JP2006203206A - 半導体メモリ装置 - Google Patents
半導体メモリ装置 Download PDFInfo
- Publication number
- JP2006203206A JP2006203206A JP2006010209A JP2006010209A JP2006203206A JP 2006203206 A JP2006203206 A JP 2006203206A JP 2006010209 A JP2006010209 A JP 2006010209A JP 2006010209 A JP2006010209 A JP 2006010209A JP 2006203206 A JP2006203206 A JP 2006203206A
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- peripheral circuit
- gate electrode
- memory device
- semiconductor memory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 70
- 230000002093 peripheral effect Effects 0.000 claims abstract description 103
- 239000003990 capacitor Substances 0.000 claims abstract description 92
- 230000007261 regionalization Effects 0.000 claims abstract description 11
- 239000011159 matrix material Substances 0.000 claims abstract description 5
- 238000009751 slip forming Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 description 20
- 230000000694 effects Effects 0.000 description 13
- 238000005530 etching Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 9
- ORQBXQOJMQIAOY-UHFFFAOYSA-N nobelium Chemical compound [No] ORQBXQOJMQIAOY-UHFFFAOYSA-N 0.000 description 6
- 238000000206 photolithography Methods 0.000 description 6
- 238000013500 data storage Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000000087 stabilizing effect Effects 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0207—Geometrical layout of the components, e.g. computer aided design; custom LSI, semi-custom LSI, standard cell technique
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
- F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
- F16K31/05—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor specially adapted for operating hand-operated valves or for combined motor and hand operation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/44—Mechanical actuating means
- F16K31/60—Handles
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/118—Masterslice integrated circuits
- H01L27/11898—Input and output buffer/driver structures
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/50—Peripheral circuit region structures
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mechanical Engineering (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】 複数個の行と列の交差点ごとに連結される単位メモリセルがマトリックス形態に形成されるセル領域と、前記メモリセルのアクセス動作に必要な周辺回路素子が形成された領域のパターン密度と前記セル領域のパターン密度との間の差に起因するパターン形成の偏差が減少するように、半導体メモリ装置の動作には寄与しない擬似回路パターンが前記周辺回路素子に隣接して形成される領域に前記半導体装置の動作に必要な動作キャパシタが形成される周辺回路領域と、を具備する。
【選択図】 図2
Description
102,202:トランジスタ
104,204,205,206,207:動作キャパシタ
Claims (14)
- 複数個の行と列の交差点ごとに連結される単位メモリセルがマトリックス形態に形成されるセル領域と、
前記メモリセルのアクセス動作に必要な周辺回路素子と、前記周辺回路素子が形成された領域のパターン密度と前記セル領域のパターン密度との間の差に起因するパターン形成の偏差を減らすために、半導体メモリ装置の動作には寄与しない擬似回路パターンを前記周辺回路素子に隣接して形成すべき領域に前記装置の回路動作に必要とされる動作キャパシタとが形成される周辺回路領域と、を具備することを特徴とする半導体メモリ装置。 - 前記動作キャパシタは、ゲート電極が第1極板の役割を果たし、ドレイン電極とソース電極とが1つに連結されて第2極板の役割を果たすMOSキャパシタであることを特徴とする請求項1に記載の半導体メモリ装置。
- 前記周辺回路素子は、N型MOSトランジスタまたはP型MOSトランジスタであることを特徴とする請求項2に記載の半導体メモリ装置。
- 前記トランジスタのうちゲート電極の幅が一番長い第1トランジスタよりもゲート電極の幅が相対的に狭い第2トランジスタが前記第1トランジスタに隣接して連続的に行方向に形成される場合には、前記周辺回路領域のうち前記第2トランジスタが形成されない領域に長さが前記第2トランジスタのゲート電極の長さよりも長いゲート電極を有する動作キャパシタが形成されることを特徴とする請求項3に記載の半導体メモリ装置。
- 前記動作キャパシタは、ゲート電極が前記第2トランジスタのゲート電極の長さと前記第2トランジスタのゲート電極間の長さとを合わせた長さに略一致するように形成されることを特徴とする請求項4に記載の半導体メモリ装置。
- 複数個の行と列の交差点ごとに連結される単位メモリセルのアクセス動作に必要な周辺回路素子と、前記周辺回路素子が形成された領域のパターン密度と前記単位メモリセルを複数有するセル領域との間のパターン密度の差に起因するパターン形成の偏差を減らすために、半導体メモリ装置の動作には寄与しない擬似回路パターンを前記周辺回路素子に隣接して形成すべき領域に、前記装置の回路動作時にキャパシタンスを提供するための動作キャパシタとが少なくとも1つ以上形成される周辺回路領域を有することを特徴とする半導体メモリ装置。
