DE60307871D1 - Vorrichtungen und verfahren zur wärmeverlustdruckmessung - Google Patents

Vorrichtungen und verfahren zur wärmeverlustdruckmessung

Info

Publication number
DE60307871D1
DE60307871D1 DE60307871T DE60307871T DE60307871D1 DE 60307871 D1 DE60307871 D1 DE 60307871D1 DE 60307871 T DE60307871 T DE 60307871T DE 60307871 T DE60307871 T DE 60307871T DE 60307871 D1 DE60307871 D1 DE 60307871D1
Authority
DE
Germany
Prior art keywords
sensing element
compensating
heat loss
compensating element
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE60307871T
Other languages
English (en)
Other versions
DE60307871T2 (de
Inventor
D Borenstein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Helix Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helix Technology Corp filed Critical Helix Technology Corp
Publication of DE60307871D1 publication Critical patent/DE60307871D1/de
Application granted granted Critical
Publication of DE60307871T2 publication Critical patent/DE60307871T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/10—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured
    • G01L21/12—Vacuum gauges by measuring variations in the heat conductivity of the medium, the pressure of which is to be measured measuring changes in electric resistance of measuring members, e.g. of filaments; Vacuum gauges of the Pirani type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
DE60307871T 2002-10-16 2003-10-14 Vorrichtungen und verfahren zur wärmeverlustdruckmessung Expired - Fee Related DE60307871T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US273402 2002-10-16
US10/273,402 US6938493B2 (en) 1997-07-21 2002-10-16 Apparatus and methods for heat loss pressure measurement
PCT/US2003/032497 WO2004036169A1 (en) 2002-10-16 2003-10-14 Apparatus and methods for heat loss pressure measurement

Publications (2)

Publication Number Publication Date
DE60307871D1 true DE60307871D1 (de) 2006-10-05
DE60307871T2 DE60307871T2 (de) 2007-04-19

Family

ID=32106455

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60307871T Expired - Fee Related DE60307871T2 (de) 2002-10-16 2003-10-14 Vorrichtungen und verfahren zur wärmeverlustdruckmessung

Country Status (11)

