JP2006332527A - 磁気記憶素子 - Google Patents
磁気記憶素子 Download PDFInfo
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- JP2006332527A JP2006332527A JP2005157459A JP2005157459A JP2006332527A JP 2006332527 A JP2006332527 A JP 2006332527A JP 2005157459 A JP2005157459 A JP 2005157459A JP 2005157459 A JP2005157459 A JP 2005157459A JP 2006332527 A JP2006332527 A JP 2006332527A
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/02—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements
- G11C11/14—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements
- G11C11/15—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using magnetic elements using thin-film elements using multiple magnetic layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N50/00—Galvanomagnetic devices
- H10N50/10—Magnetoresistive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B61/00—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10B61/20—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors
- H10B61/22—Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices comprising components having three or more electrodes, e.g. transistors of the field-effect transistor [FET] type
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1114—Magnetoresistive having tunnel junction effect
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/11—Magnetic recording head
- Y10T428/1107—Magnetoresistive
- Y10T428/1143—Magnetoresistive with defined structural feature
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Hall/Mr Elements (AREA)
- Mram Or Spin Memory Techniques (AREA)
- Semiconductor Memories (AREA)
Abstract
【解決手段】 この強磁性トンネル接合素子7では、記録層22を円形にしたので、素子の微細化に伴う反転磁界の増大を抑制することができる。また、記録層22は順次積層された強磁性層25、非磁性層26、強磁性層27、非磁性層28、および強磁性層29を含み、強磁性層25と27、および強磁性層27と29はそれぞれ反平行結合しているので、記録層22の磁化分布を略一方向に制御することができる。
【選択図】 図3
Description
+4πC(k)|M2t2−M1t1|/w …(1)
ここで、Hswは記録層の反転磁界であり、Kuは記録層の異方性エネルギであり、t1,t2はそれぞれ2つの強磁性層の厚さであり、M1,M2はそれぞれ2つの強磁性層の飽和磁化である。kは記録層のアスペクト比でありC(k)はこれに依存した係数、tおよびwはそれぞれ記録層の厚さと幅である。
S.Tehrani et al.,"High density submicron magnetoresistive random access memory (invited)", Journal of Applied Physics, vol.85, No.8, 15 April 1999, pp.5822-5827 ISSCC 2001 Dig of Tech. Papers, p.122 E.Y.Chen et al.,"Submicron spin valve magnetoresitive random access memory cell", Journal of Applied Physics, vol.81, No.8, 15 April 1997, pp.3992-3994 K. Inomata et al., "Size-independent spin switching field using synthetic antiferromagnets", Applied Physics Letters, vol.82, No.16, 21 April 2003, pp.2667-2669 N. Tezuka et al., "Magnetization reversal and domain structure of antiferromagnetically coupled submicron elements", Journal of Applied Physics, vol.93, No.10, 15 May 2003, pp.7441-7443
Claims (4)
- 交差する2本の書込線の間に配置され、前記2本の書込線に流される電流の方向に応じて磁化方向が変化する記録層を備えた磁気記憶素子において、
前記記録層の磁化困難軸方向の長さと磁化容易軸方向の長さは略等しく、
前記記録層は、順次積層された第1の強磁性層、第1の非磁性層、第2の強磁性層、第2の非磁性層、および第3の強磁性層を含み、
前記第1の強磁性層と前記第2の強磁性層、および前記第2の強磁性層と前記第3の強磁性層はそれぞれ反平行結合していることを特徴とする、磁気記憶素子。 - 前記第1および第3の強磁性層の飽和磁化と厚さの積の和は、前記第2の強磁性層の飽和磁化と厚さの積と異なることを特徴とする、請求項1に記載の磁気記憶素子。
- 前記第1〜第3の強磁性層の主成分はCo元素もしくはFe元素であることを特徴とする、請求項1または請求項2に記載の磁気記憶素子。
