1280350 , 九、發明說明： 【發明所屬之技術領域】 本發明有關於光學式位移感測器之感測頭，特別有關 於較適於使用在FPD(Flat Panel Display)生產線之使用有 分配器噴嘴之接著劑塗布作業等之光學式位移感測器之感 測頭。 【先前技術】 在FPD(Flat Panel Display)生產線之使用有分配器之 ® 接著劑塗布作業中，要求微米程度之間隙管理。使用有此 種分配器之接著劑塗布作業之說明圖以第8圖表示。 另外，在該圖中，符號a是用來搬運玻璃基板之載物 台、b是玻璃板、c是接著劑、d是分配器之相對移動方向 ，e是分配器頭、f是分配器之噴嘴，h是分配器之升降移 動方向、G是分配器噴嘴之前端和玻璃板之間之間隙。 由圖中可以明白，玻璃板b被載物台a搬運，在分配 器之噴嘴f之下，在圖中從右向左通過。利用此種方式， ® 噴嘴f對玻璃板b朝向d方向進行相對移動。這時，從噴 嘴f之前端射出接著劑c，用來將接著劑塗布在玻璃板b 之表面。 塗布在玻璃板b上之接著劑c之厚度，與噴嘴f之前 端和玻璃板b之表面之間隙之大小相關。在成爲接著對象 之玻璃板b之搬運中，當分配器噴嘴f之前端和成爲塗布 對象之玻璃板b之表面之間隙G之大小進行變動時，被塗 布之接著劑c之厚度變成不均一，會使製品之良率降低。 1280350 . 因此，先前技術使用光學式之位移感測器，用來進行 此種FDP生產線之分配器噴嘴前端和塗布對象玻璃板之間 隙之管理。亦即，要將分配器噴嘴f前端之高度經由指定 之升降驅動機構而伺服控制，而使光學式位移感測器所測 定到之間隙之値經常成爲規定値。 光學式之位移感測器使用分配器頭和信號處理單位 (通稱爲放大器部）分離之放大器分離型之位移感測器。放 大器分離型位移感測器之感測頭習知者有擴射反射對應型 φ 和正反射對應型，但是對於玻璃等之鏡面物體，採用正反 射對應型之感測頭。 正反射對應型感測頭之基本構造是在指定形狀之殻體 內收容有：發光部，做爲光源；投光用光學系，使來自發 光部之光沿著傾斜之投光光軸，對計測對象物照射；受光 用光學系，沿著與投光光軸之傾斜方位相反側之方位之對 稱傾斜之受光光軸，取入來自計測對象物之反射光；和受 光元件，接受經由受光用光學系取入之反射光，進行光電 φ 變換（參照專利文獻1)。 第9(al)、（bl)圖及第9(a2)、（b2)圖分別表示先前技術 之分配器和感測頭之配置關係。在該圖中，符號b是玻璃 板、e是分配器頭、f是分配器之噴嘴、j是感測頭、L丨是 投光光軸、L2是受光光軸。 分配器之噴嘴f和感測頭j之配置例存在有第（a 1 )圖、 第（bl)圖所示之第1先前技術，和第9(a2)圖、第9(2b)圖 所示之第2先前技術例。第1先前技術例使用噴嘴f本身 爲直線狀者，感測頭j之測定（L 1，L 2)被配置成在噴嘴f之 1280350 ^ 側方與其鄰接。第2先前技術例使噴嘴f彎曲成爲曲柄狀 ，感測頭j之測定點（L 1，L2)被配置在與透鏡f之前端大致 相同之位置。 [專利文獻1]國際專利WO 0 1 /7 3 3 7 5 A1小冊 【發明內容】 (發明所欲解決之問題） 但是，在上述之第1先前技術例，因爲噴嘴f之前端 和感測頭j之測定點過度離開，所以當玻璃板b彎曲或成 # 爲波狀時，以感測頭j測定到之間隙之値，和噴嘴前端與 玻璃板之間隙之値（實際之間隙之値）會成爲不同之問題。 另一方面，在上述之第2先前技術例，因爲噴嘴f之 前端和感測頭j之測定點互相接近，所以即使玻璃板b彎 曲或成爲波狀時，以感測頭j測定到之間隙之値，和噴嘴 前端與玻璃板之間隙之値（實際之間隙之値）不會有很大之 不同。但是，使噴嘴f彎曲成爲曲柄狀之加工需要相當之 勞力和時間，除此之外，當噴嘴被彎曲時，在其內部流動 ® 之接著劑之流動會成爲不穩定，會有射出動作成爲不穩定 等之問題。 本發明針對上述之問題，其目的是提供光學式位移感 測器之感測頭，例如，當適用在使用有分配器之接著劑塗 布步驟時，即使分配器噴嘴使用直線狀者亦可以正確地測 定噴嘴前端和玻璃板之間隙。 本發明之其他目的和作用及效果經由參照說明書之以 下之記載，只要是相關業者當可容易理解。 1280350 ^ (解決問題之手段） 本發明之光學式位移感測器之感測頭，在指定形狀之 殻體內收容有：發光部，做爲光源；投光用光學系，使來 自發光部之光沿著傾斜之投光光軸，對計測對象物照射； 受光用光學系，沿著與投光光軸之傾斜方位相反側之方位 之對稱傾斜之受光光軸，取入來自計測對象物之反射光； 和受光元件，接受經由受光用光學系取入之反射光，進行 光電變換。 ί 該指定形狀之殼體具有：投光側塊，用來收容發光部 和投光用光學系，並設有投光窗；受光側塊，用來收容受 光用光學系和受光元件，並設有受光窗；和結合構件，用 來結合投光側塊和受光側塊使其成爲一體；在投光側塊和 受光側塊之間，在與計測對象物上之光照射點之大致正上 相當之位置，設有使上下方向連通之空間。 利用其在該空間內，經由配置上下穿通之分配器之直 線狀噴嘴，可以計測噴嘴前端和大致在其正下之計測對象 ’物之表面之間隙。 依照此種構造時，感測頭之測定點成爲位於分配器噴 嘴前端之大致正下，所以當適用在使用有分配器之接著劑 塗布步驟時，即使分配器噴嘴使用直線狀者，亦可以正確 地測定噴嘴前端和玻璃板間之間隙。 在較佳實施例中，投光側塊之構成包含有：投光側基 板，組裝有構成發光部或投光用光學系之零件；和投光側 蓋子，包圍被組裝在該投光側基板之零件，並設有投光窗 1280350 , 。同樣地，受光側塊之構成包含有：受光側基板，組裝有 構成受光用光學系或受光元件之零件；和受光側蓋子，包 圍被組裝在該受光側基板之零件，並設有受光窗。另外， 投光側基板、結合構件、和受光側基板以一片之平板狀支 持板兼用。 依照此種構造時，構成發光部或受光用光學系之零件 ，和構成受光用光學系或受光元件之零件，因爲全部被組 裝在一片之平板狀支持板，所以光學系之定位精確變成爲 # 良好，和構造亦成爲簡單和堅固。 在較佳實施例中，在支持板之與上述空間鄰接之位置 形成有欠缺部，具有作爲面臨被測定對象物上之光照射點 之窗之功能。依照此種構造時，欠缺部具有作爲面臨被測 定對象物上之光照射點之窗之功能’所以可以辨識噴嘴之 前端和測定點之關係，和進行照明。 在較佳實施例中，在支持板設有安裝具用來安裝分配 器。利用此種方式，可以將感測頭牢固地固定在分配器。 Φ 在較佳實施例中，投光窗之開設面和受光窗之開設面 成爲互相對稱傾斜之傾斜面。依照此種構造時’即使在噴 嘴和玻璃板之距離接近之情況時’亦可以正確地測定間隙 之値。 (發明之效果） 依照本發明時’因爲感測頭之測定點位於分配器噴嘴 前端之正下，所以當適用在使用分配器之接著劑塗布步驟 之情況時，即使分配器噴嘴使用直線狀者，亦可以正確地 1280350 - 測定噴嘴前端和玻璃板間之間隙。 【實施方式】 下面參照附圖用來詳細說明本發明之較佳實施例。第 1圖表示本發明之感測頭從左斜前方看到之外觀斜視圖， 第2圖表示從右斜前方看到之外觀斜視圖，第3圖表示從 下斜前方看到之外觀斜視圖，第4圖表示外觀投影圖。 本發明之感測頭在指定形狀之殻體內收容有：發光部 ，做爲光源（詳細如後所述）；投光用光學系，使來自發光 0 部之光沿著傾斜之投光光軸，對計測對象物照射（詳細如後 所述）；受光用光學系，沿著與投光光軸之傾斜方位相反側 之方位之對稱傾斜之受光光軸，取入來自計測對象物之反 射光（詳細如後所述）；和受光元件，接受經由受光用光學 系取入之反射光，進行光電變換。 