CN104748856A - Optical detection device - Google Patents

Optical detection device Download PDF

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Publication number
CN104748856A
CN104748856A CN201310756394.9A CN201310756394A CN104748856A CN 104748856 A CN104748856 A CN 104748856A CN 201310756394 A CN201310756394 A CN 201310756394A CN 104748856 A CN104748856 A CN 104748856A
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CN
China
Prior art keywords
determinand
optical detection
line sweep
module
detection apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310756394.9A
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Chinese (zh)
Inventor
郑文玮
郑国渊
王浩鉴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chroma ATE Inc
Chroma Technology Corp
Original Assignee
Chroma ATE Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chroma ATE Inc filed Critical Chroma ATE Inc
Priority to CN201310756394.9A priority Critical patent/CN104748856A/en
Publication of CN104748856A publication Critical patent/CN104748856A/en
Pending legal-status Critical Current

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Abstract

The invention discloses an optical detection device. The optical detection device is arranged on the upper side of a conveying device; the conveying device is used for conveying a to-be-tested object; the optical detection device comprises a surface scanning module and a line scanning module; the surface scanning module is provided with a surface scanning region; when the to-be-tested object is positioned in a surface scanning region, the surface scanning module photographs the to-be-detected object to obtain a first to-be-detected object image; the line scanning module is provided with a line scanning region; when the to-be-detected object passes through the line scanning region, the line scanning module continuously photographs the to-be-detected object to acquire a plurality of line scanning images; the first to-be-detected image has first resolution; any line scanning image has second resolution; the second resolution is greater than the first resolution.

