JP2006261372A - 固体撮像素子および固体撮像素子の製造方法および画像撮影装置 - Google Patents
固体撮像素子および固体撮像素子の製造方法および画像撮影装置 Download PDFInfo
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Abstract
【解決手段】光電変換素子111で光電変換された信号電荷を電気信号に変換して出力する能動素子を含む複数の単位画素が配列されたもので、光電変換素子111が形成される素子層110に対してその一方の面側に、能動素子に対して配線131をなす配線層130を備え、入射光Lを素子層110の他方の面側に形成したカラーフィルター150を透過させて光電変換素子111に入射させる固体撮像素子1において、素子層110の配線層130側に、絶縁膜141を介して、能動素子のうちの光電変換された信号電荷を読み出す読み出しゲート電極121を含む画素全面を被覆するように形成した反射膜140を備えたものである。
【選択図】図1
Description
Claims (9)
- 光電変換素子で光電変換された信号電荷を電気信号に変換して出力する能動素子を含む複数の単位画素が配列されたもので、
前記光電変換素子が形成される素子層に対してその一方の面側に、前記能動素子に対して配線をなす配線層を備え、
入射光を前記素子層の他方の面側に形成したカラーフィルターを透過させて前記光電変換素子に入射させる固体撮像素子において、
前記素子層の前記配線層側に、絶縁膜を介して、前記能動素子のうちの光電変換された信号電荷を読み出す読み出しゲート電極を含む画素全面を被覆するように形成した反射膜
を備えたことを特徴とする固体撮像素子。 - 前記反射膜の前記カラーフィルターを透過する赤色光が入射される光電変換素子に対向する位置に開口部が形成されるとともに、
前記開口部の前記配線層側に反射層が形成されている
ことを特徴とする請求項1記載の固体撮像素子。 - 前記反射層は前記配線層の配線間に前記配線と間隔を置いて形成されている
ことを特徴とする請求項2記載の固体撮像素子。 - 前記反射層は前記素子層と前記配線層との間に絶縁膜を介して形成されている
ことを特徴とする請求項2記載の固体撮像素子。 - 光電変換素子で光電変換された信号電荷を電気信号に変換して出力する能動素子を含む複数の単位画素が配列されたもので、
前記光電変換素子が形成される素子層に対してその一方の面側に、前記能動素子に対して配線をなす配線層を備え、
入射光を前記素子層の他方の面側に形成したカラーフィルターを透過させて前記光電変換素子に入射させる固体撮像素子の製造方法において、
前記素子層が形成される半導体層に信号電荷を読み出す読み出し電極を形成する工程と、
前記半導体層に前記光電変換素子を形成する工程と、
前記半導体層の前記配線層が形成される側に、絶縁膜を介して前記読み出し電極を含む画素全面を被覆するように反射膜を形成する工程と
を備えたことを特徴とする固体撮像素子の製造方法。 - 前記反射膜の前記カラーフィルターを透過する赤色光が入射される光電変換素子に対向する位置に開口部を形成する工程と、
前記開口部の前記配線層側に絶縁膜を介して反射層を形成する工程と
を備えたことを特徴とする請求項5記載の固体撮像素子の製造方法。 - 前記反射層は前記配線層の配線間に前記配線と間隔を置いて形成される
ことを特徴とする請求項6記載の固体撮像素子の製造方法。 - 前記反射層は前記素子層と前記配線層との間に絶縁膜を介して形成される
ことを特徴とする請求項6記載の固体撮像素子の製造方法。 - 固体撮像素子を撮像素子に用いた画像撮影装置において、
前記固体撮像素子は、
光電変換素子で光電変換された信号電荷を電気信号に変換して出力する能動素子を含む複数の単位画素が配列されたもので、
前記光電変換素子が形成される素子層に対してその一方の面側に、前記能動素子に対して配線をなす配線層を備え、
入射光を前記素子層の他方の面側に形成したカラーフィルターを透過させて前記光電変換素子に入射させる固体撮像素子であって、
前記素子層の前記配線層側に、絶縁膜を介して、前記能動素子のうちの光電変換された信号電荷を読み出す読み出しゲート電極を含む画素全面を被覆するように形成した反射膜を備えたものからなる
ことを特徴とする画像撮影装置。
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