如第1圖〜第4(a)、（b)、（c)、（d)、（e)圖所示，指定 形狀之殼體之實例中具有投光側塊2、受光側塊3，和用來 使投光側塊2和受光側塊3結合成一體之結合構件（詳細如 φ 後所述）。在投光側塊2和受光側塊3之間，在與計測對象 物上之光照射點之大致正上相當之位置，設有空間1 7用來 連通上下方向。 如後面所述，在該空間1 7內，經由將分配器之直線性 噴嘴2 6配置成爲上下穿通（詳細部分參照第7圖），可以在 噴嘴2 6位於噴射預定位置之狀態，計測噴嘴前端和大致位 於其正下之計測對象物之表面之間隙。 亦即，投光側塊2之構成包含有：投光側基板，用來 組裝構成發光部或投光用光學系之零件（詳細如後所述）； -10- 1280350 和投光側蓋子4，包圍被組裝在該投光側基板之零件，和 設有投光窗9之開口。同樣地，受光側塊3之構成包含有 :受光側基板，用來組裝構成受光用光學系或受光元件之 零件（詳細如後所述）；和受光側蓋子5，包圍被組裝在受光 側基板之零件，並設有受光窗1 0。另外，投光側基板、結 合構件、和受光側基板以一片之平板狀支持板兼用。 依照此種構造時，構成發光部或投光用光學系之零件 ，和構成受光用光學系或受光元件之零件，因爲全部被組 t 裝在一片之平板狀支持板6，所以光學系之定位精確度良 好，和構造簡單而且堅固。 亦即，如第5(a)、（b)圖和第6(a)、（b)圖所示，支持板 6具有作爲投光側基板之功能之區域（圖中之右側區域），和 作爲受光側基板之功能之區域（圖中之左側區域）。在作爲 投光側基板之功能之區域，組裝有構成發光部或投光用光 學系之零件（發光元件基板1 8、投光透鏡1 9、透鏡保持器 > 2 0等），在其上覆蓋有投光側蓋子4。在作爲受光側基板之 功能之區域，組裝有構成受光用光學系或受光元件之零件 (受光透鏡21、反射鏡23、受光元件組建體24等），在其 上覆蓋有受光側蓋子5。 在支持板6上，於投光基板區域和受光基板區域之境 界，形成有欠缺部11。該欠缺部1 1形成在斜上方面臨測 定點（光照射點）之位置，當以攝影機等監視測定點時可以 使照明光照射在測定點。另外，在第1圖〜第5 (a)、（b)圖 中，符號7是電線、8是插頭、1 2〜1 5是安裝孔。 -11- 1280350 . 依照此種構造時，如第7圖所示，經由將分配器之直 線狀噴嘴2 6配置在上下穿通之空間1 7內，可以在噴嘴2 6 位於噴嘴預定位置之狀態，計測噴嘴前端和大致正下之計 測對象物（玻璃板27)之表面之間隙，因爲感測頭之測定部 位於分配器噴嘴26之前端之大致正下，所以當適用在使用 有分配器之接著劑塗布步驟時，分配器噴嘴26可以使用直 線狀者，亦可以正確地測定噴嘴前端和玻璃板27之間隙。 另外，特別是在本實例中，因爲投光窗形成面4 a和受 • 光窗形成面5 a對稱地傾斜，所以即使在噴嘴2 6和玻璃板 2 7很接近之情況時，因爲交叉角廣大，所以可以以高精確 度測定成爲對象之間隙G。 另外，在以上之實施例中，發光元件可以使用雷射二 極體（LD)、發光二極體（LED)等。另外，受光元件可以使用 一次元或二次元CMOS影像感測器、一次元或二次元CCD 、PSD等。另外，投光之剖面形狀可以成爲點狀，亦可以 在線上。 ® 另外，本發明之感測頭1在其性質上可以正確地使噴 嘴2 6之正下之位置成爲測定點，但是在實際之接著劑塗布 作業時，最好是使噴嘴2 6之正下之稍爲偏向側方之位置成 爲測定點。如此一來，可以避免由於射出之接著劑造成間 隙之錯誤測定。 (產業上之利用可能性） 依照本發明時，因爲感測頭之測定點位於分配器噴嘴 前端之大致正下，所以當適用在使用有分配器之接著劑塗 -12- 1280350 - 布步驟時，分配器噴嘴即使使用直線狀者，亦可以正確地 測定噴嘴前端和玻璃板間之間隙。 【圖式簡單說明】 第1圖是本發明之感測頭從左斜前方看到之外觀斜視 圖。 第2圖是本發明之感測頭從右斜前方看到之外觀斜視 圖。 第3圖是本發明之感測頭從下斜前方看到之外觀斜視 Φ圖。 第4(a)、（b)、（c)、（d)、（e)圖分別是本發明之感測頭 之外觀投影前視圖、右側視圖、左側視圖、底視圖及仰視 圖。 第5(a)、（b)圖分別是表示本發明之感測頭之內部構造 之右後方及左後方斜視圖。 第6(a)、（b)圖分別表示本發明之感測頭之光學零件配 置和光路之關係的後視圖及前視圖。 ^ 第7圖表示在分配器裝著有本發明之感測頭之狀態。 第8圖是使用有分配器之接著劑塗布作業之說明圖。 第9(al)、（bl)、（a2)及（b2)圖是分別表示第1、2先前 技術之分配器和感測頭之關係的側視圖、前視圖。 【主要元件符號說明】 1 感測頭 2 投光側塊 3 受光側塊 -13- 1280350 4 投光側蓋子 4 a 面 5 受光側蓋子 5a 面 6 支持板 7 電線 8 插頭 9 ί又尤齒 10 受光窗 11 欠缺部 12 安裝孔 13 安裝孔 14 安裝孔 15 安裝孔 17 空間 18 發光元件基板 19 投光透鏡 20 透鏡保持器 2 1 受光透鏡 22 透鏡保持器 23 反射鏡 24 受光元件組建體 25 分配器頭 26 分配器之噴嘴 -14- 1280350 27 玻璃 L 1 投光 L2 受光 a 載物 b 玻璃 c 接著 d 噴D觜 e 分配 f 分配 h 噴嘴 j 感測 G 間隙1280350, IX. Description of the Invention: [Technical Field] The present invention relates to a sensing head of an optical displacement sensor, and more particularly to a dispenser nozzle suitable for use in an FPD (Flat Panel Display) production line. The sensor head of the optical displacement sensor of the adhesive application operation or the like. [Prior Art] In the FPD (Flat Panel Display) production line, there is a dispenser. In the subsequent coating operation, micron-level gap management is required. An illustration of an adhesive application operation using such a dispenser is shown in Fig. 8. In addition, in the figure, the symbol a is a stage for transporting a glass substrate, b is a glass plate, c is an adhesive, d is a relative moving direction of the dispenser, e is a dispenser head, and f is a dispenser. The nozzle, h is the lifting direction of the dispenser, and G is the gap between the front end of the dispenser nozzle and the glass