JP2006332527A - 磁気記憶素子 - Google Patents
磁気記憶素子 Download PDFInfo
- Publication number
- JP2006332527A JP2006332527A JP2005157459A JP2005157459A JP2006332527A JP 2006332527 A JP2006332527 A JP 2006332527A JP 2005157459 A JP2005157459 A JP 2005157459A JP 2005157459 A JP2005157459 A JP 2005157459A JP 2006332527 A JP2006332527 A JP 2006332527A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- ferromagnetic
- recording layer
- magnetic field
- magnetization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 75
- 230000005294 ferromagnetic effect Effects 0.000 claims abstract description 95
- 230000005415 magnetization Effects 0.000 claims abstract description 53
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 168
- 230000000694 effects Effects 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 8
- 230000005290 antiferromagnetic effect Effects 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 229910003321 CoFe Inorganic materials 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910017107 AlOx Inorganic materials 0.000 description 1
- 229910019236 CoFeB Inorganic materials 0.000 description 1
- 229910019041 PtMn Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
- H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1114—Magnetoresistive having tunnel junction effect
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1143—Magnetoresistive with defined structural feature
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Semiconductor Memories (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005157459A JP2006332527A (ja) | 2005-05-30 | 2005-05-30 | 磁気記憶素子 |
| KR1020060046932A KR20060124578A (ko) | 2005-05-30 | 2006-05-25 | 자기저항효과에 의해 데이터를 기억하는 자기기억소자 |
| TW095118753A TW200703328A (en) | 2005-05-30 | 2006-05-26 | Magnetic storage element |
| US11/442,290 US8036024B2 (en) | 2005-05-30 | 2006-05-30 | Magnetic storage element storing data by magnetoresistive effect |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005157459A JP2006332527A (ja) | 2005-05-30 | 2005-05-30 | 磁気記憶素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006332527A true JP2006332527A (ja) | 2006-12-07 |
| JP2006332527A5 JP2006332527A5 (enExample) | 2008-06-26 |
Family
ID=37462257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005157459A Pending JP2006332527A (ja) | 2005-05-30 | 2005-05-30 | 磁気記憶素子 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8036024B2 (enExample) |
| JP (1) | JP2006332527A (enExample) |
| KR (1) | KR20060124578A (enExample) |
| TW (1) | TW200703328A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008244482A (ja) * | 2007-03-26 | 2008-10-09 | Magic Technologies Inc | Mramデバイスおよびその形成方法 |
| JP2010123967A (ja) * | 2008-11-19 | 2010-06-03 | Headway Technologies Inc | フリー層およびその形成方法、磁気抵抗効果素子 |
| JP2023545902A (ja) * | 2020-09-18 | 2023-11-01 | クロッカス・テクノロジー・ソシエテ・アノニム | ヒステリシス応答を低減した2次元磁気センサ用磁気抵抗素子 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2465370A (en) * | 2008-11-13 | 2010-05-19 | Ingenia Holdings | Magnetic data storage comprising a synthetic anti-ferromagnetic stack arranged to maintain solitons |
| JP5441024B2 (ja) * | 2008-12-15 | 2014-03-12 | ルネサスエレクトロニクス株式会社 | 磁気記憶装置 |
| US8852762B2 (en) | 2012-07-31 | 2014-10-07 | International Business Machines Corporation | Magnetic random access memory with synthetic antiferromagnetic storage layers and non-pinned reference layers |
| US20140037991A1 (en) | 2012-07-31 | 2014-02-06 | International Business Machines Corporation | Magnetic random access memory with synthetic antiferromagnetic storage layers |
| US20140037992A1 (en) * | 2012-07-31 | 2014-02-06 | International Business Machines Corporation | Magnetic random access memory with synthetic antiferromagnetic storage layers |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004172599A (ja) * | 2002-11-01 | 2004-06-17 | Nec Corp | 磁気抵抗デバイス及びその製造方法 |
| JP2005510048A (ja) * | 2001-10-16 | 2005-04-14 | フリースケール セミコンダクター インコーポレイテッド | 縮小可能性が改良された磁気抵抗ランダムアクセスメモリ |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6271997B1 (en) * | 1999-11-22 | 2001-08-07 | International Business Machines Corporation | Read head spin valve sensor with triple antiparallel coupled free layer structure |
| US6767655B2 (en) * | 2000-08-21 | 2004-07-27 | Matsushita Electric Industrial Co., Ltd. | Magneto-resistive element |
| JP2002092829A (ja) * | 2000-09-21 | 2002-03-29 | Fujitsu Ltd | 磁気抵抗センサ及び磁気抵抗ヘッド |