- 前記記録層の磁気異方性は、前記記録層の形成時および熱処理時に磁界を印加することにより付与されていることを特徴とする、請求項1から請求項3までのいずれかに記載の磁気記憶素子。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005157459A JP2006332527A (ja) | 2005-05-30 | 2005-05-30 | 磁気記憶素子 |
KR1020060046932A KR20060124578A (ko) | 2005-05-30 | 2006-05-25 | 자기저항효과에 의해 데이터를 기억하는 자기기억소자 |
TW095118753A TW200703328A (en) | 2005-05-30 | 2006-05-26 | Magnetic storage element |
US11/442,290 US8036024B2 (en) | 2005-05-30 | 2006-05-30 | Magnetic storage element storing data by magnetoresistive effect |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005157459A JP2006332527A (ja) | 2005-05-30 | 2005-05-30 | 磁気記憶素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006332527A true JP2006332527A (ja) | 2006-12-07 |
JP2006332527A5 JP2006332527A5 (ja) | 2008-06-26 |
Family
ID=37462257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005157459A Pending JP2006332527A (ja) | 2005-05-30 | 2005-05-30 | 磁気記憶素子 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8036024B2 (ja) |
JP (1) | JP2006332527A (ja) |
KR (1) | KR20060124578A (ja) |
TW (1) | TW200703328A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008244482A (ja) * | 2007-03-26 | 2008-10-09 | Magic Technologies Inc | Mramデバイスおよびその形成方法 |
JP2010123967A (ja) * | 2008-11-19 | 2010-06-03 | Headway Technologies Inc | フリー層およびその形成方法、磁気抵抗効果素子 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2465370A (en) * | 2008-11-13 | 2010-05-19 | Ingenia Holdings | Magnetic data storage comprising a synthetic anti-ferromagnetic stack arranged to maintain solitons |
JP5441024B2 (ja) * | 2008-12-15 | 2014-03-12 | ルネサスエレクトロニクス株式会社 | 磁気記憶装置 |
US20140037992A1 (en) * | 2012-07-31 | 2014-02-06 | International Business Machines Corporation | Magnetic random access memory with synthetic antiferromagnetic storage layers |
US20140037991A1 (en) * | 2012-07-31 | 2014-02-06 | International Business Machines Corporation | Magnetic random access memory with synthetic antiferromagnetic storage layers |
US8852762B2 (en) | 2012-07-31 | 2014-10-07 | International Business Machines Corporation | Magnetic random access memory with synthetic antiferromagnetic storage layers and non-pinned reference layers |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004172599A (ja) * | 2002-11-01 | 2004-06-17 | Nec Corp | 磁気抵抗デバイス及びその製造方法 |
JP2005510048A (ja) * | 2001-10-16 | 2005-04-14 | フリースケール セミコンダクター インコーポレイテッド | 縮小可能性が改良された磁気抵抗ランダムアクセスメモリ |
Family Cites Families (21)
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US6271997B1 (en) * | 1999-11-22 | 2001-08-07 | International Business Machines Corporation | Read head spin valve sensor with triple antiparallel coupled free layer structure |
US6767655B2 (en) * | 2000-08-21 | 2004-07-27 | Matsushita Electric Industrial Co., Ltd. | Magneto-resistive element |
JP2002092829A (ja) * | 2000-09-21 | 2002-03-29 | Fujitsu Ltd | 磁気抵抗センサ及び磁気抵抗ヘッド |
WO2002103798A1 (fr) * | 2001-06-19 | 2002-12-27 | Matsushita Electric Industrial Co., Ltd. | Memoire magnetique et procede de commande associe, ainsi qu'appareil de memoire magnetique comprenant celle-ci |
US6936903B2 (en) * | 2001-09-25 | 2005-08-30 | Hewlett-Packard Development Company, L.P. | Magnetic memory cell having a soft reference layer |
