JP2006170724A5 - - Google Patents
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- Publication number
- JP2006170724A5 JP2006170724A5 JP2004361836A JP2004361836A JP2006170724A5 JP 2006170724 A5 JP2006170724 A5 JP 2006170724A5 JP 2004361836 A JP2004361836 A JP 2004361836A JP 2004361836 A JP2004361836 A JP 2004361836A JP 2006170724 A5 JP2006170724 A5 JP 2006170724A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- light receiving
- optical system
- window
- light emitting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 claims 14
- 239000000758 substrate Substances 0.000 claims 6
- 238000006073 displacement reaction Methods 0.000 claims 5
- 238000005259 measurement Methods 0.000 claims 4
- 230000008878 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000011800 void material Substances 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004361836A JP4725710B2 (ja) | 2004-12-14 | 2004-12-14 | 光学式変位センサのセンサヘッド |
| KR1020050116301A KR100785631B1 (ko) | 2004-12-14 | 2005-12-01 | 광학식 변위 센서의 센서 헤드 |
| TW094143975A TWI280350B (en) | 2004-12-14 | 2005-12-13 | Sensor head of optical displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004361836A JP4725710B2 (ja) | 2004-12-14 | 2004-12-14 | 光学式変位センサのセンサヘッド |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009014098A Division JP5126544B2 (ja) | 2009-01-26 | 2009-01-26 | 光学式変位センサのセンサヘッド |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2006170724A JP2006170724A (ja) | 2006-06-29 |
| JP2006170724A5 true JP2006170724A5 (enExample) | 2007-02-08 |
| JP4725710B2 JP4725710B2 (ja) | 2011-07-13 |
Family
ID=36671653
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004361836A Expired - Lifetime JP4725710B2 (ja) | 2004-12-14 | 2004-12-14 | 光学式変位センサのセンサヘッド |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP4725710B2 (enExample) |
| KR (1) | KR100785631B1 (enExample) |
| TW (1) | TWI280350B (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100899674B1 (ko) * | 2008-01-22 | 2009-05-28 | 주식회사 탑 엔지니어링 | 시린지 장착이 가능한 변위 센서 및 이를 구비한 디스펜서 |
| JP5558091B2 (ja) * | 2009-12-18 | 2014-07-23 | 株式会社キーエンス | 光学式変位センサのセンサヘッド及びそのセンサヘッドを備える光学式変位センサ |
| JP6381909B2 (ja) * | 2013-12-27 | 2018-08-29 | パナソニック デバイスSunx株式会社 | 変位センサ |
| JP6787294B2 (ja) * | 2017-10-31 | 2020-11-18 | セイコーエプソン株式会社 | ロボットシステム、制御方法、及びロボット |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03293512A (ja) * | 1990-04-12 | 1991-12-25 | Omron Corp | 光センサ |
| JPH11276962A (ja) * | 1998-03-27 | 1999-10-12 | Toshiba Corp | ぺースト塗布装置 |
| JP3940499B2 (ja) * | 1998-06-01 | 2007-07-04 | 東海旅客鉄道株式会社 | レール変位量測定装置 |
| JP3624887B2 (ja) * | 2000-03-31 | 2005-03-02 | オムロン株式会社 | 変位センサ |
| JP3587303B2 (ja) * | 2001-06-26 | 2004-11-10 | オムロン株式会社 | 光学式変位センサ |
| KR100710683B1 (ko) * | 2004-05-12 | 2007-04-24 | 주식회사 탑 엔지니어링 | 씰런트 디스펜서 |
-
2004
- 2004-12-14 JP JP2004361836A patent/JP4725710B2/ja not_active Expired - Lifetime
-
2005
- 2005-12-01 KR KR1020050116301A patent/KR100785631B1/ko not_active Expired - Lifetime
- 2005-12-13 TW TW094143975A patent/TWI280350B/zh not_active IP Right Cessation
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