JP2006245165A - 半導体発光素子 - Google Patents
半導体発光素子 Download PDFInfo
- Publication number
- JP2006245165A JP2006245165A JP2005056964A JP2005056964A JP2006245165A JP 2006245165 A JP2006245165 A JP 2006245165A JP 2005056964 A JP2005056964 A JP 2005056964A JP 2005056964 A JP2005056964 A JP 2005056964A JP 2006245165 A JP2006245165 A JP 2006245165A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 38
- 239000000203 mixture Substances 0.000 claims abstract description 44
- 150000001875 compounds Chemical class 0.000 claims description 20
- 230000004888 barrier function Effects 0.000 claims description 9
- 229910052782 aluminium Inorganic materials 0.000 claims description 6
- 229910052738 indium Inorganic materials 0.000 claims description 6
- 230000010287 polarization Effects 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 4
- 238000005286 illumination Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 description 15
- 239000000969 carrier Substances 0.000 description 12
- 239000012535 impurity Substances 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 150000004767 nitrides Chemical class 0.000 description 5
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 4
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 4
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- AXAZMDOAUQTMOW-UHFFFAOYSA-N dimethylzinc Chemical compound C[Zn]C AXAZMDOAUQTMOW-UHFFFAOYSA-N 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
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- Semiconductor Lasers (AREA)
- Led Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005056964A JP2006245165A (ja) | 2005-03-02 | 2005-03-02 | 半導体発光素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005056964A JP2006245165A (ja) | 2005-03-02 | 2005-03-02 | 半導体発光素子 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006245165A true JP2006245165A (ja) | 2006-09-14 |
JP2006245165A5 JP2006245165A5 (enrdf_load_stackoverflow) | 2007-09-20 |
Family
ID=37051291
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005056964A Pending JP2006245165A (ja) | 2005-03-02 | 2005-03-02 | 半導体発光素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2006245165A (enrdf_load_stackoverflow) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012060172A (ja) * | 2011-12-19 | 2012-03-22 | Toshiba Corp | 半導体発光素子 |
JP2013016873A (ja) * | 2012-10-25 | 2013-01-24 | Toshiba Corp | 半導体発光素子 |
US8525203B2 (en) | 2010-02-16 | 2013-09-03 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
KR101344181B1 (ko) | 2008-01-30 | 2013-12-20 | 엘지전자 주식회사 | 질화물 반도체 소자 및 그의 제조 방법 |
JP2014033232A (ja) * | 2013-11-18 | 2014-02-20 | Toshiba Corp | 半導体発光素子 |
US9093588B2 (en) | 2010-07-08 | 2015-07-28 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device with an aluminum containing layer formed thereon |
US9437775B2 (en) | 2013-06-18 | 2016-09-06 | Meijo University | Nitride semiconductor light-emitting device |
JP2021082687A (ja) * | 2019-11-18 | 2021-05-27 | シャープ福山セミコンダクター株式会社 | 画像表示素子及び画像表示素子の製造方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004087762A (ja) * | 2002-08-27 | 2004-03-18 | Sony Corp | 窒化物系半導体発光素子 |
-
2005
- 2005-03-02 JP JP2005056964A patent/JP2006245165A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004087762A (ja) * | 2002-08-27 | 2004-03-18 | Sony Corp | 窒化物系半導体発光素子 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101344181B1 (ko) | 2008-01-30 | 2013-12-20 | 엘지전자 주식회사 | 질화물 반도체 소자 및 그의 제조 방법 |
US8525203B2 (en) | 2010-02-16 | 2013-09-03 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
US8648381B2 (en) | 2010-02-16 | 2014-02-11 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
US8901595B2 (en) | 2010-02-16 | 2014-12-02 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device |
US9093588B2 (en) | 2010-07-08 | 2015-07-28 | Kabushiki Kaisha Toshiba | Semiconductor light emitting device with an aluminum containing layer formed thereon |
JP2012060172A (ja) * | 2011-12-19 | 2012-03-22 | Toshiba Corp | 半導体発光素子 |
JP2013016873A (ja) * | 2012-10-25 | 2013-01-24 | Toshiba Corp | 半導体発光素子 |
US9437775B2 (en) | 2013-06-18 | 2016-09-06 | Meijo University | Nitride semiconductor light-emitting device |
JP2014033232A (ja) * | 2013-11-18 | 2014-02-20 | Toshiba Corp | 半導体発光素子 |
JP2021082687A (ja) * | 2019-11-18 | 2021-05-27 | シャープ福山セミコンダクター株式会社 | 画像表示素子及び画像表示素子の製造方法 |
US11908847B2 (en) | 2019-11-18 | 2024-02-20 | Sharp Fukuyama Laser Co., Ltd. | Image display element and method for manufacturing image display element |
JP7492328B2 (ja) | 2019-11-18 | 2024-05-29 | シャープ福山レーザー株式会社 | 画像表示素子及び画像表示素子の製造方法 |
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