JP2006284559A - Polarizing film inspection device and method - Google Patents

Polarizing film inspection device and method Download PDF

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Publication number
JP2006284559A
JP2006284559A JP2006046341A JP2006046341A JP2006284559A JP 2006284559 A JP2006284559 A JP 2006284559A JP 2006046341 A JP2006046341 A JP 2006046341A JP 2006046341 A JP2006046341 A JP 2006046341A JP 2006284559 A JP2006284559 A JP 2006284559A
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Japan
Prior art keywords
polarizing film
carrier
inspection
vacuum plate
installed
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JP2006046341A
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JP4226608B2 (en
Inventor
Jin Kim Hyun
Wo Kim Jin
Soku Jan Min
ジン・ウォ・キム
ヒュン・ジン・キム
ミン・ソク・ジャン
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Ever Techno Co Ltd
エバーテクノ・カンパニー・リミテッド
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Priority to KR1020050027002A priority Critical patent/KR100789659B1/en
Application filed by Ever Techno Co Ltd, エバーテクノ・カンパニー・リミテッド filed Critical Ever Techno Co Ltd
Publication of JP2006284559A publication Critical patent/JP2006284559A/en
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Publication of JP4226608B2 publication Critical patent/JP4226608B2/en
Application status is Expired - Fee Related legal-status Critical
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a polarizing film inspection device and method capable of automatically inspecting existence of a failure in a polarizing film applied to an LCD. <P>SOLUTION: The polarizing film inspection device comprises a film elevator 11 that elevates the polarizing film 2 and has a vacuum plate 11c having many air vents and an elevating member 11b that is installed on one side of the vacuum plate and moving the vacuum plate up and down, a loading section 10 having an alignment machine 12 having many alignment members 12a installed on four sides of polarizing film with an interval to align the polarizing film, an inspection section 20 that is installed on one side of the loading section and has a line scan and region scan photographing machines 21 and 22, a carrier transfer 4 for transferring, from the loading section, the carrier 3 gripping the polarizing film with a gripper 3a, and an unloading section 30 for discharging the polarizing film finished to be inspected by the inspection section. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a polarizing film inspection apparatus, and more particularly, to a polarizing film inspection apparatus and method for automatically inspecting whether there is a defect in a polarizing film applied to an LCD.

  Since LCD (Liquid Crystal Display) uses birefringence of liquid crystal, a polarizing film is used to adjust the vibration direction of light incident on liquid crystal molecules. The polarizing film has the function of making the incident natural light into polarized light that vibrates in only one direction while vibrating in multiple directions. The types are iodine, dye, phase difference, transflective and reflective. There are polarizing films such as molds. Among these, iodine-based polarizing film absorbs light in the visible light region by applying iodine to transparent PVA (Poly Vinyl Alcohol) film as a polarizing film for high-definition LCDs with high transmission and polarization characteristics. Can do.

  The structure of the polarizing film is generally configured by sequentially laminating a TAC (Tri-Acetyl-Cellulose) film, an adhesive, a polarizing element, an adhesive and a TAC film. When a roller or the like is used to manufacture the polarizing film having such a configuration, fine scratches are generated by the frictional force of the roller during the manufacturing process of the polarizing film. In addition, a kuniku due to fine deformation or damage may occur in the PVA film layer during the manufacturing process of the polarizing film. When defects such as nicks or scratches occur in the polarizing film as described above, when the LCD screen is driven, a fatal situation in which unevenness occurs on the screen may occur.

  In order to inspect and remove the defect of the polarizing film, which may cause a fatal defect on the LCD screen, conventionally, an operator has directly confirmed and inspected the film. That is, an operator visually confirms a polarizing film applied to a large screen LCD of 32 inches to 46 inches, and determines whether or not a defect due to the presence of nicks, scratches, bubbles or foreign matters has occurred in the polarizing film. I was inspecting.

  However, when the operator directly inspects the polarizing film as in the prior art, the accuracy and productivity of the inspection may be reduced depending on the skill level of the operator. For example, when the skill level of the worker is low, there is a possibility that an error in the inspection work may occur, and even as a skilled worker, there is a possibility that the productivity of the inspection work may be reduced due to the fatigue level of the worker.

  Then, this invention is for solving the above problems, and provides the polarizing film test | inspection apparatus and method which can test | inspect the presence or absence of the defect of a polarizing film.