Description

Optical detection apparatus
Technical field
The invention relates to a kind of optical detection apparatus.
Background technology
The structure of general monocrystalline silicon or polycrystalline silicon solar cell comprise following which floor: outer electrode (Conducting grid), anti-reflecting layer (Anti-reflective layer), N-type and p type semiconductor layer and internal electrode (Back contact electrode).Wherein, outer electrode structure mainly can be divided into bus electrode (busbar) and finger electrode (finger bar) two macrostructures.Bus electrode is as the trunk of trees, and finger electrode then spreads to battery surface everywhere as the branch of trees.Therefore, electronics by finger electrode to be pooled to bus electrode, and by bus electrode with remittance abroad to external loading.
For the manufacturer of solar cell, in order to reduce manufacturing cost, finger electrode has the trend printing thinner and thinner, and current fabrography can be fine to the grade of 45 microns.But most important part when finger electrode is solar cell conductive, as long as therefore occur printing the problems such as incomplete or fracture, will badly influence the generating efficiency of solar cell.
For guaranteeing the consistance of solar cell quality, in the manufacture process of solar cell, all need the monitoring carrying out quality through detecting instrument.Existing manufacturer uses automatic optics inspection (Automated Optical Inspection at present, AOI) equipment is as the detecting instrument detecting solar cell quality, and most of automated optical detection equipment all adopts Surface scan (area-scanning) camera.
But along with finger electrode is more and more meticulousr, pixel and the resolution of Surface scan camera just constantly must improve in the equipment vendor of automated optical detection equipment, and the manufacturer of solar cell also must constantly update automated optical detection equipment.When automated optical detection equipment eliminate change excessive velocities time, often cause the burden of equipment vendor and manufacturer.
Therefore, how providing a kind of and meet resolution demand and do not need constantly to change the optical detection apparatus of camera, is that current industry is desired most ardently and dropped into one of problem that development resources solves.
Summary of the invention
Therefore, the present invention is to provide a kind of optical detection apparatus, to solve the above problems.
The present invention is to provide a kind of optical detection apparatus.Optical detection apparatus is arranged at above conveying device.Conveying device is in order to carry determinand.Optical detection apparatus comprises Surface scan module and line sweep module.Surface scan module has Surface scan region.When determinand is arranged in Surface scan region, Surface scan module photograph determinand, to obtain the first determinand image, so as to detecting color or the fouling problems of determinand.Line sweep module has line sweep region.At determinand by during line sweep region, line sweep module takes determinand continuously, to obtain multiple line sweep image, so as to detecting the line flaw problem of determinand.First determinand image has the first resolution.Arbitrary line sweep image has the second resolution.Second resolution is greater than the first resolution.
Accompanying drawing explanation
Fig. 1 illustrates the optical detection apparatus of an embodiment of the present invention and the side view of conveying device;
Fig. 2 is the top view of the conveying device illustrated in Fig. 1;
Fig. 3 is the partial enlarged drawing of the determinand illustrated in Fig. 2.
Embodiment
Refer to Fig. 1 and Fig. 2.Fig. 1 illustrates the optical detection apparatus 1 of an embodiment of the present invention and the side view of conveying device 2.Fig. 2 is the top view of the conveying device 2 illustrated in Fig. 1.As shown in Figures 1 and 2, in present embodiment, optical detection apparatus 1 is arranged at above conveying device 2.Below by the annexation between the structure of the above-mentioned each element of detailed description, function and each element.
As shown in Figures 1 and 2, conveying device 2 comprises pedestal 20 and two belts 22.The belt 22 of conveying device 2 runs on abreast on pedestal 20, and can carry and carry determinand 3, so as to carrying out optical detection for optical detection apparatus 1.Optical detection apparatus 1 comprises Surface scan module 10 and line sweep module 12.The shooting direction of Surface scan module 10 is towards conveying device 2, and the visual range of Surface scan module 10 definition one side scanning area Z1(is as shown in the left-hand broken line frame in Fig. 2).It is other that line sweep module 12 is arranged at Surface scan module 10.The shooting direction of line sweep module 12 is equally towards conveying device 2, and its visual range defines a line sweep region Z2(as shown in the right side dotted line frame in Fig. 2).The belt 22 of conveying device 2 is parallel to throughput direction D, therefore can carry determinand 3 along throughput direction D and sequentially by Surface scan region Z1 and line sweep region Z2 (that is, after line sweep module 12 is arranged at Surface scan module 10).
When determinand 3 to be delivered in the Surface scan region Z1 of Surface scan module 10 by the belt 22 of conveying device 2, Surface scan module 10 takes determinand 3, so as to obtaining the first determinand image, so as to detecting color or the fouling problems of determinand 3.During the line sweep region Z2 of determinand 3 by line sweep module 12 carried by the belt 22 of conveying device 2, line sweep module 12 can take determinand 3 continuously, so as to obtaining multiple line sweep image, and the part of all corresponding determinand 3 of each line sweep image, so as to detecting the line flaw problem of determinand 3.The first determinand image captured by Surface scan module 10 has the first resolution.Arbitrary line sweep image captured by line sweep module 12 has the second resolution.Second resolution is greater than the first resolution (in other words, the Optical Resolution of line sweep module 12 is greater than the Optical Resolution of Surface scan module 10).
Furthermore, the optical detection apparatus 1 of present embodiment comprises Image compounding module 14 further.Image compounding module 14 electric connection line scan module 12, and can by the line sweep Image compounding second determinand image captured by line sweep module 12.The first determinand image captured by Surface scan module 10 and the second determinand image synthesized by Image compounding module 14 is noted that, the complete image of all corresponding determinand 3 at this.Resolution due to the second determinand image is greater than the resolution of the first determinand image, therefore testing staff via the first determinand image tentatively and to detect on determinand 3 comparatively macroscopic and obvious large flaw rapidly, and can accurately detect via the second determinand image the nibs that determinand 3 occurs.
But in another embodiment, before line sweep module 12 also can be arranged at Surface scan module 10, therefore the belt 22 of conveying device 2 can be carried determinand 3 along throughput direction D and sequentially pass through line sweep region Z2 and Surface scan region Z1.
Please refer to Fig. 3, it is the partial enlarged drawing of the determinand 3 illustrated in Fig. 2.