plate. As can be understood from the figure, the glass sheet b is carried by the stage a, and passes under the nozzle f of the dispenser, from right to left in the drawing. In this way, the ® nozzle f relatively moves the glass sheet b in the d direction. At this time, the adhesive c is ejected from the front end of the nozzle f to apply the adhesive to the surface of the glass plate b. The thickness of the adhesive c applied to the glass sheet b is related to the size of the gap between the front end of the nozzle f and the surface of the glass sheet b. When the size of the gap G between the front end of the dispenser nozzle f and the surface of the glass sheet b to be coated fluctuates in the conveyance of the glass sheet b to be the target, the thickness of the applied adhesive c becomes non-uniform. Will reduce the yield of the product. 1280350. Therefore, the prior art uses an optical displacement sensor for managing the gap between the dispenser nozzle front end of the FDP line and the coated object glass plate. That is, the height of the front end of the dispenser nozzle f is servo-controlled by the designated lifting/lowering mechanism, and the gap detected by the optical displacement sensor is often defined. The optical displacement sensor uses an amplifier-separated displacement sensor that is separated by a splitter head and a signal processing unit (referred to as an amplifier unit). The sensor head of the amplifier-separated displacement sensor has a diffuse reflection-corresponding type φ and a specular reflection type, but for a specular object such as glass, a positive-reflective-corresponding type of sensing head is used. The basic structure of the specular reflection-compatible sensor head is such that a light-emitting portion is housed in a housing having a predetermined shape as a light source, and an optical system for projecting light causes light from the light-emitting portion to be measured along an inclined optical axis. Irradiation of the object; the optical system for receiving light receives the reflected light from the object to be measured along the symmetrical tilt of the azimuth opposite to the oblique direction of the projection optical axis; and the light receiving element receives the light for receiving light. The reflected light is taken in and photoelectric φ is converted (see Patent Document 1). The 9th (al), (bl), and 9th (a2), (b2) diagrams respectively show the arrangement relationship of the prior art dispenser and the sensing head. In the figure, the symbol b is a glass plate, e is a dispenser head, f is a nozzle of the dispenser, j is a sensor head, L is a light projecting axis, and L2 is a light receiving axis. The arrangement example of the nozzle f and the sensing head j of the dispenser includes the first prior art shown in the (a 1)th diagram and the (bl) diagram, and the 9th (a2) diagram and the 9th (2b) diagram. A second prior art example is shown. In the first prior art example, the nozzle f itself is linear, and the measurement (L 1, L 2) of the sensor head j is disposed adjacent to the side of the nozzle f at 1280350 ^. In the second prior art example, the nozzle f is bent into a