  Another object of the present invention is to improve the productivity of the polarizing film inspection work by using the polarizing film inspection apparatus and method to inspect whether there is a defect in the polarizing film.

In order to achieve such an object, the polarizing film inspection apparatus of the present invention moves the polarizing film up and down to form a vacuum plate in which a large number of air holes are formed and a vacuum plate installed on one side of the vacuum plate. A film elevator comprising an elevating member that moves up and down, a loading unit including an aligner having a plurality of alignment members arranged at intervals on four sides of the polarizing film to align the polarizing film, and loading An inspection unit that is installed on one side of the unit and in which a line scan and an area scan photographing machine are respectively installed, a carrier transfer for transferring a carrier holding a polarizing film by a gripper from the loading unit to the inspection unit, and the inspection And an unloading unit for discharging the polarizing film that has been inspected by the unit. To.
In the polarizing film inspection method of the present invention, after the polarizing film is aligned by the aligner of the loading unit, the polarizing film is seated on the vacuum plate, and when the polarizing film is seated, the polarizing film is gripped by the carrier. Thereafter, adjusting the tension of the polarizing film, adjusting the tension of the polarizing film with the carrier, lowering the vacuum plate on which the polarizing film is seated to the transfer position, and transferring the carrier to the transfer position. And carrier transfer to the inspection unit, and when the carrier is transferred to the inspection unit, the polarizing film undergoes line scan / area scan inspection, and the polarizing film completes the line scan / area scan inspection. A stage for discharging the polarizing film. To.

  According to the polarizing film inspection apparatus and method of the present invention, by inspecting the presence or absence of defects in the polarizing film, there is an advantage that it is possible to inspect more precisely and improve the productivity of the polarizing film inspection work. .

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view of a polarizing film inspection apparatus according to the present invention, and FIG. 2 is a front view of the polarizing film inspection apparatus shown in FIG.

  As shown in the drawing, a polarizing film inspection apparatus according to the present invention includes a loading unit (10) installed on one side of a body (1) and provided with an aligner (12) for aligning the polarizing film (2). And an inspection unit (20) installed on one side of the loading unit (10) and installed with line scan and area scan photographing machines (21, 22) for inspecting the polarizing film (2).

  In the inspection apparatus of the present invention, the carrier transfer (4) is installed in the body (1) for transferring the carrier (3) holding the polarizing film (2) from the loading unit (10) to the inspection unit (20). The film elevator (11) is installed between the aligner (12) and the carrier transfer (4).

  The configuration and operation of the polarizing film inspection apparatus of the present invention will be described in more detail. In the polarizing film inspection apparatus of the present invention, a loading unit (10) is installed on one side of the body (1), and an inspection unit (20) for inspecting the polarizing film (2) is installed on one side of the loading unit (10). Thus, the carrier (3) holding the polarizing film (2) between the loading unit (10) and the inspection unit (20) can be transferred from the loading unit (10) to the inspection unit (20). A carrier transfer (4) is installed on one side of the body (1).

  As shown in FIG. 1, the carrier transfer (4) is installed in the longitudinal direction of the body (1), and when the polarizing film (2) is held by the carrier (3) by the loading unit (10), this is transferred to the inspection unit ( 20) are sequentially transferred to the line scan camera (21) and the area scan camera (22).

  When the carrier (3) holding the polarizing film (2) is transferred by the carrier transfer (4), the line scan photographing machine (21) of the inspection unit (20) moves the first camera (21b) and the first illumination ( 21c) carries out a transmission inspection of the polarizing film (2). As shown in FIGS. 2 and 3, the first camera (21b) for inspecting the polarizing film (2) is at least one on the upper side of the polarizing film (2) held by the carrier (3). Thus, the first illumination (21c) is installed so as to face the first camera (21b) on the lower side with respect to the polarizing film (2). In FIG. The form in which the stand is installed is illustrated.

  In the transmission inspection of the polarizing film (2) by the first camera (21b) and the first illumination (21c), the light generated from the first illumination (21c) installed on the lower side of the polarizing film (2) is the polarizing film (2 ), And the first camera (21b) takes an image of the image and inspects a large foreign substance inside the polarizing film (2). For this purpose, the carrier (3) is transferred to the carrier transfer (4). Is transferred linearly. Here, bar-shaped illumination is applied to the first illumination (21c).