Country Link
US (3) US6938493B2 (de)
EP (1) EP1552265B1 (de)
JP (1) JP2006503290A (de)
KR (1) KR20050051705A (de)
CN (1) CN100374839C (de)
AT (1) ATE337543T1 (de)
AU (1) AU2003279271A1 (de)
DE (1) DE60307871T2 (de)
FR (1) FR2847982B1 (de)
TW (1) TW200411154A (de)
WO (1) WO2004036169A1 (de)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6938493B2 (en) * 1997-07-21 2005-09-06 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
JP3555844B2 (ja) 1999-04-09 2004-08-18 三宅 正二郎 摺動部材およびその製造方法
US6969198B2 (en) * 2002-11-06 2005-11-29 Nissan Motor Co., Ltd. Low-friction sliding mechanism
JP3891433B2 (ja) * 2003-04-15 2007-03-14 日産自動車株式会社 燃料噴射弁
EP1479946B1 (de) * 2003-05-23 2012-12-19 Nissan Motor Co., Ltd. Kolben für eine Brennkraftmaschine
EP1482190B1 (de) * 2003-05-27 2012-12-05 Nissan Motor Company Limited Wälzkörper
JP2005008851A (ja) * 2003-05-29 2005-01-13 Nissan Motor Co Ltd 硬質炭素薄膜付き機械加工工具用切削油及び硬質炭素薄膜付き機械加工工具
JP4863152B2 (ja) * 2003-07-31 2012-01-25 日産自動車株式会社 歯車
WO2005014761A2 (ja) 2003-08-06 2005-02-17 Nissan Motor Co., Ltd. 低摩擦摺動機構、低摩擦剤組成物及び摩擦低減方法
JP4973971B2 (ja) * 2003-08-08 2012-07-11 日産自動車株式会社 摺動部材
JP2005054617A (ja) * 2003-08-08 2005-03-03 Nissan Motor Co Ltd 動弁機構
WO2005015637A1 (ja) * 2003-08-08 2005-02-17 Matsushita Electric Industrial Co., Ltd. 電子デバイスおよびその製造方法
JP4117553B2 (ja) * 2003-08-13 2008-07-16 日産自動車株式会社 チェーン駆動装置
US7771821B2 (en) 2003-08-21 2010-08-10 Nissan Motor Co., Ltd. Low-friction sliding member and low-friction sliding mechanism using same
EP1508611B1 (de) 2003-08-22 2019-04-17 Nissan Motor Co., Ltd. Getriebe enthaltend eine getriebeölzusammensetzung
US20060021444A1 (en) * 2004-07-28 2006-02-02 Helix Technology Corporation Method of operating a resistive heat-loss pressure sensor
KR20070085218A (ko) 2004-07-28 2007-08-27 브룩스 오토메이션, 인크. 저항성 열손실 압력 센서의 작동 방법
US7249516B2 (en) * 2004-07-28 2007-07-31 Brooks Automation, Inc. Method of operating a resistive heat-loss pressure sensor
US7331237B2 (en) * 2006-02-01 2008-02-19 Brooks Automation, Inc. Technique for improving Pirani gauge temperature compensation over its full pressure range
JP4831670B2 (ja) * 2006-02-24 2011-12-07 富士通株式会社 試料抵抗測定装置
US7322248B1 (en) * 2006-08-29 2008-01-29 Eastman Kodak Company Pressure gauge for organic materials
US7478002B2 (en) 2007-01-26 2009-01-13 Delphi Technologies, Inc. Apparatus and method for trimming multiple sensing elements with a single trim resistor
US8117898B2 (en) * 2008-12-19 2012-02-21 Institut National D'optique Method for sensing gas composition and pressure
CA2746336C (en) 2008-12-19 2014-05-27 Institut National D'optique Micro-thermistor gas pressure sensor
CA2746335C (en) * 2008-12-19 2014-05-13 Institut National D'optique Method for sensing gas composition and pressure
US8171801B2 (en) * 2008-12-19 2012-05-08 Institut National D'optique Micro-thermistor gas pressure sensor
US9429479B2 (en) * 2012-07-18 2016-08-30 Millar Instruments Methods, devices, and systems which determine a parameter value of an object or an environment from a voltage reading associated with a common mode signal of a balanced circuit
FR2995691B1 (fr) * 2012-09-19 2014-10-10 Commissariat Energie Atomique Capteur de flux thermique, capteur de gaz comportant au moins un tel capteur et jauge pirani comportant au moins un tel capteur
CN108181228B (zh) * 2017-12-14 2021-04-27 北京金风科创风电设备有限公司 等效温度循环的测试系统及测试方法、计算机存储介质
US10914717B2 (en) 2018-05-09 2021-02-09 Mks Instruments, Inc. Method and apparatus for partial pressure detection
WO2021203187A1 (en) * 2020-04-08 2021-10-14 Institut National D'optique Heat-loss pressure microsensors
CN111982393B (zh) * 2020-08-27 2021-11-19 天津科技大学 一种实时监测真空仪表
CN114878033B (zh) * 2022-03-29 2023-12-22 深圳国微感知技术有限公司 一种矩阵式压力分布测量系统及方法