crank shape, and the measurement points (L1, L2) of the sensor head j are disposed at substantially the same position as the front end of the lens f. [Patent Document 1] International Patent WO 0 1 /7 3 3 7 5 A1 Booklet [Disclosure] (Problems to be Solved by the Invention) However, in the first prior art example described above, because the nozzle f is at the front end and sensed The measurement point of the head j is excessively separated, so when the glass plate b is bent or # is wavy, the gap between the gap measured by the sensing head j and the gap between the tip end of the nozzle and the glass plate (the actual gap 値) ) will become a different issue. On the other hand, in the second prior art example described above, since the measurement points of the front end of the nozzle f and the sensing head j are close to each other, even if the glass plate b is curved or wavy, the gap measured by the sensing head j is used. After that, there is no significant difference between the gap between the front end of the nozzle and the glass plate (the actual gap). However, it takes a lot of labor and time to bend the nozzle f into a crank shape. In addition, when the nozzle is bent, the flow of the adhesive flowing inside the inside of the nozzle becomes unstable, and the injection operation becomes non-existent. Stability and other issues. The present invention is directed to the above problems, and an object thereof is to provide a sensing head of an optical displacement sensor, for example, when applied to an adhesive coating step using a dispenser, even if the dispenser nozzle uses a straight line, it can be correctly The gap between the front end of the nozzle and the glass plate was measured. Other objects, effects and effects of the present invention are described below with reference to the specification, as long as they are easily understood by the relevant industry. 1280350 ^ (Means for Solving the Problem) The sensor head of the optical displacement sensor of the present invention houses a light-emitting portion as a light source and a light-emitting optical system for light from the light-emitting portion in a housing of a predetermined shape. The object to be measured is irradiated along the oblique projection optical axis; the optical system for receiving light receives the reflection from the measurement object along the illuminating optical axis that is symmetrically inclined with respect to the direction opposite to the oblique orientation of the projection optical axis. The light-receiving element receives the reflected light taken in through the light-receiving optical system and performs photoelectric conversion.壳体 The housing of the specified shape has a light-emitting side block for accommodating the light-emitting portion and the light-emitting optical system, and a light-projecting window; and a light-receiving side block for accommodating the light-receiving optical system and the light-receiving element, and a light receiving window; and a coupling member for combining the light projecting side block and the light receiving side block to be integrated; and between the light projecting side block and the light