  When the transmission inspection of the polarizing film (2) is completed by the first camera (21b) and the first illumination (21c), the second and third illuminations (21e, 21g), the second and third cameras (21d, 21f) are completed. ), The upper and lower surfaces of the polarizing film (2) are subjected to reflection inspection to inspect whether the polarizing film (2) contains foreign matter or bubbles. Here, a bar-shaped linear light source is applied to the second and third illuminations (21e, 21g).

  For reflection inspection of the upper / lower surface of the polarizing film (2), the second and third illuminations (21e, 21g) are arranged at predetermined intervals on the upper / lower side of the polarizing film (2) held by the carrier (3). In addition to being separated by (m), they are installed obliquely at a predetermined angle (k). Here, the predetermined angle (k) is 30 ° to 60 °, preferably 45 °, and the second and third illuminations (21e, 21g) are respectively installed obliquely.

  The second and third cameras (21d, 21f) are placed on the polarizing film (2) so as to capture images reflected by the second and third lights (21e, 21g) installed obliquely at a predetermined angle. At least one or more of them are installed at a predetermined interval (n) on the lower side, and images of the polarizing film (2) reflected by the light generated from the second and third illuminations (21e, 21g) are taken. Then, the polarizing film (2) is scanned and photographed for foreign matter or bubbles. For this purpose, the carrier (3) holding the polarizing film (2) is linearly transferred by the carrier transfer (4), and bar-like illumination is applied to the second and third illuminations (21e, 21g), respectively. The

  When the reflection inspection of the polarizing film (2) is completed by the second and third cameras (21d, 21f), the carrier (3) holding the polarizing film (2) is moved to the area scan photographing machine (4) by the carrier transfer (4). To 22). The area scan camera (22) has a fourth camera (22b), a fourth illumination (22c), an inspection polarization film (22d), and an area scan rotating member (22e) for nick inspection that can occur in the polarizing film (2). Consists of Here, LCD backlight illumination is applied to the fourth illumination (22c).

  The fourth camera (22b) of the area scanning camera (22) is installed on the upper side of the polarizing film (2) held by the carrier (3) transferred by the carrier transfer (4), and the polarizing film (2). At least one is installed in the area scan camera (22) so that the fourth illumination (22c) can be scanned under the polarizing film (2) and the fourth camera (22b). Installed and configured to face each other. In addition, an area scan rotating member (22e) is installed and configured at the lower part of the fourth illumination (22c) so that the inspection polarizing film (22d) can be rotated at a predetermined angle. Here, the region scanning rotating member (22e) is installed so as to be rotated by a rotating motor (22f), and the name of the inspection polarizing film (22d) is for distinction from the polarizing film (2) which is an inspection object. I use it.

  The area scan photographing device (22) having the above-described configuration performs a nick inspection of the polarizing film (2) by transferring the carrier (3) transferred by the carrier transfer (22a) step by step. For this purpose, a fourth illumination (22c) was installed below the fourth camera (22b), and an inspection polarizing film (22d) was installed above the fourth illumination (22c). The inspection polarizing film (22d) is installed for cross inspection of the polarizing film (2), and an area scanning rotating member (so that the inspection polarizing film (22d) can be rotated by a predetermined angle, that is, at least 360 °. 22e) is installed.

  The region scan rotating member (22e) is used to correct the axial angle between the inspection polarizing film (22d) and the inspection target polarizing film (2), and the region scanning rotating member (22e) A rotary motor (22f) is installed on the lower side of 22e), and can be rotated by the rotary motor (22f).

  The carrier (3) is sent to the line scan camera (21) and the area scan camera (22) of the inspection unit (20) so that the contamination source contained in the polarizing film (2) can be photographed and inspected through the above process. In order to transport the polarizing film (2) gripped by the), a large number of support rollers (23) are installed on the body (1). A large number of support rollers (23) are installed in the inspection section (20) to support the polarizing film (2) held by the carrier (3).

  The flatness of the polarizing film (2) is an important factor for determining whether there is a defect by scanning the polarizing film (2) supported and transferred by the support roller (23) by the inspection unit (20). In particular, in the case of a polarizing film (2) applied to a large screen LCD of 32 inches to 46 inches, the flatness of the polarizing film (2) must be accurately maintained when gripped by the carrier (3). .

  For this purpose, a film elevator (11) and an aligner (12) are installed in the loading section (10), respectively. As shown in FIGS. 1 and 4, the aligner (12) has a large number of aligning members (12a) installed on four sides of the polarizing film (2), and each aligning member (12a) is a ball screw. A linear transfer mechanism (not shown) or an LM guide (Linear Motion Guide).

