JP2006261641A - 半導体パッケージ・アセンブリ - Google Patents
半導体パッケージ・アセンブリ Download PDFInfo
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- JP2006261641A JP2006261641A JP2006013706A JP2006013706A JP2006261641A JP 2006261641 A JP2006261641 A JP 2006261641A JP 2006013706 A JP2006013706 A JP 2006013706A JP 2006013706 A JP2006013706 A JP 2006013706A JP 2006261641 A JP2006261641 A JP 2006261641A
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Abstract
【解決手段】 半導体パッケージ・アセンブリ23は、半導体基板2上の第1の導電性パッド8と、パッケージ基板12上の第2の導電性パッド16と、第1の導電性パッド8と第2の導電性パッド16間に物理的に結合されるバンプ10から構成される。この構成において、バンプ10は、無鉛、さもなければ高濃度鉛を実質的に含有するとともに、第1の導電性パッド8との第1の接触面を有し、この第1の接触面は第1の直線寸法を有し、またバンプ10は、第2の導電性パッド16との第2の接触面を有し、第2の接触面は第2の直線寸法を有する。第1の直線寸法と第2の直線寸法の比率は、約0.7から約1.7の間にある。
【選択図】 図1
Description
さらに、本願の範囲を、明細書で説明した工程、機械、製造、材料の組合せ、手段および方法について、この特別な実施例に限定する意図はない。本発明の開示から当業者が容易に理解するように、現存する、或いは、将来開発される、同一の機能を当業者が十分に実行し、或いは、ここに、説明した実施例に相当するとものと同じ機能を実行し、同じ結果を実現する工程、機械、製造、材料の組合せ、手段および方法は、本発明により利用される。従って、添付の請求項は、工程、機械、製造、材料の組合せ、手段および方法などの範囲内を包含するものである。
8 UBM(第1の導電性パッド)
10 バンプ
12 パッケージ基板
16 バンプ・パッド(第2の導電性パッド)
23 半導体パッケージ・アセンブリ
30 BGAボール
Claims (15)
- 半導体基板上の第1の導電性パッドと、
パッケージ基板上の第2の導電性パッドと、
前記第1の導電性パッドと前記第2の導電性パッド間を物理的に結合するほぼ無鉛のバンプと、から構成される半導体パッケージ・アセンブリにおいて、
前記バンプが、前記第1の導電性パッドとの第1の接触面を有し、前記第1の接触面が第1の直線寸法を有し、
前記バンプが、前記第2の導電性パッドとの第2の接触面を有し、前記第2の接触面が第2の直線寸法を有し、
前記第1の直線寸法に対する前記第2の直線寸法の比率が、約0.7と約1.7の間にあることを特徴とする半導体パッケージ・アセンブリ。 - 前記半導体基板が、約3.3未満のk値を有する少なくとも1つの低誘電率体層から成ることを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 前記第2の導電性パッドが、銅,アルミニュウム,およびこれらの組み合わせから主として成るグループから選択された材料から構成されることを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 前記第2の導電性パッドが、ニッケル,金,およびこれらの組み合わせから主として成るグループから選択された材料から構成される保護層であることを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 前記第1の直線寸法と前記第2の直線寸法が、約30μmと約200μmの間にそれぞれあることを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 前記半導体基板と前記パッケージの間に複数のバンプをさらに備え、前記複数のバンプが、約100μmと約300μmの間のピッチを有することを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 前記バンプが、約30μmと約200μmの間の高さを有し、前記高さと前記第1の直線寸法が、約0.5と約1.0の間の比率を有し、前記高さの前記第2の直線寸法に対する比率が、約0.5と約1.0の間であることを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 前記第1の導電性パッドが、アンダー・バンプ・メタライゼーション(UBM)であることを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 前記パッケージ基板表面上に複数のボール・グリッド・アレイ(BGA)ボールをさらに備え、前記BGAボールは、主として共晶合金から構成されるグループから選択される材料と、約5%未満の鉛濃度を有する材料とから成ることを特徴とする請求項1記載の半導体パッケージ・アセンブリ。
- 半導体基板上の第1の導電性パッドと、
パッケージ基板上の第2の導電性パッドと、
前記半導体基板と前記パッケージ基板間を物理的に結合する大幅な高濃度鉛を含有するバンプと、から構成される半導体パッケージ・アセンブリにおいて、
前記バンプが、前記第1の導電性パッドが第1の接触面を有し、前記第1の接触面は第1の直線寸法有し、
前記バンプが、前記第2の導電性パッドが第2の接触面を有し、前記第2の接触面は第2の直線寸法を有し、さらに
第1の直線寸法に対する第2の直線寸法の比率が、約0.7と約1.7の間にあることを特徴とする半導体パッケージ・アセンブリ。 - 前記半導体基板が、約3.3未満のk値を有する少なくとも1つの低誘電率体層から成ることを特徴とする請求項10記載の半導体パッケージ・アセンブリ。
- 前記第2の導電性パッドが、銅,アルミニュウム,およびこれらの組み合わせから主として成るグループから選択される材料で構成されることを特徴とする請求項10記載の半導体パッケージ・アセンブリ。
- 前記第1の直線寸法と前記第2の直線寸法が、約30μmと約200μmの間にそれぞれあることを特徴とする請求項10記載の半導体パッケージ・アセンブリ。
- 前記バンプが、約30μmと約200μmの間の高さを有し、前記高さの前記第1の直線寸法に対する比率が、約0.5と約1.0の間にあり、前記高さの前記第2の直線寸法に対する比率が、約0.5と約1.0の間にあることを特徴とする請求項10記載の半導体パッケージ・アセンブリ。
- 半導体基板上にあって、第1の直線寸法を有する導体パッドと、
パッケージ基板上にあって、第2の直線寸法を有するバンプ・パッドと、
前記導体パッドと前記バンプ・パッドを物理的に接続し、約5%未満の鉛から成り、ほぼ無鉛であるか、さもなければ約80%を超える鉛から成り、ほぼ高濃度の鉛を含有するバンプと、から構成されるとともに、
前記第1の直線寸法に対する前記第2の直線寸法の比率が、約0.7と約1.7の間にあることを特徴とする半導体パッケージ・アセンブリ。
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Also Published As
Publication number | Publication date |
---|---|
CN1835218A (zh) | 2006-09-20 |
TWI267206B (en) | 2006-11-21 |
US7361990B2 (en) | 2008-04-22 |
TW200635056A (en) | 2006-10-01 |
CN100428459C (zh) | 2008-10-22 |
US20080142994A1 (en) | 2008-06-19 |
US20060220244A1 (en) | 2006-10-05 |
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