receiving side block, substantially at the light irradiation point on the object to be measured At the same position, there is a space for connecting the up and down direction. The gap between the tip end of the nozzle and the surface of the object to be measured directly under the nozzle can be measured by the linear nozzle in the space through the dispenser that is disposed to pass through. According to this configuration, the measuring point of the sensing head is located substantially at the front end of the dispenser nozzle, so that when applied to the adhesive coating step using the dispenser, even if the dispenser nozzle uses a straight line, it can be correct. The gap between the tip of the nozzle and the glass plate was measured. In a preferred embodiment, the light-emitting side block includes: a light-emitting side substrate, a component constituting the light-emitting portion or the light-emitting optical system, and a light-emitting side cover surrounded by the light-emitting side substrate; The parts are equipped with a light projection window 1280350. Similarly, the light-receiving side block includes a light-receiving side substrate in which components constituting the light-receiving optical system or the light-receiving element are assembled, and a light-receiving side cover, which surrounds the components of the light-receiving side substrate, and is provided with a light receiving window. Further, the light-emitting side substrate, the coupling member, and the light-receiving side substrate are used in combination with one flat plate-shaped support plate. According to this configuration, the components constituting the light-emitting portion or the light-receiving optical system and the components constituting the light-receiving optical system or the light-receiving element are all assembled in one flat support plate, so that the positioning of the optical system becomes exactly # Good, and the construction is also simple and sturdy. In the preferred embodiment, the missing portion is formed at a position adjacent to the space of the support plate, and has a function as a window facing the light irradiation point on the object to be measured. According to this configuration, the missing portion has a function as a window facing the light irradiation point on the object to be measured. Therefore, the relationship between the tip end of the nozzle and the measurement point can be recognized and illumination can be performed. In a preferred embodiment, a mounting plate is provided on the support plate for mounting the dispenser. In this way, the sensor head can be securely attached to the dispenser. Φ In the preferred embodiment, the opening surface of the light projecting window and the opening surface of the light receiving window are inclined surfaces which are symmetrically inclined with each other. According to this configuration, the gap can be accurately measured even when the distance between the nozzle and the glass plate is close. (Effect of the Invention) According to the present invention, 'because the measuring point of the sensing head is located directly under the front end of the dispenser nozzle, when