01-02 | Nebraska Electronics, Inc. | Process and apparatus for microwave diagnostics and therapy |
US5561377A (en) * | 1995-04-14 | 1996-10-01 | Cascade Microtech, Inc. | System for evaluating probing networks |
US6002109A (en) * | 1995-07-10 | 1999-12-14 | Mattson Technology, Inc. | System and method for thermal processing of a semiconductor substrate |
KR0176434B1 (ko) * | 1995-10-27 | 1999-04-15 | 이대원 | 진공 척 장치 |
US5712571A (en) * | 1995-11-03 | 1998-01-27 | Analog Devices, Inc. | Apparatus and method for detecting defects arising as a result of integrated circuit processing |
US6075376A (en) * | 1997-12-01 | 2000-06-13 | Schwindt; Randy J. | Low-current probe card |
US5729150A (en) * | 1995-12-01 | 1998-03-17 | Cascade Microtech, Inc. | Low-current probe card with reduced triboelectric current generating cables |
US5861743A (en) * | 1995-12-21 | 1999-01-19 | Genrad, Inc. | Hybrid scanner for use in an improved MDA tester |
JP2900877B2 (ja) * | 1996-03-22 | 1999-06-02 | 日本電気株式会社 | 半導体デバイスの配線電流観測方法、配線系欠陥検査方法およびその装置 |
US6023209A (en) * | 1996-07-05 | 2000-02-08 | Endgate Corporation | Coplanar microwave circuit having suppression of undesired modes |
US6181149B1 (en) * | 1996-09-26 | 2001-01-30 | Delaware Capital Formation, Inc. | Grid array package test contactor |
US6184845B1 (en) * | 1996-11-27 | 2001-02-06 | Symmetricom, Inc. | Dielectric-loaded antenna |
US6019612A (en) * | 1997-02-10 | 2000-02-01 | Kabushiki Kaisha Nihon Micronics | Electrical connecting apparatus for electrically connecting a device to be tested |
US6002263A (en) * | 1997-06-06 | 1999-12-14 | Cascade Microtech, Inc. | Probe station having inner and outer shielding |
US6034533A (en) * | 1997-06-10 | 2000-03-07 | Tervo; Paul A. | Low-current pogo probe card |
US6029141A (en) * | 1997-06-27 | 2000-02-22 | Amazon.Com, Inc. | Internet-based customer referral system |
WO1999004273A1 (en) * | 1997-07-15 | 1999-01-28 | Wentworth Laboratories, Inc. | Probe station with multiple adjustable probe supports |
US6013586A (en) * | 1997-10-09 | 2000-01-11 | Dimension Polyant Sailcloth, Inc. | Tent material product and method of making tent material product |
US6287776B1 (en) * | 1998-02-02 | 2001-09-11 | Signature Bioscience, Inc. | Method for detecting and classifying nucleic acid hybridization |
US6181144B1 (en) * | 1998-02-25 | 2001-01-30 | Micron Technology, Inc. | Semiconductor probe card having resistance measuring circuitry and method fabrication |
US6181416B1 (en) * | 1998-04-14 | 2001-01-30 | Optometrix, Inc. | Schlieren method for imaging semiconductor device properties |
TW440699B (en) * | 1998-06-09 | 2001-06-16 | Advantest Corp | Test apparatus for electronic parts |
US6178091B1 (en) * | 1998-07-09 | 2001-01-23 | Dell Usa, L.P. | Computer system having surface mount PWB grounding clips |
US6175228B1 (en) * | 1998-10-30 | 2001-01-16 | Agilent Technologies | Electronic probe for measuring high impedance tri-state logic circuits |
US6169410B1 (en) * | 1998-11-09 | 2001-01-02 | Anritsu Company | Wafer probe with built in RF frequency conversion module |
US6284971B1 (en) * | 1998-11-25 | 2001-09-04 | Johns Hopkins University School Of Medicine | Enhanced safety coaxial cables |