  When the aligner (12) aligns the polarizing film (2), a film elevator (11) is installed in the center of the loading unit (10) to support the polarizing film (2). The film elevator (11) includes a vacuum plate (11c) and a lifting member (11b) as shown in FIGS.

  The vacuum plate (11c) is formed with a plurality of air holes (11a) so that air can be supplied, and the elevating member (11b) moves the vacuum plate (11c) to the aligner (12) and the carrier (3). And the carrier transfer (4) are installed and configured at predetermined positions on the vacuum plate (11c).

  As shown in FIG. 4, the film elevator (11) having the above-described configuration is aligned to support the polarizing film (2) when the operator attaches the polarizing film (2) to the alignment unit (12) of the loading unit (10). The vacuum plate (11c) is raised to the height (A) where the machine (12) is installed. When the vacuum plate (11c) is raised by the elevating member (11b), the operator places the polarizing film (2) on the vacuum plate (11c) and then aligns it with the aligner (12).

When aligning the polarizing film (2) with the aligner (12), one side of the polarizing film (2) is first aligned with the alignment member (12a), and then the remaining side is aligned. When the polarizing film (2) is aligned by the aligner (12), air is supplied partially or entirely through a plurality of air holes (11a) formed in the vacuum plate (11c) to supply the polarizing film (2 ) Is adjusted finely. This operation can be configured such that air can be automatically supplied to a large number of air holes (11a) using a control device (not shown) and a solenoid valve (not shown) of the polarizing film inspection apparatus.
When the flatness of the polarizing film (2) is aligned by air supplied through a number of air holes (11a) formed in the vacuum plate (11c), the polarizing film (2) is moved to an arrow “c” in this state. The carrier (3) is lowered to the height (B) where the carrier (3) is positioned by the elevating member (11b) which is raised / lowered in the vertical direction as described above. When the polarizing film (2) is moved in the direction of arrow "a" and lowered to the height (B) where the carrier (3) is positioned, the gripper (3a) of the carrier (3) grips the polarizing film (2). .

  When the gripper (3a) of the carrier (3) grips all four sides of the polarizing film (2), the gripper (3a) is moved to the carrier (3) to operate the tension of the polarizing film (2). By this operation, the polarizing film (2) is held flat on the carrier (3) while maintaining a certain level of tension. When the polarizing film (2) is held by the carrier (3), the carrier plate (3) holding the polarizing film (2) is moved again by moving the vacuum plate (11c) in the direction of the arrow “b” and the carrier transfer (4). Lower to the installed height (c).

  When the carrier (3) is lowered to the position where the carrier transfer (4) is installed, the carrier (3) is transferred to the inspection unit (20) by the carrier transfer (4), and the polarized light held by the carrier (3). The film (2) is inspected for defects.

  When the inspection is completed while being held by the carrier (3) as described above, the unloading shown in FIGS. 1 and 2 is performed by the carrier transfer (4) when the polarizing film inspection apparatus is installed in an in-line module system. If it is not an in-line module type, it is transported and ejected in the reverse order of the transporting process for inspecting the polarizing film (2) held by the carrier (3). In this way, a linear transfer mechanism such as a linear servo motor is applied to the carrier transfer (4) for transferring the carrier (3).

A method of inspecting the polarizing film (2) using the polarizing film inspection apparatus as described above will be described with reference to FIGS. 1, 4, 5a and 5b attached.
In order to inspect foreign matter, bubbles or nicks contained in the polarizing film (2), the polarizing film (2) is first aligned by the aligner (12) of the loading unit (10) and then placed on the vacuum plate (11c). The wearing step (S10) is performed.

  In order to place the polarizing film (2) on the vacuum plate (11c), first, a step (S11) is performed in which the operator puts the polarizing film (2) into the loading unit (10). Here, the operator throws in the polarizing film (2) at a height (A) where the aligner (12) shown in FIG. 4 is installed. When the polarizing film (2) is loaded into the loading unit (10), the aligning unit (12) aligns the polarizing film (2) (S12). When the polarizing film (2) is aligned, a step (S13) of adsorbing the aligned polarizing film (2) by the vacuum plate (11c) is performed.

