JP2006310736A5 - - Google Patents
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- Publication number
- JP2006310736A5 JP2006310736A5 JP2005292346A JP2005292346A JP2006310736A5 JP 2006310736 A5 JP2006310736 A5 JP 2006310736A5 JP 2005292346 A JP2005292346 A JP 2005292346A JP 2005292346 A JP2005292346 A JP 2005292346A JP 2006310736 A5 JP2006310736 A5 JP 2006310736A5
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- gate insulating
- insulating film
- treatment step
- processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 12
- 230000003647 oxidation Effects 0.000 claims 11
- 238000007254 oxidation reaction Methods 0.000 claims 11
- 239000007789 gas Substances 0.000 claims 9
- 238000000034 method Methods 0.000 claims 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 6
- 239000001301 oxygen Substances 0.000 claims 6
- 229910052760 oxygen Inorganic materials 0.000 claims 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims 3
- 229910052710 silicon Inorganic materials 0.000 claims 3
- 239000010703 silicon Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims 2
- 229910001882 dioxygen Inorganic materials 0.000 claims 2
- 238000003860 storage Methods 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 1
- 229910001873 dinitrogen Inorganic materials 0.000 claims 1
- 238000005121 nitriding Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005292346A JP2006310736A (ja) | 2005-03-30 | 2005-10-05 | ゲート絶縁膜の製造方法および半導体装置の製造方法 |
| KR1020077022436A KR100966927B1 (ko) | 2005-03-30 | 2006-03-28 | 절연막의 제조 방법 및 반도체 장치의 제조 방법 |
| PCT/JP2006/306288 WO2006106667A1 (ja) | 2005-03-30 | 2006-03-28 | 絶縁膜の製造方法および半導体装置の製造方法 |
| US11/910,332 US20090239364A1 (en) | 2005-03-30 | 2006-03-28 | Method for forming insulating film and method for manufacturing semiconductor device |
| CN2006800105952A CN101151721B (zh) | 2005-03-30 | 2006-03-28 | 绝缘膜的制造方法和等离子体处理装置 |
| TW095111268A TWI402912B (zh) | 2005-03-30 | 2006-03-30 | Manufacturing method of insulating film and manufacturing method of semiconductor device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005099408 | 2005-03-30 | ||
| JP2005292346A JP2006310736A (ja) | 2005-03-30 | 2005-10-05 | ゲート絶縁膜の製造方法および半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006310736A JP2006310736A (ja) | 2006-11-09 |
| JP2006310736A5 true JP2006310736A5 (enExample) | 2008-11-13 |
Family
ID=37073233
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005292346A Pending JP2006310736A (ja) | 2005-03-30 | 2005-10-05 | ゲート絶縁膜の製造方法および半導体装置の製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20090239364A1 (enExample) |
| JP (1) | JP2006310736A (enExample) |
| KR (1) | KR100966927B1 (enExample) |
| CN (1) | CN101151721B (enExample) |
| TW (1) | TWI402912B (enExample) |
| WO (1) | WO2006106667A1 (enExample) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW200511430A (en) * | 2003-05-29 | 2005-03-16 | Tokyo Electron Ltd | Plasma processing apparatus and plasma processing method |
| JP4975569B2 (ja) * | 2007-09-11 | 2012-07-11 | 東京エレクトロン株式会社 | プラズマ酸化処理方法およびシリコン酸化膜の形成方法 |
| JP5520455B2 (ja) * | 2008-06-11 | 2014-06-11 | 東京エレクトロン株式会社 | プラズマ処理装置 |
| JP4902716B2 (ja) * | 2008-11-20 | 2012-03-21 | 株式会社日立国際電気 | 不揮発性半導体記憶装置およびその製造方法 |
| JP5692794B2 (ja) * | 2010-03-17 | 2015-04-01 | 独立行政法人産業技術総合研究所 | 透明導電性炭素膜の製造方法 |
| US8450221B2 (en) * | 2010-08-04 | 2013-05-28 | Texas Instruments Incorporated | Method of forming MOS transistors including SiON gate dielectric with enhanced nitrogen concentration at its sidewalls |
| JP5839804B2 (ja) * | 2011-01-25 | 2016-01-06 | 国立大学法人東北大学 | 半導体装置の製造方法、および半導体装置 |
| CN103650118B (zh) * | 2011-05-31 | 2016-08-24 | 应用材料公司 | 电感耦合等离子体(icp)反应器的动态离子自由基筛与离子自由基孔 |
| KR101817131B1 (ko) | 2012-03-19 | 2018-01-11 | 에스케이하이닉스 주식회사 | 게이트절연층 형성 방법 및 반도체장치 제조 방법 |
| US20180076026A1 (en) * | 2016-09-14 | 2018-03-15 | Applied Materials, Inc. | Steam oxidation initiation for high aspect ratio conformal radical oxidation |
| CN108807139A (zh) * | 2017-05-05 | 2018-11-13 | 上海新昇半导体科技有限公司 | 氧化硅生长系统、方法及半导体测试结构的制作方法 |
| CN109545687B (zh) * | 2018-11-13 | 2020-10-30 | 中国科学院微电子研究所 | 基于交流电压下微波等离子体氧化的凹槽mosfet器件制造方法 |
| CN109494147B (zh) * | 2018-11-13 | 2020-10-30 | 中国科学院微电子研究所 | 基于交流电压下微波等离子体的碳化硅氧化方法 |
| TWI894310B (zh) | 2020-08-02 | 2025-08-21 | 美商應用材料股份有限公司 | 用於環繞式閘極奈米片輸出入裝置之共形氧化 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10265948A (ja) * | 1997-03-25 | 1998-10-06 | Rohm Co Ltd | 半導体装置用基板およびその製法 |
| JP2002058130A (ja) * | 2000-08-07 | 2002-02-22 | Sumitomo Wiring Syst Ltd | 電気接続箱 |
| KR100746120B1 (ko) * | 2001-01-22 | 2007-08-13 | 동경 엘렉트론 주식회사 | 반도체 디바이스의 제조 방법, 플라즈마 처리 방법, 및게이트 절연막 형성 방법 |
| JP2003124204A (ja) * | 2001-10-18 | 2003-04-25 | Toshiba Corp | プラズマ処理装置及びこれを用いた半導体装置の製造方法 |
| US7517751B2 (en) * | 2001-12-18 | 2009-04-14 | Tokyo Electron Limited | Substrate treating method |
| JP2004040064A (ja) * | 2002-07-01 | 2004-02-05 | Yutaka Hayashi | 不揮発性メモリとその製造方法 |
| KR100810794B1 (ko) * | 2002-11-20 | 2008-03-07 | 동경 엘렉트론 주식회사 | 플라즈마 처리 방법 |
| WO2004070816A1 (ja) * | 2003-02-06 | 2004-08-19 | Tokyo Electron Limited | プラズマ処理方法，半導体基板及びプラズマ処理装置 |
-
2005
- 2005-10-05 JP JP2005292346A patent/JP2006310736A/ja active Pending
-
2006
- 2006-03-28 WO PCT/JP2006/306288 patent/WO2006106667A1/ja not_active Ceased
- 2006-03-28 US US11/910,332 patent/US20090239364A1/en not_active Abandoned
- 2006-03-28 KR KR1020077022436A patent/KR100966927B1/ko not_active Expired - Fee Related
- 2006-03-28 CN CN2006800105952A patent/CN101151721B/zh not_active Expired - Fee Related
- 2006-03-30 TW TW095111268A patent/TWI402912B/zh not_active IP Right Cessation
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