applied to the adhesive coating step using the dispenser, even if the dispenser nozzle uses a straight line It is also possible to correctly measure 1280350 - the gap between the front end of the nozzle and the glass plate. [Embodiment] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Fig. 1 is a perspective view showing the appearance of the sensor head of the present invention as seen obliquely from the front left side, Fig. 2 is a perspective view showing the appearance seen from the right oblique front side, and Fig. 3 is a perspective view showing the appearance seen from the lower oblique front side. Figure 4 shows the appearance projection. The sensing head of the present invention houses a light-emitting portion as a light source (described in detail later) in a housing of a predetermined shape, and an optical system for projecting light, which causes the light from the light-emitting portion to follow the tilting optical axis. Irradiation of the measurement target object (described later in detail); the optical system for receiving light receives the reflected light from the measurement target object along the illuminating optical axis inclined symmetrically to the direction opposite to the oblique direction of the projection optical axis (Detailed later); and the light-receiving element receives the reflected light taken in through the light-receiving optical system, and performs photoelectric conversion. As shown in FIGS. 1 to 4 (a), (b), (c), (d), and (e), the case of the housing of the specified shape has the light projecting side block 2 and the light receiving side block 3, And a joint member for combining the light projecting side block 2 and the light receiving side block 3 (details are as described later in φ). Between the light-emitting side block 2 and the light-receiving side block 3, a space 17 is provided to communicate the up-and-down direction at a position substantially equivalent to the light irradiation point on the measurement target. As will be described later, in the space 17, by arranging the linear nozzles 26 of the dispenser to be vertically penetrated (see the seventh drawing in detail), the nozzle tip can be measured in a state where the nozzles 26 are located at the predetermined injection position. And a gap between the surface of the measurement object located substantially below it. That is, the light-emitting side block 2 includes a light-emitting side substrate for assembling components constituting the light-emitting portion or the light-emitting optical system (described later in detail); -10- 1280350 and the light-emitting side cover 4 And surrounding the component assembled on the light projecting side substrate and the opening provided with the light projecting window 9. In the same manner, the light-receiving side block 3 includes a light-receiving side substrate for assembling components constituting the light-receiving optical system or the light-receiving element (described later in detail), and a light-receiving side cover 5 that is surrounded by the light-receiving side substrate. The parts are equipped with a light receiving window 10 . Further, the light-emitting side