  When the polarizing film (2) is adsorbed on the vacuum plate (11c), the adsorbing state is released, and then the step (S14) of placing the polarizing film (2) on the vacuum plate (11c) is performed. When the polarizing film (2) is seated on the vacuum plate (11c), a step (S15) of ejecting air from the vacuum plate (11c) is performed to adjust the flatness of the polarizing film (2). In this step (S15), air is blown out through the air holes (11a) formed in the vacuum plate (11c) to adjust the flatness of the polarizing film (2).

  When the flatness of the polarizing film (2) is adjusted and the polarizing film (2) is seated on the vacuum plate (11c), after the polarizing film (2) is gripped by the carrier (3), the tension of the polarizing film (2) The step of adjusting (S20) is performed.

  In order to adjust the tension of the polarizing film (2), first, when the polarizing film (2) is seated on the vacuum plate (11c), the vacuum plate (11c) is shown in the grip / tension adjustment position, that is, in FIG. Then, the carrier (3) is lowered at the position (B) where the carrier (3) is positioned, and the carrier (3) grips the polarizing film (2) for the first grip step (S21). When the first grip step (S21) is completed, a first tension step (S22) for adjusting the tension of the polarizing film (2) gripped by the carrier (3) is performed. When the first tension adjustment is completed, a second grip step (S23) is performed in which the polarizing film (2) is gripped again by the carrier (3). When the second grip is completed, the carrier (3) again A second tension step (S24) is performed to readjust the tension of the polarizing film (2).

  When the tension of the polarizing film (2) is adjusted by the carrier (3), the step (S30) of lowering the vacuum plate (11c) on which the polarizing film (2) is seated to the transfer position is performed.

  In order to transfer the carrier (3) holding the polarizing film (2) at the transfer position, that is, at the height (C) where the carrier transfer (4) shown in FIG. When the tension is adjusted by the carrier (3), a step (S31) of lowering the vacuum plate (11c) is performed in order to transfer the carrier (3) to the transfer position. When the vacuum plate (11c) is lowered and the carrier (3) is moved to the transfer position, the third tension step (S32) is performed in which the tension of the polarizing film (2) is readjusted by the carrier (3). The tension is maintained with the flatness of the polarizing film (2) adjusted by (3).

  When the carrier (3) is transferred to the transfer position in a state where the flatness of the polarizing film (2) is maintained, the step of transferring the carrier (3) to the inspection unit (20) by the carrier transfer (4) (S40). carry out. When the carrier (3) is transferred to the inspection unit (20), the polarizing film (2) is inspected for defects in the polarizing film (2) by performing a line scan / area scan inspection step (S50). Then, when the line film / area scan inspection of the polarizing film (2) is completed, the step (S60) of discharging the polarizing film (2) by the carrier transfer (4) is performed to perform the inspection work of the polarizing film (2). Complete.

  In this way, by using a polarizing film inspection apparatus and method consisting of a loading part and an inspection part for a polarizing film applied to a large screen LCD, it is possible to accurately determine whether there is a defect in the polarizing film while maintaining the flatness of the polarizing film. Can be determined.

The top view of the polarizing film test | inspection apparatus by this invention. The front view of the polarizing film test | inspection apparatus shown in FIG. The enlarged front view of the test | inspection part shown in FIG. The front view of the loading part shown in FIG. The flowchart which showed the polarizing film test | inspection method by this invention. The flowchart which showed the polarizing film test | inspection method by this invention.

Explanation of symbols

1: Body
2: Polarizing film
3: Career
4: Carrier transfer
10: Loading section
11: Film elevator
12: Alignment machine
20: Inspection department
21: Line scan camera
21a: Line scan transfer
22: Area scan camera
22a: Carrier transfer
30: Unloading section
31: Unloading transfer

Claims (9)