As shown in Figure 3, and coordinate with reference to Fig. 2, in present embodiment, the determinand 3 be carried on the belt 22 of conveying device 2 is solar cell.Solar cell comprises multiple bus electrode 30 and multiple finger electrode 32.The cross-sectional dimension of each bus electrode 30 is all greater than the cross-sectional dimension of arbitrary finger electrode 32.In other words, bus electrode 30 is as the trunk of trees, and finger electrode 32 then spreads to solar cell surface everywhere as the branch of trees.Therefore, electronics by finger electrode 32 to be pooled to bus electrode 30, and by bus electrode 30 with remittance abroad to external loading.
Furthermore, Surface scan module is mainly in order to detect color or the fouling problems of solar cell, and line sweep module 12 is mainly in order to detect the line flaw problem of the finger electrode 32 of solar cell.As shown in Figure 2 and Figure 3, the bearing of trend of finger electrode 32 described in each is perpendicular to throughput direction D, and the long axis direction of the line sweep region Z2 of line sweep module 12 is also perpendicular to throughput direction D, in the shooting process of therefore online scan module 12, each the line sweep image captured by it all can comprise at least one complete finger electrode 32.It is event, when Image compounding module 14 is by line sweep Image compounding second determinand image, arbitrary finger electrode 32 in each line sweep image can't occur cannot the problem (because the image of arbitrary finger electrode 32 can't locally appear in different line sweep images) of precise alignment.
When the line flaw problem of testing staff according to the second determinand Image detection finger electrode 32, carries out Bus bar detection, burn out detection and hachure to I haven't seen you for ages and detect.The detected rule of each test item will be described in detail below.
In Bus bar detects, also comprise the sub-projects such as Size Different Percent, Break Defect TH, AreaDefect TH and Defect Size MIN.For Size Different Percent sub-project, it is the difference percentage scope of the setting real area of finger electrode and the area of default finger electrode, if exceed this scope, is namely judged to be Bus bar Defect.For Break Defect TH sub-project, it is the grey decision-making scope (such as, the binaryzation scope of 0 ~ 50) that setting disconnects finger electrode, if exceed this scope, then judge finger electrode to disconnect completely and discontinuous, and be judged to be Break Defect.For Area Defect TH sub-project, it is that setting appears at grey decision-making scope (such as, the binaryzation scope of 0 ~ 100) dirty above finger electrode, if exceed this scope, then judge above finger electrode, there is dirty or part disconnection, and be judged to be Area Defect.For Defect Size MIN sub-project, it is the minimum Area Defect area of setting, if exceed this scope, then judges that the defect area that Area Defect detects exceeds Defect Size MIN setting value, is judged to be Area Defect equally.
In burn out detection, also comprise the sub-projects such as Finger Broken Length1, Finger Broken Length2, Small Broken Number Limit, Finger Width MAX and Finger Segment TH.Former three can coordinate composition two to judge the condition of broken string specification, as long as there is a condition to meet, is namely judged to broken string.Condition one: detect broken string length when being greater than the setting value of Finger Broken Length1, and the number of times occurred is more than the setting value of Small Broken Number Limit, is namely judged to be broken string.Condition two: detect broken string length when being more than or equal to the setting value of Finger Broken Length2, as long as and occur one, be namely judged to broken string.For Finger Width MAX sub-project, it is the width setting normal finger electrode, if be less than this scope, is then judged to be broken string.For Finger Segment TH sub-project, it is the binaryzation scope (such as, the binaryzation scope of 0 ~ 100) of setting finger electrode, if 2 are less than this scope, is then judged to be position of breaking.
In hachure detects, also comprise the sub-projects such as Halo Width1, Halo Width2, Small Halo NumberTH, Finger Width Max, Halo Length Min, Halo Detect High and Finger SegmentTH.Former three can coordinate composition two to judge the condition of broken string specification, as long as there is a condition to meet, is namely judged to hachure.Condition one: detect hachure width when being greater than the setting value of Halo Width1, and the number of times occurred is more than the setting value of Small Halo Number TH, is namely judged to be hachure.Condition two: detect hachure width when being more than or equal to the setting value of Halo Width2, as long as and occur one, be namely judged to hachure.For Finger Width MAX sub-project, it is the width setting normal finger electrode, if be greater than this scope, is then judged to be hachure.For Halo Length Min sub-project, it is the length that setting detects hachure, if be greater than this scope, is then judged to be hachure.For Halo Detect High sub-project, it is that setting detects hachure breadth extreme scope (erroneous judgement caused for avoiding white point and set parameter), if be greater than this scope, is then judged to be hachure.For Finger Segment TH sub-project, it is the binaryzation scope (such as, the binaryzation scope of 0 ~ 100) of setting finger electrode, if be greater than this scope, is then judged to be hachure position.
In present embodiment, the transporting velocity of conveying device 2 is shooting speeds of line of engagement scan module 12, makes only to comprise single finger electrode 32 in each line sweep image.Therefore, via the second determinand image after synthesis, testing staff can clearly judge whether each finger electrode 32 of solar cell has the problem that printing is incomplete or rupture.
In general, compared to Surface scan module 10, line sweep module 12 has with low cost and that Optical Resolution is high advantage, even if the finger electrode dealt with therefore 32 has more and more meticulousr situation, the equipment vendor of optical detection apparatus 1 and the manufacturer of solar cell only need to change cheap line sweep module 12, do not need the Surface scan module 10 changed costly, so can alleviate the cost burden eliminated and change optical detection apparatus 1.
In addition, as shown in Figure 3, in present embodiment, each finger electrode 32 of solar cell has live width W, and live width W is greater than 20 microns.And the second resolution of arbitrary line sweep image is all less than 20 microns.That is, the Optical Resolution of the line sweep module 12 of present embodiment has enough abilities and can know and present the image that live width W is at least the finger electrode 32 of 20 microns.
By the above detailed description for the specific embodiment of the present invention, can find out significantly, optical detection apparatus of the present invention is the outer line sweep of the additional again module in Surface scan module, and with line sweep module special disposal line flaw problem.And, because line sweep module is compared to Surface scan module, there is with low cost and that Optical Resolution is high advantage, even if the finger electrode dealt with therefore has more and more meticulousr situation, the equipment vendor of optical detection apparatus and the manufacturer of solar cell only need to change cheap line sweep module, do not need the Surface scan module changed costly, so can alleviate the cost burden eliminated and change optical detection apparatus.
Although the present invention discloses as above with embodiment; so itself and be not used to limit the present invention; anyly be familiar with this those skilled in the art; without departing from the spirit and scope of the present invention; when being used for a variety of modifications and variations, the scope that therefore protection scope of the present invention ought define depending on appending claims is as the criterion.