| CN1270323C (zh) * | 2001-06-19 | 2006-08-16 | 松下电器产业株式会社 | 磁性存储器的驱动方法 |
| US6936903B2 (en) * | 2001-09-25 | 2005-08-30 | Hewlett-Packard Development Company, L.P. | Magnetic memory cell having a soft reference layer |
| US20030235016A1 (en) * | 2002-06-19 | 2003-12-25 | International Business Machines Corporation | Stabilization structures for CPP sensor |
| JP4237991B2 (ja) * | 2002-08-29 | 2009-03-11 | アルプス電気株式会社 | 磁気検出素子 |
| US7216648B2 (en) * | 2002-09-06 | 2007-05-15 | Apneon, Inc. | Systems and methods for moving and/or restraining tissue in the upper respiratory system |
| JP3863484B2 (ja) * | 2002-11-22 | 2006-12-27 | 株式会社東芝 | 磁気抵抗効果素子および磁気メモリ |
| US7130166B2 (en) * | 2003-07-02 | 2006-10-31 | Hitachi Global Storage Technologies Netherlands B.V. | CPP GMR with improved synthetic free layer |
| US7298595B2 (en) * | 2003-09-26 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Differential GMR sensor with multi-layer bias structure between free layers of first and second self-pinned GMR sensors |
| JP4337641B2 (ja) * | 2004-06-10 | 2009-09-30 | ソニー株式会社 | 不揮発性磁気メモリ装置及びフォトマスク |
| US7242556B2 (en) * | 2004-06-21 | 2007-07-10 | Hitachi Global Storage Technologies Netherlands B.V. | CPP differential GMR sensor having antiparallel stabilized free layers for perpendicular recording |
| US7280326B2 (en) * | 2004-07-30 | 2007-10-09 | Hitachi Global Storage Technologies Netherlands B.V. | Trilayer SAF with current confining layer |
| JP4550552B2 (ja) * | 2004-11-02 | 2010-09-22 | 株式会社東芝 | 磁気抵抗効果素子、磁気ランダムアクセスメモリ、磁気抵抗効果素子の製造方法 |
| US7129098B2 (en) * | 2004-11-24 | 2006-10-31 | Freescale Semiconductor, Inc. | Reduced power magnetoresistive random access memory elements |
| US7423850B2 (en) * | 2005-03-31 | 2008-09-09 | Hitachi Global Storage Technologies Netherlands B.V. | CPP-GMR read head sensor with synthetic free layer providing suppression of spin torque noise |
| JP2007027575A (ja) * | 2005-07-20 | 2007-02-01 | Toshiba Corp | 磁気抵抗効果素子および磁気メモリ |
| US7301801B2 (en) * | 2005-10-28 | 2007-11-27 | International Business Machines Corporation | Tuned pinned layers for magnetic tunnel junctions with multicomponent free layers |
| WO2008146610A1 (ja) * | 2007-05-28 | 2008-12-04 | Nec Corporation | 磁性体記憶装置 |
| US7948044B2 (en) * | 2008-04-09 | 2011-05-24 | Magic Technologies, Inc. | Low switching current MTJ element for ultra-high STT-RAM and a method for making the same |
-
2005
- 2005-05-30 JP JP2005157459A patent/JP2006332527A/ja active Pending
-
2006
- 2006-05-25 KR KR1020060046932A patent/KR20060124578A/ko not_active Ceased
- 2006-05-26 TW TW095118753A patent/TW200703328A/zh unknown
- 2006-05-30 US US11/442,290 patent/US8036024B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005510048A (ja) * | 2001-10-16 | 2005-04-14 | フリースケール セミコンダクター インコーポレイテッド | 縮小可能性が改良された磁気抵抗ランダムアクセスメモリ |
| JP2004172599A (ja) * | 2002-11-01 | 2004-06-17 | Nec Corp | 磁気抵抗デバイス及びその製造方法 |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008244482A (ja) * | 2007-03-26 | 2008-10-09 | Magic Technologies Inc | Mramデバイスおよびその形成方法 |
| JP2010123967A (ja) * | 2008-11-19 | 2010-06-03 | Headway Technologies Inc | フリー層およびその形成方法、磁気抵抗効果素子 |
| JP2023545902A (ja) * | 2020-09-18 | 2023-11-01 | クロッカス・テクノロジー・ソシエテ・アノニム | ヒステリシス応答を低減した2次元磁気センサ用磁気抵抗素子 |
| JP7555484B2 (ja) | 2020-09-18 | 2024-09-24 | アレグロ・マイクロシステムズ・リミテッド・ライアビリティ・カンパニー | ヒステリシス応答を低減した2次元磁気センサ用磁気抵抗素子 |
| US12174276B2 (en) | 2020-09-18 | 2024-12-24 | Allegro Microsystems, Llc | Magnetoresistive element for a 2D magnetic sensor having a reduced hysteresis response |
Also Published As
| Publication number | Publication date |
|---|---|
| US20060267058A1 (en) | 2006-11-30 |
| KR20060124578A (ko) | 2006-12-05 |
| TW200703328A (en) | 2007-01-16 |
| US8036024B2 (en) | 2011-10-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080508 |
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| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080508 |
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| A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20100526 |
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| A977 | Report on retrieval |
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| A131 | Notification of reasons for refusal |
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| A02 | Decision of refusal |
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