substrate, the bonding member, and the light-receiving side substrate are used in combination as one flat support plate. According to such a configuration, the components constituting the light-emitting portion or the light-emitting optical system and the components constituting the light-receiving optical system or the light-receiving element are all mounted in a single flat support plate 6 so that the optical system is positioned. Good precision, and simple and sturdy construction. That is, as shown in the fifth (a), (b), and (a), (b), the support plate 6 has a function as a light-emitting side substrate (the right side in the drawing), and A region (the left region in the figure) that functions as a light receiving side substrate. On the function of the light-emitting side substrate, components (light-emitting element substrate 18, light-emitting lens 19, lens holder > 20, etc.) constituting the light-emitting portion or the light-emitting optical system are incorporated thereon. Covered with a light-emitting side cover 4. In the region functioning as the light-receiving side substrate, components (light-receiving lens 21, mirror 23, light-receiving element assembly 24, and the like) constituting the light-receiving optical system or the light-receiving element are incorporated, and the light-receiving side cover 5 is covered thereon. On the support plate 6, a missing portion 11 is formed in the boundary between the light-emitting substrate region and the light-receiving substrate region. The missing portion 1 1 is formed at a position facing the measurement point (light irradiation point) obliquely upward, and the illumination light can be irradiated to the measurement point when the measurement point is monitored by a camera or the like. Further, in Figs. 1 to 5 (a) and (b), reference numeral 7 is an electric wire, 8 is a plug, and 1 2 to 15 are mounting holes. -11- 1280350. According to this configuration, as shown in Fig. 7, by arranging the linear nozzles 26 of the dispenser in the space 17 which is vertically penetrated, the nozzles 26 can be positioned at predetermined positions of the nozzles. The gap between the tip end of the nozzle and the surface of the measurement object (glass plate 27) which is substantially right is measured, because the measuring portion of the sensing head is located substantially at the front end of the dispenser nozzle 26, so when it is applied to the use of the dispenser In the agent coating step, the dispenser nozzle 26 can be linear, and the gap between the nozzle tip and the glass plate 27 can be accurately measured. Further, particularly in the present example, since the light projecting window forming surface 4a and the light receiving window forming surface 5a are symmetrically inclined, even when the nozzle 26 and the glass plate 27 are in close proximity, because of the crossing angle It is vast, so the gap G that becomes the object can be measured with high accuracy. Further, in the above embodiments, the light-emitting element may use a laser diode (LD), a light-emitting diode (LED), or the like. Further, the light receiving element can use a one- or two-element CMOS image sensor, a one- or