Family Cites Families (44)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1094341A (en) * 1913-05-14 1914-04-21 Ulysses S G Peoples Water-heating attachment for stoves.
US1448540A (en) 1917-07-14 1923-03-13 Western Electric Co Apparatus for measuring gas pressures
US1675710A (en) * 1922-08-07 1928-07-03 Speedaumat Addressing Machiner Selector-discharge mechanism
US1648592A (en) * 1923-01-11 1927-11-08 Howard P Denison Wireless apparatus
US1668106A (en) 1923-07-26 1928-05-01 Bbc Brown Boveri & Cie Hot-wire vacuum meter
US1778508A (en) 1925-10-20 1930-10-14 Western Electric Co Apparatus for measuring and recording pressures
US1873984A (en) 1928-09-14 1932-08-30 Sieber Fritz Indicating device
US2105472A (en) * 1936-07-03 1938-01-18 Bell Telephone Labor Inc High power discharge device
US2105047A (en) * 1936-10-10 1938-01-11 Robert H Lake Stretcher for uniform cap covers
BE435406A (de) * 1938-07-12
US2650496A (en) * 1948-05-17 1953-09-01 Phillips Petroleum Co Fluid flowmeter with heated resistance bridge circuit
US2938387A (en) 1956-12-10 1960-05-31 Cons Vacuum Corp Automatic control circuit
DE1094341B (de) 1958-12-13 1960-12-08 Cons Electrodynamics Corp Anordnung zur selbsttaetigen Steuerung der Temperatur eines stromdurchflossenen Widerstandes
US3199356A (en) 1961-11-06 1965-08-10 Andriulis Vytautas Pressure gauge
US3429178A (en) * 1965-01-07 1969-02-25 Enoch J Durbin Measuring system
DE1648592A1 (de) 1967-10-25 1971-04-01 Leybold Heraeus Gmbh & Co Kg Messverfahren zur Messung kleiner Differenzdruecke
US3580081A (en) 1969-09-10 1971-05-25 Veeco Instr Inc Vacuum gauge
US4106350A (en) 1977-08-29 1978-08-15 Morris Richard T Thin wire pressure sensor
US4279147A (en) * 1980-01-10 1981-07-21 Djorup Robert Sonny Directional heat loss anemometer transducer
DE3131506A1 (de) 1981-08-08 1983-03-17 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum betrieb eines geregelten pirani-vakuummeters und dafuer geeignetes pirani-vakuummeter
DE3230405A1 (de) 1981-08-28 1983-03-10 Boc Ltd., London Gasdruck-messschaltung
GB2105047B (en) 1981-08-28 1986-04-03 British Oxygen Co Ltd Pirani gauges
US4682503A (en) 1986-05-16 1987-07-28 Honeywell Inc. Microscopic size, thermal conductivity type, air or gas absolute pressure sensor
US4736155A (en) 1987-03-06 1988-04-05 Colt Industries Inc Transducer temperature control circuit and method
SU1675710A1 (ru) 1987-03-26 1991-09-07 Предприятие П/Я А-1614 Способ градуировки теплового вакуумметра
US4787251A (en) * 1987-07-15 1988-11-29 Tsi Incorporated Directional low differential pressure transducer
DE58905634D1 (de) 1989-01-23 1993-10-21 Balzers Hochvakuum Gasdruck-Messgerät.
US4918974A (en) * 1989-02-06 1990-04-24 Alcan International Limited Method and apparatus for the measurement of the thermal conductivity of gases
US5184500A (en) 1990-03-20 1993-02-09 J And N Associates, Inc. Gas detector
US5079954A (en) 1990-12-27 1992-01-14 The Boc Group, Inc. Vacuum gauge
DE4308433A1 (de) 1993-03-17 1994-09-22 Leybold Ag Wärmeleitungsvakuummeter mit Meßzelle, Meßgerät und Verbindungskabel
DE4308434A1 (de) 1993-03-17 1994-09-22 Leybold Ag Temperaturkompensation bei einem geregelten Wärmeleitungsvakuummeter
US5347869A (en) 1993-03-25 1994-09-20 Opto Tech Corporation Structure of micro-pirani sensor
EP0660096B1 (de) 1993-12-23 1999-03-17 Heimann Optoelectronics GmbH Mikrovakuumsensor
US5557972A (en) 1994-09-13 1996-09-24 Teledyne Industries, Inc. Miniature silicon based thermal vacuum sensor and method of measuring vacuum pressures
US5668320A (en) 1995-06-19 1997-09-16 Cardiometrics, Inc. Piezoresistive pressure transducer circuitry accommodating transducer variability
DE19617238A1 (de) 1996-04-30 1997-11-06 Leybold Vakuum Gmbh Schaltung zur Temperaturkompensation eines Wärmeleitungsvakuummeters
US5812047A (en) * 1997-02-18 1998-09-22 Exar Corporation Offset-free resistor geometry for use in piezo-resistive pressure sensor
US6658941B1 (en) 1997-07-21 2003-12-09 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
US6023979A (en) 1997-07-21 2000-02-15 Helix Technology Apparatus and methods for heat loss pressure measurement
US6938493B2 (en) * 1997-07-21 2005-09-06 Helix Technology Corporation Apparatus and methods for heat loss pressure measurement
FR2768817B1 (fr) 1997-09-19 1999-12-10 Cis Bio Int Methode homogene pour la detection et/ou la determination de l'activite phosphorylante d'un materiel biologique
CH692762A5 (de) * 1997-09-22 2002-10-15 Unaxis Balzers Ag Verfahren zur Messung des Gasdrucks in einem Gefäss sowie Vorrichtungen zur Durchführung des Verfahrens.
US6663834B1 (en) * 2000-10-27 2003-12-16 Mine Safety Appliance Company Catalytic sensor