AU5586000A (en) * | 1999-02-22 | 2000-09-14 | Paul Bryant | Programmable active microwave ultrafine resonance spectrometer (pamurs) method and systems |
US6400166B2 (en) * | 1999-04-15 | 2002-06-04 | International Business Machines Corporation | Micro probe and method of fabricating same |
US6445202B1 (en) * | 1999-06-30 | 2002-09-03 | Cascade Microtech, Inc. | Probe station thermal chuck with shielding for capacitive current |
US6340895B1 (en) * | 1999-07-14 | 2002-01-22 | Aehr Test Systems, Inc. | Wafer-level burn-in and test cartridge |
US6379130B1 (en) * | 2000-06-09 | 2002-04-30 | Tecumseh Products Company | Motor cover retention |
JP2002022775A (ja) * | 2000-07-05 | 2002-01-23 | Ando Electric Co Ltd | 電気光学プローブおよび磁気光学プローブ |
JP2002039091A (ja) * | 2000-07-21 | 2002-02-06 | Minebea Co Ltd | 送風機 |
US6512482B1 (en) * | 2001-03-20 | 2003-01-28 | Xilinx, Inc. | Method and apparatus using a semiconductor die integrated antenna structure |
JP4029603B2 (ja) * | 2001-05-31 | 2008-01-09 | 豊田合成株式会社 | ウェザストリップ |
CA2353024C (en) * | 2001-07-12 | 2005-12-06 | Ibm Canada Limited-Ibm Canada Limitee | Anti-vibration and anti-tilt microscope stand |
US7343185B2 (en) * | 2002-06-21 | 2008-03-11 | Nir Diagnostics Inc. | Measurement of body compounds |
TWI327226B (en) * | 2002-06-28 | 2010-07-11 | Celadon Systems Inc | Shielded probe apparatus |
US6847219B1 (en) * | 2002-11-08 | 2005-01-25 | Cascade Microtech, Inc. | Probe station with low noise characteristics |
US6838885B2 (en) * | 2003-03-05 | 2005-01-04 | Murata Manufacturing Co., Ltd. | Method of correcting measurement error and electronic component characteristic measurement apparatus |
-
2003
- 2003-09-18 US US10/666,219 patent/US6847219B1/en not_active Expired - Lifetime
- 2003-10-24 KR KR1020057008246A patent/KR100753945B1/ko active IP Right Grant
- 2003-10-24 EP EP03768538A patent/EP1559116A4/en not_active Withdrawn
- 2003-10-24 JP JP2005507057A patent/JP2006505961A/ja active Pending
- 2003-10-24 AU AU2003291650A patent/AU2003291650A1/en not_active Abandoned
- 2003-10-24 WO PCT/US2003/033842 patent/WO2004044949A2/en active Application Filing
-
2004
- 2004-11-12 US US10/986,639 patent/US7138810B2/en not_active Expired - Fee Related
-
2006
- 2006-09-27 US US11/528,809 patent/US7295025B2/en not_active Expired - Fee Related
-
2007
- 2007-10-04 US US11/906,846 patent/US7550984B2/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013520770A (ja) * | 2010-02-22 | 2013-06-06 | カスケード マイクロテック インコーポレイテッド | 相互接続を改良したプローブステーション |
Also Published As
Publication number | Publication date |
---|---|
AU2003291650A1 (en) | 2004-06-03 |
EP1559116A2 (en) | 2005-08-03 |
WO2004044949A3 (en) | 2004-10-14 |
US7295025B2 (en) | 2007-11-13 |
AU2003291650A8 (en) | 2004-06-03 |
KR20050074568A (ko) | 2005-07-18 |
US20050104610A1 (en) | 2005-05-19 |
US20080054922A1 (en) | 2008-03-06 |
US6847219B1 (en) | 2005-01-25 |
KR100753945B1 (ko) | 2007-08-31 |
US20070018665A1 (en) | 2007-01-25 |
US7550984B2 (en) | 2009-06-23 |
US7138810B2 (en) | 2006-11-21 |
WO2004044949A2 (en) | 2004-05-27 |
EP1559116A4 (en) | 2007-05-02 |
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