- 前記動作キャパシタは、ゲート電極が第1極板の役割を果たし、ドレイン電極とソース電極とが1つに連結されて第2極板の役割を果たすMOSキャパシタであることを特徴とする請求項6に記載の半導体メモリ装置。
- 前記周辺回路素子はN型MOSトランジスタまたはP型MOSトランジスタであることを特徴とする請求項7に記載の半導体メモリ装置。
- 前記トランジスタのうちゲート電極の幅が一番長い第1トランジスタよりもゲート電極の幅が相対的に狭い第2トランジスタが前記第1トランジスタに隣接して連続的に行方向に形成される場合には、前記第2トランジスタが形成されない領域に長さが前記第2トランジスタのゲート電極の長さよりも長いゲート電極を有する動作キャパシタが形成されることを特徴とする請求項8に記載の半導体メモリ装置。
- 前記動作キャパシタは、ゲート電極が前記第2トランジスタのゲート電極の長さと前記第2トランジスタのゲート電極間の長さとを合わせた長さに略一致するように形成されることを特徴とする請求項9に記載の半導体メモリ装置。
- データを蓄積するためのメモリセルのアクセス動作に必要な回路を構成するために周辺回路トランジスタが形成され、前記トランジスタのうちゲート電極の幅が一番大きい第1トランジスタよりも相対的に狭いゲート電極を有する第2トランジスタが略列方向に形成され、前記第2トランジスタのゲート電極の幅との和が前記第1トランジスタのゲート電極の幅よりも短くなるように形成される動作キャパシタを有する第1周辺回路ブロックと、
前記第2トランジスタが行方向に連続して2つ以上形成される場合、前記第2トランジスタのゲート電極の長さと前記第2トランジスタのゲート電極間の長さとを合わせた長さに略一致し、前記第2トランジスタのゲート電極の幅との和が前記第1トランジスタのゲート電極の幅よりも短くなるように形成される動作キャパシタを有する第2周辺回路ブロックと、を備えることを特徴とする半導体メモリ装置。 - 前記動作キャパシタはMOSキャパシタであることを特徴とする請求項11に記載の半導体メモリ装置。
- 前記第1周辺回路ブロックまたは前記第2周辺回路ブロックを2つ以上有する周辺回路領域を備えることを特徴とする請求項12に記載の半導体メモリ装置。
- 複数個の行と列の交差点ごとに連結される単位メモリセルがマトリックス形態に形成されるセル領域と、
前記メモリセルのアクセス動作に必要な周辺回路素子と、前記周辺回路素子の電圧レベルを安定化するために電源電圧端子と接地電圧端子との間に接続されるキャパシタと、が形成される周辺回路領域と、
を具備することを特徴とする半導体メモリ装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2005-0004435 | 2005-01-18 | ||
KR1020050004435A KR100610022B1 (ko) | 2005-01-18 | 2005-01-18 | 반도체 메모리 장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006203206A true JP2006203206A (ja) | 2006-08-03 |
JP5008050B2 JP5008050B2 (ja) | 2012-08-22 |
Family
ID=36682969
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006010209A Active JP5008050B2 (ja) | 2005-01-18 | 2006-01-18 | 半導体メモリ装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US7608880B2 (ja) |
JP (1) | JP5008050B2 (ja) |
KR (1) | KR100610022B1 (ja) |
CN (1) | CN100587956C (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012009588A (ja) * | 2010-06-24 | 2012-01-12 | Renesas Electronics Corp | 半導体集積回路装置 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8286114B2 (en) * | 2007-04-18 | 2012-10-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | 3-dimensional device design layout |
US8237201B2 (en) | 2007-05-30 | 2012-08-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Layout methods of integrated circuits having unit MOS devices |
KR100933686B1 (ko) | 2008-08-29 | 2009-12-23 | 주식회사 하이닉스반도체 | 전하저장회로 및 그를 이용한 전압 안정화 회로, 전하저장방법 |
CN101894826B (zh) * | 2009-05-18 | 2012-05-30 | 比亚迪股份有限公司 | 一种电路连接装置 |
KR101841199B1 (ko) * | 2011-12-07 | 2018-03-23 | 삼성전자주식회사 | 반도체 장치의 제조 방법 및 이에 의해 제조된 반도체 장치 |
KR102409871B1 (ko) * | 2015-10-22 | 2022-06-20 | 에스케이하이닉스 주식회사 | 기준전압 생성회로, 이를 이용하는 리시버, 반도체 장치 및 시스템 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10107235A (ja) * | 1996-09-27 | 1998-04-24 | Hitachi Ltd | ゲートアレーlsiの構成方法とこれを用いた回路装置 |
JP2001185700A (ja) * | 1999-12-27 | 2001-07-06 | Mitsubishi Electric Corp | 半導体記憶装置 |
JP2002198435A (ja) * | 2000-10-02 | 2002-07-12 | Matsushita Electric Ind Co Ltd | 半導体集積回路装置及びその製造方法 |
JP2003514391A (ja) * | 1999-11-18 | 2003-04-15 | インフィネオン テクノロジーズ ノース アメリカ コーポレイション | リソグラフィにおいてダミー充填を用いる最適化されたデカップリングキャパシタ |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02298068A (ja) * | 1989-05-12 | 1990-12-10 | Matsushita Electron Corp | 半導体集積装置 |
JP3720064B2 (ja) * | 1994-01-20 | 2005-11-24 | 株式会社ルネサステクノロジ | 半導体集積回路 |
JP4794030B2 (ja) * | 2000-07-10 | 2011-10-12 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP2002270788A (ja) * | 2001-03-14 | 2002-09-20 | Fujitsu Ltd | 半導体装置及びその製造方法 |
US6740940B2 (en) * | 2001-11-27 | 2004-05-25 | Samsung Electronics Co., Ltd. | Semiconductor memory devices having dummy active regions |