two-element CCD, a PSD, or the like. In addition, the cross-sectional shape of the light projection may be in the form of dots or on the line. In addition, the sensing head 1 of the present invention can correctly make the position of the nozzle 26 directly below the measuring point in its nature, but in the actual adhesive coating operation, it is preferable to make the nozzle 26 directly below. The position slightly offset to the side becomes the measurement point. In this way, erroneous measurement of the gap due to the injected adhesive can be avoided. (Industrial Applicability) According to the present invention, since the measuring point of the sensing head is located substantially directly below the front end of the dispenser nozzle, when applied to the step of applying the primer 120-1280350 - cloth using the dispenser Even if the dispenser nozzle uses a straight line, the gap between the nozzle tip and the glass plate can be accurately measured. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a perspective view showing the appearance of the sensing head of the present invention as seen from the left oblique front side. Fig. 2 is a perspective view showing the appearance of the sensing head of the present invention as seen from the right oblique front side. Fig. 3 is a perspective view of the appearance of the sensing head of the present invention as seen from the lower oblique front side. 4(a), (b), (c), (d), and (e) are respectively a front view, a right side view, a left side view, a bottom view, and a bottom view of the appearance of the sensor head of the present invention. Figs. 5(a) and 5(b) are respectively right rear and left rear oblique views showing the internal structure of the sensing head of the present invention. Fig. 6(a) and (b) are a rear view and a front view, respectively, showing the relationship between the optical component arrangement and the optical path of the sensing head of the present invention. ^ Figure 7 shows the state in which the dispenser of the present invention is mounted on the dispenser. Fig. 8 is an explanatory view of an adhesive application operation using a dispenser. The ninth (al), (bl), (a2), and (b2) diagrams are side and front views, respectively, showing the relationship between the dispenser of the first and second prior art and the sensing head. [Main component symbol description] 1 Sensing head 2 Light-emitting side block 3 Light-receiving side block-13- 1280350 4 Light-emitting side cover 4 a Face 5 Light-receiving side cover 5a Face 6 Support plate 7 Wire 8 Plug 9 ί又 Especially 10 Light receiving window 11 Missing portion 12 Mounting hole 13 Mounting hole 14 Mounting hole 15 Mounting hole 17 Space 18 Light-emitting element substrate 19 Projection lens 20 Lens holder 2 1 Light-receiving lens 22 Lens holder 23 Mirror 24 Light-receiving element assembly 25 Distributor Head 26 Dispenser Nozzle-14- 1280350 27 Glass L 1 Projection L2 Receiver a Load b Glass c Next d Spray D觜e Assign f Assign h Nozzle j Sense G Gap
板 光軸 光軸 台 板 劑 之相對移動方向 器頭 器之噴嘴 之升降方向 頭Plate, optical axis, optical axis, relative movement direction of the plate, nozzle of the head, lifting direction, head