Also Published As

Publication number Publication date
FR2847982B1 (fr) 2005-09-16
WO2004036169A1 (en) 2004-04-29
EP1552265A1 (de) 2005-07-13
CN1711465A (zh) 2005-12-21
TW200411154A (en) 2004-07-01
ATE337543T1 (de) 2006-09-15
CN100374839C (zh) 2008-03-12
US6945119B2 (en) 2005-09-20
US20030097876A1 (en) 2003-05-29
KR20050051705A (ko) 2005-06-01
EP1552265B1 (de) 2006-08-23
FR2847982A1 (fr) 2004-06-04
US6865952B2 (en) 2005-03-15
US20040216527A1 (en) 2004-11-04
AU2003279271A1 (en) 2004-05-04
US6938493B2 (en) 2005-09-06
US20040216528A1 (en) 2004-11-04
JP2006503290A (ja) 2006-01-26
DE60307871T2 (de) 2007-04-19

Similar Documents

Publication Publication Date Title
DE60307871D1 (de) Vorrichtungen und verfahren zur wärmeverlustdruckmessung
CN103308223B (zh) 基于柔性热敏传感器的壁面剪应力测试装置及其测量方法
DE60313219D1 (de) Sensormodul zur oberflächenmessung
ATE421682T1 (de) Dehnungsmessvorrichtung mit temperaturabgleich
MX2013002024A (es) Medicion de temperatura de fluido de proceso.
TW200724881A (en) Circuit board monitoring system
DE69904185T2 (de) Verfahren und vorrichtung zum messen des zustandes einer elektrophoretischen anzeigevorrichtung
MX2021015166A (es) Sensor de gas con elemento de deteccion de contaminante separado.
ATE512360T1 (de) Messvorrichtung zum messen des zustandes von ölen und fetten
DE60139017D1 (de) Dünnfilm-magnetfeldsensor
TW200622888A (en) A system for determining the true electrical characteristics of a device
DE60233405D1 (de) Kompensieren eines fühlers zum messen eines magnetischen feldes
ATE522967T1 (de) Verfahren und einrichtung zur bestimmung der elektrischen belastbarkeit von freileitungen mittels temperaturmessung
ATE446561T1 (de) Sensoranordnung
ATE515684T1 (de) System für fernmessungen
ATE448487T1 (de) Magnetfeldempfindliche sensoranordnung
CN101526404A (zh) 一种温度压力复合传感器
ATE434847T1 (de) Verfahren und vorrichtung zum messen der temperatur vonthermischen abstimmelementen in abstimmbaren optischen einrichtungen
FI20030992A0 (fi) Menetelmä hydrometeoreja havaitsevan mittalaitteen yhteydessä sekä tähän liittyvä laitteisto
TW200711020A (en) Methods and apparatus for optimizing an electrical response to a set of conductive layers on a substrate
ATE207613T1 (de) Folienmanometer
DE50214368D1 (de) Druckaufnehmer zur zylinderdruckmessung bei motore
CN104820449A (zh) 一种发热模拟装置
JP4209429B2 (ja) ひずみ・温度測定方法
ATE364864T1 (de) Verfahren zur messung der raumtemperatur

Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee