JP2006234462A5 - - Google Patents
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- Publication number
- JP2006234462A5 JP2006234462A5 JP2005046752A JP2005046752A JP2006234462A5 JP 2006234462 A5 JP2006234462 A5 JP 2006234462A5 JP 2005046752 A JP2005046752 A JP 2005046752A JP 2005046752 A JP2005046752 A JP 2005046752A JP 2006234462 A5 JP2006234462 A5 JP 2006234462A5
- Authority
- JP
- Japan
- Prior art keywords
- flexible resin
- resin substrate
- inertial sensor
- detection element
- natural frequency
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 53
- 239000011347 resin Substances 0.000 claims description 49
- 229920005989 resin Polymers 0.000 claims description 49
- 238000001514 detection method Methods 0.000 claims description 38
- 239000000853 adhesive Substances 0.000 claims description 2
- 230000001070 adhesive Effects 0.000 claims description 2
- 230000001276 controlling effect Effects 0.000 claims description 2
- 239000011796 hollow space material Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 description 7
- 230000001629 suppression Effects 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 230000035939 shock Effects 0.000 description 5
- 230000002238 attenuated Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000004825 One-part adhesive Substances 0.000 description 1
- 229920001721 Polyimide Polymers 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000000875 corresponding Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 229910000833 kovar Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005046752A JP2006234462A (ja) | 2005-02-23 | 2005-02-23 | 慣性センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005046752A JP2006234462A (ja) | 2005-02-23 | 2005-02-23 | 慣性センサ |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007230971A Division JP2007316091A (ja) | 2007-09-06 | 2007-09-06 | 慣性センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006234462A JP2006234462A (ja) | 2006-09-07 |
| JP2006234462A5 true JP2006234462A5 (zh) | 2007-10-25 |
Family
ID=37042294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005046752A Pending JP2006234462A (ja) | 2005-02-23 | 2005-02-23 | 慣性センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2006234462A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4595779B2 (ja) * | 2005-10-12 | 2010-12-08 | 株式会社デンソー | 角速度センサ |
| JP4924873B2 (ja) * | 2006-08-02 | 2012-04-25 | セイコーエプソン株式会社 | 圧電振動ジャイロモジュール及び圧電振動ジャイロセンサ |
| JP7254637B2 (ja) * | 2019-06-17 | 2023-04-10 | キヤノン株式会社 | 角速度検出装置並びにこれを備える撮像装置及びレンズ鏡筒 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3352856B2 (ja) * | 1995-09-26 | 2002-12-03 | アルプス電気株式会社 | 振動子の保護装置 |
| JPH09133704A (ja) * | 1995-11-07 | 1997-05-20 | Murata Mfg Co Ltd | 加速度センサ |
| JPH09170926A (ja) * | 1995-12-21 | 1997-06-30 | Matsushita Electric Ind Co Ltd | 角速度センサ |
| JPH1123285A (ja) * | 1997-07-08 | 1999-01-29 | Alps Electric Co Ltd | 振動子の支持構造 |
| JP2002071353A (ja) * | 2000-09-01 | 2002-03-08 | Ngk Insulators Ltd | 角速度測定装置 |
| US6462530B1 (en) * | 2001-01-25 | 2002-10-08 | Bei Technologies, Inc. | Redundant rate sensor and method |
| JP2003028647A (ja) * | 2001-07-18 | 2003-01-29 | Murata Mfg Co Ltd | 振動型センサ部品およびその製造方法およびその振動型センサ部品を用いたセンサモジュール |
| JP4324956B2 (ja) * | 2003-02-20 | 2009-09-02 | セイコーエプソン株式会社 | 振動型ジャイロスコープ |
| JP2004271479A (ja) * | 2003-03-12 | 2004-09-30 | Citizen Watch Co Ltd | 角速度センサ |
-
2005
- 2005-02-23 JP JP2005046752A patent/JP2006234462A/ja active Pending
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