JP2006269607A5 - - Google Patents
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- Publication number
- JP2006269607A5 JP2006269607A5 JP2005083597A JP2005083597A JP2006269607A5 JP 2006269607 A5 JP2006269607 A5 JP 2006269607A5 JP 2005083597 A JP2005083597 A JP 2005083597A JP 2005083597 A JP2005083597 A JP 2005083597A JP 2006269607 A5 JP2006269607 A5 JP 2006269607A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- conductivity type
- transparent conductive
- semiconductor layer
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000004065 semiconductor Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 238000009832 plasma treatment Methods 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- 238000010438 heat treatment Methods 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- 229910052743 krypton Inorganic materials 0.000 claims description 2
- 229910021424 microcrystalline silicon Inorganic materials 0.000 claims description 2
- 229910052754 neon Inorganic materials 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 229910052724 xenon Inorganic materials 0.000 claims description 2
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 description 4
- 230000001788 irregular Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005083597A JP2006269607A (ja) | 2005-03-23 | 2005-03-23 | 光起電力素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005083597A JP2006269607A (ja) | 2005-03-23 | 2005-03-23 | 光起電力素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006269607A JP2006269607A (ja) | 2006-10-05 |
| JP2006269607A5 true JP2006269607A5 (https=) | 2008-05-08 |
Family
ID=37205272
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005083597A Pending JP2006269607A (ja) | 2005-03-23 | 2005-03-23 | 光起電力素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006269607A (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8203071B2 (en) | 2007-01-18 | 2012-06-19 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
| US7875486B2 (en) | 2007-07-10 | 2011-01-25 | Applied Materials, Inc. | Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning |
| EP2171759A1 (en) * | 2007-07-24 | 2010-04-07 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
| KR100965397B1 (ko) * | 2008-12-23 | 2010-06-25 | 주식회사 테스 | 적층형 박막 태양전지 제조 장치 및 그 방법 |
| KR101319674B1 (ko) * | 2009-05-06 | 2013-10-17 | 씬실리콘 코포레이션 | 광기전 전지 및 반도체층 적층체에서의 광 포획성 향상 방법 |
| JP6265362B2 (ja) * | 2012-02-27 | 2018-01-24 | 日東電工株式会社 | Ｃｉｇｓ系化合物太陽電池 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02177372A (ja) * | 1988-12-27 | 1990-07-10 | Kyocera Corp | 光電変換装置 |
| JP2958491B2 (ja) * | 1990-03-28 | 1999-10-06 | 鐘淵化学工業株式会社 | 光電変換装置の製造方法 |
| JP3560109B2 (ja) * | 1996-11-18 | 2004-09-02 | 富士電機ホールディングス株式会社 | 薄膜光電変換素子の製造方法および製造装置 |
| JPH11354820A (ja) * | 1998-06-12 | 1999-12-24 | Sharp Corp | 光電変換素子及びその製造方法 |
| JP4219096B2 (ja) * | 2000-03-24 | 2009-02-04 | 三洋電機株式会社 | 光起電力装置の製造方法 |
| JP4012106B2 (ja) * | 2003-03-26 | 2007-11-21 | キヤノン株式会社 | 光起電力素子形成方法 |
| JP4086693B2 (ja) * | 2003-03-26 | 2008-05-14 | キヤノン株式会社 | 光起電力素子および光起電力素子形成方法 |
| JP2004311965A (ja) * | 2003-03-26 | 2004-11-04 | Canon Inc | 光起電力素子の製造方法 |
| JP2005159320A (ja) * | 2003-10-27 | 2005-06-16 | Mitsubishi Heavy Ind Ltd | 太陽電池及び太陽電池の製造方法 |
-
2005
- 2005-03-23 JP JP2005083597A patent/JP2006269607A/ja active Pending
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