US20030235016A1 (en) * | 2002-06-19 | 2003-12-25 | International Business Machines Corporation | Stabilization structures for CPP sensor |
JP4237991B2 (ja) * | 2002-08-29 | 2009-03-11 | アルプス電気株式会社 | 磁気検出素子 |
US7216648B2 (en) * | 2002-09-06 | 2007-05-15 | Apneon, Inc. | Systems and methods for moving and/or restraining tissue in the upper respiratory system |
JP3863484B2 (ja) * | 2002-11-22 | 2006-12-27 | 株式会社東芝 | 磁気抵抗効果素子および磁気メモリ |
US7130166B2 (en) * | 2003-07-02 | 2006-10-31 | Hitachi Global Storage Technologies Netherlands B.V. | CPP GMR with improved synthetic free layer |
US7298595B2 (en) * | 2003-09-26 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Differential GMR sensor with multi-layer bias structure between free layers of first and second self-pinned GMR sensors |
JP4337641B2 (ja) * | 2004-06-10 | 2009-09-30 | ソニー株式会社 | 不揮発性磁気メモリ装置及びフォトマスク |
US7242556B2 (en) * | 2004-06-21 | 2007-07-10 | Hitachi Global Storage Technologies Netherlands B.V. | CPP differential GMR sensor having antiparallel stabilized free layers for perpendicular recording |
US7280326B2 (en) * | 2004-07-30 | 2007-10-09 | Hitachi Global Storage Technologies Netherlands B.V. | Trilayer SAF with current confining layer |
JP4550552B2 (ja) * | 2004-11-02 | 2010-09-22 | 株式会社東芝 | 磁気抵抗効果素子、磁気ランダムアクセスメモリ、磁気抵抗効果素子の製造方法 |
US7129098B2 (en) * | 2004-11-24 | 2006-10-31 | Freescale Semiconductor, Inc. | Reduced power magnetoresistive random access memory elements |
US7423850B2 (en) * | 2005-03-31 | 2008-09-09 | Hitachi Global Storage Technologies Netherlands B.V. | CPP-GMR read head sensor with synthetic free layer providing suppression of spin torque noise |
JP2007027575A (ja) * | 2005-07-20 | 2007-02-01 | Toshiba Corp | 磁気抵抗効果素子および磁気メモリ |
US7301801B2 (en) * | 2005-10-28 | 2007-11-27 | International Business Machines Corporation | Tuned pinned layers for magnetic tunnel junctions with multicomponent free layers |
WO2008146610A1 (ja) * | 2007-05-28 | 2008-12-04 | Nec Corporation | 磁性体記憶装置 |
US7948044B2 (en) * | 2008-04-09 | 2011-05-24 | Magic Technologies, Inc. | Low switching current MTJ element for ultra-high STT-RAM and a method for making the same |
-
2005
- 2005-05-30 JP JP2005157459A patent/JP2006332527A/ja active Pending
-
2006
- 2006-05-25 KR KR1020060046932A patent/KR20060124578A/ko not_active Application Discontinuation
- 2006-05-26 TW TW095118753A patent/TW200703328A/zh unknown
- 2006-05-30 US US11/442,290 patent/US8036024B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005510048A (ja) * | 2001-10-16 | 2005-04-14 | フリースケール セミコンダクター インコーポレイテッド | 縮小可能性が改良された磁気抵抗ランダムアクセスメモリ |
JP2004172599A (ja) * | 2002-11-01 | 2004-06-17 | Nec Corp | 磁気抵抗デバイス及びその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008244482A (ja) * | 2007-03-26 | 2008-10-09 | Magic Technologies Inc | Mramデバイスおよびその形成方法 |
JP2010123967A (ja) * | 2008-11-19 | 2010-06-03 | Headway Technologies Inc | フリー層およびその形成方法、磁気抵抗効果素子 |
Also Published As
Publication number | Publication date |
---|---|
US8036024B2 (en) | 2011-10-11 |
US20060267058A1 (en) | 2006-11-30 |
TW200703328A (en) | 2007-01-16 |
KR20060124578A (ko) | 2006-12-05 |
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