Claims (9)

1. an optical detection apparatus, is characterized in that, is arranged at above a conveying device, and this conveying device is in order to carry a determinand, and this optical detection apparatus comprises:
A scan module, have one side scanning area, wherein when this determinand is arranged in this Surface scan region, this this determinand of Surface scan module photograph, to obtain one first determinand image, so as to detecting color or the fouling problems of this determinand; And
One line sweep module, has a line sweep region, and wherein during this determinand passes through this line sweep region, this line sweep module takes this determinand continuously, to obtain multiple line sweep image, so as to detecting the line flaw problem of this determinand;
Wherein this first determinand image has one first resolution, and arbitrary described line sweep image has one second resolution, and this second resolution is greater than this first resolution.
2. optical detection apparatus according to claim 1, is characterized in that, comprises an Image compounding module further, and this Image compounding module is electrically connected this line sweep module, in order to by described line sweep Image compounding one second determinand image.
3. optical detection apparatus according to claim 1, it is characterized in that, this conveying device comprises two belts, and described belt is parallel to a throughput direction, and in order to carry this determinand, so as to carrying this determinand along this throughput direction sequentially by this Surface scan region and this line sweep region.
4. optical detection apparatus according to claim 3, is characterized in that, this determinand is a solar cell, and this solar cell comprises multiple finger electrode, and this line sweep module is in order to detect the line flaw problem of described finger electrode.
5. optical detection apparatus according to claim 4, is characterized in that, the bearing of trend of finger electrode described in each is perpendicular to this throughput direction.
6. optical detection apparatus according to claim 4, is characterized in that, finger electrode described in each has a live width, and this live width is greater than 20 microns.
7. optical detection apparatus according to claim 1, is characterized in that, this second resolution is less than 20 microns.
8. optical detection apparatus according to claim 1, is characterized in that, when this conveying device is carried in this determinand to this Surface scan region, and this this determinand of Surface scan module photograph.
9. optical detection apparatus according to claim 1, it is characterized in that, during this conveying device carries this determinand by this line sweep region, this line sweep module takes this determinand continuously, and a transporting velocity of this conveying device is the shooting speed coordinating this line sweep module.
CN201310756394.9A 2013-12-31 2013-12-31 Optical detection device Pending CN104748856A (en)

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CN201310756394.9A CN104748856A (en) 2013-12-31 2013-12-31 Optical detection device

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108627457A (en) * 2017-03-21 2018-10-09 德律科技股份有限公司 Automatic optical detecting system and its operating method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1841052A (en) * 2005-03-31 2006-10-04 恩富技术株式会社 Polarizing film detection apparatus and method
CN101487802A (en) * 2009-02-26 2009-07-22 华东师范大学 Crackle detecting instrument for solar cell panel
CN102854194A (en) * 2012-09-11 2013-01-02 中南大学 Object surface defect detection method and apparatus based on linear array CCD
KR20130099551A (en) * 2012-02-29 2013-09-06 주식회사 아이비에스 Camera system for vision inspector of solar cell wafer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1841052A (en) * 2005-03-31 2006-10-04 恩富技术株式会社 Polarizing film detection apparatus and method
CN101487802A (en) * 2009-02-26 2009-07-22 华东师范大学 Crackle detecting instrument for solar cell panel
KR20130099551A (en) * 2012-02-29 2013-09-06 주식회사 아이비에스 Camera system for vision inspector of solar cell wafer
CN102854194A (en) * 2012-09-11 2013-01-02 中南大学 Object surface defect detection method and apparatus based on linear array CCD

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108627457A (en) * 2017-03-21 2018-10-09 德律科技股份有限公司 Automatic optical detecting system and its operating method
CN108627457B (en) * 2017-03-21 2021-06-11 德律科技股份有限公司 Automatic optical inspection system and method of operation thereof

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Application publication date: 20150701