  1. Aligning the polarizing film with a film elevator comprising a vacuum plate in which a large number of air holes are formed and a lifting member that is installed on one side of the vacuum plate and moves the vacuum plate up and down by raising and lowering the polarizing film A loading unit having an aligner having a plurality of alignment members disposed at intervals on four sides of the polarizing film;
    An inspection unit installed on one side of the loading unit, in which a line scan and an area scan photographing machine are respectively installed;
    A carrier transfer for transferring the carrier gripping the polarizing film by the gripper from the loading unit to the inspection unit;
    An unloading unit that discharges the polarizing film that has been inspected by the inspection unit;
    A polarizing film inspection apparatus comprising:
  2. The line scan photographing machine of the inspection unit includes at least one first camera installed vertically on an upper part of the polarizing film,
    A first illumination installed opposite to the first camera at the bottom of the polarizing film;
    Second and third illuminations installed at a predetermined interval on the upper / lower side of the polarizing film and obliquely installed at a predetermined angle;
    At least one or more second and third electrodes installed at a predetermined angle facing each other on the upper / lower side of the polarizing film so as to capture an image reflected by the second and third illuminations. A third camera,
    The polarizing film inspection apparatus according to claim 1, comprising:
  3.   The polarizing film inspection apparatus according to claim 2, wherein the first to third illuminations are configured in a bar shape.
  4. The area scan photographing device is installed on the upper side of the polarizing film and scans the polarizing film step by step, and at least one fourth camera;
    A fourth illumination installed on the lower side of the polarizing film and facing the fourth camera;
    An inspection polarizing film installed on top of the fourth illumination;
    An area scan rotating member that rotates the inspection polarizing film at a predetermined angle;
    The polarizing film inspection apparatus according to claim 1, comprising:
  5.   The polarizing film inspection apparatus according to claim 4, wherein the fourth illumination is an LCD backlight.
  6. After aligning the polarizing film by an aligner of the loading unit, and placing the polarizing film on a vacuum plate;
    Adjusting the tension of the polarizing film after gripping the polarizing film by a carrier when the polarizing film is seated;
    When the tension of the polarizing film is adjusted with a carrier, the vacuum plate on which the polarizing film is seated is lowered to a transfer position;
    Transferring the carrier to the inspection unit by carrier transfer when the carrier is transferred to the transfer position;
    Performing a line scan / area scan inspection on the polarizing film when the carrier is transferred to the inspection unit;
    Discharging the polarizing film when the line scanning / area scanning inspection is completed for the polarizing film;
    A polarizing film inspection method comprising:
  7. After aligning the polarizing film by the loading unit aligner, the step of seating on the vacuum plate comprises:
    Introducing a polarizing film into the loading section;
    When the polarizing film is loaded into the loading unit, aligning the polarizing film with an aligner;
    When the polarizing film is aligned, adsorbing the aligned polarizing film by a vacuum plate;
    When the polarizing film is adsorbed on the vacuum plate, after releasing the vacuum adsorption state, the polarizing film is seated on the vacuum plate;
    Jetting air from the vacuum plate to adjust the flatness of the polarizing film when the polarizing film is seated on the vacuum plate;
    The polarizing film inspection method according to claim 6, comprising:
  8. After gripping the polarizing film with the carrier when the polarizing film is seated, adjusting the tension of the polarizing film is lowered to the grip / tension adjusting position when the polarizing film is seated on the vacuum plate. A first grip stage in which the carrier grips the polarizing film;
    When the first grip step is completed, a first tension adjustment step of adjusting the tension of the polarizing film gripped by the carrier;
    When the first tension adjustment is completed, a second grip step of re-griping the polarizing film again by the carrier;
    When the second grip is completed, a second tension adjusting step of readjusting the tension of the polarizing film again by the carrier;
    The polarizing film inspection method according to claim 6, comprising:
  9. When the tension of the polarizing film is adjusted by the carrier, the step of lowering the vacuum plate on which the polarizing film is placed to the transfer position is to transfer the carrier to the transfer position when the tension of the polarizing film is adjusted by the carrier. Lowering the vacuum plate to
    A third tension adjusting step in which the tension of the polarizing film is readjusted by the carrier when the vacuum plate is lowered and the carrier is transferred to a transfer position;
    The polarizing film inspection method according to claim 6, comprising:
JP2006046341A 2005-03-31 2006-02-23 Polarizing film inspection apparatus and method Expired - Fee Related JP4226608B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020050027002A KR100789659B1 (en) 2005-03-31 2005-03-31 Apparatus and Method for Inspecting Polarizing Film

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JP2006284559A true JP2006284559A (en) 2006-10-19
JP4226608B2 JP4226608B2 (en) 2009-02-18

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KR (1) KR100789659B1 (en)
CN (1) CN100557428C (en)
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KR100853247B1 (en) * 2006-12-08 2008-08-21 주식회사 에스에프에이 Apparatus and Method for Manufacturing Polarizing Film
KR100903585B1 (en) * 2007-07-13 2009-06-23 충북대학교 산학협력단 Vacuum Chuck for Inspecting Apparatus of Polarizing Film
KR100920221B1 (en) * 2007-11-28 2009-10-05 주식회사 아바코 Film inspection system
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