JP2003332580A (ja) * | 2002-05-09 | 2003-11-21 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
KR100481870B1 (ko) * | 2002-12-06 | 2005-04-11 | 삼성전자주식회사 | 일회적 프로그래밍이 가능한 롬을 구비하는 반도체 장치및 그 제조방법 |
JP4778689B2 (ja) * | 2004-06-16 | 2011-09-21 | パナソニック株式会社 | 標準セル、標準セルライブラリおよび半導体集積回路 |
-
2005
- 2005-01-18 KR KR1020050004435A patent/KR100610022B1/ko active IP Right Grant
-
2006
- 2006-01-05 US US11/326,159 patent/US7608880B2/en active Active
- 2006-01-18 JP JP2006010209A patent/JP5008050B2/ja active Active
- 2006-01-18 CN CN200610005014A patent/CN100587956C/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10107235A (ja) * | 1996-09-27 | 1998-04-24 | Hitachi Ltd | ゲートアレーlsiの構成方法とこれを用いた回路装置 |
JP2003514391A (ja) * | 1999-11-18 | 2003-04-15 | インフィネオン テクノロジーズ ノース アメリカ コーポレイション | リソグラフィにおいてダミー充填を用いる最適化されたデカップリングキャパシタ |
JP2001185700A (ja) * | 1999-12-27 | 2001-07-06 | Mitsubishi Electric Corp | 半導体記憶装置 |
JP2002198435A (ja) * | 2000-10-02 | 2002-07-12 | Matsushita Electric Ind Co Ltd | 半導体集積回路装置及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012009588A (ja) * | 2010-06-24 | 2012-01-12 | Renesas Electronics Corp | 半導体集積回路装置 |
Also Published As
Publication number | Publication date |
---|---|
CN100587956C (zh) | 2010-02-03 |
KR100610022B1 (ko) | 2006-08-08 |
CN1825591A (zh) | 2006-08-30 |
US20060157737A1 (en) | 2006-07-20 |
KR20060083568A (ko) | 2006-07-21 |
JP5008050B2 (ja) | 2012-08-22 |
US7608880B2 (en) | 2009-10-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US7883970B2 (en) | Semiconductor device having decoupling capacitor and method of fabricating the same | |
JP5008050B2 (ja) | 半導体メモリ装置 | |
US9673195B2 (en) | Semiconductor device having sufficient process margin and method of forming same | |
JP3910047B2 (ja) | 半導体記憶装置 | |
US8933508B2 (en) | Memory with isolation structure | |
JP4507119B2 (ja) | 半導体装置およびその製造方法 | |
US8188534B2 (en) | Semiconductor memory device | |
US8507995B2 (en) | Semiconductor memory device | |
JP2007053321A (ja) | 半導体記憶装置 | |
US6950367B2 (en) | Memory embedded logic integrated circuit mounting memory circuits having different performances on the same chip | |
KR0145058B1 (ko) | 스태틱 랜덤 억세스 메모리 소자 및 제조방법 | |
JP4609722B2 (ja) | 強誘電体記憶装置および電子機器 | |
US6845035B2 (en) | Semiconductor memory device | |
KR100338415B1 (ko) | 더미 사진 식각 패턴을 사용하는 금속 산화 반도체 커패시터 | |
KR101095271B1 (ko) | 반도체 구조물; 및 메모리 어레이 및 반도체 구조물의 형성 방법 | |
JP2009094463A (ja) | 磁器コンデンサを有するdramセル | |
US7419913B2 (en) | Methods of forming openings into dielectric material | |
JP2001148471A (ja) | 半導体集積回路装置 | |
JP2009088475A (ja) | Dramセル | |
JP2003037249A (ja) | 半導体集積回路装置 | |
US7733707B2 (en) | 1-transistor type DRAM cell, DRAM device and DRAM comprising thereof and driving method thereof and manufacturing method thereof | |
JPH11168192A (ja) | 半導体記憶装置 | |
JP4322474B2 (ja) | 半導体集積回路装置 | |
JP2003068880A (ja) | 半導体集積回路装置 | |
JP2007294695A (ja) | 半導体記憶装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20080201 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20080620 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20081225 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20111226 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120104 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120404 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120424 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120524 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 5008050 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150608 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |