JP2006503290A - 熱損失式圧力測定装置および方法 - Google Patents

熱損失式圧力測定装置および方法 Download PDF

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Publication number
JP2006503290A
JP2006503290A JP2004544887A JP2004544887A JP2006503290A JP 2006503290 A JP2006503290 A JP 2006503290A JP 2004544887 A JP2004544887 A JP 2004544887A JP 2004544887 A JP2004544887 A JP 2004544887A JP 2006503290 A JP2006503290 A JP 2006503290A
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Prior art keywords
compensation
detection element
compensation element
temperature
resistance
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JP2004544887A
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English (en)
Japanese (ja)
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ボレンステイン・マイケル・ディー
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ヘリックス・テクノロジー・コーポレーション
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Publication of JP2006503290A publication Critical patent/JP2006503290A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2004544887A 2002-10-16 2003-10-14 熱損失式圧力測定装置および方法 Pending JP2006503290A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/273,402 US6938493B2 (en) 1997-07-21 2002-10-16 Apparatus and methods for heat loss pressure measurement
PCT/US2003/032497 WO2004036169A1 (en) 2002-10-16 2003-10-14 Apparatus and methods for heat loss pressure measurement

Publications (1)

Publication Number Publication Date
JP2006503290A true JP2006503290A (ja) 2006-01-26

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ID=32106455

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JP2004544887A Pending JP2006503290A (ja) 2002-10-16 2003-10-14 熱損失式圧力測定装置および方法

Country Status (11)

Country Link
US (3) US6938493B2 (zh)
EP (1) EP1552265B1 (zh)
JP (1) JP2006503290A (zh)
KR (1) KR20050051705A (zh)
CN (1) CN100374839C (zh)
AT (1) ATE337543T1 (zh)
AU (1) AU2003279271A1 (zh)
DE (1) DE60307871T2 (zh)
FR (1) FR2847982B1 (zh)
TW (1) TW200411154A (zh)
WO (1) WO2004036169A1 (zh)

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CN108181228B (zh) * 2017-12-14 2021-04-27 北京金风科创风电设备有限公司 等效温度循环的测试系统及测试方法、计算机存储介质
US10914717B2 (en) 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
US11747231B2 (en) * 2020-04-08 2023-09-05 Institut National D'optique Heat-loss pressure microsensors
CN111982393B (zh) * 2020-08-27 2021-11-19 天津科技大学 一种实时监测真空仪表
CN114878033B (zh) * 2022-03-29 2023-12-22 深圳国微感知技术有限公司 一种矩阵式压力分布测量系统及方法

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Also Published As

Publication number Publication date
DE60307871T2 (de) 2007-04-19
AU2003279271A1 (en) 2004-05-04
FR2847982A1 (fr) 2004-06-04
CN1711465A (zh) 2005-12-21
US6945119B2 (en) 2005-09-20
US20030097876A1 (en) 2003-05-29
EP1552265B1 (en) 2006-08-23
TW200411154A (en) 2004-07-01
KR20050051705A (ko) 2005-06-01
US6938493B2 (en) 2005-09-06
WO2004036169A1 (en) 2004-04-29
DE60307871D1 (de) 2006-10-05
ATE337543T1 (de) 2006-09-15
US20040216527A1 (en) 2004-11-04
EP1552265A1 (en) 2005-07-13
US6865952B2 (en) 2005-03-15
FR2847982B1 (fr) 2005-09-16
CN100374839C (zh) 2008-03-12
US20040216528A1 (en) 2004-11-04

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